{"id":170,"date":"2024-04-11T13:38:56","date_gmt":"2024-04-11T05:38:56","guid":{"rendered":"https:\/\/www.bihec.com\/angstrom-engineering\/?p=170"},"modified":"2024-04-11T13:38:56","modified_gmt":"2024-04-11T05:38:56","slug":"%e7%be%8e%e5%9b%bd-angstrom-engineering-nebula-cluster%e9%9b%86%e6%88%90%e7%9c%9f%e7%a9%ba%e7%b3%bb%e7%bb%9f","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/angstrom-engineering\/%e7%be%8e%e5%9b%bd-angstrom-engineering-nebula-cluster%e9%9b%86%e6%88%90%e7%9c%9f%e7%a9%ba%e7%b3%bb%e7%bb%9f\/","title":{"rendered":"\u7f8e\u56fd ANGSTROM ENGINEERING NEBULA CLUSTER\u96c6\u6210\u771f\u7a7a\u7cfb\u7edf"},"content":{"rendered":"<h2><strong><a href=\"https:\/\/www.bihec.com\/angstrom-engineering\/tag\/nebula-cluster\/\" title=\"View all posts in NEBULA CLUSTER\" target=\"_blank\">NEBULA CLUSTER<\/a><a href=\"https:\/\/www.bihec.com\/angstrom-engineering\/tag\/%e9%9b%86%e6%88%90%e7%9c%9f%e7%a9%ba%e7%b3%bb%e7%bb%9f\/\" title=\"View all posts in \u96c6\u6210\u771f\u7a7a\u7cfb\u7edf\" target=\"_blank\">\u96c6\u6210\u771f\u7a7a\u7cfb\u7edf<\/a><\/strong><\/h2>\n<p><img loading=\"lazy\" class=\"\" src=\"https:\/\/angstromengineering.com\/wp-content\/uploads\/2018\/11\/Nebula-cluster-angstrom-pvd.jpg\" alt=\"Cluster physical vapor deposition system with multiple vacuum chambers and glovebox\" width=\"973\" height=\"232\" \/><\/p>\n<p id=\"smcZuRI\">Angstrom\u5728\u81ea\u52a8\u5316\u3001\u5de5\u7a0b\u7cbe\u5ea6\u3001\u7528\u6237\u63a7\u5236\u4e0a\u7ecf\u9a8c\u4e30\u5bcc\uff0c\u8fd9\u4e9bNEBULA CLUSTER\u96c6\u6210<a href=\"https:\/\/www.bihec.com\/angstrom-engineering\/tag\/%e7%9c%9f%e7%a9%ba%e7%b3%bb%e7%bb%9f\/\" title=\"View all posts in \u771f\u7a7a\u7cfb\u7edf\" target=\"_blank\">\u771f\u7a7a\u7cfb\u7edf<\/a>\u4e13\u4e3a\u6ee1\u8db3\u5ba2\u6237\u7684\u5de5\u827a\u8981\u6c42\u800c\u8bbe\u8ba1\u3002\u771f\u7a7a\u6a21\u5757\u7684\u6570\u91cf\u548c\u7c7b\u578b\u7531\u5ba2\u6237\u9009\u62e9\uff0c\u5e76\u4e3a\u672a\u6765\u7684\u6269\u5c55\u6f5c\u529b\u63d0\u4f9b\u4e86\u7a7a\u95f4\u3002<\/p>\n<p><strong>\u5e26\u6709\u591a\u4e2a\u771f\u7a7a\u5ba4\u548c\u5185\u886c\u7bb1\u7684\u7c07\u5f0f\u7269\u7406<a href=\"https:\/\/www.bihec.com\/angstrom-engineering\/tag\/%e6%b0%94%e7%9b%b8%e6%b2%89%e7%a7%af\/\" title=\"View all posts in \u6c14\u76f8\u6c89\u79ef\" target=\"_blank\">\u6c14\u76f8\u6c89\u79ef<\/a>\u7cfb\u7edf<\/strong><\/p>\n<p><img loading=\"lazy\" class=\"\" src=\"https:\/\/angstromengineering.com\/wp-content\/uploads\/2016\/04\/chamber-door.jpg\" width=\"376\" height=\"235\" \/><\/p>\n<p>Nebula Cluster \u96c6\u6210\u771f\u7a7a\u7cfb\u7edf\u6709\u7740PVD\u3001CVD\u3001ALD\u3001\u63a9\u819c\u548c\u505c\u653e\u8f6c\u79fb\u3001\u5e26\u52a0\u70ed\/\u51b7\u5374\u529f\u80fd\u7684\u5e73\u53f0\u3001\u8f85\u52a9\u6e05\u6d01\u6e90\u3001\u53ef\u53d8\u89d2\u5ea6\u6c89\u79ef\u7b49\u6280\u672f\u6a21\u5757\u3002\u6b64\u5916\uff0cNebula Cluster \u96c6\u6210\u771f\u7a7a\u7cfb\u7edf\u8fd8\u5305\u62ec\u4e00\u4e2a\u8fde\u63a5\u6240\u6709\u8bbe\u5907\u7684\u4e2d\u592e\u673a\u5668\u4eba\u4e2d\u67a2\uff0c\u6240\u6709\u8bbe\u5907\u5747\u7531\u96c6\u6210\u5f0f\u7b80\u5355\u6613\u7528\u7684\u914d\u65b9\u9a71\u52a8\u8f6f\u4ef6\u63a7\u5236\u3002<\/p>\n<p><strong>\u5de5\u827a\u6a21\u5757\u9009\u9879<\/strong><\/p>\n<p><img loading=\"lazy\" class=\"\" src=\"https:\/\/angstromengineering.com\/wp-content\/uploads\/2018\/11\/Nebula-cluster-angstrom-aeres.jpg\" alt=\"Cluster physical vapor deposition system with multiple vacuum chambers and glovebox, capable of atomic layer deposition ald\" width=\"396\" height=\"297\" \/><br \/>\n\u4f7f\u7528\u7b49\u79bb\u5b50\u6216\u79bb\u5b50\u675f\u6e90\u8fdb\u884c\u57fa\u5e95\u6e05\u6d01\u548c\u5236\u5907<br \/>\n\u591a\u79cd\u771f\u7a7a\u6c89\u79ef\u6a21\u5757\u53ef\u7528\u4e8e PVD\u3001CVD\u3001ALD \u4ee5\u53ca\u91cf\u5b50\u7cfb\u5217\u7b49\u91cd\u70b9\u5e94\u7528\u6a21\u5757<br \/>\n\u57fa\u5e95\u548c\u63a9\u819c\u5b58\u50a8\u76d2\u53ef\u6839\u636e\u9700\u8981\u5bb9\u7eb3 25 \u4e2a\u6216\u66f4\u591a\u6837\u54c1\u76d8<br \/>\n\u4f7f\u7528 SCARA \u673a\u68b0\u624b\u7684\u5206\u914d\u6a21\u5757\u5c3a\u5bf8\u53ef\u6839\u636e\u9700\u6c42\u9009\u62e9<br \/>\n\u5185\u886c\u7bb1\u73af\u5883\u53ef\u96c6\u6210\u5230\u4e00\u4e2a\u6216\u591a\u4e2a\u6a21\u5757\u4e2d<\/p>\n<p><strong>\u57fa\u677f\u5c3a\u5bf8\/\u4ea7\u91cf<\/strong><\/p>\n<p><img loading=\"lazy\" class=\"\" src=\"https:\/\/angstromengineering.com\/wp-content\/uploads\/2017\/09\/rf-bias-stage.jpg\" alt=\"Purple argon plasma from a rectangular sputter cathode\" width=\"333\" height=\"222\" \/><\/p>\n<p>\u9002\u7528\u4e8e\u6807\u51c6\u534a\u5bfc\u4f53\u6676\u7247\u5916\u5f62\u5c3a\u5bf8\u4ee5\u53ca\u5178\u578b\u663e\u793a\u5668\u73bb\u7483\u7684\u6a21\u5757\uff0c\u5305\u62ec\u9002\u7528\u4e8e\u7b2c 2 \u4ee3\uff08360 \u6beb\u7c73 x 465 \u6beb\u7c73\uff09\u53ca\u66f4\u5927\u5c3a\u5bf8\u7684\u6a21\u5757\u3002<br \/>\n\u4ea7\u91cf\u53d6\u51b3\u4e8e\u5236\u7a0b\u6301\u7eed\u65f6\u95f4\u548c\u590d\u6742\u7a0b\u5ea6\u3002\u4e0d\u8fc7\uff0cAERES \u8f6f\u4ef6\u5e73\u53f0\u4f18\u5316\u4e86\u5c42\u4e0e\u5c42\u4e4b\u95f4\u7684\u8f6c\u6362\uff0c\u4ece\u800c\u7f29\u77ed\u4e86\u6574\u4f53\u5236\u7a0b\u65f6\u95f4\u3002<\/p>\n<br><div class=\"tagcloud\"><a href=\"https:\/\/www.bihec.com\/angstrom-engineering\/tag\/amod\/\" class=\"tag-cloud-link tag-link-0 tag-link-position-1\" style=\"font-size: 14.3pt;\" aria-label=\"AMOD (5\u4e2a\u9879\u76ee)\">AMOD<\/a>\n<a href=\"https:\/\/www.bihec.com\/angstrom-engineering\/tag\/angstrom-engineering\/\" class=\"tag-cloud-link tag-link-1 tag-link-position-2\" style=\"font-size: 20.25pt;\" aria-label=\"Angstrom Engineering (8\u4e2a\u9879\u76ee)\">Angstrom Engineering<\/a>\n<a href=\"https:\/\/www.bihec.com\/angstrom-engineering\/tag\/covap\/\" class=\"tag-cloud-link tag-link-2 tag-link-position-3\" style=\"font-size: 16.75pt;\" aria-label=\"COVAP (6\u4e2a\u9879\u76ee)\">COVAP<\/a>\n<a href=\"https:\/\/www.bihec.com\/angstrom-engineering\/tag\/evovac\/\" class=\"tag-cloud-link tag-link-3 tag-link-position-4\" style=\"font-size: 11.5pt;\" aria-label=\"EVOVAC (4\u4e2a\u9879\u76ee)\">EVOVAC<\/a>\n<a href=\"https:\/\/www.bihec.com\/angstrom-engineering\/tag\/nebula-cluster\/\" class=\"tag-cloud-link tag-link-4 tag-link-position-5\" style=\"font-size: 8pt;\" aria-label=\"NEBULA CLUSTER (3\u4e2a\u9879\u76ee)\">NEBULA CLUSTER<\/a>\n<a href=\"https:\/\/www.bihec.com\/angstrom-engineering\/tag\/nexdep\/\" class=\"tag-cloud-link tag-link-5 tag-link-position-6\" style=\"font-size: 11.5pt;\" aria-label=\"Nexdep (4\u4e2a\u9879\u76ee)\">Nexdep<\/a>\n<a href=\"https:\/\/www.bihec.com\/angstrom-engineering\/tag\/%e6%b0%94%e7%9b%b8%e6%b2%89%e7%a7%af\/\" class=\"tag-cloud-link tag-link-6 tag-link-position-7\" style=\"font-size: 22pt;\" aria-label=\"\u6c14\u76f8\u6c89\u79ef (9\u4e2a\u9879\u76ee)\">\u6c14\u76f8\u6c89\u79ef<\/a>\n<a href=\"https:\/\/www.bihec.com\/angstrom-engineering\/tag\/%e7%89%a9%e7%90%86%e6%b0%94%e7%9b%b8%e6%b2%89%e7%a7%af%e5%b9%b3%e5%8f%b0\/\" class=\"tag-cloud-link tag-link-7 tag-link-position-8\" style=\"font-size: 18.5pt;\" aria-label=\"\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u5e73\u53f0 (7\u4e2a\u9879\u76ee)\">\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u5e73\u53f0<\/a>\n<a href=\"https:\/\/www.bihec.com\/angstrom-engineering\/tag\/%e7%9c%9f%e7%a9%ba%e7%b3%bb%e7%bb%9f\/\" class=\"tag-cloud-link tag-link-8 tag-link-position-9\" style=\"font-size: 14.3pt;\" aria-label=\"\u771f\u7a7a\u7cfb\u7edf (5\u4e2a\u9879\u76ee)\">\u771f\u7a7a\u7cfb\u7edf<\/a>\n<a href=\"https:\/\/www.bihec.com\/angstrom-engineering\/tag\/%e9%9b%86%e6%88%90%e7%9c%9f%e7%a9%ba%e7%b3%bb%e7%bb%9f\/\" class=\"tag-cloud-link tag-link-9 tag-link-position-10\" style=\"font-size: 11.5pt;\" aria-label=\"\u96c6\u6210\u771f\u7a7a\u7cfb\u7edf (4\u4e2a\u9879\u76ee)\">\u96c6\u6210\u771f\u7a7a\u7cfb\u7edf<\/a><\/div>","protected":false},"excerpt":{"rendered":"<p>NEBULA CLUSTER\u96c6\u6210\u771f\u7a7a\u7cfb\u7edf Angstrom\u5728\u81ea\u52a8\u5316\u3001\u5de5\u7a0b\u7cbe\u5ea6\u3001\u7528\u6237\u63a7\u5236\u4e0a\u7ecf\u9a8c\u4e30\u5bcc\uff0c\u8fd9\u4e9bNEBULA CLUSTER\u96c6\u6210\u771f\u7a7a\u7cfb\u7edf\u4e13\u4e3a\u6ee1\u8db3\u5ba2\u6237\u7684\u5de5\u827a\u8981\u6c42\u800c\u8bbe\u8ba1\u3002\u771f\u7a7a\u6a21\u5757 <\/p>\n","protected":false},"author":25,"featured_media":173,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[11],"tags":[9,7,4,10,12,8,6,5,14,13],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v17.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u7f8e\u56fd ANGSTROM ENGINEERING NEBULA CLUSTER\u96c6\u6210\u771f\u7a7a\u7cfb\u7edf - Angstrom Engineering \u7535\u963b\u5f0f\u70ed\u84b8\u53d1 \u7535\u5b50\u675f\u84b8\u53d1 \u79bb\u5b50\u675f\u52a0\u5de5 \u5316\u5b66\u6c14\u76f8\u6c89\u79ef \u81ea\u52a8\u5316\u7cfb\u7edf \u5939\u5177<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.bihec.com\/angstrom-engineering\/\u7f8e\u56fd-angstrom-engineering-nebula-cluster\u96c6\u6210\u771f\u7a7a\u7cfb\u7edf\/\" \/>\n<meta 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