{"id":74,"date":"2020-02-25T10:33:16","date_gmt":"2020-02-25T02:33:16","guid":{"rendered":"https:\/\/www.bihec.com\/high-voltage-engineering\/?p=74"},"modified":"2020-02-25T10:33:16","modified_gmt":"2020-02-25T02:33:16","slug":"high-voltage-%e7%83%ad%e9%98%b4%e6%9e%81%e6%bd%98%e5%ae%81%e7%a6%bb%e5%ad%90%e6%ba%90model-so-100","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/high-voltage-engineering\/high-voltage-%e7%83%ad%e9%98%b4%e6%9e%81%e6%bd%98%e5%ae%81%e7%a6%bb%e5%ad%90%e6%ba%90model-so-100\/","title":{"rendered":"High Voltage \u70ed\u9634\u6781\u6f58\u5b81\u79bb\u5b50\u6e90Model SO-100"},"content":{"rendered":"
<\/p>\n
High Voltage \u70ed\u9634\u6781\u6f58\u5b81\u79bb\u5b50\u6e90<\/a>Model SO-100<\/a> \u4e3b\u8981\u7279\u70b9 General description High Voltage \u70ed\u9634\u6781\u6f58\u5b81\u79bb\u5b50\u6e90Model SO-100 \u4e3b\u8981\u7279\u70b9 \uf0b7 \u6613\u4e8e\u64cd\u4f5c\u548c\u7ef4\u62a4 \uf0b7 \u4f4e\u529f\u8017 \uf0b7 \u706f\u4e1d\u5bff\u547d\u957f \uf0b7 \u8fd1\u5149\u706f\u53d1\u5c04 \uf0b7 \u79bb\u5b50\u675f\u6765\u81ea\u60f0\u6027\u6c14\u4f53 General <\/p>\n","protected":false},"author":19,"featured_media":75,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[1],"tags":[4,14,3,11,12,8,10,9,7,6,5],"yoast_head":"\n
\n\uf0b7 \u6613\u4e8e\u64cd\u4f5c\u548c\u7ef4\u62a4
\n\uf0b7 \u4f4e\u529f\u8017
\n\uf0b7 \u706f\u4e1d\u5bff\u547d\u957f
\n\uf0b7 \u8fd1\u5149\u706f\u53d1\u5c04
\n\uf0b7 \u79bb\u5b50\u675f\u6765\u81ea\u60f0\u6027\u6c14\u4f53<\/p>\n
\nThe HVEE SO-100 high current ion source is a hot filament Penning discharge source to produce, among others, ions like B+, Si+, P+ and As+ from fluorinated gases like BF3, PF5 (PF3), SiF4 and AsF5. Beams from noble gases as well as from gases like O2 are also readily produced.
\nThe discharge is sustained by electrons emitted from a hot tungsten filament and an arc power supply that accelerates the electrons into the plasma region where they serve to ionize and break up the molecules from the feed gas. A solenoid creates a magnetic field that is shaped by soft iron within the source and that serves to confine the plasma. From the plasma boundary, the ions are extracted by the electric field in the extraction region to form a low divergent ion beam.
\nSpare parts to cover the first needs are included with each SO-100 ion source.
\nOther types of penning ion sources available from High Voltage Engineering<\/a> Europa B.V. are:
\n– The Model SO-60<\/a> Cold Cathode Penning ion source
\n– The Model SO-90<\/a> Sputter Penning ion source<\/p>\n