{"id":574,"date":"2024-08-06T12:00:10","date_gmt":"2024-08-06T04:00:10","guid":{"rendered":"https:\/\/www.bihec.com\/idonus\/?p=574"},"modified":"2024-08-06T12:00:10","modified_gmt":"2024-08-06T04:00:10","slug":"hf-vapor-phase-etcher-vpe","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/idonus\/hf-vapor-phase-etcher-vpe\/","title":{"rendered":"\u745e\u58ebidonus s\u00e0rl HF\u6c14\u76f8\u8680\u523b\u673a-HF Vapor Phase Etcher-VPE\u7cfb\u5217"},"content":{"rendered":"

\"\"<\/h1>\n

HF Vapor Phase Etcher<\/a><\/h1>\n

HF\u6c14\u76f8\u8680\u523b\u673a<\/a><\/h1>\n

VPE\u7cfb\u5217<\/a><\/h1>\n
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VPE<\/a>\u7cfb\u7edf\u7531\u4e00\u4e2a\u53cd\u5e94\u5ba4\u548c\u4e00\u4e2a\u76d6\u5b50\u7ec4\u6210\u3002\u52a0\u70ed\u5143\u4ef6\u96c6\u6210\u5728\u76d6\u5b50\u4e2d\uff0c\u7528\u4e8e\u63a7\u5236\u5f85\u8680\u523b\u886c\u5e95\u7684\u6e29\u5ea6\u3002\u6676\u5706\u5939\u6301\u53ef\u4ee5\u901a\u8fc7\u4e24\u79cd\u65b9\u5f0f\u5b9e\u73b0\uff1a\u4e00\u79cd\u662f\u4f7f\u7528\u5939\u6301\u73af\u673a\u68b0\u5939\u6301\u6676\u5706\u3002\u87ba\u4e1d\u4ece\u8bbe\u5907\u7684\u80cc\u9762\u8fdb\u884c\u56fa\u5b9a\uff0c\u6c38\u8fdc\u4e0d\u4e0e\u6c22\u6c1f\u9178\uff08HF\uff09\u84b8\u6c14\u63a5\u89e6\u3002\u8fd9\u4e09\u4e2a\u87ba\u6bcd\u5e26\u6709\u4fdd\u62a4\u624b\u5957\u6613\u4e8e\u64cd\u4f5c\u3002\u53e6\u4e00\u79cd\u9009\u62e9\u662f\u9759\u7535\u5939\u6301\u3002\u5355\u4e2a\u82af\u7247\uff08\u957f\u5ea6\u8d85\u8fc710\u6beb\u7c73\uff09\u4ee5\u53ca\u6676\u5706\u53ef\u4ee5\u5939\u6301\u5230\u52a0\u70ed\u5143\u4ef6\u4e0a\uff0c\u4fdd\u62a4\u6676\u5706\u80cc\u9762\u514d\u53d7\u8680\u523b\u5f71\u54cd\u3002<\/p>\n

\u6db2\u6001\u6c22\u6c1f\u9178\uff08HF\uff09\u88ab\u6ce8\u5165\u53cd\u5e94\u5ba4\u4e2d\u3002\u53cd\u5e94\u5ba4\u7528\u76d6\u5b50\u5bc6\u5c01\u3002\u5728\u5ba4\u6e29\u4e0b\uff0c\u6db2\u6001HF\u84b8\u53d1\u4ea7\u751fHF\u84b8\u6c14\uff0c\u8680\u523b\u8fc7\u7a0b\u968f\u5373\u5f00\u59cb\u3002\u8680\u523b\u901f\u7387\u7531\u53ef\u4ee5\u8c03\u8282\u7684\u6676\u5706\u6e29\u5ea6\u63a7\u5236\uff0c\u6e29\u5ea6\u8303\u56f4\u4ece35\u00b0C\u523060\u00b0C\u3002<\/p>\n<\/div>\n

\u5904\u7406\u5b8c\u6210\u540e\uff0c\u9178\u53ef\u4ee5\u5b58\u50a8\u5728\u4e00\u4e2a\u5bc6\u5c01\u5bb9\u5668\u4e2d\u7684\u50a8\u6db2\u6c60\u4e2d\uff0c\u4ee5\u4fbf\u91cd\u65b0\u4f7f\u7528\u3002\u6db2\u4f53\u8f6c\u79fb\u7b80\u5355\u5730\u901a\u8fc7\u964d\u4f4e\u5e26\u6709\u624b\u67c4\u7684\u4f20\u8f93\u50a8\u6db2\u6c60\u6765\u5b8c\u6210\u3002\u7531\u4e8e\u91cd\u529b\u4f5c\u7528\uff0c\u9178\u6d41\u5165\u50a8\u6db2\u6c60\uff0c\u5e76\u53ef\u4ee5\u901a\u8fc7\u4e24\u4e2a\u9600\u95e8\u5173\u95ed\u3002\u91cd\u65b0\u586b\u5145\u53cd\u5e94\u5ba4\u662f\u901a\u8fc7\u6253\u5f00\u9600\u95e8\u5e76\u63d0\u8d77\u624b\u67c4\u5b8c\u6210\u7684\uff0c\u9178\u5c31\u4f1a\u6d41\u5165\u53cd\u5e94\u5ba4\u3002\u8fd9\u79cd\u9178\u53ef\u4ee5\u591a\u6b21\u7528\u4e8e\u8680\u523b\uff0c\u76f4\u5230\u9700\u8981\u66f4\u6362\u3002VPE\u7cfb\u7edf\u5360\u5730\u9762\u79ef\u5c0f\uff0c\u53ef\u4ee5\u8f7b\u677e\u96c6\u6210\u5230\u73b0\u6709\u7684\u6d41\u901a\u7bb1\u4e2d\u3002<\/p>\n

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\u6e29\u5ea6\u63a7\u5236\u53cd\u5e94\u5ba4<\/h2>\n

\u4e3a\u4e86\u7a33\u5b9a\u4e8c\u6c27\u5316\u7845<\/a>\u7684\u8680\u523b\u901f\u7387\uff0c\u6211\u4eec\u4f7f\u7528\u4e00\u4e2a\u5177\u6709\u6e29\u5ea6\u63a7\u5236\u6db2\u6001HF\u7684\u53cd\u5e94\u5ba4\u3002\u6db2\u6001HF\u7684\u6e29\u5ea6\u4f1a\u968f\u7740\u6d01\u51c0\u5ba4\u73af\u5883\u6e29\u5ea6\u7684\u53d8\u5316\u800c\u53d8\u5316\u3002\u6b64\u5916\uff0c\u5728\u957f\u65f6\u95f4\u7684\u8680\u523b\u8fc7\u7a0b\u4e2d\uff0c\u6db2\u6001HF\u4f1a\u52a0\u70ed\uff0c\u5bfc\u81f4\u4ece\u4e00\u4e2a\u6676\u5706\u5230\u53e6\u4e00\u4e2a\u6676\u5706\u7684\u8680\u523b\u901f\u7387\u9010\u6e10\u589e\u52a0\uff0c\u76f4\u5230\u7cfb\u7edf\u7a33\u5b9a\u4e0b\u6765\u3002<\/p>\n

\u4e3a\u4e86\u7a33\u5b9a\u8680\u523b\u901f\u7387\uff0c\u6211\u4eec\u6709\u4e00\u4e2a\u5e26\u6709\u6e29\u5ea6\u63a7\u5236\u7684\u53cd\u5e94\u5ba4\uff0c\u53ef\u4ee5\u901a\u8fc7\u989d\u5916\u7684\u63a7\u5236\u5668\u8c03\u8282HF\u7684\u6e29\u5ea6\u3002\u5c06HF\u9178\u52a0\u70ed\u81f3\u67d0\u4e2a\u9608\u503c\u4ee5\u4e0a\u53ef\u4ee5\u5728\u8680\u523b\u8fc7\u7a0b\u4e2d\u4fdd\u6301\u6e29\u5ea6\u7a33\u5b9a\u3002<\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n

\"\"<\/p>\n

\n

 <\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n

DIM<\/a>\nDouble Image Microscope (DIM\u00a0)<\/a>\nHF Vapor Phase Etcher<\/a>\nHF\u6c14\u76f8\u8680\u523b\u673a<\/a>\nidonus<\/a>\nidonus s\u00e0rl<\/a>\nInfrared Microscope<\/a>\nIR-M<\/a>\nMAS<\/a>\nMAS + DIM<\/a>\nMask Aligner<\/a>\nMask Alignment System (MAS\u00a0)<\/a>\nMEMS<\/a>\nMEMS\u5668\u4ef6<\/a>\nMEMS\u9020\u8bbe\u5907<\/a>\nMercury-vapor lamp<\/a>\nShadow Mask Aligner<\/a>\nUV-EXP\u7cfb\u5217<\/a>\nUV-LED<\/a>\nUV-LED exposure\u7cfb\u7edf<\/a>\nVPE<\/a>\nVPE\u7cfb\u5217<\/a>\n\u5177\u6709\u53cc\u56fe\u50cf\u663e\u5fae\u955c\u7684\u63a9\u6a21\u5bf9\u51c6\u7cfb\u7edf<\/a>\n\u63a9\u6a21\u5bf9\u51c6\u5668<\/a>\n\u63a9\u6a21\u5bf9\u51c6\u7cfb\u7edf<\/a>\n\u6c14\u76f8\u8680\u523b\u673a<\/a>\n\u6c5e\u6c14\u706f<\/a>\n\u745e\u58ebIDONUS<\/a>\n\u745e\u58ebidonus s\u00e0rl<\/a>\n\u7d2b\u5916-LED\u66dd\u5149\u7cfb\u7edf<\/a>\n\u7d2b\u5916LED\u5149\u523b\u66dd\u5149\u7cfb\u7edf<\/a>\n\u7d2b\u5916\u7167\u660e\u7cfb\u7edf<\/a>\n\u7ea2\u5916\u663e\u5fae\u955c<\/a>\n\u7ea2\u5916\u7845\u7247\u68c0\u6d4b\u663e\u5fae\u955c<\/a>\n\u836b\u7f69\u5bf9\u51c6\u5668<\/a>\n\u836b\u7f69\u63a9\u819c\u5bf9\u51c6\u5668<\/a><\/div>","protected":false},"excerpt":{"rendered":"

HF Vapor Phase Etcher HF\u6c14\u76f8\u8680\u523b\u673a VPE\u7cfb\u5217 VPE\u7cfb\u7edf\u7531\u4e00\u4e2a\u53cd\u5e94\u5ba4\u548c\u4e00\u4e2a\u76d6\u5b50\u7ec4\u6210\u3002\u52a0\u70ed\u5143\u4ef6\u96c6\u6210\u5728\u76d6\u5b50\u4e2d\uff0c\u7528\u4e8e\u63a7\u5236\u5f85\u8680\u523b\u886c\u5e95\u7684\u6e29\u5ea6\u3002\u6676\u5706\u5939\u6301\u53ef\u4ee5\u901a\u8fc7\u4e24\u79cd\u65b9 <\/p>\n","protected":false},"author":22,"featured_media":576,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[72,163],"tags":[158,157,165,102,7,162,74,160,156,152,117,155,12,38,13,115,95,150,19,151,8,164,153,116,154,166,114,73,161,20,85,17,24,159,68,94],"_links":{"self":[{"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/posts\/574"}],"collection":[{"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/users\/22"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/comments?post=574"}],"version-history":[{"count":1,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/posts\/574\/revisions"}],"predecessor-version":[{"id":579,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/posts\/574\/revisions\/579"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/media\/576"}],"wp:attachment":[{"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/media?parent=574"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/categories?post=574"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/tags?post=574"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}