{"id":581,"date":"2024-08-06T12:08:34","date_gmt":"2024-08-06T04:08:34","guid":{"rendered":"https:\/\/www.bihec.com\/idonus\/?p=581"},"modified":"2024-08-06T12:08:34","modified_gmt":"2024-08-06T04:08:34","slug":"electrostatic-chucks-e-chucks","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/idonus\/electrostatic-chucks-e-chucks\/","title":{"rendered":"\u745e\u58ebidonus s\u00e0rl-Electrostatic chucks (E-chucks\u00a0) \u9759\u7535\u5438\u76d8\u3001\u7535\u5b50\u5361\u76d8\u00a0"},"content":{"rendered":"

\"\"<\/h1>\n

Electrostatic chucks<\/a> (E-chucks<\/a><\/i>\u00a0)<\/h1>\n

\u9759\u7535\u5438\u76d8<\/a>\u3001\u7535\u5b50\u5361\u76d8<\/a><\/i><\/h1>\n
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\u7535\u9759\u529b\u5361\u76d8\u80fd\u591f\u901a\u8fc7\u9759\u7535\u529b\u5c06\u591a\u4e2a\u82af\u7247\u4ee5\u53ca\u6676\u5706\u7684\u90e8\u5206\u5939\u6301\u5230\u6676\u5706\u652f\u67b6\u4e0a\u3002<\/p>\n

\u8fd9\u79cd\u8bbe\u5907\u5bf9\u4e8e\u7814\u53d1\u673a\u6784\u975e\u5e38\u6709\u7528\uff0c\u56e0\u4e3a\u5e76\u975e\u603b\u662f\u53ef\u4ee5\u5904\u7406\u5b8c\u6574\u7684\u6676\u5706\u3002\u901a\u8fc7\u7535\u9759\u529b\u5939\u6301\u82af\u7247\uff0c\u53ef\u4ee5\u5728HF\u84b8\u6c7d\u91ca\u653e\u4e4b\u524d\u6267\u884cMEMS<\/a>\u6676\u5706\u7684\u4e25\u683c\u5207\u5272\u5de5\u827a\u3002\u901a\u8fc7\u4fee\u6539\u4f20\u7edf\u7684\u5236\u9020\u987a\u5e8f\uff0c\u53ef\u4ee5\u751f\u4ea7\u51fa\u5177\u6709\u6781\u5176\u67d4\u8f6f\u60ac\u6d6e\u7ed3\u6784\u7684MEMS\u5668\u4ef6<\/a>\u3002<\/p>\n

\u7535\u9759\u529b\u5361\u76d8\u7684\u4f7f\u7528\u975e\u5e38\u7b80\u5355\u3002\u5c06\u82af\u7247\u653e\u7f6e\u5728\u6676\u5706\u652f\u67b6\u4e0a\uff0c\u5e76\u901a\u8fc7\u63a7\u5236\u7bb1\u4e0a\u7684\u5f00\u5173\u6253\u5f00\u7535\u529b\u3002\u7535\u9759\u529b\u7684\u5927\u5c0f\u53ef\u4ee5\u8fdb\u884c\u8c03\u6574\u3002<\/p>\n

\"\"<\/p>\n

\u9759\u7535\u5361\u76d8<\/a>\u65e2\u53ef\u4ee5\u7528\u4e8e\u6574\u4e2a\u6676\u7247\u7684\u5939\u6301\uff0c\u4e5f\u53ef\u4ee5\u7528\u4e8e\u5355\u4e2a\u82af\u7247\u7684\u9759\u7535\u5939\u6301\u3002<\/i><\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n

DIM<\/a>\nDouble Image Microscope (DIM\u00a0)<\/a>\nE-chucks<\/a>\nElectrostatic chucks<\/a>\nHF Vapor Phase Etcher<\/a>\nHF\u6c14\u76f8\u8680\u523b\u673a<\/a>\nidonus<\/a>\nidonus s\u00e0rl<\/a>\nInfrared Microscope<\/a>\nIR-M<\/a>\nMAS<\/a>\nMAS + DIM<\/a>\nMask Aligner<\/a>\nMask Alignment System (MAS\u00a0)<\/a>\nMEMS<\/a>\nMEMS\u5668\u4ef6<\/a>\nMEMS\u9020\u8bbe\u5907<\/a>\nMercury-vapor lamp<\/a>\nShadow Mask Aligner<\/a>\nUV-EXP\u7cfb\u5217<\/a>\nUV-LED<\/a>\nUV-LED exposure\u7cfb\u7edf<\/a>\nVPE<\/a>\nVPE\u7cfb\u5217<\/a>\n\u5177\u6709\u53cc\u56fe\u50cf\u663e\u5fae\u955c\u7684\u63a9\u6a21\u5bf9\u51c6\u7cfb\u7edf<\/a>\n\u63a9\u6a21\u5bf9\u51c6\u5668<\/a>\n\u63a9\u6a21\u5bf9\u51c6\u7cfb\u7edf<\/a>\n\u6c14\u76f8\u8680\u523b\u673a<\/a>\n\u6c5e\u6c14\u706f<\/a>\n\u745e\u58ebIDONUS<\/a>\n\u745e\u58ebidonus s\u00e0rl<\/a>\n\u7535\u5b50\u5361\u76d8<\/a>\n\u7d2b\u5916-LED\u66dd\u5149\u7cfb\u7edf<\/a>\n\u7d2b\u5916LED\u5149\u523b\u66dd\u5149\u7cfb\u7edf<\/a>\n\u7d2b\u5916\u7167\u660e\u7cfb\u7edf<\/a>\n\u7ea2\u5916\u663e\u5fae\u955c<\/a>\n\u7ea2\u5916\u7845\u7247\u68c0\u6d4b\u663e\u5fae\u955c<\/a>\n\u836b\u7f69\u5bf9\u51c6\u5668<\/a>\n\u836b\u7f69\u63a9\u819c\u5bf9\u51c6\u5668<\/a>\n\u9759\u7535\u5438\u76d8<\/a><\/div>","protected":false},"excerpt":{"rendered":"

Electrostatic chucks (E-chucks\u00a0) \u9759\u7535\u5438\u76d8\u3001\u7535\u5b50\u5361\u76d8 \u7535\u9759\u529b\u5361\u76d8\u80fd\u591f\u901a\u8fc7\u9759\u7535\u529b\u5c06\u591a\u4e2a\u82af\u7247\u4ee5\u53ca\u6676\u5706\u7684\u90e8\u5206\u5939\u6301\u5230\u6676\u5706\u652f\u67b6\u4e0a\u3002 \u8fd9\u79cd\u8bbe\u5907\u5bf9\u4e8e\u7814\u53d1\u673a\u6784\u975e\u5e38\u6709 <\/p>\n","protected":false},"author":22,"featured_media":582,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[72,101,167],"tags":[158,157,169,170,165,102,7,162,74,160,156,152,117,155,12,38,13,115,95,150,19,151,8,164,153,116,154,166,114,73,161,168,20,85,17,24,159,68,94,123],"_links":{"self":[{"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/posts\/581"}],"collection":[{"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/users\/22"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/comments?post=581"}],"version-history":[{"count":1,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/posts\/581\/revisions"}],"predecessor-version":[{"id":584,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/posts\/581\/revisions\/584"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/media\/582"}],"wp:attachment":[{"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/media?parent=581"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/categories?post=581"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/tags?post=581"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}