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\u4ea7\u54c1\u63cf\u8ff0<\/b><\/h2>\n

VPE<\/a> \u7531\u53cd\u5e94\u5ba4\u548c\u76d6\u5b50\u7ec4\u6210\u3002\u52a0\u70ed\u5143\u4ef6\u96c6\u6210\u5728\u76d6\u5b50\u4e2d\u3002\u5b83\u63a7\u5236\u8981\u8680\u523b\u7684\u57fa\u6750\u7684\u6e29\u5ea6\u3002\u6676\u5706\u5939\u7d27\u53ef\u4ee5\u901a\u8fc7\u4e24\u79cd\u65b9\u5f0f\u5b9e\u73b0\uff1a\u6676\u5706\u53ef\u4ee5\u4f7f\u7528\u5939\u7d27\u73af\u673a\u68b0\u5730\u5939\u7d27\u3002\u62e7\u7d27\u4ece\u8bbe\u5907\u80cc\u9762\u8fdb\u884c\uff0c\u8be5\u88c5\u7f6e\u4ece\u4e0d\u4e0e HF \u84b8\u6c7d\u63a5\u89e6\u30023 \u4e2a\u87ba\u6bcd\u6613\u4e8e\u4f7f\u7528\u4fdd\u62a4\u624b\u5957\u64cd\u4f5c\u3002\u53e6\u4e00\u79cd\u9009\u62e9\u662f\u9759\u7535\u5939\u7d27\u3002\u5355\u4e2a\u82af\u7247\uff08\u5927\u4e8e 10 mm\uff09\u4ee5\u53ca\u6676\u5706\u53ef\u5939\u7d27\u5230\u52a0\u70ed\u5143\u4ef6\u4e0a\u3002\u6676\u5706\u80cc\u9762\u53ef\u9632\u6b62\u8680\u523b\u3002<\/p>\n

\u6db2\u4f53\u9ad8\u9891\u88ab\u586b\u5145\u5230\u53cd\u5e94\u5ba4\u4e2d\u3002\u53cd\u5e94\u5ba4\u7528\u76d6\u5b50\u5173\u95ed\u3002HF \u84b8\u6c7d\u5728\u5ba4\u6e29\u4e0b\u5f62\u6210\uff0c\u8680\u523b\u8fc7\u7a0b\u81ea\u53d1\u542f\u52a8\u3002\u8680\u523b\u901f\u7387\u7531\u53ef\u4ece 35\u00b0C \u8c03\u8282\u5230 60\u00b0C \u7684\u6676\u5706\u6e29\u5ea6\u63a7\u5236\u3002\u52a0\u5de5\u540e\uff0c\u9178\u53ef\u4ee5\u50a8\u5b58\u5728\u50a8\u6db2\u7f50\u4e2d\uff0c\u5728\u53ef\u5bc6\u5c01\u5bb9\u5668\u4e2d\u518d\u7528\u3002\u6db2\u4f53\u4f20\u8f93\u53ea\u9700\u901a\u8fc7\u964d\u4f4e\u5e26\u624b\u67c4\u7684\u901a\u4fe1\u50a8\u6db2\u7f50\u5373\u53ef\u5b8c\u6210\u3002\u7531\u4e8e\u91cd\u529b\uff0c\u9178\u6d41\u5165\u50a8\u6db2\u7f50\uff0c\u5e76\u53ef\u4ee5\u901a\u8fc7\u4e24\u4e2a\u9600\u95e8\u5173\u95ed\u3002\u901a\u8fc7\u6253\u5f00\u9600\u95e8\u5e76\u63d0\u8d77\u624b\u67c4\uff0c\u5bf9\u53cd\u5e94\u5ba4\u8fdb\u884c\u91cd\u65b0\u52a0\u6ce8\u3002\u9178\u6d41\u5165\u53cd\u5e94\u5ba4\u3002\u9178\u53ef\u4ee5\u91cd\u65b0\u7528\u4e8e\u591a\u4e2a\u8680\u523b\uff0c\u76f4\u5230\u5b83\u5fc5\u987b\u88ab\u66f4\u6362\u3002
\nVPE \u7cfb\u7edf\u7684\u5360\u5730\u9762\u79ef\u5c0f\uff0c\u53ef\u8f7b\u677e\u96c6\u6210\u5230\u73b0\u6709\u6d41\u91cf\u7bb1\u4e2d\u3002<\/p>\n

<\/figure>\n

Application \u603b\u7ed3<\/b><\/h2>\n

– \u7c98\u9644\u81ea\u7531
\nMEMS<\/a> \u91ca\u653e
\n– \u7ed3\u6784\u53d8\u8584 – SOI \u57fa
\n\u6750\u4e0a\u7ed3\u6784\u7684\u81ea\u7531\u91ca\u653e – \u8680\u523b\u901f\u7387\u53ef\u8c03\u81ea 0 \u81f3\u7ea6
\n30 \u03bcm\/h – \u5355\u4fa7 SiO2 \u8680\u523b\uff08\u5728\u8fc7\u7a0b\u4e2d\u4fdd\u62a4\u80cc\u9762\uff09<\/p>\n

\u7ec4\u5408\u9a71\u52a8\u5668\u7ed3\u6784\u7684\u91ca\u653e<\/b>
\n\u5c06\u68b3\u5b50\u9a71\u52a8\u5668\u7684\u81ea\u7531\u91ca\u653e\u4e0e\u76f8\u90bb\u68b3\u5b50\u624b\u6307\u4e4b\u95f4\u7684 1 \u03bcm \u95f4\u9699\uff08\u56fe\u7247\u6765\u6e90\uff1aIdonus Sarl\uff09<\/p>\n

<\/figure>\n

\u53cd\u5e94\u5ba4\u6e29\u5ea6\u63a7\u5236<\/b><\/h2>\n

\u4e8c\u6c27\u5316\u7845<\/a>\u7684\u8680\u523b\u901f\u7387\u968f\u53cd\u5e94\u5ba4\u4e2d\u6db2\u4f53\u9ad8\u9891\u7684\u6e29\u5ea6\u800c\u7565\u6709\u53d8\u5316\u3002HF \u7684\u6e29\u5ea6\u53d6\u51b3\u4e8e\u6d01\u51c0\u5ba4\u7684\u73af\u5883\u6e29\u5ea6\u3002\u6b64\u5916\uff0cHF \u5728\u957f\u65f6\u95f4\u7684\u8680\u523b\u8fc7\u7a0b\u4e2d\u52a0\u70ed\uff0c\u5bfc\u81f4\u4ece\u6676\u5706\u5230\u6676\u5706\u7684\u8680\u523b\u901f\u7387\u589e\u52a0\uff0c\u76f4\u5230\u7cfb\u7edf\u7a33\u5b9a\u4e0b\u6765\u3002\u4e3a\u4e86\u7a33\u5b9a\u8680\u523b\u901f\u7387\uff0c\u6211\u4eec\u5f00\u53d1\u4e86\u4e00\u4e2a\u53cd\u5e94\u5ba4\uff0c\u5bb9\u5668\u4e2d\u88c5\u6709\u6e29\u5ea6\u63a7\u5236\u9ad8\u9891\u3002HF \u7684\u6e29\u5ea6\u53ef\u4ee5\u901a\u8fc7\u9644\u52a0\u63a7\u5236\u5668\u8fdb\u884c\u8c03\u6574\u3002Peltier \u5143\u4ef6\u6839\u636e\u6240\u9700\u7684\u5de5\u827a\u53c2\u6570\u52a0\u70ed\u6216\u51b7\u5374\u9178\u3002<\/p>\n

<\/figure>\n
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