{"id":119,"date":"2021-07-12T17:36:41","date_gmt":"2021-07-12T09:36:41","guid":{"rendered":"https:\/\/www.bihec.com\/nonsequitur\/?p=119"},"modified":"2021-07-12T17:36:41","modified_gmt":"2021-07-12T09:36:41","slug":"nonsequitur-%e7%a6%bb%e5%ad%90%e6%ba%90%e7%a6%bb%e5%ad%90%e6%9e%aa-ion-guns-model-1401-%e6%b0%94%e7%9b%b8%e7%a6%bb%e5%ad%90%e6%ba%90","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/nonsequitur\/nonsequitur-%e7%a6%bb%e5%ad%90%e6%ba%90%e7%a6%bb%e5%ad%90%e6%9e%aa-ion-guns-model-1401-%e6%b0%94%e7%9b%b8%e7%a6%bb%e5%ad%90%e6%ba%90\/","title":{"rendered":"NonSequitur \u79bb\u5b50\u6e90\u79bb\u5b50\u67aa Ion Guns:  Model 1401 \u6c14\u76f8\u79bb\u5b50\u6e90"},"content":{"rendered":"<p><img loading=\"lazy\" class=\"alignnone wp-image-70\" src=\"https:\/\/www.bihec.com\/nonsequitur\/wp-content\/uploads\/sites\/344\/2020\/02\/Logo-1-300x23.jpg\" alt=\"\" width=\"535\" height=\"41\" srcset=\"https:\/\/www.bihec.com\/nonsequitur\/wp-content\/uploads\/sites\/344\/2020\/02\/Logo-1-300x23.jpg 300w, https:\/\/www.bihec.com\/nonsequitur\/wp-content\/uploads\/sites\/344\/2020\/02\/Logo-1-768x58.jpg 768w, https:\/\/www.bihec.com\/nonsequitur\/wp-content\/uploads\/sites\/344\/2020\/02\/Logo-1-500x38.jpg 500w, https:\/\/www.bihec.com\/nonsequitur\/wp-content\/uploads\/sites\/344\/2020\/02\/Logo-1-800x60.jpg 800w, https:\/\/www.bihec.com\/nonsequitur\/wp-content\/uploads\/sites\/344\/2020\/02\/Logo-1.jpg 959w\" sizes=\"(max-width: 535px) 100vw, 535px\" \/><\/p>\n<p><a href=\"https:\/\/www.bihec.com\/nonsequitur\/tag\/nonsequitur\/\" title=\"View all posts in Nonsequitur\" target=\"_blank\">Nonsequitur<\/a>\u516c\u53f8\u7684Model 1401<a href=\"https:\/\/www.bihec.com\/nonsequitur\/tag\/%e7%a6%bb%e5%ad%90%e6%ba%90\/\" title=\"View all posts in \u79bb\u5b50\u6e90\" target=\"_blank\">\u79bb\u5b50\u6e90<\/a><a href=\"https:\/\/www.bihec.com\/nonsequitur\/tag\/%e7%a6%bb%e5%ad%90%e6%9e%aa\/\" title=\"View all posts in \u79bb\u5b50\u67aa\" target=\"_blank\">\u79bb\u5b50\u67aa<\/a>\u975e\u5e38\u9002\u5408<a href=\"https:\/\/www.bihec.com\/nonsequitur\/tag\/%e7%94%a8%e4%ba%8e%e8%a1%a8%e9%9d%a2%e5%8c%96%e5%ad%a6%e5%ae%9e%e9%aa%8c\/\" title=\"View all posts in \u7528\u4e8e\u8868\u9762\u5316\u5b66\u5b9e\u9a8c\" target=\"_blank\">\u7528\u4e8e\u8868\u9762\u5316\u5b66\u5b9e\u9a8c<\/a>\uff0c\u4f8b\u5982\u4f7f\u7528Auger \u548cESCA\u8fdb\u884c\u6837\u54c1\u5236\u5907\u548c\u6df1\u5ea6\u5206\u6790\uff0c\u53ef\u4ee5\u7528\u4e8e\u60f0\u6027\u6c14\u4f53\u3002<\/p>\n<p>\u5728\u5de5\u4f5c\u8ddd\u79bb\u4e3a25mm\uff0c\u675f\u6d41\u5927\u5c0f\u4e3a20\u00b5A\u65f6\uff0c\u5149\u6591\u4e3a\u76f4\u5f840.4mm\u3002\u76f8\u6bd4\u8f83\u4e8e\u5176\u4ed6\u7684\u79bb\u5b50\u67aa\u800c\u8a00\uff0c\u79bb\u5b50\u67aaModel 1401\u80fd\u63d0\u4f9b\u7684\u7535\u6d41\u5bc6\u5ea6\u662f\u5176\u4ed6\u79bb\u5b50\u67aa\u76841-\u500d\u3002\u5f53\u675f\u6d41\u4e3a1\u00b5A\u65f6\uff0c\u5149\u6591\u6700\u5c0f\u53ef\u4ee5\u9009\u62e9\u523050\u00b5m. \u7535\u5b50\u675f\u80fd\u91cf\u53ef\u4ee5\u5728\u8303\u56f45eV\u52305keV\u4e2d\u9009\u62e9\uff0c\u5e76\u540c\u65f6\u4fdd\u6301\u6837\u54c1\u7684\u6700\u4f73\u805a\u7126\u3002\u675f\u6d41\u5927\u5c0f\u53ef\u4ee5\u8c03\u8282\uff0c\u5e76\u4e0d\u53d7\u7535\u5b50\u675f\u80fd\u91cf\u7684\u5f71\u54cd\uff0c\u65e0\u9700\u5916\u90e8\u8bbe\u5907\uff0c\u53ef\u4ee5\u76f4\u63a5\u4ece\u524d\u9762\u677f\u8fdb\u884c\u8c03\u8282\u3002<\/p>\n<p>\u901a\u8fc7\u7535\u5b50\u51b2\u51fb\u6765\u751f\u6210\u79bb\u5b50\uff0c\u53cc\u706f\u4e1d\u8bbe\u8ba1\u53ef\u4ee5\u5ef6\u957f\u4f7f\u7528\u5bff\u547d\uff0c\u800c\u65e0\u9700\u4e2d\u65ad\u8bbe\u5907\u7684\u4f7f\u7528\u3002\u79bb\u5b50\u6e90\u7684\u771f\u7a7a\u706f\u4e1d\u5904\u4e8e\u79bb\u8f74\u72b6\u6001\uff0c\u4ee5\u9632\u6b62\u706f\u4e1d\u6750\u6599\u6c89\u79ef\u5230\u6837\u54c1\u4e0a\u3002<br \/>\nThe ion source may be differentially pumped either directly into the system or by means of a separate turbo pump for improved system vacuum.<\/p>\n<p>The controller with power supplies and scan electronics is housed in a single 5-1\/4&#8243; high 19&#8243; rack mount cabinet. The Ion Gun can be controlled either from the front panel or through a flexible interface allowing control of beam and focus voltages, ionization current, gas, beam on\/off, and raster. The raster scan is digitally generated for uniform etch rate.<\/p>\n<p><strong>Design Features:<\/strong><\/p>\n<ul>\n<li>High current density 15 to 50 mA\/cm2 depending on spot size selected.<\/li>\n<li>Unique ion source design for stable emission.<\/li>\n<li>Dual tungsten filaments with typical filament life-time &gt; 500 hours. Yttria coated iridium optional.<\/li>\n<li>Replaceable beam trimming aperture with typical life-time &gt; 500 hours.<\/li>\n<li>All UHV compatible and etch resistant materials used in fabrication.<\/li>\n<li>Differential pumping tominimize main chamber gas loading.<\/li>\n<li>Gun is easily disassembled for maintenance.<\/li>\n<li>Electrical connections and gas inlet located on a single flange for easier installation.<\/li>\n<li>Preset extraction and condenser lens parameters (three spot size settings) for repeatable operation.<\/li>\n<li>Integral beam current measurement.<\/li>\n<li>Direct measurement of ion source pressure.<\/li>\n<li>System and cable interlocks prevent energizing high voltage with poor vacuum or cable removed.<\/li>\n<li>Power supply and raster generator in single 5-1\/4 high 19 inch rack mount enclosure.<\/li>\n<li>Digitally generated raster option for uniform etch profile.<\/li>\n<li>Computer control option.<\/li>\n<li>Optional ion source pressure regulation.<\/li>\n<\/ul>\n<br><div class=\"tagcloud\"><a href=\"https:\/\/www.bihec.com\/nonsequitur\/tag\/nonsequitur\/\" class=\"tag-cloud-link tag-link-0 tag-link-position-1\" style=\"font-size: 8pt;\" aria-label=\"Nonsequitur (34\u4e2a\u9879\u76ee)\">Nonsequitur<\/a>\n<a href=\"https:\/\/www.bihec.com\/nonsequitur\/tag\/%e7%9c%9f%e7%a9%ba%e6%b5%8b%e8%af%95\/\" class=\"tag-cloud-link tag-link-1 tag-link-position-2\" style=\"font-size: 9.6470588235294pt;\" aria-label=\"\u771f\u7a7a\u6d4b\u8bd5 (35\u4e2a\u9879\u76ee)\">\u771f\u7a7a\u6d4b\u8bd5<\/a>\n<a href=\"https:\/\/www.bihec.com\/nonsequitur\/tag\/%e7%9c%9f%e7%a9%ba%e7%b3%bb%e7%bb%9f\/\" class=\"tag-cloud-link tag-link-2 tag-link-position-3\" style=\"font-size: 9.6470588235294pt;\" aria-label=\"\u771f\u7a7a\u7cfb\u7edf (35\u4e2a\u9879\u76ee)\">\u771f\u7a7a\u7cfb\u7edf<\/a>\n<a href=\"https:\/\/www.bihec.com\/nonsequitur\/tag\/%e7%9c%9f%e7%a9%ba%e8%85%94\/\" class=\"tag-cloud-link tag-link-3 tag-link-position-4\" style=\"font-size: 14.588235294118pt;\" aria-label=\"\u771f\u7a7a\u8154 (41\u4e2a\u9879\u76ee)\">\u771f\u7a7a\u8154<\/a>\n<a href=\"https:\/\/www.bihec.com\/nonsequitur\/tag\/%e7%9c%9f%e7%a9%ba%e8%a1%a8%e9%9d%a2%e5%8c%96%e5%ad%a6%e5%ae%9e%e9%aa%8c\/\" class=\"tag-cloud-link tag-link-4 tag-link-position-5\" style=\"font-size: 16.235294117647pt;\" aria-label=\"\u771f\u7a7a\u8868\u9762\u5316\u5b66\u5b9e\u9a8c (43\u4e2a\u9879\u76ee)\">\u771f\u7a7a\u8868\u9762\u5316\u5b66\u5b9e\u9a8c<\/a>\n<a href=\"https:\/\/www.bihec.com\/nonsequitur\/tag\/%e7%a6%bb%e5%ad%90%e6%9e%aa\/\" class=\"tag-cloud-link tag-link-5 tag-link-position-6\" style=\"font-size: 22pt;\" aria-label=\"\u79bb\u5b50\u67aa (50\u4e2a\u9879\u76ee)\">\u79bb\u5b50\u67aa<\/a>\n<a href=\"https:\/\/www.bihec.com\/nonsequitur\/tag\/%e7%a6%bb%e5%ad%90%e6%ba%90\/\" class=\"tag-cloud-link tag-link-6 tag-link-position-7\" style=\"font-size: 16.235294117647pt;\" aria-label=\"\u79bb\u5b50\u6e90 (43\u4e2a\u9879\u76ee)\">\u79bb\u5b50\u6e90<\/a><\/div>","protected":false},"excerpt":{"rendered":"<p>Nonsequitur\u516c\u53f8\u7684Model 1401\u79bb\u5b50\u6e90\u79bb\u5b50\u67aa\u975e\u5e38\u9002\u5408\u7528\u4e8e\u8868\u9762\u5316\u5b66\u5b9e\u9a8c\uff0c\u4f8b\u5982\u4f7f\u7528Auger \u548cESCA\u8fdb\u884c\u6837\u54c1\u5236\u5907\u548c\u6df1\u5ea6\u5206\u6790\uff0c\u53ef\u4ee5\u7528\u4e8e\u60f0\u6027\u6c14\u4f53\u3002 \u5728\u5de5\u4f5c\u8ddd\u79bb\u4e3a25mm <\/p>\n","protected":false},"author":19,"featured_media":68,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[1],"tags":[3,8,6,7,9,5,4],"_links":{"self":[{"href":"https:\/\/www.bihec.com\/nonsequitur\/wp-json\/wp\/v2\/posts\/119"}],"collection":[{"href":"https:\/\/www.bihec.com\/nonsequitur\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bihec.com\/nonsequitur\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/nonsequitur\/wp-json\/wp\/v2\/users\/19"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/nonsequitur\/wp-json\/wp\/v2\/comments?post=119"}],"version-history":[{"count":1,"href":"https:\/\/www.bihec.com\/nonsequitur\/wp-json\/wp\/v2\/posts\/119\/revisions"}],"predecessor-version":[{"id":123,"href":"https:\/\/www.bihec.com\/nonsequitur\/wp-json\/wp\/v2\/posts\/119\/revisions\/123"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/nonsequitur\/wp-json\/wp\/v2\/media\/68"}],"wp:attachment":[{"href":"https:\/\/www.bihec.com\/nonsequitur\/wp-json\/wp\/v2\/media?parent=119"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bihec.com\/nonsequitur\/wp-json\/wp\/v2\/categories?post=119"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bihec.com\/nonsequitur\/wp-json\/wp\/v2\/tags?post=119"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}