{"id":622,"date":"2024-05-23T13:22:31","date_gmt":"2024-05-23T05:22:31","guid":{"rendered":"https:\/\/www.bihec.com\/prevac\/?p=622"},"modified":"2024-05-23T13:22:31","modified_gmt":"2024-05-23T05:22:31","slug":"%e7%94%a8%e4%ba%8e2-%e8%8b%b1%e5%af%b8%e7%9b%ae%e6%a0%87%e7%9a%84%e7%a3%81%e6%8e%a7%e7%ae%a1%e6%ba%90-63cf-%e6%ba%85%e5%b0%84%e5%b7%a5%e8%89%ba-m600dc-ps-%e7%94%b5%e6%ba%90-2","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/prevac\/%e7%94%a8%e4%ba%8e2-%e8%8b%b1%e5%af%b8%e7%9b%ae%e6%a0%87%e7%9a%84%e7%a3%81%e6%8e%a7%e7%ae%a1%e6%ba%90-63cf-%e6%ba%85%e5%b0%84%e5%b7%a5%e8%89%ba-m600dc-ps-%e7%94%b5%e6%ba%90-2\/","title":{"rendered":"\u7528\u4e8e2 \u82f1\u5bf8\u76ee\u6807\u7684\u78c1\u63a7\u7ba1\u6e90 63CF \u6e85\u5c04\u5de5\u827a M600DC-PS \u7535\u6e90"},"content":{"rendered":"

\u78c1\u63a7\u7ba1\u6e90<\/a>\uff0c\u7528\u4e8e\u5728\u6e85\u5c04\u8fc7\u7a0b\u4e2d\u65bd\u52a0\u5177\u6709\u9ad8\u5747\u5300\u6027\u7684\u8584\u5c42\u3002\u9002\u7528\u4e8e\u76f4\u5f84\u4e3a 2 \u82f1\u5bf8<\/strong>\u7684\u76ee\u6807\u3002<\/p>\n

\u6839\u636e\u6e85\u5c04\u5de5\u827a<\/a>\u6240\u9700\u7684\u6761\u4ef6\uff0c\u6211\u4eec\u63d0\u4f9b2\u79cd\u7c7b\u578b\u7684\u5149\u6e90\uff1aB<\/strong>\u578b\u548cC<\/strong>\u578b<\/strong>\u3002<\/span><\/span><\/span><\/p>\n

\u6240\u6709\u7c7b\u578b\u90fd\u4e0e\u6211\u4eec\u7684 M600DC-PS \u7535\u6e90<\/a>\u4ee5\u53ca\u5e02\u573a\u4e0a\u6240\u6709\u5176\u4ed6\u76f4\u6d41\u3001\u5c04\u9891\u548c\u8109\u51b2\u76f4\u6d41\u7535\u6e90\u5b8c\u5168\u517c\u5bb9\u3002<\/p>\n

\u6e90\u7c7b\u578bB<\/p>\n

B\u578b<\/strong>\u78c1\u63a7\u7ba1\u6e90\u7528\u4e8e\u5728\u6e85\u5c04\u8fc7\u7a0b\u4e2d\u65bd\u52a0\u5177\u6709\u9ad8\u5747\u5300\u6027\u7684\u8584\u5c42\u3002\u8be5\u6e90\u4e0e UHV \u6761\u4ef6\u517c\u5bb9\u3002\u8be5\u5149\u6e90\u8bbe\u8ba1\u7528\u4e8e\u6e85\u5c04\u78c1\u6027\u548c\u94c1\u78c1\u6750\u6599\u3002\u5b83\u53ef\u4ee5\u5728\u539a\u8fbe 7 mm \u7684\u76ee\u6807\u4e0a\u64cd\u4f5c\u3002<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u5b89\u88c5\u6cd5\u5170<\/td>\n DN 63 CF<\/td>\n<\/tr>\n
\u6700\u5927\u529f\u7387\uff08\u76f4\u6d41\u6a21\u5f0f\uff09<\/td>\n 400 W \u76f4\u6d41 **<\/td>\n<\/tr>\n
\u6700\u5927\u529f\u7387\uff08\u5c04\u9891\u6a21\u5f0f\uff09<\/td>\n 400 W \u5c04\u9891 **<\/td>\n<\/tr>\n
\u6700\u5927\u7535\u538b\u76f4\u6d41<\/td>\n 1200 V<\/td>\n<\/tr>\n
\u76f4\u6d41\/\u5c04\u9891\u8fde\u63a5\u5668<\/td>\n \u7c7b\u578b 7\/16<\/td>\n<\/tr>\n
\u76ee\u6807<\/td>\n <\/td>\n<\/tr>\n
\u5f62\u5f0f<\/td>\n \u6212\u6307<\/td>\n<\/tr>\n
\u76f4\u5f84<\/td>\n 2\u82f1\u5bf8\uff0850.8\u6beb\u7c73\uff09\u00b10.2\u6beb\u7c73<\/td>\n<\/tr>\n
\u539a\u5ea6<\/td>\n 1 \u2013 7 \u6beb\u7c73\uff08\u78c1\u6027\u548c\u975e\u78c1\u6027\uff09<\/td>\n<\/tr>\n
\u51b7\u5374<\/td>\n \u95f4\u63a5<\/td>\n<\/tr>\n
\u3cc1<\/td>\n \u6700\u5c0f 1 \u5347\/\u5206\u949f<\/td>\n<\/tr>\n
\u6700\u9ad8\u8fdb\u6c34\u6e29\u5ea6<\/td>\n < 28 \u00b0C<\/td>\n<\/tr>\n
\u6700\u5927\u6c34\u538b<\/td>\n 3 \u5df4<\/td>\n<\/tr>\n
\u6cb9\u7ba1\u76f4\u5f84<\/td>\n \u76f4\u5f846\u00d71\u6beb\u7c73\u805a\u56db\u6c1f\u4e59\u70ef<\/td>\n<\/tr>\n
\u78c1\u94c1\u6750\u6599<\/td>\n \u9490\u94b4<\/td>\n<\/tr>\n
\u78c1\u94c1\u6700\u9ad8\u6e29\u5ea6<\/td>\n 350\u00b0C<\/td>\n<\/tr>\n
\u5185\u90e8\u6c14\u52a8\u5feb\u95e8<\/td>\n \u662f\u7684<\/td>\n<\/tr>\n
\u5feb\u95e8\u7c7b\u578b<\/td>\n \u5706\u9876\u578b\u6216\u5e73\u6446<\/td>\n<\/tr>\n
\u539f\u4f4d\u503e\u659c\u6a21\u5757<\/td>\n \u662f\uff0c\u8303\u56f4 +45\u00b0 \u00f7 -10\u00b0<\/td>\n<\/tr>\n
\u70df\u56f1<\/td>\n \u662f\u7684<\/td>\n<\/tr>\n
\u4e13\u7528\u6750\u6599\uff1a<\/td>\n <\/td>\n<\/tr>\n
<\/td>\n 200 W \u7684\u5178\u578b\u901f\u7387 [nm\/min]\uff1a<\/td>\n<\/tr>\n
\u94dc<\/td>\n 32\uff0c84 \u7eb3\u7c73\/\u5206\u949f\uff08\u8ddd\u79bb\uff1a160 \u6beb\u7c73;\u76ee\u6807\u539a\u5ea6\uff1a3 \u6beb\u7c73\uff09***<\/td>\n<\/tr>\n
\u949b<\/td>\n 10\uff0c07 \u7eb3\u7c73\/\u5206\u949f\uff08\u8ddd\u79bb\uff1a160 \u6beb\u7c73;\u76ee\u6807\u539a\u5ea6\uff1a3 \u6beb\u7c73\uff09***<\/td>\n<\/tr>\n
\u94c1<\/td>\n 9\uff0c63 \u7eb3\u7c73\/\u5206\u949f\uff08\u8ddd\u79bb\uff1a160 \u6beb\u7c73;\u76ee\u6807\u539a\u5ea6\uff1a3 \u6beb\u7c73\uff09***<\/td>\n<\/tr>\n
\u5185\u90e8\u8fdb\u6c14\u53e3<\/td>\n \u662f\uff08\u5f55\u50cf\u673a\u6807\u51c6\uff09<\/td>\n<\/tr>\n
\u5de5\u4f5c\u6c14\u4f53<\/td>\n \u963f\u5c14<\/td>\n<\/tr>\n
\u6700\u5927\u5de5\u4f5c\u538b\u529b<\/td>\n 5\u00d710\u65e5^{-3<\/sup>\u2013 1\u00d710^{-1<\/sup>\u6beb\u5df4<\/td>\n<\/tr>\n}}
\u6700\u4f73\u5de5\u4f5c\u538b\u529b<\/td>\n 5\u00d710\u65e5^{-3<\/sup>\u2013 5\u00d710^{-2<\/sup>\u6beb\u5df4<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n* \u53ef\u6839\u636e\u8981\u6c42\u63d0\u4f9b
\n\u5176\u4ed6\u5b89\u88c5\u6cd5\u5170 ** \u6700\u5927\u529f\u7387\u7531\u76ee\u6807\u6750\u6599
\n\u51b3\u5b9a *** \u8ddd\u79bb\u53d6\u51b3\u4e8e\u8154\u5ba4\u548c\u78c1\u63a7\u7ba1\u7684\u51e0\u4f55\u5f62\u72b6<\/p>\n
\u6e90\u7c7b\u578bC<\/p>\n
C\u578b<\/strong>\u78c1\u63a7\u7ba1\u6e90\u517c\u5bb9\u5c04\u9891\u548c\u76f4\u6d41\uff0c\u53ef\u4ee5\u6c89\u79ef\u8bb8\u591a\u7c7b\u522b\u7684\u6750\u6599\uff1a\u5bfc\u4f53\u3001\u534a\u5bfc\u4f53\u548c\u7edd\u7f18\u4f53\u3002\u8be5\u6e90\u80fd\u591f\u521b\u5efa\u5747\u5300\u3001\u5747\u5300\u548c\u5c0f\u9897\u7c92\u7684\u8584\u819c;\u5177\u6709\u9ad8\u5bc6\u5ea6\uff08\u4f4e\u7a7a\u9699\u9762\u79ef\uff09\u3001\u9ad8\u955c\u9762\u53cd\u5c04\u7387\uff08\u53cd\u5c04\u7387\uff09\u3001\u65e0\u8f90\u5c04\u635f\u4f24\u548c\u65ad\u88c2\u952e\u7b49\u4f18\u70b9\u3002<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\u5b89\u88c5\u6cd5\u5170<\/td>\n DN 63CF<\/a> \u6216 DN 63ISO-K \u9002\u7528\u4e8e MS2\/63C1 \u578b\u53f7\uff0cDN 100CF \u6216 DN 100ISO-K \u9002\u7528\u4e8e\u00a0MS2\/100C1<\/strong>
\n\u578b\u53f7<\/td>\n<\/tr>\n
\u6700\u5927\u529f\u7387\uff08\u76f4\u6d41\u6a21\u5f0f\uff09<\/td>\n 400 W \u76f4\u6d41 **<\/td>\n<\/tr>\n
\u6700\u5927\u529f\u7387\uff08\u5c04\u9891\u6a21\u5f0f\uff09<\/td>\n 400 W \u5c04\u9891 **<\/td>\n<\/tr>\n
\u6700\u5927\u7535\u538b\u76f4\u6d41<\/td>\n 1200 V<\/td>\n<\/tr>\n
\u76f4\u6d41\/\u5c04\u9891\u8fde\u63a5\u5668<\/td>\n \u7c7b\u578b 7\/16<\/td>\n<\/tr>\n
\u76ee\u6807<\/td>\n \u5b88\u95e8\u5458\u6807\u51c6<\/td>\n<\/tr>\n
\u5f62\u5f0f<\/td>\n \u5faa\u73af<\/td>\n<\/tr>\n
\u76f4\u5f84<\/td>\n 2\u82f1\u5bf8\uff0850.8\u6beb\u7c73\uff09\u00b10.2\u6beb\u7c73<\/td>\n<\/tr>\n
\u539a\u5ea6<\/td>\n \u975e\u78c1\u6027\uff1a1-6\u6beb\u7c73;\u78c1\u6027\uff1a\u94c11\u6beb\u7c73\uff0c\u954d1\u6beb\u7c73<\/td>\n<\/tr>\n
\u51b7\u5374<\/td>\n \u95f4\u63a5<\/td>\n<\/tr>\n
\u3cc1<\/td>\n \u6700\u5c0f 1 \u5347\/\u5206\u949f<\/td>\n<\/tr>\n
\u6700\u9ad8\u8fdb\u6c34\u6e29\u5ea6<\/td>\n < 28 \u00b0C<\/td>\n<\/tr>\n
\u6700\u5927\u6c34\u538b<\/td>\n 3 \u5df4<\/td>\n<\/tr>\n
\u6cb9\u7ba1\u76f4\u5f84<\/td>\n \u76f4\u5f846\u00d71\u6beb\u7c73\u805a\u56db\u6c1f\u4e59\u70ef<\/td>\n<\/tr>\n
\u78c1\u94c1\u6750\u6599<\/td>\n \u787c\u5316\u9495\u94c1\uff08\u9495\u94c1\u787c\uff09<\/td>\n<\/tr>\n
\u78c1\u94c1\u6700\u9ad8\u6e29\u5ea6<\/td>\n 200 \u00b0C<\/td>\n<\/tr>\n
\u5185\u90e8\u6c14\u52a8\u5feb\u95e8<\/td>\n \u662f\u7684<\/td>\n<\/tr>\n
\u5feb\u95e8\u7c7b\u578b<\/td>\n \u5706\u9876\u578b\u6216\u5e73\u6446<\/td>\n<\/tr>\n
\u539f\u4f4d\u503e\u659c\u6a21\u5757<\/td>\n \u662f\uff0c\u8303\u56f4 +45\u00b0 \u00f7 -10\u00b0<\/td>\n<\/tr>\n
\u70df\u56f1<\/td>\n \u662f\u7684<\/td>\n<\/tr>\n
\u4e13\u7528\u6750\u6599\uff1a<\/td>\n <\/td>\n<\/tr>\n
<\/td>\n 200 W \u7684\u5178\u578b\u901f\u7387 [nm\/min]\uff1a<\/td>\n<\/tr>\n
\u94dc<\/td>\n 34\uff0c70 \u7eb3\u7c73\/\u5206\u949f\uff08\u8ddd\u79bb\uff1a100 \u6beb\u7c73;\u76ee\u6807\u539a\u5ea6\uff1a3 \u6beb\u7c73\uff09***<\/td>\n<\/tr>\n
\u949b<\/td>\n 6\uff0c8 \u7eb3\u7c73\/\u5206\u949f\uff08\u8ddd\u79bb\uff1a100 \u6beb\u7c73;\u76ee\u6807\u539a\u5ea6\uff1a3 \u6beb\u7c73\uff09***<\/td>\n<\/tr>\n
\u94c1<\/td>\n 32\uff0c41 \u7eb3\u7c73\/\u5206\u949f\uff08\u8ddd\u79bb\uff1a100 \u6beb\u7c73;\u76ee\u6807\u539a\u5ea6\uff1a1 \u6beb\u7c73\uff09***<\/td>\n<\/tr>\n
\u5185\u90e8\u8fdb\u6c14\u53e3<\/td>\n \u662f\uff08\u5f55\u50cf\u673a\u6807\u51c6\uff09<\/td>\n<\/tr>\n
\u5de5\u4f5c\u6c14\u4f53<\/td>\n \u963f\u5c14<\/td>\n<\/tr>\n
\u6700\u5927\u5de5\u4f5c\u538b\u529b<\/td>\n 5\u00d710\u65e5^{-3<\/sup>\u2013 1\u00d710^{-1<\/sup>\u6beb\u5df4<\/td>\n<\/tr>\n}}
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\n\u51b3\u5b9a *** \u8ddd\u79bb\u53d6\u51b3\u4e8e\u8154\u5ba4\u548c\u78c1\u63a7\u7ba1\u7684\u51e0\u4f55\u5f62\u72b6<\/p>\n
\u7279\u5f81\uff1a<\/p>\n
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\u6807\u914d\u70df\u56f1<\/strong><\/li>\n
\u6c14\u52a8\u5706\u9876<\/strong>\u5f0f\u6216\u4fa7\u6446\u5f0f\u5feb\u95e8<\/strong><\/li>\n
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\u5b9a\u5236\u957f\u5ea6<\/strong><\/li>\n
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