{"id":865,"date":"2024-12-06T15:13:37","date_gmt":"2024-12-06T07:13:37","guid":{"rendered":"https:\/\/www.bihec.com\/prevac\/?p=865"},"modified":"2024-12-06T15:13:37","modified_gmt":"2024-12-06T07:13:37","slug":"%e6%b3%a2%e5%85%b0-prevac-magnetron-source-2-inch-targets-%e7%a3%81%e6%8e%a7%e7%ae%a1%e6%ba%90-2%e8%8b%b1%e5%af%b8%e9%9d%b6","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/prevac\/%e6%b3%a2%e5%85%b0-prevac-magnetron-source-2-inch-targets-%e7%a3%81%e6%8e%a7%e7%ae%a1%e6%ba%90-2%e8%8b%b1%e5%af%b8%e9%9d%b6\/","title":{"rendered":"\u6ce2\u5170 PREVAC Magnetron source 2-inch targets \u78c1\u63a7\u7ba1\u6e90 2\u82f1\u5bf8\u9776"},"content":{"rendered":"

\u78c1\u63a7\u6e90\uff0c\u7528\u4e8e\u5728\u6e85\u5c04\u8fc7\u7a0b\u4e2d\u65bd\u52a0\u5177\u6709\u9ad8\u5747\u5300\u6027\u7684\u8584\u5c42\u3002\u9002\u7528\u4e8e\u76f4\u5f84\u4e3a2\u82f1\u5bf8\u7684\u76ee\u6807\u3002
\n\u6839\u636e\u6e85\u5c04\u5de5\u827a<\/a>\u6240\u9700\u7684\u6761\u4ef6\uff0c\u6211\u4eec\u63d0\u4f9b\u4e24\u79cd\u7c7b\u578b\u7684\u6e90\uff1aB\u578b\u548cC\u578b\u3002
\n\u6240\u6709\u7c7b\u578b\u90fd\u4e0e\u6211\u4eec\u7684M600DC-PS\u7535\u6e90\u4ee5\u53ca\u5e02\u573a\u4e0a\u6240\u6709\u5176\u4ed6\u76f4\u6d41\u3001\u5c04\u9891\u548c\u8109\u51b2\u76f4\u6d41\u7535\u6e90\u5b8c\u5168\u517c\u5bb9\u3002<\/p>\n

\"\"<\/p>\n

\u7279\u6027<\/strong><\/p>\n

\u6709\u6216\u6ca1\u6709\u539f\u4f4d\u503e\u659c\u6a21\u5757
\n\u5b89\u88c5\u6cd5\u5170\u8303\u56f4
\n\u70df\u56f1\u4e3a\u6807\u51c6\u914d\u7f6e
\n\u6c14\u52a8\u5706\u9876\u5f0f\u6216\u4fa7\u6446\u5f0f\u767e\u53f6\u7a97
\n\u95f4\u63a5\u51b7\u5374<\/p>\n

\u9009\u9879<\/strong><\/p>\n

\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668\uff08MKS MF1\uff09
\n\u5b9a\u5236\u957f\u5ea6
\nZ\u673a\u68b0\u624b<\/p>\n

A\u578b\u78c1\u63a7\u6e90\u7528\u4e8e\u5728\u6e85\u5c04\u8fc7\u7a0b\u4e2d\u65bd\u52a0\u5177\u6709\u9ad8\u5747\u5300\u6027\u7684\u8584\u5c42\u3002\u8be5\u7535\u6e90\u4e0e\u7279\u9ad8\u538b\u6761\u4ef6\u517c\u5bb9\u3002\u5f97\u76ca\u4e8e\u96c6\u6210\u7684\u539f\u4f4d\u503e\u659c\u7cfb\u7edf\uff0c\u5b83\u65e2\u53ef\u7528\u4e8e\u6807\u51c6\u8154\u4f53\uff0c\u4e5f\u53ef\u7528\u4e8e\u5b9a\u5236\u8154\u4f53\u3002\u901a\u8fc7\u4f7f\u7528\u5706\u9876\u578b\u8bbe\u8ba1\uff0c\u6211\u4eec\u6700\u5927\u9650\u5ea6\u5730\u51cf\u5c11\u4e86\u6253\u5f00\u767e\u53f6\u7a97\u6240\u9700\u7684\u7a7a\u95f4\u3002<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Mounting flange<\/td>\nDN 63 CF, DN 100 ISO-K*<\/td>\n<\/tr>\n
Max. p<\/a>ower (DC mode)<\/td>\n400 W DC **<\/td>\n<\/tr>\n
Max. power (RF mode)<\/td>\n400 W RF **<\/td>\n<\/tr>\n
Max. voltage DC<\/td>\n1200 V<\/td>\n<\/tr>\n
Connector DC\/RF<\/td>\ntype 7\/16<\/td>\n<\/tr>\n
Target<\/td>\n<\/td>\n<\/tr>\n
\u00a0\u00a0 form<\/td>\ncircular<\/td>\n<\/tr>\n
\u00a0\u00a0 diameter<\/td>\n2\u2033 (50.8 mm) \u00b1 0.2 mm<\/td>\n<\/tr>\n
\u00a0\u00a0 thickness<\/td>\n1 \u2013 6 mm<\/td>\n<\/tr>\n
\u00a0\u00a0 cooling<\/td>\nindirect<\/td>\n<\/tr>\n
Water flow<\/td>\nmin. 1 l\/min<\/td>\n<\/tr>\n
Max. inlet water temperature<\/td>\n< 28 \u00b0C<\/td>\n<\/tr>\n
Max. water pressure<\/td>\n3 bar<\/td>\n<\/tr>\n
Tubing diameter<\/td>\n\u00d86\u00d71 mm PTFE<\/td>\n<\/tr>\n
Magnet material<\/td>\nNeodymium Iron Boride (NdFeB)<\/td>\n<\/tr>\n
Magnet max. temperature<\/td>\n200\u00b0C<\/td>\n<\/tr>\n
Internal pneumatic shutter<\/td>\nyes<\/td>\n<\/tr>\n
Shutter type<\/td>\ndome type or flat swing<\/td>\n<\/tr>\n
Insitu tilt module<\/td>\nyes, range +45\u00b0 \u00f7 -10\u00b0<\/td>\n<\/tr>\n
Chimney<\/td>\nyes<\/td>\n<\/tr>\n
Dedicated materials:<\/td>\n<\/td>\n<\/tr>\n
<\/td>\ntypical rates [nm\/min] for 200 W:<\/td>\n<\/tr>\n
\u00a0\u00a0 Cu<\/td>\n40,87 nm\/min ( distance: 150 mm; target thickness: 3 mm)***<\/td>\n<\/tr>\n
\u00a0\u00a0 Ti<\/td>\n10,82 nm\/min (distance: 150 mm; target thickness: 3 mm)***<\/td>\n<\/tr>\n
\u00a0\u00a0 Fe<\/td>\n15,94 nm\/min (distance: 150 mm; target thickness: 1 mm)***<\/td>\n<\/tr>\n
Internal gas inlet<\/td>\nyes (VCR standard)<\/td>\n<\/tr>\n
Working gas<\/td>\nAr<\/td>\n<\/tr>\n
Max. working pressure<\/td>\n5\u00d710-3<\/sup>\u00a0\u2013 1\u00d710-1<\/sup>\u00a0mbar<\/td>\n<\/tr>\n
Optimal working pressure<\/td>\n5\u00d710-3<\/sup>\u00a0\u2013 5\u00d710-2<\/sup>\u00a0mbar<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

B\u578b\u78c1\u63a7\u6e90\u7528\u4e8e\u5728\u6e85\u5c04\u8fc7\u7a0b\u4e2d\u65bd\u52a0\u5177\u6709\u9ad8\u5747\u5300\u6027\u7684\u8584\u5c42\u3002\u8be5\u7535\u6e90\u4e0e\u7279\u9ad8\u538b\u6761\u4ef6\u517c\u5bb9\u3002\u8be5\u6e90\u4e13\u4e3a\u6e85\u5c04\u78c1\u6027\u548c\u94c1\u78c1\u6027\u6750\u6599\u800c\u8bbe\u8ba1\u3002\u5b83\u53ef\u4ee5\u64cd\u4f5c\u9ad8\u8fbe7\u6beb\u7c73\u539a\u7684\u76ee\u6807\u3002<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Mounting flange<\/td>\nDN 63 CF<\/td>\n<\/tr>\n
Max. power (DC mode)<\/td>\n400 W DC **<\/td>\n<\/tr>\n
Max. power (RF mode)<\/td>\n400 W RF **<\/td>\n<\/tr>\n
Max. voltage DC<\/td>\n1200 V<\/td>\n<\/tr>\n
Connector DC\/RF<\/td>\ntype 7\/16<\/td>\n<\/tr>\n
Target<\/td>\n<\/td>\n<\/tr>\n
\u00a0\u00a0 form<\/td>\nring<\/td>\n<\/tr>\n
\u00a0\u00a0 diameter<\/td>\n2\u2033 (50.8 mm) \u00b1 0.2 mm<\/td>\n<\/tr>\n
\u00a0\u00a0 thickness<\/td>\n1 \u2013 7 mm (magnetic & non-magnetic)<\/td>\n<\/tr>\n
\u00a0\u00a0 cooling<\/td>\nindirect<\/td>\n<\/tr>\n
Water flow<\/td>\nmin. 1 l\/min<\/td>\n<\/tr>\n
Max. inlet water temperature<\/td>\n< 28 \u00b0C<\/td>\n<\/tr>\n
Max. water pressure<\/td>\n3 bar<\/td>\n<\/tr>\n
Tubing diameter<\/td>\n\u00d86\u00d71 mm PTFE<\/td>\n<\/tr>\n
Magnet material<\/td>\nSamarium Cobalt (SmCo)<\/td>\n<\/tr>\n
Magnet max. temperature<\/td>\n350\u00b0C<\/td>\n<\/tr>\n
Internal pneumatic shutter<\/td>\nyes<\/td>\n<\/tr>\n
Shutter type<\/td>\ndome type or flat swing<\/td>\n<\/tr>\n
Insitu tilt module<\/td>\nyes, range +45\u00b0 \u00f7 -10\u00b0<\/td>\n<\/tr>\n
Chimney<\/td>\nyes<\/td>\n<\/tr>\n
Dedicated materials:<\/td>\n<\/td>\n<\/tr>\n
<\/td>\ntypical rates [nm\/min] for 200 W:<\/td>\n<\/tr>\n
\u00a0\u00a0 Cu<\/td>\n32,84 nm\/min ( distance: 160 mm; target thickness: 3 mm)***<\/td>\n<\/tr>\n
\u00a0\u00a0 Ti<\/td>\n10,07 nm\/min (distance: 160 mm; target thickness: 3 mm)***<\/td>\n<\/tr>\n
\u00a0\u00a0 Fe<\/td>\n9,63 nm\/min (distance: 160 mm; target thickness: 3 mm)***<\/td>\n<\/tr>\n
Internal gas inlet<\/td>\nyes (VCR standard)<\/td>\n<\/tr>\n
Working gas<\/td>\nAr<\/td>\n<\/tr>\n
Max. working pressure<\/td>\n5\u00d710-3<\/sup>\u00a0\u2013 1\u00d710-1<\/sup>\u00a0mbar<\/td>\n<\/tr>\n
Optimal working pressure<\/td>\n5\u00d710-3<\/sup>\u00a0\u2013 5\u00d710-2<\/sup>\u00a0mbar<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

* Other mounting flanges on request
\n** The maximum power is determined by the target material
\n*** Distances depend on the geometry of the chamber and the magnetrons<\/p>\n

2-inch targets<\/a>\nMagnetron source<\/a>\nMagnetron source 2-inch targets<\/a>\nPrevac<\/a>\n\u6ce2\u5170 PREVAC<\/a>\n\u78c1\u63a7\u7ba1\u6e90<\/a>\n\u78c1\u63a7\u7ba1\u6e90 2\u82f1\u5bf8\u9776<\/a><\/div>","protected":false},"excerpt":{"rendered":"

\u78c1\u63a7\u6e90\uff0c\u7528\u4e8e\u5728\u6e85\u5c04\u8fc7\u7a0b\u4e2d\u65bd\u52a0\u5177\u6709\u9ad8\u5747\u5300\u6027\u7684\u8584\u5c42\u3002\u9002\u7528\u4e8e\u76f4\u5f84\u4e3a2\u82f1\u5bf8\u7684\u76ee\u6807\u3002 \u6839\u636e\u6e85\u5c04\u5de5\u827a\u6240\u9700\u7684\u6761\u4ef6\uff0c\u6211\u4eec\u63d0\u4f9b\u4e24\u79cd\u7c7b\u578b\u7684\u6e90\uff1aB\u578b\u548cC\u578b\u3002 \u6240\u6709\u7c7b\u578b\u90fd\u4e0e\u6211\u4eec\u7684M600DC-PS\u7535\u6e90\u4ee5\u53ca <\/p>\n","protected":false},"author":19,"featured_media":866,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[123,41],"tags":[312,311,314,3,114,73,313],"_links":{"self":[{"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/posts\/865"}],"collection":[{"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/users\/19"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/comments?post=865"}],"version-history":[{"count":1,"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/posts\/865\/revisions"}],"predecessor-version":[{"id":867,"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/posts\/865\/revisions\/867"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/media\/866"}],"wp:attachment":[{"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/media?parent=865"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/categories?post=865"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/tags?post=865"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}