{"id":868,"date":"2024-12-06T15:39:21","date_gmt":"2024-12-06T07:39:21","guid":{"rendered":"https:\/\/www.bihec.com\/prevac\/?p=868"},"modified":"2024-12-06T15:39:21","modified_gmt":"2024-12-06T07:39:21","slug":"%e6%b3%a2%e5%85%b0-prevac-magnetron-source-3-inch-targets-%e7%a3%81%e6%8e%a7%e7%ae%a1%e6%ba%903%e8%8b%b1%e5%af%b8%e9%9d%b6","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/prevac\/%e6%b3%a2%e5%85%b0-prevac-magnetron-source-3-inch-targets-%e7%a3%81%e6%8e%a7%e7%ae%a1%e6%ba%903%e8%8b%b1%e5%af%b8%e9%9d%b6\/","title":{"rendered":"\u6ce2\u5170 PREVAC Magnetron source 3-inch targets \u78c1\u63a7\u7ba1\u6e903\u82f1\u5bf8\u9776"},"content":{"rendered":"

\u78c1\u63a7\u6e90\uff0c\u7528\u4e8e\u5728\u6e85\u5c04\u8fc7\u7a0b\u4e2d\u65bd\u52a0\u5177\u6709\u9ad8\u5747\u5300\u6027\u7684\u8584\u5c42\u3002\u9002\u7528\u4e8e\u76f4\u5f84\u4e3a3\u82f1\u5bf8\u7684\u76ee\u6807\u3002
\n\u6839\u636e\u6e85\u5c04\u5de5\u827a<\/a>\u6240\u9700\u7684\u6761\u4ef6\uff0c\u6211\u4eec\u63d0\u4f9b\u4e24\u79cd\u7c7b\u578b\u7684\u6e90\uff1aB\u578b\u548cC\u578b\u3002
\n\u6240\u6709\u7c7b\u578b\u90fd\u4e0e\u6211\u4eec\u7684M600DC-PS\u7535\u6e90\u4ee5\u53ca\u5e02\u573a\u4e0a\u6240\u6709\u5176\u4ed6\u76f4\u6d41\u3001\u5c04\u9891\u548c\u8109\u51b2\u76f4\u6d41\u7535\u6e90\u5b8c\u5168\u517c\u5bb9\u3002<\/p>\n

\u6709\u6216\u6ca1\u6709\u539f\u4f4d\u503e\u659c\u6a21\u5757
\n\u5b89\u88c5\u6cd5\u5170\u8303\u56f4
\n\u70df\u56f1\u4e3a\u6807\u51c6\u914d\u7f6e
\n\u6c14\u52a8\u5706\u9876\u5f0f\u6216\u4fa7\u6446\u5f0f\u767e\u53f6\u7a97
\n\u95f4\u63a5\u51b7\u5374<\/p>\n

\u9009\u9879<\/strong><\/p>\n

\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668\uff08MKS MF1\uff09
\n\u5b9a\u5236\u957f\u5ea6
\nZ\u673a\u68b0\u624b<\/p>\n

B\u578b\u78c1\u63a7\u6e90\u7528\u4e8e\u5728\u6e85\u5c04\u8fc7\u7a0b\u4e2d\u65bd\u52a0\u5177\u6709\u9ad8\u5747\u5300\u6027\u7684\u8584\u5c42\u3002\u8be5\u7535\u6e90\u4e0e\u7279\u9ad8\u538b\u6761\u4ef6\u517c\u5bb9\u3002\u78c1\u63a7\u6e90\u4e13\u4e3a\u6e85\u5c04\u78c1\u6027\u548c\u94c1\u78c1\u6027\u6750\u6599\u800c\u8bbe\u8ba1\u3002\u5b83\u53ef\u4ee5\u5bf9\u539a\u5ea6\u8fbe7\u6beb\u7c73\u7684\u76ee\u6807\u8fdb\u884c\u64cd\u4f5c\u3002<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Mounting flange<\/td>\n DN 160 CF*<\/td>\n<\/tr>\n
Max. p<\/a>ower (DC mode)<\/td>\n 600 W DC **<\/td>\n<\/tr>\n
Max. power (RF mode)<\/td>\n 600 W RF **<\/td>\n<\/tr>\n
Max. voltage DC<\/td>\n 1200 V<\/td>\n<\/tr>\n
Connector DC\/RF<\/td>\n type 7\/16<\/td>\n<\/tr>\n
Target<\/td>\n <\/td>\n<\/tr>\n
\u00a0\u00a0 form<\/td>\n ring<\/td>\n<\/tr>\n
\u00a0\u00a0 diameter<\/td>\n 3\u2033 (76.2 mm) \u00b1 0.2 mm<\/td>\n<\/tr>\n
\u00a0\u00a0 thickness<\/td>\n 1 \u2013 7 mm (magnetic & non-magnetic)<\/td>\n<\/tr>\n
\u00a0\u00a0 cooling<\/td>\n indirect<\/td>\n<\/tr>\n
Water flow<\/td>\n min. 1 l\/min<\/td>\n<\/tr>\n
Max. inlet water temperature<\/td>\n < 28 \u00b0C<\/td>\n<\/tr>\n
Max. water pressure<\/td>\n 3 bar<\/td>\n<\/tr>\n
Tubing diameter<\/td>\n \u00d86\u00d71 mm PTFE<\/td>\n<\/tr>\n
Magnet material<\/td>\n Samarium Cobalt (SmCo)<\/td>\n<\/tr>\n
Magnet max. temperature<\/td>\n 350\u00b0C<\/td>\n<\/tr>\n
Internal pneumatic shutter<\/td>\n yes<\/td>\n<\/tr>\n
Shutter type<\/td>\n dome type or flat swing<\/td>\n<\/tr>\n
Insitu tilt module<\/td>\n yes, range +45\u00b0 \u00f7 -10\u00b0<\/td>\n<\/tr>\n
Chimney<\/td>\n yes<\/td>\n<\/tr>\n
Dedicated materials:<\/td>\n <\/td>\n<\/tr>\n
<\/td>\n typical rates [nm\/min] for 200 W:<\/td>\n<\/tr>\n
\u00a0\u00a0 Cu<\/td>\n 18,72 nm\/min (distance: 170 mm; target thickness: 3 mm)***<\/td>\n<\/tr>\n
\u00a0\u00a0 Ti<\/td>\n 4,10 nm\/min (distance: 170 mm; target thickness: 3 mm)***<\/td>\n<\/tr>\n
\u00a0\u00a0 Fe<\/td>\n 5,16 nm\/min ( distance: 170 mm; target thickness: 3 mm)***<\/td>\n<\/tr>\n
Internal gas inlet<\/td>\n yes (VCR standard)<\/td>\n<\/tr>\n
Working gas<\/td>\n Ar<\/td>\n<\/tr>\n
Max. working pressure<\/td>\n 5\u00d710^{-3<\/sup>\u00a0\u2013 1\u00d710^{-1<\/sup>\u00a0mbar<\/td>\n<\/tr>\n}}
Optimal working pressure<\/td>\n 5\u00d710^{-3<\/sup>\u00a0\u2013 5\u00d710^{-2<\/sup>\u00a0mbar<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\nC\u578b\u78c1\u63a7\u6e85\u5c04\u6e90<\/a>\u65e2\u517c\u5bb9\u5c04\u9891\uff0c\u4e5f\u517c\u5bb9\u76f4\u6d41\uff0c\u53ef\u4ee5\u6c89\u79ef\u591a\u79cd\u6750\u6599\uff1a\u5bfc\u4f53\u3001\u534a\u5bfc\u4f53\u548c\u7edd\u7f18\u4f53\u3002\u78c1\u63a7\u7ba1\u6e90<\/a>\u80fd\u591f\u4ea7\u751f\u5747\u5300\u3001\u5747\u8d28\u548c\u5c0f\u6676\u7c92\u7684\u8584\u819c\uff1b\u5177\u6709\u9ad8\u5bc6\u5ea6\uff08\u4f4e\u7a7a\u9699\u9762\u79ef\uff09\u3001\u9ad8\u955c\u9762\u6027\uff08\u53cd\u5c04\u7387\uff09\u3001\u65e0\u8f90\u5c04\u635f\u4f24\u548c\u7c98\u5408\u65ad\u88c2\u7b49\u4f18\u70b9\u3002<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\nMounting flange<\/td>\n DN 160 CF*<\/td>\n<\/tr>\n
Max. power (DC mode)<\/td>\n 600 W DC **<\/td>\n<\/tr>\n
Max. power (RF mode)<\/td>\n 600 W RF **<\/td>\n<\/tr>\n
Max. voltage DC<\/td>\n 1200 V<\/td>\n<\/tr>\n
Connector DC\/RF<\/td>\n type 7\/16<\/td>\n<\/tr>\n
Target<\/td>\n Keeper standard<\/td>\n<\/tr>\n
\u00a0\u00a0 form<\/td>\n circular<\/td>\n<\/tr>\n
\u00a0\u00a0 diameter<\/td>\n 3\u2033 (76.2 mm) \u00b1 0.2 mm<\/td>\n<\/tr>\n
\u00a0\u00a0 thickness<\/td>\n 1 \u2013 6 mm<\/td>\n<\/tr>\n
\u00a0\u00a0 cooling<\/td>\n indirect<\/td>\n<\/tr>\n
Water flow<\/td>\n min. 1 l\/min<\/td>\n<\/tr>\n
Max. inlet water temperature<\/td>\n < 28 \u00b0C<\/td>\n<\/tr>\n
Max. water pressure<\/td>\n 3 bar<\/td>\n<\/tr>\n
Tubing diameter<\/td>\n \u00d86\u00d71 mm PTFE<\/td>\n<\/tr>\n
Magnet material<\/td>\n Neodymium Iron Boride (NdFeB)<\/td>\n<\/tr>\n
Magnet max. temperature<\/td>\n 200 \u00b0C<\/td>\n<\/tr>\n
Internal pneumatic shutter<\/td>\n yes<\/td>\n<\/tr>\n
Shutter type<\/td>\n dome type or flat swing<\/td>\n<\/tr>\n
Insitu tilt module<\/td>\n yes, range +45\u00b0 \u00f7 -10\u00b0<\/td>\n<\/tr>\n
Chimney<\/td>\n yes<\/td>\n<\/tr>\n
Dedicated materials:<\/td>\n <\/td>\n<\/tr>\n
<\/td>\n typical rates [nm\/min] for 200 W:<\/td>\n<\/tr>\n
\u00a0\u00a0 Cu<\/td>\n 19,76 nm\/min (distance: 150 mm; target thickness: 3 mm)***<\/td>\n<\/tr>\n
\u00a0\u00a0 Ti<\/td>\n 4,08 nm\/min (distance: 150 mm; target thickness: 6 mm)*** <\/p>\n4,32 nm\/min (distance: 150 mm; target thickness: 3 mm)***<\/td>\n<\/tr>\n
Internal gas inlet<\/td>\n yes (VCR standard)<\/td>\n<\/tr>\n
Working gas<\/td>\n Ar<\/td>\n<\/tr>\n
Max. working pressure<\/td>\n 5\u00d710^{-3<\/sup>\u00a0\u2013 1\u00d710^{-1<\/sup>\u00a0mbar<\/td>\n<\/tr>\n}}
Optimal working pressure<\/td>\n 5\u00d710^{-3<\/sup>\u00a0\u2013 5\u00d710^{-2<\/sup>\u00a0mbar<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n* Other mounting flanges on request
\n** The maximum power is determined by the target material
\n*** Distances depend on the geometry of the chamber and the magnetrons<\/p>\n
Magnetron source<\/a>\nMagnetron source 3-inch targets<\/a>\nPrevac<\/a>\n\u6ce2\u5170 PREVAC<\/a>\n\u78c1\u63a7\u7ba1\u6e90<\/a>\n\u78c1\u63a7\u7ba1\u6e903\u82f1\u5bf8\u9776<\/a><\/div>","protected":false},"excerpt":{"rendered":"\u78c1\u63a7\u6e90\uff0c\u7528\u4e8e\u5728\u6e85\u5c04\u8fc7\u7a0b\u4e2d\u65bd\u52a0\u5177\u6709\u9ad8\u5747\u5300\u6027\u7684\u8584\u5c42\u3002\u9002\u7528\u4e8e\u76f4\u5f84\u4e3a3\u82f1\u5bf8\u7684\u76ee\u6807\u3002 \u6839\u636e\u6e85\u5c04\u5de5\u827a\u6240\u9700\u7684\u6761\u4ef6\uff0c\u6211\u4eec\u63d0\u4f9b\u4e24\u79cd\u7c7b\u578b\u7684\u6e90\uff1aB\u578b\u548cC\u578b\u3002 \u6240\u6709\u7c7b\u578b\u90fd\u4e0e\u6211\u4eec\u7684M600DC-PS\u7535\u6e90\u4ee5\u53ca <\/p>\n","protected":false},"author":19,"featured_media":869,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[123,41],"tags":[311,315,3,114,73,316],"_links":{"self":[{"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/posts\/868"}],"collection":[{"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/users\/19"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/comments?post=868"}],"version-history":[{"count":1,"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/posts\/868\/revisions"}],"predecessor-version":[{"id":870,"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/posts\/868\/revisions\/870"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/media\/869"}],"wp:attachment":[{"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/media?parent=868"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/categories?post=868"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bihec.com\/prevac\/wp-json\/wp\/v2\/tags?post=868"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}}}}}