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\u6ce2\u5170PREVAC<\/a> Standard MS systems<\/a>\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf<\/a><\/h2>\n
PREVAC Standard MS<\/a> systems \u78c1\u63a7\u6e85\u5c04<\/a>\u7cfb\u7edf\u7684\u72ec\u7acb\u914d\u7f6e\u4e0e\u6211\u4eec\u7684\u73b0\u573a\u9a8c\u8bc1\u6807\u51c6\u89e3\u51b3\u65b9\u6848,\u4f7f\u6c89\u79ef\u8fc7\u7a0b\u7b80\u4fbf\u3001\u9ad8\u6548\u548c\u53ef\u9760\u3002<\/span>\u00a0<\/span><\/p>\n
PREVAC \u6839\u636e\u60a8\u7684\u9700\u8981,\u6211\u4eec\u7684\u6807\u51c6MS\u7cfb\u7edf\u63d0\u4f9b<\/span><\/p>\n

dard MS systems\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf<\/h2>\n
PREVAC Standard MS systems\u78c1\u63a7\u4e86\u5728\u4e00\u4e2a\u5355\u72ec\u7684\u623f\u95f4\u7684\u51e0\u4e2a\u55b7\u6e85\u6c89\u79ef\u6280\u672f\u7684\u7075\u6d3b\u6027\u3002\u6bcf\u4e2a\u7cfb\u7edf\u90fd\u6709\u4e00\u4e2a\u901a\u7528\u7684\u5b89\u88c5\u6cd5\u5170,\u53ef\u4ee5\u914d\u7f6e\u4e3a \u78c1\u63a7\u6e85\u5c04\u6c89\u79ef<\/a>(\u5e26\u6709\u5f39\u5c04\u6216\u5f39\u5c04\u914d\u7f6e)\u6216\u4efb\u4f55\u5176\u4ed6 \u8584\u819c\u6c89\u79ef<\/a>\u6280\u672f\u7684\u7ec4\u5408\u3002\u8fd9\u5c31\u4f7f\u9884VAC\u6807\u51c6MS\u7cfb\u7edf\u6210\u4e3a\u4e00\u4e2a\u591a\u529f\u80fd\u3001\u5f3a\u5927\u548c\u7b80\u5355\u7684\u5355\u4f4d,\u4ee5\u6ee1\u8db3\u8868\u9762\u79d1\u5b66\u6d82\u6599\u9886\u57df\u7684\u5927\u591a\u6570\u9700\u6c42\u3002<\/span>\u00a0<\/span><\/p>\n
PREVAC Standard MS systems\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf\u7279\u70b9\uff1a<\/p>\n
\n
\u72ec\u7acb\u7684HV\/UHV\u7cfb\u7edf,\u5305\u62ec\u9ad8\u8d28\u91cf\u548c\u9ad8\u53ef\u7528\u6027\u89e3\u51b3\u65b9\u6848\u7684\u6e85\u5c04\u8fc7\u7a0b<\/strong><\/span><\/li>\n
\u6700\u9002\u5408\u6c89\u79ef\u91d1\u5c5e\u548c\u4ecb\u7535\u8584\u819c<\/span><\/li>\n
\u5de5\u827a\u5ba4\u6807\u51c6\u5c3a\u5bf8:570\u6beb\u7c73<\/span><\/li>\n
\u793a\u4f8b\u914d\u7f6e<\/strong>\u00a0\u4e3b\u5ba4\u7684\u6e90\u7aef\u53e3:2\u4e2a\u78c1\u5f3a\u76846xdn100cf\u7aef\u53e3,\u621610\u4e2adn63cf\u7aef\u53e3(\u540c\u65f6\u67095\u4e2a\u78c1\u5f3a\u7ba1\u5de5\u4f5c),\u62163\u4e2a\u78c1\u5f3a\u76845xdn160iosK\u7aef\u53e3<\/span><\/li>\n
\u78b1\u538b<\/strong>\u00a0\u4ece10\u5f00\u59cb^{\u00a0-7<\/sup>\u00a0M\u81f3\u8d85\u9ad8\u9891<\/span><\/li>\n}
\u4e8c\u8f74\u673a\u68b0\u624b<\/strong>\u00a0\u5177\u6709\u7a33\u5b9a\u3001\u957f\u5bff\u547d\u7684\u52a0\u70ed\u5143\u4ef6,\u7531\u56fa\u4f53\u78b3\u5316\u7845\u548c\u63a5\u6536\u7ad9\u7ec4\u6210,\u53ef\u8fbe\u5230\u9ad8\u8fbe1200\u2103\u7684\u9ad8\u6e29\u3002<\/span>\u00a0<\/span><\/li>\n
A \u57fa\u677f\u6301\u6709\u7684\u8303\u56f4<\/strong>\u00a0\u5c3a\u5bf8(10\u00d710\u6beb\u7c73\u81f36\u82f1\u5bf8,\u5176\u4ed6\u5c3a\u5bf8\u6839\u636e\u8981\u6c42)\u548c\u5f62\u72b6<\/span><\/li>\n
Sp<\/a>utter-up<\/strong>\u00a0\u548c Sputter-down\u53ef\u7528<\/strong><\/span><\/li>\n
\u64cd\u4f5c\u7684\u65b9\u5f0f\u6709\u00a0DC<\/strong>\u00a0, RF<\/strong>\u00a0\u548c Pulsed-DC<\/strong>\u00a0\u65b9\u5f0f<\/span><\/li>\n
Ar \u6c14\u4f53\u81ea\u52a8<\/strong>\u00a0\u901a\u8fc7\u8d28\u91cf\u6d41\u91cf\u63a7\u5236<\/span>\u00a0<\/span><\/li>\n
\u53ef\u80fd\u91c7\u7528\u73b0\u573a\u5b9a\u6027\u5de5\u5177,\u4f8b\u5982:\u7b49\u79bb\u5b50\u53d1\u5c04\u76d1\u6d4b\u5668(PEM)\u3001\u692d\u5706\u8ba1\u3001\u53cd\u5c04\u8ba1\u3001\u77f3\u82f1\u5e73\u8861\u5668\u6216\u9ad8\u6e29\u8ba1\u6e29\u5ea6\u6d4b\u91cf\u7cfb\u7edf<\/span><\/li>\n
\u591a\u4e2a\u6765\u6e90\u63d0\u4f9b\u5355\u4e00\u7535\u6e90\u00a0\u4ea4\u6362\u7f51\u7edc<\/strong>\u00a0,\u6216\u6709\u591a\u79cd\u4f9b\u5e94\u54c1\u00a0\u5171\u540c\u4f5c\u8bc1<\/strong>\u00a0\u52a0\u5de5<\/span><\/li>\n
\u524d\u95e8\u5165\u53e3<\/strong>\u00a0\u548c\/\u6216\u7528\u4e8e\u5feb\u901f\u548c\u65b9\u4fbf\u886c\u5e95\u88c5\u8f7d\u7684\u8d1f\u8f7d\u9501\u5b9a\u5ba4<\/span><\/li>\n
\u5e95\u90e8\u6cd5\u5170 \u6709\u53ef\u80fd\u662f\u00a0\u5b8c\u5168\u8bbf\u95ee<\/strong>\u00a0\u6216\u7528\u4e13\u7528\u8d77\u91cd\u8f66\u66f4\u6362<\/span><\/li>\n
19″\u5e26\u6709\u7535\u5b50<\/a>\u5355\u5143\u7684\u6a71\u67dc<\/span><\/li>\n
\u00a0Synthesium\u8f6f\u4ef6<\/b>\u5168\u9762\u63a7\u5236\u6c89\u79ef\u8fc7\u7a0b\u548c\u8bbe\u5907\u00a0<\/span><\/li>\n<\/ul>\n
PREVAC Standard MS systems\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf\u5e94\u7528\uff1a<\/strong><\/p>\n\n\n\n\n\n\n\n\n\n\n\n
\u5e94\u7528\u7a0b\u5e8f<\/span><\/strong><\/td>\n \u4f8b\u5b50<\/span><\/strong><\/td>\n<\/tr>\n
\u5355\u5c42\u548c\u591a\u5c42\u5bfc\u4f53\u8584\u819c(\u7528\u4e8e\u5fae\u7535\u5b50\u548c\u534a\u5bfc\u4f53\u5668\u4ef6)<\/span>\u00a0<\/span><\/td>\n Al, Mo, Mo\/Au, Ta, Ta\/Au<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
\u534a\u5bfc\u4f53\u91d1\u5c5e\u5316\u7684\u5c4f\u969c\u5c42<\/span>\u00a0<\/span><\/td>\n TiN, W-Ti<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
\u78c1\u5b66\u7535\u5f71<\/span>\u00a0<\/span><\/td>\n Fe, Co, Ni, Fe-Al-Si, Co-Nb-Zr, Co-Cr, Fe-Ni-Cr, Fe-Si, Co-Ni-Cr, Co-Ni-Si\u00a0<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
\u5149\u5b66\u6d82\u6599-\u91d1\u5c5e(\u53cd\u5149)<\/span>\u00a0<\/span><\/td>\n Cr, Al, Ag<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
\u5149\u5b66\u6d82\u6599-\u4ecb\u8d28<\/span>\u00a0<\/span><\/td>\n MgO, TiO<\/span>_{2<\/sub><\/span>, ZrO<\/span>_{2<\/sub><\/span>\u00a0<\/span><\/td>\n<\/tr>\n}}
\u7167\u76f8\u5668<\/span>\u00a0<\/span><\/td>\n Cr, Mo, W<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
\u900f\u660e\u6c14\u4f53\/\u84b8\u6c14\u6e17\u900f\u5c4f\u969c<\/span>\u00a0<\/span><\/td>\n Al<\/span>_{2<\/sub><\/span>O<\/span>_{3<\/sub><\/span>\u00a0<\/span><\/td>\n<\/tr>\n}}
\u900f\u660e\u5bfc\u4f53<\/span>\u00a0<\/span><\/td>\n InO<\/span>_{2<\/sub><\/span>, SnO<\/span>_{2<\/sub><\/span>,In-Sn-O (ITO)<\/span>\u00a0<\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
Prevac<\/a>\nPREVAC sp. z o.o.<\/a>\nPREVAC Standard MS<\/a>\nPREVAC\u4ee3\u7406<\/a>\nPREVAC \u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf<\/a>\nPREVAC \u79bb\u5b50\u6e90<\/a>\n\u6ce2\u5170 PREVAC<\/a>\n\u771f\u7a7a\u5ba4<\/a>\n\u771f\u7a7a\u6cb9\u6cf5<\/a>\n\u9ad8\u538b\u5149\u53d1\u5c04\u5149\u8c31\u7279\u9ad8\u538b\u7cfb\u7edf<\/a><\/div>","protected":false},"excerpt":{"rendered":"\u6ce2\u5170PREVAC Standard MS systems\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf PREVAC Standard MS systems\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf\u7684\u72ec\u7acb\u914d\u7f6e\u4e0e\u6211\u4eec\u7684\u73b0\u573a\u9a8c\u8bc1\u6807\u51c6\u89e3\u51b3\u65b9\u6848,\u4f7f\u6c89\u79ef <\/p>\n","protected":false},"author":29,"featured_media":539,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[1],"tags":[3,337,338,99,57,333,114,38,33,24],"yoast_head":"\n\u6ce2\u5170PREVAC Standard MS systems\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf<\/title>\n<meta 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\u5e94\u7528\u7a0b\u5e8f<\/span><\/strong><\/td>\n	\u4f8b\u5b50<\/span><\/strong><\/td>\n<\/tr>\n
\u5355\u5c42\u548c\u591a\u5c42\u5bfc\u4f53\u8584\u819c(\u7528\u4e8e\u5fae\u7535\u5b50\u548c\u534a\u5bfc\u4f53\u5668\u4ef6)<\/span>\u00a0<\/span><\/td>\n	Al, Mo, Mo\/Au, Ta, Ta\/Au<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
\u534a\u5bfc\u4f53\u91d1\u5c5e\u5316\u7684\u5c4f\u969c\u5c42<\/span>\u00a0<\/span><\/td>\n	TiN, W-Ti<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
\u78c1\u5b66\u7535\u5f71<\/span>\u00a0<\/span><\/td>\n	Fe, Co, Ni, Fe-Al-Si, Co-Nb-Zr, Co-Cr, Fe-Ni-Cr, Fe-Si, Co-Ni-Cr, Co-Ni-Si\u00a0<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
\u5149\u5b66\u6d82\u6599-\u91d1\u5c5e(\u53cd\u5149)<\/span>\u00a0<\/span><\/td>\n	Cr, Al, Ag<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
\u5149\u5b66\u6d82\u6599-\u4ecb\u8d28<\/span>\u00a0<\/span><\/td>\n	MgO, TiO<\/span>_{2<\/sub><\/span>, ZrO<\/span>_{2<\/sub><\/span>\u00a0<\/span><\/td>\n<\/tr>\n}}
\u7167\u76f8\u5668<\/span>\u00a0<\/span><\/td>\n	Cr, Mo, W<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
\u900f\u660e\u6c14\u4f53\/\u84b8\u6c14\u6e17\u900f\u5c4f\u969c<\/span>\u00a0<\/span><\/td>\n	Al<\/span>_{2<\/sub><\/span>O<\/span>_{3<\/sub><\/span>\u00a0<\/span><\/td>\n<\/tr>\n}}
\u900f\u660e\u5bfc\u4f53<\/span>\u00a0<\/span><\/td>\n	InO<\/span>_{2<\/sub><\/span>, SnO<\/span>_{2<\/sub><\/span>,In-Sn-O (ITO)<\/span>\u00a0<\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n Prevac<\/a>\nPREVAC sp. z o.o.<\/a>\nPREVAC Standard MS<\/a>\nPREVAC\u4ee3\u7406<\/a>\nPREVAC \u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf<\/a>\nPREVAC \u79bb\u5b50\u6e90<\/a>\n\u6ce2\u5170 PREVAC<\/a>\n\u771f\u7a7a\u5ba4<\/a>\n\u771f\u7a7a\u6cb9\u6cf5<\/a>\n\u9ad8\u538b\u5149\u53d1\u5c04\u5149\u8c31\u7279\u9ad8\u538b\u7cfb\u7edf<\/a><\/div>","protected":false},"excerpt":{"rendered":"\u6ce2\u5170PREVAC Standard MS systems\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf PREVAC Standard MS systems\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf\u7684\u72ec\u7acb\u914d\u7f6e\u4e0e\u6211\u4eec\u7684\u73b0\u573a\u9a8c\u8bc1\u6807\u51c6\u89e3\u51b3\u65b9\u6848,\u4f7f\u6c89\u79ef <\/p>\n","protected":false},"author":29,"featured_media":539,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[1],"tags":[3,337,338,99,57,333,114,38,33,24],"yoast_head":"\n\u6ce2\u5170PREVAC Standard MS systems\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf<\/title>\n<meta name=\"description\" content=\"\u674e\u7ecf\u7406\uff1a17317355928\uff0c\u6ce2\u5170PREVAC Standard MS systems\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf\u3002REVAC Standard MS systems\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf\u7684\u72ec\u7acb\u914d\u7f6e\u4e0e\u6211\u4eec\u7684\u73b0\u573a\u9a8c\u8bc1\u6807\u51c6\u89e3\u51b3\u65b9\u6848,\u4f7f\u6c89\u79ef\u8fc7\u7a0b\u7b80\u4fbf\u3001\u9ad8\u6548\u548c\u53ef\u9760\u3002\u00a0\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" 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