{"id":247,"date":"2025-03-27T19:46:16","date_gmt":"2025-03-27T11:46:16","guid":{"rendered":"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/?p=247"},"modified":"2025-03-27T19:46:16","modified_gmt":"2025-03-27T11:46:16","slug":"sens4vpm-4%e7%9c%9f%e7%a9%ba%e5%8f%98%e9%80%81%e5%99%a8%e7%9c%9f%e7%a9%ba%e5%bc%80%e5%85%b3%e5%8a%9f%e8%83%bd%e4%bc%98%e5%8c%96%e5%85%a8%e9%87%8f%e7%a8%8b%e6%b5%8b%e9%87%8f%e5%a4%a7%e6%b0%94","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/sens4vpm-4%e7%9c%9f%e7%a9%ba%e5%8f%98%e9%80%81%e5%99%a8%e7%9c%9f%e7%a9%ba%e5%bc%80%e5%85%b3%e5%8a%9f%e8%83%bd%e4%bc%98%e5%8c%96%e5%85%a8%e9%87%8f%e7%a8%8b%e6%b5%8b%e9%87%8f%e5%a4%a7%e6%b0%94\/","title":{"rendered":"SENS4,VPM-4,\u771f\u7a7a\u53d8\u9001\u5668,\u771f\u7a7a\u5f00\u5173\u529f\u80fd\u4f18\u5316,\u5168\u91cf\u7a0b\u6d4b\u91cf\u5927\u6c14\u538b\u53ca\u4ee5\u4e0a"},"content":{"rendered":"
SENS4<\/a>,VPM-4<\/a>,\u771f\u7a7a\u53d8\u9001\u5668<\/a>,\u771f\u7a7a\u5f00\u5173\u529f\u80fd\u4f18\u5316<\/a>,\u5168\u91cf\u7a0b\u6d4b\u91cf\u5927\u6c14\u538b\u53ca\u4ee5\u4e0a<\/a>,\u91c7\u7528\u5148\u8fdbMEMS\u4f20\u611f\u5668\u4e0e\u6570\u5b57\u4fe1\u53f7\u5904\u7406\u67b6\u6784\uff0c\u5c06\u70ed\u5bfc\u5f0f\u771f\u7a7a\u89c4\u91cf\u7a0b\u5411\u4e0b\u6269\u5c551-3\u4e2a\u6570\u91cf\u7ea7\u3002\u4e13\u4e3a\u771f\u7a7a\u5f00\u5173\u529f\u80fd\u4f18\u5316\uff0c\u9700\u5168\u91cf\u7a0b\u6d4b\u91cf\uff08\u81f3\u5927\u6c14\u538b\u53ca\u4ee5\u4e0a\uff09\u65f6\u63a8\u8350VPM-5<\/a>\u578b\u53f7\u3002<\/p>\n VPM-4 SmartPirani™ Lite \u771f\u7a7a\u53d8\u9001\u5668<\/strong> \u6838\u5fc3\u7279\u6027<\/strong> \u6280\u672f\u7a81\u7834<\/strong> \u4e25\u82db\u5de5\u51b5\u9002\u914d<\/strong><\/p>\n \u6d4b\u63a7\u529f\u80fd<\/strong> \u6570\u5b57\u63a5\u53e3<\/strong> \u56fa\u6001\u7ee7\u7535\u5668<\/strong> \u517c\u5bb9\u6027\u8bbe\u8ba1<\/strong><\/p>\n \u5e94\u7528\u9886\u57df<\/strong> \n \u89c4\u683c<\/strong><\/p>\n \u6d4b\u91cf\u8303\u56f4\uff08mbar\uff09<\/strong> \u6d4b\u91cf\u539f\u7406<\/strong> \u7cbe\u5ea6<\/strong> 1\u00d710\u207b\u2074 \u81f3 9.99\u00d710\u207b\u00b9 mbar 1.00 \u81f3 10 mbar \u6ede\u540e\uff08\u6839\u636e ISO19685:2017\uff09<\/strong> \u6a21\u62df\u8f93\u51fa\u5206\u8fa8\u7387<\/strong> \u6a21\u62df\u8f93\u51fa\u66f4\u65b0\u7387<\/strong> \u54cd\u5e94\u65f6\u95f4\uff08\u6839\u636e ISO 19685:2017\uff09<\/strong> \u6e29\u5ea6\u8865\u507f<\/strong> \u56fa\u6001\u7ee7\u7535\u5668\u8bbe\u5b9a\u8303\u56f4<\/strong> \u56fa\u6001\u7ee7\u7535\u5668\u89e6\u70b9\u989d\u5b9a\u503c<\/strong> \u56fa\u6001\u7ee7\u7535\u5668\u8ba4\u8bc1<\/strong> \u5de5\u4f5c\u73af\u5883\u6e29\u5ea6<\/strong> \u4ecb\u8d28\u6e29\u5ea6<\/strong> \u50a8\u5b58\u73af\u5883\u6e29\u5ea6<\/strong> \u70d8\u70e4\u6e29\u5ea6\uff08\u975e\u5de5\u4f5c\u72b6\u6001\uff09<\/strong> \u6700\u5927\u4ecb\u8d28\u538b\u529b(3)<\/strong> \u5b89\u88c5\u4f4d\u7f6e<\/strong> \u9632\u62a4\u7b49\u7ea7\uff08\u6839\u636e EN 60529\/A2:2013\uff09<\/strong> \u6e7f\u5ea6\uff08\u6839\u636e IEC 68-2-38\uff09<\/strong> \u7535\u6e90\u7535\u538b<\/strong> \u529f\u8017<\/strong> \u53cd\u63a5\u4fdd\u62a4<\/strong> \u8fc7\u538b\u4fdd\u62a4<\/strong> \u5185\u90e8\u4fdd\u9669\u4e1d<\/strong> \u5916\u58f3<\/strong> \u771f\u7a7a\u5de5\u827a\u6cd5\u5170\uff08\u63a5\u89e6\u4ecb\u8d28\uff09<\/strong> \u63a5\u89e6\u771f\u7a7a\u6750\u6599\uff08\u63a5\u89e6\u4ecb\u8d28\uff09\u6807\u51c6\u7248\u672c<\/strong> \u63a5\u89e6\u771f\u7a7a\u6750\u6599\uff08\u63a5\u89e6\u4ecb\u8d28\uff09Parylene \u4fdd\u62a4\u7248\u672c<\/strong> \u63a5\u89e6\u771f\u7a7a\u6750\u6599\uff08\u63a5\u89e6\u4ecb\u8d28\uff09\u9676\u74f7\u4fdd\u62a4\u7248\u672c<\/strong> \u5de5\u827a\u6cc4\u6f0f\u5bc6\u5c01\u6027<\/strong> MTBF\uff08\u5e73\u5747\u65e0\u6545\u969c\u65f6\u95f4\uff09<\/strong> \u5931\u6548\u7387 FIT\uff08\u6bcf 10\u2079 \u5c0f\u65f6\u5185\u7684\u5931\u6548\u6b21\u6570\uff09<\/strong> CE<\/strong> RoHS \u7b26\u5408\u6027<\/strong> (1) \u7cbe\u5ea6\u89c4\u683c\u4e3a\u5728\u96f6\u70b9\u8c03\u6574\u540e\u3001\u7a33\u5b9a\u6e29\u5ea6\u4e0b\u7684\u5178\u578b\u503c\u3002 https:\/\/www.bihec.com\/sens4-vacuum-pressure\/SENS4,VPM-4,\u771f\u7a7a\u53d8\u9001\u5668,\u771f\u7a7a\u5f00\u5173\u529f\u80fd\u4f18\u5316,\u5168\u91cf\u7a0b\u6d4b\u91cf\u5927\u6c14\u538b\u53ca\u4ee5\u4e0a<\/span>\/<\/a><\/span><\/p>\n https:\/\/zhuanlan.zhihu.com\/p\/1888637202159878582<\/a><\/p>\n SENS4,VPM-4,\u771f\u7a7a\u53d8\u9001\u5668,\u771f\u7a7a\u5f00\u5173\u529f\u80fd\u4f18\u5316,\u5168\u91cf\u7a0b\u6d4b\u91cf\u5927\u6c14\u538b\u53ca\u4ee5\u4e0a,\u91c7\u7528\u5148\u8fdbMEMS\u4f20\u611f\u5668\u4e0e\u6570\u5b57\u4fe1\u53f7\u5904\u7406\u67b6\u6784\uff0c\u5c06\u70ed\u5bfc\u5f0f\u771f\u7a7a\u89c4\u91cf\u7a0b\u5411\u4e0b\u6269\u5c551-3\u4e2a\u6570\u91cf\u7ea7\u3002\u4e13\u4e3a\u771f\u7a7a\u5f00\u5173\u529f\u80fd\u4f18 <\/p>\n","protected":false},"author":27,"featured_media":248,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[4],"tags":[6,16,15,36,39,38,8,37],"yoast_head":"\n
\n| \u771f\u7a7a\u6d4b\u91cf |<\/strong><\/p>\n
\n\u25b8\u00a0\u8d85\u5bbd\u91cf\u7a0bMEMS\u76ae\u62c9\u5c3c\u4f20\u611f\u5668<\/strong>\uff1a1.0E-6~10 mbar
\n\u25b8\u00a0\u8010\u8150\u8680\u9009\u914d<\/strong>\uff1a\u9676\u74f7\/\u6d3e\u745e\u6797\u6d82\u5c42\u9632\u62a4
\n\u25b8\u00a0\u6570\u5b57\u63a5\u53e3<\/strong>\uff1aRS-232\/485\u7cfb\u7edf\u96c6\u6210
\n\u25b8\u00a0\u8fc7\u7a0b\u63a7\u5236<\/strong>\uff1a\u53ef\u7f16\u7a0b\u7ee7\u7535\u5668\u5b9e\u73b0\u771f\u7a7a\u5f00\u5173\u529f\u80fd<\/p>\n
\n\u91c7\u7528\u5148\u8fdbMEMS\u4f20\u611f\u5668\u4e0e\u6570\u5b57\u4fe1\u53f7\u5904\u7406\u67b6\u6784\uff0c\u5c06\u70ed\u5bfc\u5f0f\u771f\u7a7a\u89c4\u91cf\u7a0b\u5411\u4e0b\u6269\u5c551-3\u4e2a\u6570\u91cf\u7ea7\u3002\u4e13\u4e3a\u771f\u7a7a\u5f00\u5173\u529f\u80fd\u4f18\u5316\uff0c\u9700\u5168\u91cf\u7a0b\u6d4b\u91cf\uff08\u81f3\u5927\u6c14\u538b\u53ca\u4ee5\u4e0a\uff09\u65f6\u63a8\u8350VPM-5\u578b\u53f7\u3002<\/p>\n\n
\n\u2022 \u9676\u74f7\u9632\u62a4\u5c42\uff08\u7535\u5bb9\u89c4\u7ea7\u8010\u8150\u8680\uff09
\n\u2022 \u533b\u7528\u7ea7\u6d3e\u745e\u6797\u6d82\u5c42\uff08\u8010\u8fc7\u6c27\u5316\u6c22\u7b49\u79bb\u5b50\u706d\u83cc\uff09<\/li>\n
\n\u6a21\u62df\u8f93\u51fa<\/strong>
\n1 VDC\/\u5341\u8fdb\u5236\u7684\u6807\u51c6\u8f93\u51fa\uff08\u652f\u6301mbar\/Torr\/Pascal\uff09\uff0c\u517c\u5bb9\u4e3b\u6d41\u54c1\u724c\u4eea\u8868\u66ff\u6362<\/p>\n
\nRS-232\/485\u6297\u5e72\u6270\u4f20\u8f93\uff0c\u652f\u6301\uff1a<\/p>\n\n
\n3\u7ec4UL\/CSA\u8ba4\u8bc1\u89e6\u70b9\uff1a<\/p>\n\n
\n
\nPVD\u9540\u819c<\/a><\/strong>\uff1a\u5e26\u53ef\u7ef4\u62a4\u6321\u677f\u7684\u9540\u819c\u5de5\u827a
\n\u524d\u7ea7\u7ba1\u8def\u76d1\u6d4b<\/strong>\uff1a\u53ef\u7f16\u7a0b\u7ee7\u7535\u5668\u63a7\u5236\u5916\u56f4\u8bbe\u5907
\n\u7a7a\u95f4\u6a21\u62df<\/a><\/strong>\uff1a\u6781\u7aef\u771f\u7a7a\u73af\u5883\u6d4b\u91cf
\n\u6c22\u80fd\u7cfb\u7edf<\/strong>\uff1a\u50a8\u6c22\u7f50\u7edd\u7f18\u771f\u7a7a\u76d1\u6d4b
\n\u534a\u5bfc\u4f53<\/strong>\uff1aCVD\/PVD\u5de5\u827a\u771f\u7a7a\u63a7\u5236
\n\u8d28\u8c31\u4eea<\/strong>\uff1a\u4f4e\u6c14\u538b\u6d4b\u91cf\u652f\u6301<\/p>\n
1\u00d710\u207b\u2076 \u81f3 10 mbar\uff087.5\u00d710\u207b\u2077 \u81f3 7.5 Torr\uff09<\/p>\n
1\u00d710\u207b\u2076 \u81f3 10 mbar
MEMS \u76ae\u62c9\u5c3c\u70ed\u5bfc\u6cd5<\/p>\n
1\u00d710\u207b\u2075 \u81f3 9.99\u00d710\u207b\u2075 mbar
\u8bfb\u6570\u7684 25%<\/p>\n
\u8bfb\u6570\u7684 5%<\/p>\n
\u8bfb\u6570\u7684 30%<\/p>\n
1\u00d710\u207b\u00b3 \u81f3 10 mbar
1%<\/p>\n
16 \u4f4d\uff08150 \u03bcV\uff09<\/p>\n
124 Hz<\/p>\n
<20 ms<\/p>\n
+10 \u81f3 +50 \u00b0C<\/p>\n
5\u00d710\u207b\u2076 \u81f3 1333 mbar\uff083.75\u00d710\u207b\u2076 \u81f3 1000 Torr\uff09<\/p>\n
50 V\uff0c100 mArms \/ mADC<\/p>\n
UL \u8ba4\u8bc1\uff1a\u6587\u4ef6\u53f7 E76270
CSA \u8ba4\u8bc1\uff1a\u8bc1\u4e66\u53f7 1175739
EN\/IEC 60950-1 \u8ba4\u8bc1<\/p>\n\u73af\u5883\u6761\u4ef6<\/strong><\/h3>\n
-20 \u81f3 +50 \u00b0C<\/p>\n
-20 \u81f3 +50 \u00b0C<\/p>\n
-40 \u81f3 +120 \u00b0C<\/p>\n
+120 \u00b0C<\/p>\n
10 bar \u7edd\u5bf9\u538b\u529b<\/p>\n
\u4efb\u610f<\/p>\n
IP40<\/p>\n
98%\uff0c\u4e0d\u51dd\u7ed3<\/p>\n\u7535\u6e90<\/strong><\/h3>\n
12-30 VDC<\/p>\n
\u6700\u5927 240 mW<\/p>\n
\u662f<\/p>\n
\u662f<\/p>\n
100 mA\uff08\u53ef\u6062\u590d\u70ed\u4fdd\u9669\u4e1d\uff09<\/p>\n\u6750\u6599<\/strong><\/h3>\n
SS 1.4307 \/ AISI 304L \/ \u94dd 6061<\/p>\n
SS 1.4401 \/ AISI 316<\/p>\n
316 \u4e0d\u9508\u94a2\u3001Kovar\u3001\u73bb\u7483\u3001\u7845\u3001\u954d\u3001\u94dd\u3001SiO\u2082\u3001Si\u2083N\u2084\u3001\u91d1\u3001Viton\u00ae\u3001\u4f4e\u6790\u6c14\u73af\u6c27\u6811\u8102<\/p>\n
316 \u4e0d\u9508\u94a2\u3001Viton\u00ae\u3001Parylene<\/p>\n
316 \u4e0d\u9508\u94a2\u3001Viton\u00ae\u3001\u6c27\u5316\u94dd\u9676\u74f7\uff08Al\u2082O\u2083\uff09<\/p>\n
<1\u00d710\u207b\u2079 mbar\u00b7l\/s<\/p>\n\u53ef\u9760\u6027<\/strong><\/h3>\n
13,092,170 \u5c0f\u65f6<\/p>\n
76.38<\/p>\n\u8ba4\u8bc1<\/strong><\/h3>\n
\u7535\u78c1\u517c\u5bb9\u6307\u4ee4 2014\/30\/EU<\/p>\n
\u6307\u4ee4 EU 2015\/863<\/p>\n
(2) Viton\u00ae \u662f THE CHEMOURS COMPANY FC, LLC \u7684\u5546\u6807\u3002
(3) \u8d85\u538b\u9650\u5236\u4ec5\u5728\u4f7f\u7528\u7b26\u5408\u89c4\u683c\u7684\u63a5\u5934\u65f6\u9002\u7528\u3002<\/p>\n