{"id":260,"date":"2025-03-27T20:33:22","date_gmt":"2025-03-27T12:33:22","guid":{"rendered":"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/?p=260"},"modified":"2025-03-27T20:33:22","modified_gmt":"2025-03-27T12:33:22","slug":"sens4vpm-15-tricap-%e4%bc%a0%e6%84%9f%e5%99%a8%e5%a4%9a%e4%bc%a0%e6%84%9f%e5%99%a8%e7%9c%9f%e7%a9%ba%e8%ae%a1","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/sens4vpm-15-tricap-%e4%bc%a0%e6%84%9f%e5%99%a8%e5%a4%9a%e4%bc%a0%e6%84%9f%e5%99%a8%e7%9c%9f%e7%a9%ba%e8%ae%a1\/","title":{"rendered":"SENS4,VPM-15 TriCAP&#x2122; \u4f20\u611f\u5668,\u591a\u4f20\u611f\u5668\u771f\u7a7a\u8ba1"},"content":{"rendered":"<p><a href=\"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/tag\/sens4\/\" title=\"View all posts in SENS4\" target=\"_blank\">SENS4<\/a>,VPM-15 TriCAP&#x2122; \u4f20\u611f\u5668,<a href=\"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/tag\/%e5%a4%9a%e4%bc%a0%e6%84%9f%e5%99%a8%e7%9c%9f%e7%a9%ba%e8%ae%a1\/\" title=\"View all posts in \u591a\u4f20\u611f\u5668\u771f\u7a7a\u8ba1\" target=\"_blank\">\u591a\u4f20\u611f\u5668\u771f\u7a7a\u8ba1<\/a>,VPM-15 TriCAP&#x2122; \u4f20\u611f\u5668\u4e3a\u5404\u7c7b\u771f\u7a7a\u5e94\u7528\u6811\u7acb\u4e86\u5168\u65b0\u7684\u4e00\u4f53\u5316\u5bbd\u8303\u56f4\u6d4b\u91cf\u6807\u51c6\u3002\u5176\u72ec\u7279\u4e4b\u5904\u5728\u4e8e\u63d0\u4f9b\u7ecf\u6d4e\u9ad8\u6548\u3001\u6c14\u4f53\u65e0\u5173\u7684 5.0E-3 \u81f3 1333 mbar \u6d4b\u91cf\u8303\u56f4\uff0c\u5e76\u7ed3\u5408\u70ed\u635f\u5931\u539f\u7406\u5b9e\u73b0\u4f4e\u81f3 1E-6 mbar \u7684\u6d4b\u91cf\u3002<\/p>\n<p>VPM-15 TriCAP&#x2122; \u4f20\u611f\u5668<br \/>\n| \u771f\u7a7a |<\/p>\n<p><strong>\u8d85\u5bbd\u6d4b\u91cf\u8303\u56f4<\/strong><br \/>\nMEMS \u76ae\u62c9\u5c3c\u4e0e\u819c\u7247\u4f20\u611f\u5668\u7ec4\u5408\uff0c\u5b9e\u73b0 1.0E-6 \u81f3 1333 mbar \u7684\u6d4b\u91cf\u8303\u56f4<\/p>\n<p><strong>\u8010\u8150\u8680\u6027<\/strong><br \/>\n\u53ef\u9009\u9676\u74f7\u6216\u805a\u5bf9\u4e8c\u7532\u82ef\u4f20\u611f\u5668\u4fdd\u62a4<\/p>\n<p><strong>\u6c14\u4f53\u65e0\u5173\u6d4b\u91cf<\/strong><br \/>\n\u53cc\u819c\u7247\u4f20\u611f\u5668\uff0c\u8303\u56f4 5E-3 \u81f3 1333 mbar<\/p>\n<p><strong>CDG \u81ea\u52a8\u8c03\u96f6\u529f\u80fd<\/strong><br \/>\nCDG \u81ea\u52a8\u8c03\u96f6\u529f\u80fd\u65e0\u9700\u624b\u52a8\u8c03\u96f6<\/p>\n<p>VPM-15 TriCAP&#x2122; \u4f20\u611f\u5668\u4e3a\u5404\u7c7b\u771f\u7a7a\u5e94\u7528\u6811\u7acb\u4e86\u5168\u65b0\u7684\u4e00\u4f53\u5316\u5bbd\u8303\u56f4\u6d4b\u91cf\u6807\u51c6\u3002\u5176\u72ec\u7279\u4e4b\u5904\u5728\u4e8e\u63d0\u4f9b\u7ecf\u6d4e\u9ad8\u6548\u3001\u6c14\u4f53\u65e0\u5173\u7684 5.0E-3 \u81f3 1333 mbar \u6d4b\u91cf\u8303\u56f4\uff0c\u5e76\u7ed3\u5408\u70ed\u635f\u5931\u539f\u7406\u5b9e\u73b0\u4f4e\u81f3 1E-6 mbar \u7684\u6d4b\u91cf\u3002<\/p>\n<p>\u5728\u6c14\u4f53\u6210\u5206\u53ef\u80fd\u53d8\u5316\u7684\u771f\u7a7a\u5e94\u7528\u4e2d\uff0c\u4f20\u7edf\u4f9d\u8d56\u6c14\u4f53\u7c7b\u578b\u7684\u76ae\u62c9\u5c3c\u8ba1\u53ef\u80fd\u5bfc\u81f4\u6d4b\u91cf\u504f\u5dee\u3002TriCAP&#x2122; \u4f20\u611f\u5668\u91c7\u7528\u9ad8\u7cbe\u5ea6\u7535\u5bb9\u5f0f\u819c\u7247\u89c4\uff08CDG\uff09\u4f20\u611f\u5668\uff0c\u6d88\u9664\u6c14\u4f53\u4f9d\u8d56\u6027\uff0c\u5373\u4f7f\u6c14\u4f53\u6027\u8d28\u53d8\u5316\u4e5f\u80fd\u63d0\u4f9b\u7cbe\u51c6\u6d4b\u91cf\u3002\u2014\u2014\u91cd\u65b0\u5b9a\u4e49\u771f\u7a7a\u6d4b\u91cf<\/p>\n<p>VPM-15 TriCAP&#x2122; \u662f\u4e00\u6b3e\u521b\u65b0\u7684\u591a\u4f20\u611f\u5668<a href=\"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/tag\/%e7%9c%9f%e7%a9%ba%e8%ae%a1\/\" title=\"View all posts in \u771f\u7a7a\u8ba1\" target=\"_blank\">\u771f\u7a7a\u8ba1<\/a>\uff0c\u662f\u5347\u7ea7\u4f20\u7edf\u76ae\u62c9\u5c3c\u8ba1\u5e94\u7528\u7684\u7406\u60f3\u9009\u62e9\uff0c\u4e5f\u53ef\u4f5c\u4e3a\u5206\u7acb\u5f0f\u7535\u5bb9\u89c4\u4e0e\u76ae\u62c9\u5c3c\u8ba1\u7684\u7ecf\u6d4e\u578b\u4e00\u4f53\u5316\u66ff\u4ee3\u65b9\u6848\u3002<\/p>\n<p><strong>VPM-15 \u6d4b\u91cf\u8303\u56f4<\/strong><br \/>\n<strong>CDG \u81ea\u52a8\u8c03\u96f6<\/strong><br \/>\n\u96c6\u6210 MEMS \u76ae\u62c9\u5c3c\u70ed\u635f\u5931\u4f20\u611f\u5668\u5c06\u6d4b\u91cf\u8303\u56f4\u6269\u5c55\u81f3 1E-6 mbar\uff0c\u5e76\u4e3a\u7535\u5bb9\u89c4\u63d0\u4f9b\u521b\u65b0\u7684\u81ea\u52a8\u8c03\u96f6\u529f\u80fd\uff0c\u7701\u53bb\u4f20\u7edf\u7535\u5bb9\u819c\u7247\u89c4\u5e38\u89c1\u7684\u624b\u52a8\u8c03\u96f6\u6b65\u9aa4\u3002\u65e0\u9700\u624b\u52a8\u6309\u952e\u8c03\u96f6\u2014\u2014\u53ea\u9700\u62bd\u771f\u7a7a\u81f3\u81ea\u52a8\u8c03\u96f6\u70b9\uff0cCDG \u5373\u81ea\u52a8\u6821\u51c6\u5e76\u51c6\u5907\u5c31\u7eea\u3002<\/p>\n<p><strong>\u9002\u7528\u4e8e\u4e25\u82db\u5e94\u7528<\/strong><br \/>\n\u9488\u5bf9\u53ef\u80fd\u63a5\u89e6\u8150\u8680\u6027\u6216\u6d3b\u6027\u6c14\u4f53\u7684\u5e94\u7528\uff0cTriCAP&#x2122; \u53ef\u9009\u914d\u9632\u62a4\u6d82\u5c42\u4f5c\u4e3a\u6709\u6548\u5c4f\u969c\u3002<\/p>\n<p>TriCAP&#x2122; \u7cfb\u5217\u63d0\u4f9b\u9676\u74f7\u6216\u805a\u5bf9\u4e8c\u7532\u82ef\u4fdd\u62a4\u5c42\u9009\u9879\uff0c\u9632\u6b62\u4f20\u611f\u5668\u6750\u6599\u8150\u8680\u6216\u6c27\u5316\u3002\u9676\u74f7\u5177\u6709\u5353\u8d8a\u8010\u8150\u8680\u6027\uff0c\u662f\u7535\u5bb9\u819c\u7247\u89c4\u771f\u7a7a\u4f20\u611f\u5668\u819c\u7247\u7684\u53ef\u9760\u6750\u6599\u3002\u805a\u5bf9\u4e8c\u7532\u82ef\u662f\u4e00\u79cd\u72ec\u7279\u805a\u5408\u7269\uff0c\u517c\u5177\u4f18\u5f02\u8010\u8150\u8680\u6027\u4e0e\u758f\u6c34\u6027\uff0c\u4e13\u4e3a\u533b\u7597\u5e94\u7528\uff08\u5982\u51bb\u5e72\u548c\u706d\u83cc\uff09\u8bbe\u8ba1\u3002<\/p>\n<p>\u67d0\u4e9b\u771f\u7a7a\u5de5\u827a\u4e2d\u7684\u9897\u7c92\u53ef\u80fd\u5a01\u80c1\u771f\u7a7a\u8ba1\u5b89\u5168\u3002\u4e3a\u6b64\uff0cTriCAP&#x2122; \u4f20\u611f\u5668\u53ef\u9009\u914d\u9632\u62a4\u6321\u677f\u963b\u6321\u5b8f\u89c2\u9897\u7c92\u3002\u7ed3\u5408\u9632\u62a4\u6d82\u5c42\u9009\u9879\uff0cTriCAP&#x2122; \u4e13\u4e3a\u6311\u6218\u6027\u771f\u7a7a\u73af\u5883\u6253\u9020\u3002<\/p>\n<p><strong>\u5e26\u9632\u62a4\u6321\u677f\u7684 VPM-15 \u4f20\u611f\u5668<\/strong><br \/>\n<strong>\u6a21\u62df\u8f93\u51fa<\/strong><br \/>\n\u63d0\u4f9b\u591a\u79cd\u6a21\u62df\u8f93\u51fa\u7f29\u653e\u9009\u9879\uff0c\u53ef\u6a21\u62df\u5176\u4ed6\u5382\u5546\u7684\u771f\u7a7a\u8ba1\u4e0e\u4f20\u611f\u5668\u3002\u53ef\u9009\u6b21\u7ea7\u6a21\u62df\u8f93\u51fa\u652f\u6301\u540c\u6b65\u76d1\u6d4b\u5168\u8303\u56f4\u771f\u7a7a\u538b\u529b\u4e0e\u76f8\u5bf9\u4e8e\u5927\u6c14\u538b\u7684\u538b\u529b\u4fe1\u53f7\u3002<\/p>\n<p>\u6a21\u62df\u8f93\u51fa\u7535\u538b\u4e3a\u5916\u90e8\u8bfb\u53d6\u6216\u63a7\u5236\u63d0\u4f9b\u4fe1\u53f7\u3002VPM-15 \u6807\u51c6\u914d\u7f6e\u4e3a 1VDC\/\u5341\u500d\u9891\u7a0b\uff08mbar\u3001Torr \u6216 Pascal\uff09\u7535\u538b\u8f93\u51fa\u4fe1\u53f7\u3002<\/p>\n<p><strong>\u6570\u5b57\u8fde\u63a5<\/strong><br \/>\nRS-232 \u548c RS-485 \u4e32\u884c\u63a5\u53e3\u53ef\u5c06\u538b\u529b\u4e0e\u6e29\u5ea6\u6d4b\u91cf\u6570\u636e\u4f20\u8f93\u81f3\u5916\u90e8\u8bbe\u5907\u3002<\/p>\n<p>\u6570\u5b57\u63a5\u53e3\u652f\u6301\u8bca\u65ad\u3001\u9884\u6d4b\u6027\u7ef4\u62a4\u3001\u670d\u52a1\u3001\u6821\u51c6\u3001\u8bbe\u5b9a\u70b9\u914d\u7f6e\u3001\u6a21\u62df\u8f93\u51fa\u7f29\u653e\u4ee5\u53ca\u5b9e\u65f6\u771f\u7a7a\u538b\u529b\u6d4b\u91cf\u6570\u636e\u83b7\u53d6\uff0c\u7528\u4e8e\u5c4f\u5e55\u53ef\u89c6\u5316\u3002<\/p>\n<p><strong>\u53ef\u9760\u8bbe\u5b9a\u70b9\u7ee7\u7535\u5668\u63a7\u5236<\/strong><br \/>\n\u4e09\u4e2a\u72ec\u7acb\u56fa\u6001\u5f00\u5173\u7ee7\u7535\u5668\u53ef\u7528\u4e8e\u63a7\u5236\u5916\u90e8\u8bbe\u5907\uff0c\u5982\u6cf5\u3001\u9600\u95e8\u548c\u5b89\u5168\u8054\u9501\u7535\u8def\u3002<\/p>\n<p>\u4e0e\u673a\u7535\u7ee7\u7535\u5668\u4e0d\u540c\uff0c\u56fa\u6001\u7ee7\u7535\u5668\u53ef\u9760\u6027\u66f4\u9ad8\u3001\u5207\u6362\u901f\u5ea6\u66f4\u5feb\uff0c\u4e14\u65e0\u7535\u5f27\u63a5\u89e6\uff0c\u5207\u6362\u65f6\u65e0\u7535\u78c1\u5e72\u6270\uff08EMI\uff09\u3002<\/p>\n<p>TriCAP&#x2122; \u7ee7\u7535\u5668\u7ecf\u4e45\u8010\u7528\uff0c\u901a\u8fc7 UL \u8ba4\u8bc1\u3001CSA \u8ba4\u53ef\u53ca EN\/IEC 60950-1 \u8ba4\u8bc1\uff0c\u786e\u4fdd\u5728\u5173\u952e\u771f\u7a7a\u8fc7\u7a0b\u548c\u9ad8\u5faa\u73af\u5e94\u7528\u4e2d\u63a7\u5236\u53ef\u9760\u3002<\/p>\n<p><strong>\u5176\u4ed6\u5382\u5546\u517c\u5bb9\u6027<\/strong><br \/>\nVPM-15 TriCAP&#x2122; \u4f20\u611f\u5668\u63d0\u4f9b\u5f15\u811a\u517c\u5bb9\u6027\u3001\u6a21\u62df\u7535\u538b\u538b\u529b\u4fe1\u53f7\u6a21\u62df\u4ee5\u53ca\u4e0e\u5176\u4ed6\u5382\u5546\u771f\u7a7a\u4f20\u611f\u5668\u548c\u53d8\u9001\u5668\u7684\u6570\u5b57\u534f\u8bae\u6a21\u62df\u529f\u80fd\u3002<\/p>\n<p>\u8fd9\u4e9b\u6a21\u62df\u7279\u6027\u53ef\u5feb\u901f\u65e0\u7f1d\u5347\u7ea7\u4f20\u7edf\u5fae\u578b\u76ae\u62c9\u5c3c\u4f20\u611f\u5668\uff0c\u65e0\u9700\u66f4\u6539\u7ebf\u7f06\u548c\u7cfb\u7edf\u8bbe\u5907\u8f6f\u4ef6\u5373\u53ef\u8fc7\u6e21\u81f3\u65b0\u4e00\u4ee3\u771f\u7a7a\u4f20\u611f\u5668\u3002<\/p>\n<p>\u66ff\u6362\u4f20\u7edf\u771f\u7a7a\u8ba1\u548c\u4f20\u611f\u5668\u65f6\uff0cVPM-15 TriCAP&#x2122; \u80fd\u5728\u591a\u6570\u5e94\u7528\u4e2d\u63d0\u4f9b\u589e\u5f3a\u7684\u6d4b\u91cf\u6027\u80fd\u3002<\/p>\n<p>\u5176\u4ed6\u5382\u5546\u6a21\u62df\u529f\u80fd\u8fd8\u517c\u5bb9\u7b2c\u4e09\u65b9\u63a7\u5236\u5668\u4e0e\u663e\u793a\u5355\u5143\u3002<\/p>\n<p><strong>\u6d4b\u91cf\u4e0e\u63a7\u5236\u5148\u8fdb\u771f\u7a7a\u5de5\u827a<\/strong><br \/>\nVPM-15 TriCAP&#x2122; \u4e13\u4e3a\u9876\u5c16\u771f\u7a7a\u6c14\u4f53\u538b\u529b\u6d4b\u91cf\u4e0e\u63a7\u5236\u8bbe\u8ba1\uff0c\u591a\u79cd\u8f93\u51fa\u9009\u9879\u4e0d\u4ec5\u63d0\u4f9b\u538b\u529b\u6d4b\u91cf\u4fe1\u53f7\u3002<\/p>\n<p><strong>\u5e94\u7528\u4e0e\u5e02\u573a<\/strong><br \/>\n<a href=\"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/tag\/vpm-5\/\" title=\"View all posts in VPM-5\" target=\"_blank\">VPM-5<\/a> SmartPirani&#x2122; \u4e13\u4e3a\u53ef\u9760\u6d4b\u91cf\u548c\u63a7\u5236\u5148\u8fdb\u771f\u7a7a\u5de5\u827a\u800c\u8bbe\u8ba1\uff0c\u9002\u7528\u4e8e\u5de5\u4e1a\u4e0e\u79d1\u5b66\u9886\u57df\u7684\u5e7f\u6cdb\u5e94\u7528\u3002\u591a\u6837\u5316\u7684 VPM-5 \u914d\u7f6e\u53ef\u6ee1\u8db3\u4e0d\u540c\u5e94\u7528\u9700\u6c42\u3002<\/p>\n<p><strong>\u7269\u7406\u6c14\u76f8\u6c89\u79ef (PVD)<\/strong><br \/>\n\u786c\u8d28\u6d82\u5c42<br \/>\n\u914d\u5907\u53ef\u7ef4\u62a4\u6321\u677f\u4fdd\u62a4\u7684 VPM-5 \u9002\u7528\u4e8e\u7269\u7406\u6c14\u76f8\u6c89\u79ef (PVD) \u6d82\u5c42\u5e94\u7528\uff0c\u786e\u4fdd\u4f7f\u7528\u5bff\u547d\u3002<\/p>\n<p><strong><a href=\"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/tag\/%e7%9c%9f%e7%a9%ba%e7%83%ad%e5%a4%84%e7%90%86\/\" title=\"View all posts in \u771f\u7a7a\u70ed\u5904\u7406\" target=\"_blank\">\u771f\u7a7a\u70ed\u5904\u7406<\/a>\u5e94\u7528<\/strong><br \/>\n\u7194\u7089<br \/>\n\u771f\u7a7a\u70ed\u5904\u7406\u8fc7\u7a0b\u4e2d\u7684\u771f\u7a7a\u5ea6\u6d4b\u91cf\u4e0e\u63a7\u5236\u3002\u5de5\u4e1a\u5e94\u7528\u53ef\u9009\u914d\u6321\u677f\u4e0e\u9632\u62a4\u6d82\u5c42\u3002<\/p>\n<p><strong><a href=\"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/tag\/%e7%a9%ba%e9%97%b4%e6%a8%a1%e6%8b%9f\/\" title=\"View all posts in \u7a7a\u95f4\u6a21\u62df\" target=\"_blank\">\u7a7a\u95f4\u6a21\u62df<\/a><\/strong><br \/>\n\u7a7a\u95f4\u6a21\u62df<br \/>\n\u6d4b\u8bd5\u7269\u4f53\u8131\u6c14\u53ef\u80fd\u5bfc\u81f4\u7a7a\u95f4\u6a21\u62df\u8fc7\u7a0b\u4e2d\u6c14\u4f53\u6210\u5206\u53d8\u5316\u3002VPM-15 \u6d88\u9664\u76ae\u62c9\u5c3c\u8ba1\u7684\u6c14\u4f53\u4f9d\u8d56\u6027\u3002<\/p>\n<p><strong>\u592a\u9633\u80fd\u8584\u819c<\/strong><br \/>\n\u6c22\u50a8\u80fd\u7f50\u4e0e\u4f9b\u5e94\u7ba1\u7ebf\u7684\u7edd\u7f18\u771f\u7a7a\u6d4b\u91cf\u4e0e\u76d1\u63a7\u3002<\/p>\n<p><strong>\u534a\u5bfc\u4f53<\/strong><br \/>\n\u5316\u5b66\u6c14\u76f8\u6c89\u79ef (CVD)\u3001\u7269\u7406\u6c14\u76f8\u6c89\u79ef (PVD) \u53ca\u534a\u5bfc\u4f53\u524d\u7ea7\u7ba1\u7ebf\u771f\u7a7a\u6d4b\u91cf\u3002\u53ef\u9009\u8010\u8150\u8680\u9676\u74f7\u4f20\u611f\u5668\u3002<\/p>\n<p><strong>\u8d28\u8c31\u4eea<\/strong><br \/>\n\u5229\u7528 VPM-5 \u7684\u4f4e\u538b\u6d4b\u91cf\u80fd\u529b\uff0c\u9002\u7528\u4e8e\u8d28\u8c31\u4eea\u8bbe\u5907\u3002<\/p>\n<p class=\"\" data-start=\"0\" data-end=\"8\"><strong data-start=\"0\" data-end=\"6\">\u89c4\u683c<\/strong><\/p>\n<p class=\"\" data-start=\"10\" data-end=\"65\"><strong data-start=\"10\" data-end=\"24\">\u6d4b\u91cf\u8303\u56f4\uff08mbar\uff09<\/strong><br data-start=\"24\" data-end=\"27\" \/>1E-6 \u81f3 1333 mbar\uff087.5E-7 \u81f3 1000 Torr\uff09<\/p>\n<p class=\"\" data-start=\"67\" data-end=\"77\"><strong data-start=\"67\" data-end=\"75\">\u6d4b\u91cf\u539f\u7406<\/strong><\/p>\n<ul data-start=\"78\" data-end=\"241\">\n<li class=\"\" data-start=\"78\" data-end=\"112\">\n<p class=\"\" data-start=\"80\" data-end=\"112\">1E-6 \u81f3 1E-3 mbar\uff1aMEMS \u76ae\u62c9\u5c3c\u70ed\u4f20\u5bfc\u539f\u7406<\/p>\n<\/li>\n<li class=\"\" data-start=\"113\" data-end=\"156\">\n<p class=\"\" data-start=\"115\" data-end=\"156\">1E-3 \u81f3 5E-3 mbar\uff1a\u6df7\u5408 MEMS \u76ae\u62c9\u5c3c\/\u7535\u5bb9\u819c\u7247\u8868\uff08CDG\uff09<\/p>\n<\/li>\n<li class=\"\" data-start=\"157\" data-end=\"188\">\n<p class=\"\" data-start=\"159\" data-end=\"188\">5E-3 \u81f3 3.99 mbar\uff1a\u7535\u5bb9\u819c\u7247\u8868\uff08CDG\uff09<\/p>\n<\/li>\n<li class=\"\" data-start=\"189\" data-end=\"218\">\n<p class=\"\" data-start=\"191\" data-end=\"218\">4 \u81f3 5.99 mbar\uff1a\u6df7\u5408 CDG\/\u538b\u7535\u819c\u7247<\/p>\n<\/li>\n<li class=\"\" data-start=\"219\" data-end=\"241\">\n<p class=\"\" data-start=\"221\" data-end=\"241\">6 \u81f3 1333 mbar\uff1a\u538b\u7535\u819c\u7247<\/p>\n<\/li>\n<\/ul>\n<p class=\"\" data-start=\"243\" data-end=\"251\"><strong data-start=\"243\" data-end=\"249\">\u7cbe\u5ea6<\/strong><\/p>\n<ul data-start=\"252\" data-end=\"403\">\n<li class=\"\" data-start=\"252\" data-end=\"283\">\n<p class=\"\" data-start=\"254\" data-end=\"283\">1E-5 \u81f3 9.99E-5 mbar\uff1a\u8bfb\u6570\u7684 25%<\/p>\n<\/li>\n<li class=\"\" data-start=\"284\" data-end=\"314\">\n<p class=\"\" data-start=\"286\" data-end=\"314\">1E-4 \u81f3 9.99E-3 mbar\uff1a\u8bfb\u6570\u7684 5%<\/p>\n<\/li>\n<li class=\"\" data-start=\"315\" data-end=\"343\">\n<p class=\"\" data-start=\"317\" data-end=\"343\">1E-2 \u81f3 799 mbar\uff1a\u8bfb\u6570\u7684 0.5%<\/p>\n<\/li>\n<li class=\"\" data-start=\"344\" data-end=\"373\">\n<p class=\"\" data-start=\"346\" data-end=\"373\">800 \u81f3 1099 mbar\uff1a\u8bfb\u6570\u7684 0.25%<\/p>\n<\/li>\n<li class=\"\" data-start=\"374\" data-end=\"403\">\n<p class=\"\" data-start=\"376\" data-end=\"403\">1100 \u81f3 1333 mbar\uff1a\u8bfb\u6570\u7684 0.5%<\/p>\n<\/li>\n<\/ul>\n<p class=\"\" data-start=\"405\" data-end=\"434\"><strong data-start=\"405\" data-end=\"432\">\u6ede\u540e\uff08\u6839\u636e ISO19685:2017 \u6807\u51c6\uff09<\/strong><\/p>\n<ul data-start=\"435\" data-end=\"480\">\n<li class=\"\" data-start=\"435\" data-end=\"456\">\n<p class=\"\" data-start=\"437\" data-end=\"456\">1E-3 \u81f3 10 mbar\uff1a1%<\/p>\n<\/li>\n<li class=\"\" data-start=\"457\" data-end=\"480\">\n<p class=\"\" data-start=\"459\" data-end=\"480\">10 \u81f3 1333 mbar\uff1a0.1%<\/p>\n<\/li>\n<\/ul>\n<p class=\"\" data-start=\"482\" data-end=\"510\"><strong data-start=\"482\" data-end=\"493\">\u6a21\u62df\u8f93\u51fa\u5206\u8fa8\u7387<\/strong><br data-start=\"493\" data-end=\"496\" \/>16 \u4f4d\uff08150 \u03bcV\uff09<\/p>\n<p class=\"\" data-start=\"512\" data-end=\"535\"><strong data-start=\"512\" data-end=\"524\">\u6a21\u62df\u8f93\u51fa\u66f4\u65b0\u901f\u7387<\/strong><br data-start=\"524\" data-end=\"527\" \/>124 Hz<\/p>\n<p class=\"\" data-start=\"537\" data-end=\"578\"><strong data-start=\"537\" data-end=\"567\">\u54cd\u5e94\u65f6\u95f4\uff08\u6839\u636e ISO 19685:2017 \u6807\u51c6\uff09<\/strong><br data-start=\"567\" data-end=\"570\" \/>&lt;20 ms<\/p>\n<p class=\"\" data-start=\"580\" data-end=\"605\"><strong data-start=\"580\" data-end=\"588\">\u6e29\u5ea6\u8865\u507f<\/strong><br data-start=\"588\" data-end=\"591\" \/>+10 \u81f3 +50 \u00b0C<\/p>\n<p class=\"\" data-start=\"607\" data-end=\"663\"><strong data-start=\"607\" data-end=\"621\">\u56fa\u6001\u7ee7\u7535\u5668\u8bbe\u5b9a\u70b9\u8303\u56f4<\/strong><br data-start=\"621\" data-end=\"624\" \/>5E-6 \u81f3 1333 mbar\uff083.75E-6 \u81f3 1000 Torr\uff09<\/p>\n<p class=\"\" data-start=\"665\" data-end=\"705\"><strong data-start=\"665\" data-end=\"679\">\u56fa\u6001\u7ee7\u7535\u5668\u89e6\u70b9\u989d\u5b9a\u503c<\/strong><br data-start=\"679\" data-end=\"682\" \/>50 V\uff0c100 mArms \/ mADC<\/p>\n<p class=\"\" data-start=\"707\" data-end=\"720\"><strong data-start=\"707\" data-end=\"718\">\u56fa\u6001\u7ee7\u7535\u5668\u8ba4\u8bc1<\/strong><\/p>\n<ul data-start=\"721\" data-end=\"788\">\n<li class=\"\" data-start=\"721\" data-end=\"742\">\n<p class=\"\" data-start=\"723\" data-end=\"742\">UL \u8ba4\u8bc1\uff1a\u6587\u4ef6\u7f16\u53f7 E76270<\/p>\n<\/li>\n<li class=\"\" data-start=\"743\" data-end=\"766\">\n<p class=\"\" data-start=\"745\" data-end=\"766\">CSA \u8ba4\u8bc1\uff1a\u8bc1\u4e66\u7f16\u53f7 1175739<\/p>\n<\/li>\n<li class=\"\" data-start=\"767\" data-end=\"788\">\n<p class=\"\" data-start=\"769\" data-end=\"788\">EN\/IEC 60950-1 \u8ba4\u8bc1<\/p>\n<\/li>\n<\/ul>\n<h3 class=\"\" data-start=\"795\" data-end=\"809\"><strong data-start=\"799\" data-end=\"807\">\u73af\u5883\u6761\u4ef6<\/strong><\/h3>\n<p class=\"\" data-start=\"810\" data-end=\"837\"><strong data-start=\"810\" data-end=\"820\">\u5de5\u4f5c\u73af\u5883\u6e29\u5ea6<\/strong><br data-start=\"820\" data-end=\"823\" \/>-20 \u81f3 +50 \u00b0C<\/p>\n<p class=\"\" data-start=\"839\" data-end=\"864\"><strong data-start=\"839\" data-end=\"847\">\u4ecb\u8d28\u6e29\u5ea6<\/strong><br data-start=\"847\" data-end=\"850\" \/>-20 \u81f3 +50 \u00b0C<\/p>\n<p class=\"\" data-start=\"866\" data-end=\"893\"><strong data-start=\"866\" data-end=\"876\">\u5b58\u50a8\u73af\u5883\u6e29\u5ea6<\/strong><br data-start=\"876\" data-end=\"879\" \/>-20 \u81f3 +80 \u00b0C<\/p>\n<p class=\"\" data-start=\"895\" data-end=\"921\"><strong data-start=\"895\" data-end=\"910\">\u70d8\u70e4\u6e29\u5ea6\uff08\u975e\u5de5\u4f5c\u72b6\u6001\uff09<\/strong><br data-start=\"910\" data-end=\"913\" \/>+80 \u00b0C<\/p>\n<p class=\"\" data-start=\"923\" data-end=\"950\"><strong data-start=\"923\" data-end=\"937\">\u6700\u5927\u4ecb\u8d28\u538b\u529b (3)<\/strong><br data-start=\"937\" data-end=\"940\" \/>4 bar \u7edd\u538b<\/p>\n<p class=\"\" data-start=\"952\" data-end=\"971\"><strong data-start=\"952\" data-end=\"960\">\u5b89\u88c5\u4f4d\u7f6e<\/strong><br data-start=\"960\" data-end=\"963\" \/>\u4efb\u610f (4)<\/p>\n<p class=\"\" data-start=\"973\" data-end=\"1014\"><strong data-start=\"973\" data-end=\"1005\">\u9632\u62a4\u7b49\u7ea7\uff08\u6839\u636e EN 60529\/A2:2013 \u6807\u51c6\uff09<\/strong><br data-start=\"1005\" data-end=\"1008\" \/>IP40<\/p>\n<p class=\"\" data-start=\"1016\" data-end=\"1053\"><strong data-start=\"1016\" data-end=\"1041\">\u6e7f\u5ea6\uff08\u6839\u636e IEC 68-2-38 \u6807\u51c6\uff09<\/strong><br data-start=\"1041\" data-end=\"1044\" \/>98%\uff0c\u4e0d\u51dd\u7ed3<\/p>\n<h3 class=\"\" data-start=\"1060\" data-end=\"1072\"><strong data-start=\"1064\" data-end=\"1070\">\u7535\u6e90<\/strong><\/h3>\n<p class=\"\" data-start=\"1073\" data-end=\"1095\"><strong data-start=\"1073\" data-end=\"1081\">\u4f9b\u7535\u7535\u538b<\/strong><br data-start=\"1081\" data-end=\"1084\" \/>12-30 VDC<\/p>\n<p class=\"\" data-start=\"1097\" data-end=\"1119\"><strong data-start=\"1097\" data-end=\"1103\">\u529f\u8017<\/strong><br data-start=\"1103\" data-end=\"1106\" \/>350 mW\uff08\u6700\u5927\u503c\uff09<\/p>\n<p class=\"\" data-start=\"1121\" data-end=\"1136\"><strong data-start=\"1121\" data-end=\"1130\">\u53cd\u6781\u6027\u4fdd\u62a4<\/strong><br data-start=\"1130\" data-end=\"1133\" \/>\u662f<\/p>\n<p class=\"\" data-start=\"1138\" data-end=\"1153\"><strong data-start=\"1138\" data-end=\"1147\">\u8fc7\u7535\u538b\u4fdd\u62a4<\/strong><br data-start=\"1147\" data-end=\"1150\" \/>\u662f<\/p>\n<p class=\"\" data-start=\"1155\" data-end=\"1181\"><strong data-start=\"1155\" data-end=\"1164\">\u5185\u90e8\u7194\u65ad\u5668<\/strong><br data-start=\"1164\" data-end=\"1167\" \/>100 mA\uff08\u70ed\u6062\u590d\u578b\uff09<\/p>\n<h3 class=\"\" data-start=\"1188\" data-end=\"1200\"><strong data-start=\"1192\" data-end=\"1198\">\u6750\u6599<\/strong><\/h3>\n<p class=\"\" data-start=\"1201\" data-end=\"1242\"><strong data-start=\"1201\" data-end=\"1207\">\u5916\u58f3<\/strong><br data-start=\"1207\" data-end=\"1210\" \/>SS 1.4307 \/ AISI 304L \/ \u94dd 6061<\/p>\n<p class=\"\" data-start=\"1244\" data-end=\"1285\"><strong data-start=\"1244\" data-end=\"1260\">\u771f\u7a7a\u5de5\u827a\u6cd5\u5170\uff08\u63a5\u89e6\u4ecb\u8d28\uff09<\/strong><br data-start=\"1260\" data-end=\"1263\" \/>SS 1.4401 \/ AISI 316<\/p>\n<p class=\"\" data-start=\"1287\" data-end=\"1385\"><strong data-start=\"1287\" data-end=\"1309\">\u771f\u7a7a\u63a5\u89e6\u6750\u6599\uff08\u63a5\u89e6\u4ecb\u8d28\uff09\u2014\u2014\u6807\u51c6\u7248\u672c<\/strong><br data-start=\"1309\" data-end=\"1312\" \/>316 \u4e0d\u9508\u94a2\uff0cKovar\uff0c\u73bb\u7483\uff0c\u7845\uff0c\u954d\uff0c\u94dd\uff0cSiO\u2082\uff0cSi\u2083N\u2084\uff0cAI\u2082O\u2083\uff0c\u91d1\uff0cViton\u00ae\uff0c\u4f4e\u6790\u6c14\u73af\u6c27\u6811\u8102\uff0c\u710a\u6599\uff0cRO4305\uff0c\u7194\u878d\u77f3\u82f1<\/p>\n<p class=\"\" data-start=\"1387\" data-end=\"1446\"><strong data-start=\"1387\" data-end=\"1418\">\u771f\u7a7a\u63a5\u89e6\u6750\u6599\uff08\u63a5\u89e6\u4ecb\u8d28\uff09\u2014\u2014Parylene \u4fdd\u62a4\u7248\u672c<\/strong><br data-start=\"1418\" data-end=\"1421\" \/>316 \u4e0d\u9508\u94a2\uff0cViton\u00ae\uff0cParylene<\/p>\n<p class=\"\" data-start=\"1448\" data-end=\"1504\"><strong data-start=\"1448\" data-end=\"1472\">\u771f\u7a7a\u63a5\u89e6\u6750\u6599\uff08\u63a5\u89e6\u4ecb\u8d28\uff09\u2014\u2014\u9676\u74f7\u4fdd\u62a4\u7248\u672c<\/strong><br data-start=\"1472\" data-end=\"1475\" \/>316 \u4e0d\u9508\u94a2\uff0cViton\u00ae\uff0c\u6c27\u5316\u94dd\u9676\u74f7\uff08AI\u2082O\u2083\uff09<\/p>\n<p class=\"\" data-start=\"1506\" data-end=\"1538\"><strong data-start=\"1506\" data-end=\"1517\">\u5de5\u827a\u6cc4\u6f0f\u5bc6\u5c01\u6027<\/strong><br data-start=\"1517\" data-end=\"1520\" \/>&lt;1\u00b710\u207b\u2079 mbar\u00b7l\/s<\/p>\n<h3 class=\"\" data-start=\"1545\" data-end=\"1557\"><strong data-start=\"1549\" data-end=\"1555\">\u8ba4\u8bc1<\/strong><\/h3>\n<ul data-start=\"1558\" data-end=\"1615\">\n<li class=\"\" data-start=\"1558\" data-end=\"1564\">\n<p class=\"\" data-start=\"1560\" data-end=\"1564\">CE<\/p>\n<\/li>\n<li class=\"\" data-start=\"1565\" data-end=\"1586\">\n<p class=\"\" data-start=\"1567\" data-end=\"1586\">EMC \u6307\u4ee4 2014\/30\/EU<\/p>\n<\/li>\n<li class=\"\" data-start=\"1587\" data-end=\"1615\">\n<p class=\"\" data-start=\"1589\" data-end=\"1615\">RoHS \u7b26\u5408\u6027\uff08\u6307\u4ee4 EU 2015\/863\uff09<\/p>\n<\/li>\n<\/ul>\n<figure id=\"attachment_261\" aria-describedby=\"caption-attachment-261\" style=\"width: 293px\" class=\"wp-caption alignnone\"><img loading=\"lazy\" class=\"wp-image-261 \" src=\"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/wp-content\/uploads\/sites\/1979\/2025\/03\/img_67e545057b661.png\" alt=\"SENS4,VPM-15 TriCAP&#x2122; \u4f20\u611f\u5668,\u591a\u4f20\u611f\u5668\u771f\u7a7a\u8ba1\" width=\"293\" height=\"304\" srcset=\"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/wp-content\/uploads\/sites\/1979\/2025\/03\/img_67e545057b661.png 660w, https:\/\/www.bihec.com\/sens4-vacuum-pressure\/wp-content\/uploads\/sites\/1979\/2025\/03\/img_67e545057b661-289x300.png 289w, https:\/\/www.bihec.com\/sens4-vacuum-pressure\/wp-content\/uploads\/sites\/1979\/2025\/03\/img_67e545057b661-500x518.png 500w\" sizes=\"(max-width: 293px) 100vw, 293px\" \/><figcaption id=\"caption-attachment-261\" class=\"wp-caption-text\">SENS4,VPM-15 TriCAP&#x2122; \u4f20\u611f\u5668,\u591a\u4f20\u611f\u5668\u771f\u7a7a\u8ba1<\/figcaption><\/figure>\n<p><span id=\"sample-permalink\"><a href=\"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/?p=260&amp;preview=true\" target=\"wp-preview-260\" rel=\"noopener\">https:\/\/www.bihec.com\/sens4-vacuum-pressure\/<span id=\"editable-post-name\">SENS4,VPM-15 TriCAP&#x2122; \u4f20\u611f\u5668,\u591a\u4f20\u611f\u5668\u771f\u7a7a\u8ba1<\/span>\/<\/a><\/span><\/p>\n<p><a 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