{"id":263,"date":"2025-03-27T20:40:35","date_gmt":"2025-03-27T12:40:35","guid":{"rendered":"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/?p=263"},"modified":"2025-03-27T20:40:35","modified_gmt":"2025-03-27T12:40:35","slug":"sens4vpm-17-tricap-atm-%e4%bc%a0%e6%84%9f%e5%99%a8%e5%a4%9a%e4%bc%a0%e6%84%9f%e5%99%a8%e7%9c%9f%e7%a9%ba%e8%ae%a1","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/sens4vpm-17-tricap-atm-%e4%bc%a0%e6%84%9f%e5%99%a8%e5%a4%9a%e4%bc%a0%e6%84%9f%e5%99%a8%e7%9c%9f%e7%a9%ba%e8%ae%a1\/","title":{"rendered":"SENS4,VPM-17 TriCAP™ ATM \u4f20\u611f\u5668,\u591a\u4f20\u611f\u5668\u771f\u7a7a\u8ba1"},"content":{"rendered":"

SENS4<\/a>,VPM-17 TriCAP™ ATM \u4f20\u611f\u5668,\u591a\u4f20\u611f\u5668\u771f\u7a7a\u8ba1<\/a>,VPM-17 TriCAP™ ATM\u4f20\u611f\u5668\u4e3a\u5e7f\u57df\u771f\u7a7a\u5e94\u7528\u6811\u7acb\u4e86\u5168\u65b0\u7684\u4e00\u4f53\u5316\u6d4b\u91cf\u6807\u51c6\u3002\u76f8\u6bd4\u4f20\u7edf\u771f\u7a7a\u8ba1<\/a>\uff0c\u5b83\u4e0d\u4ec5\u63d0\u4f9b5.0E-3\u81f31333 mbar\u7ecf\u6d4e\u9ad8\u6548\u7684\u6c14\u4f53\u65e0\u5173\u6d4b\u91cf\u8303\u56f4\uff0c\u8fd8\u5177\u5907\u4f4e\u81f31E-6 mbar\u7684\u76ae\u62c9\u5c3c\u70ed\u635f\u8017\u6d4b\u91cf\u80fd\u529b\u3002<\/p>\n

VPM-17 TriCAP™ ATM \u4f20\u611f\u5668
\n| \u771f\u7a7a |<\/p>\n

\u8d85\u5bbd\u6d4b\u91cf\u8303\u56f4<\/strong>
\n9\u4e2a\u6570\u91cf\u7ea7\u8986\u76d61.0E-6\u81f31333 mbar\uff0c\u5176\u4e2d5E-3\u81f31333 mbar\u4e3a\u6c14\u4f53\u65e0\u5173\u6d4b\u91cf<\/p>\n

\u521b\u65b0\u56db\u4f20\u611f\u5668\u7ec4\u5408<\/strong>
\n\u96c6\u6210MEMS\u76ae\u62c9\u5c3c\u3001\u7535\u5bb9\u819c\u7247\u3001\u538b\u7535\u819c\u7247\u53ca\u6c14\u538b\u4f20\u611f\u5668<\/p>\n

CDG\u81ea\u52a8\u8c03\u96f6\u529f\u80fd<\/strong>
\nCDG\u81ea\u52a8\u8c03\u96f6\u529f\u80fd\u65e0\u9700\u624b\u52a8\u6821\u51c6<\/p>\n

\u5927\u6c14\u538b\u5207\u6362\u529f\u80fd<\/strong>
\n\u76f8\u5bf9\u5927\u6c14\u538b\u6d4b\u91cf\u5b9e\u73b0\u771f\u7a7a\u7cfb\u7edf\u7cbe\u51c6\u6392\u6c14\u63a7\u5236<\/p>\n

VPM-17 TriCAP™ ATM\u4f20\u611f\u5668\u4e3a\u5e7f\u57df\u771f\u7a7a\u5e94\u7528\u6811\u7acb\u4e86\u5168\u65b0\u7684\u4e00\u4f53\u5316\u6d4b\u91cf\u6807\u51c6\u3002\u76f8\u6bd4\u4f20\u7edf\u771f\u7a7a\u8ba1\uff0c\u5b83\u4e0d\u4ec5\u63d0\u4f9b5.0E-3\u81f31333 mbar\u7ecf\u6d4e\u9ad8\u6548\u7684\u6c14\u4f53\u65e0\u5173\u6d4b\u91cf\u8303\u56f4\uff0c\u8fd8\u5177\u5907\u4f4e\u81f31E-6 mbar\u7684\u76ae\u62c9\u5c3c\u70ed\u635f\u8017\u6d4b\u91cf\u80fd\u529b\u3002<\/p>\n

\u5728\u6c14\u4f53\u6210\u5206\u53ef\u80fd\u53d8\u5316\u7684\u771f\u7a7a\u5e94\u7528\u4e2d\uff0c\u4f20\u7edf\u6c14\u4f53\u4f9d\u8d56\u578b\u76ae\u62c9\u5c3c\u8ba1\u4f1a\u5bfc\u81f4\u6d4b\u91cf\u504f\u5dee\u3002TriCAP™ ATM\u91c7\u7528\u9ad8\u7cbe\u5ea6\u7535\u5bb9\u5f0f\u819c\u7247\u89c4\uff08CDG\uff09\u4f20\u611f\u5668\uff0c\u5f7b\u5e95\u6d88\u9664\u6c14\u4f53\u4f9d\u8d56\u6027\uff0c\u5373\u4f7f\u6c14\u4f53\u7279\u6027\u53d8\u5316\u4e5f\u80fd\u786e\u4fdd\u6d4b\u91cf\u7cbe\u51c6\u3002<\/p>\n

\u9664\u771f\u7a7a\u6d4b\u91cf\u5916\uff0cVPM-17\u652f\u6301\u76f8\u5bf9\u5927\u6c14\u538b\u7684\u538b\u529b\u6d4b\u91cf\uff0c\u53ef\u7cbe\u786e\u63a7\u5236\u771f\u7a7a\u7cfb\u7edf\u6392\u6c14\u6d41\u7a0b\u3002\u2014\u2014\u91cd\u65b0\u5b9a\u4e49\u771f\u7a7a\u6d4b\u91cf
\nTriCAP™ ATM\u662f\u771f\u6b63\u521b\u65b0\u7684\u591a\u4f20\u611f\u5668\u771f\u7a7a\u8ba1\uff0c\u65e2\u53ef\u7528\u4e8e\u5347\u7ea7\u4f20\u7edf\u76ae\u62c9\u5c3c\u8ba1\u5e94\u7528\uff0c\u4e5f\u53ef\u4f5c\u4e3a\u5206\u7acb\u5f0f\u7535\u5bb9\u89c4\u4e0e\u76ae\u62c9\u5c3c\u8ba1\u7684\u7ecf\u6d4e\u578b\u4e00\u4f53\u5316\u66ff\u4ee3\u65b9\u6848\u3002<\/p>\n

VPM-17\u6d4b\u91cf\u8303\u56f4<\/strong>
\nCDG\u81ea\u52a8\u8c03\u96f6<\/strong>
\n\u96c6\u6210MEMS\u76ae\u62c9\u5c3c\u70ed\u635f\u8017\u4f20\u611f\u5668\u5c06\u6d4b\u91cf\u8303\u56f4\u6269\u5c55\u81f31E-6 mbar\uff0c\u5e76\u4e3a\u7535\u5bb9\u89c4\u5f15\u5165\u521b\u65b0\u81ea\u52a8\u8c03\u96f6\u529f\u80fd\uff0c\u7701\u53bb\u4f20\u7edf\u7535\u5bb9\u819c\u7247\u89c4\u7e41\u7410\u7684\u624b\u52a8\u8c03\u96f6\u6b65\u9aa4\u3002\u65e0\u9700\u6309\u952e\u64cd\u4f5c\u2014\u2014\u62bd\u771f\u7a7a\u81f3\u81ea\u52a8\u8c03\u96f6\u70b9\u540e\uff0c\u7535\u5bb9\u819c\u7247\u89c4\u5373\u81ea\u52a8\u6821\u51c6\u5e76\u51c6\u5907\u5c31\u7eea\u3002<\/p>\n

\u4e25\u82db\u5e94\u7528\u9002\u914d<\/strong>
\n\u9488\u5bf9\u53ef\u80fd\u63a5\u89e6\u8150\u8680\u6027\u6216\u6d3b\u6027\u6c14\u4f53\u7684\u73af\u5883\uff0cTriCAP™\u53ef\u9009\u914d\u9632\u62a4\u6d82\u5c42\u4f5c\u4e3a\u6709\u6548\u5c4f\u969c\u3002<\/p>\n

\u8be5\u7cfb\u5217\u63d0\u4f9b\u9676\u74f7\u6216\u805a\u5bf9\u4e8c\u7532\u82ef\u4fdd\u62a4\u5c42\u9009\u9879\uff0c\u9632\u6b62\u4f20\u611f\u5668\u6750\u6599\u8150\u8680\u6c27\u5316\u3002\u9676\u74f7\u5177\u6709\u5353\u8d8a\u8010\u8150\u8680\u6027\uff0c\u662f\u7535\u5bb9\u819c\u7247\u89c4\u771f\u7a7a\u4f20\u611f\u5668\u819c\u7247\u7684\u53ef\u9760\u6750\u8d28\u3002\u805a\u5bf9\u4e8c\u7532\u82ef\u4f5c\u4e3a\u7279\u79cd\u805a\u5408\u7269\uff0c\u517c\u5177\u4f18\u5f02\u8010\u8150\u8680\u6027\u4e0e\u758f\u6c34\u6027\uff0c\u7279\u522b\u9002\u5408\u51bb\u5e72\u706d\u83cc\u7b49\u533b\u7597\u5e94\u7528\u3002<\/p>\n

\u67d0\u4e9b\u771f\u7a7a\u5de5\u827a\u4e2d\u7684\u9897\u7c92\u53ef\u80fd\u5a01\u80c1\u4eea\u8868\u5b89\u5168\u3002\u4e3a\u6b64TriCAP™\u53ef\u9009\u914d\u9632\u62a4\u6321\u677f\u963b\u6321\u5b8f\u89c2\u9897\u7c92\uff0c\u7ed3\u5408\u9632\u62a4\u6d82\u5c42\u9009\u9879\uff0c\u4e13\u4e3a\u6781\u7aef\u771f\u7a7a\u73af\u5883\u6253\u9020\u3002<\/p>\n

\u5e26\u9632\u62a4\u6321\u677f\u7684VPM-17\u4f20\u611f\u5668<\/strong>
\n\u6a21\u62df\u8f93\u51fa<\/strong>
\n\u63d0\u4f9b\u591a\u79cd\u6a21\u62df\u8f93\u51fa\u7f29\u653e\u9009\u9879\uff0c\u53ef\u6a21\u62df\u5176\u4ed6\u5382\u5546\u771f\u7a7a\u8ba1\u53ca\u53d8\u9001\u5668\u4fe1\u53f7\u3002<\/p>\n

\u53ef\u9009\u6b21\u7ea7\u6a21\u62df\u8f93\u51fa\u652f\u6301\u540c\u6b65\u76d1\u6d4b\u5168\u91cf\u7a0b\u771f\u7a7a\u538b\u529b\u53ca\u76f8\u5bf9\u5927\u6c14\u538b\u4fe1\u53f7\u3002<\/p>\n

\u6807\u51c6\u914d\u7f6e\u63d0\u4f9b1VDC\/\u5341\u500d\u9891\u7a0b\uff08mbar\/Torr\/Pascal\uff09\u7535\u538b\u8f93\u51fa\u4fe1\u53f7\uff0c\u9002\u7528\u4e8e\u5916\u90e8\u8bfb\u53d6\u6216\u63a7\u5236\u3002<\/p>\n

\u6570\u5b57\u8fde\u63a5<\/strong>
\nRS-232\u4e0eRS-485\u4e32\u884c\u63a5\u53e3\u53ef\u4f20\u8f93\u538b\u529b\u6e29\u5ea6\u6570\u636e\u81f3\u5916\u90e8\u8bbe\u5907\u3002<\/p>\n

\u6570\u5b57\u63a5\u53e3\u652f\u6301\u8bca\u65ad\u3001\u9884\u6d4b\u6027\u7ef4\u62a4\u3001\u6821\u51c6\u3001\u8bbe\u5b9a\u70b9\u914d\u7f6e\u3001\u6a21\u62df\u8f93\u51fa\u7f29\u653e\u53ca\u5b9e\u65f6\u771f\u7a7a\u538b\u529b\u6570\u636e\u53ef\u89c6\u5316\u3002\u914d\u5957\u6570\u636e\u8bb0\u5f55\u8f6f\u4ef6\u4fbf\u4e8ePC\u7aef\u4ea4\u4e92\u3002<\/p>\n

\u53ef\u9760\u8bbe\u5b9a\u70b9\u7ee7\u7535\u5668\u63a7\u5236<\/strong>
\n\u4e09\u4e2a\u72ec\u7acb\u56fa\u6001\u5f00\u5173\u7ee7\u7535\u5668\u53ef\u63a7\u5236\u6cf5\u9600\u3001\u5b89\u5168\u8054\u9501\u7b49\u5916\u90e8\u8bbe\u5907\u3002<\/p>\n

\u76f8\u6bd4\u673a\u7535\u7ee7\u7535\u5668\uff0c\u56fa\u6001\u65b9\u6848\u5177\u5907\u66f4\u9ad8\u53ef\u9760\u6027\u3001\u66f4\u5feb\u5207\u6362\u901f\u5ea6\uff0c\u4e14\u65e0\u7535\u5f27\u63a5\u89e6\u4e0e\u7535\u78c1\u5e72\u6270\uff08EMI\uff09\u3002<\/p>\n

TriCAP™\u7ee7\u7535\u5668\u901a\u8fc7UL\u8ba4\u8bc1\u3001CSA\u8ba4\u53ef\u53caEN\/IEC 60950-1\u8ba4\u8bc1\uff0c\u786e\u4fdd\u5173\u952e\u771f\u7a7a\u6d41\u7a0b\u4e0e\u9ad8\u9891\u5e94\u7528\u7684\u63a7\u5236\u5b89\u5168\u3002<\/p>\n

\u7b2c\u4e09\u65b9\u517c\u5bb9\u6027<\/strong>
\nVPM-17 TriCAP™ ATM\u63d0\u4f9b\u5f15\u811a\u517c\u5bb9\u3001\u6a21\u62df\u7535\u538b\u4fe1\u53f7\u6a21\u62df\u53ca\u6570\u5b57\u534f\u8bae\u6a21\u62df\u529f\u80fd\uff0c\u53ef\u5339\u914d\u5176\u4ed6\u5382\u5546\u771f\u7a7a\u4f20\u611f\u5668\u4e0e\u53d8\u9001\u5668\u3002<\/p>\n

\u8fd9\u4e9b\u7279\u6027\u652f\u6301\u5feb\u901f\u65e0\u7f1d\u5347\u7ea7\u4f20\u7edf\u5fae\u578b\u76ae\u62c9\u5c3c\u4f20\u611f\u5668\uff0c\u65e0\u9700\u66f4\u6539\u7ebf\u7f06\u4e0e\u7cfb\u7edf\u8f6f\u4ef6\u5373\u53ef\u8fc7\u6e21\u81f3\u65b0\u4e00\u4ee3\u4ea7\u54c1\u3002<\/p>\n

\u66ff\u6362\u4f20\u7edf\u771f\u7a7a\u8ba1\u65f6\uff0cVPM-17 TriCAP™ ATM\u80fd\u5728\u591a\u6570\u573a\u666f\u63d0\u4f9b\u589e\u5f3a\u6027\u80fd\uff0c\u5176\u6a21\u62df\u529f\u80fd\u8fd8\u517c\u5bb9\u7b2c\u4e09\u65b9\u63a7\u5236\u5668\u4e0e\u663e\u793a\u5355\u5143\u3002<\/p>\n

\u5b9a\u5236\u5316\u8bbe\u7f6e<\/strong>
\n\u53ef\u6839\u636e\u5177\u4f53\u5e94\u7528\u9700\u6c42\u9884\u914d\u7f6e\u6d4b\u91cf\u8303\u56f4\u3001\u538b\u529b\u5355\u4f4d\u3001\u8bbe\u5b9a\u70b9\u53c2\u6570\u53ca\u8f93\u51fa\u4fe1\u53f7\u7f29\u653e\u7b49\u53c2\u6570\uff0c\u5b9e\u73b0\u5f00\u7bb1\u5373\u7528\u3002\u5b9a\u5236\u4ea7\u54c1\u914d\u6709\u4e13\u5c5e\u6599\u53f7\u4fbf\u4e8e\u540e\u7eed\u91c7\u8d2d\u3002<\/p>\n

\u5e94\u7528\u9886\u57df<\/strong>
\nVPM-17 TriCAP™\u4e13\u4e3a\u5148\u8fdb\u771f\u7a7a\u5de5\u827a\u7684\u6d4b\u63a7\u8bbe\u8ba1\uff0c\u9002\u7528\u4e8e\u5de5\u4e1a\u4e0e\u79d1\u7814\u591a\u9886\u57df\uff1a<\/p>\n

\u6c22\u80fd\u771f\u7a7a<\/strong>
\n\u50a8\u6c22\u7f50\u53ca\u4f9b\u5e94\u7ba1\u7ebf\u7684\u7edd\u7f18\u771f\u7a7a\u76d1\u6d4b<\/p>\n

\u534a\u5bfc\u4f53<\/strong>
\n\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(CVD)\u3001\u7269\u7406\u6c14\u76f8\u6c89\u79ef(PVD)\u53ca\u524d\u7ea7\u7ba1\u7ebf\u771f\u7a7a\u6d4b\u91cf\uff08\u53ef\u9009\u8010\u8150\u8680\u9676\u74f7\u4f20\u611f\u5668\uff09<\/p>\n

\u8d28\u8c31\u4eea<\/strong>
\n\u5229\u7528\u5176\u4f4e\u538b\u6d4b\u91cf\u80fd\u529b\u9002\u914d\u8d28\u8c31\u8bbe\u5907<\/p>\n

PVD\u9540\u819c<\/a><\/strong>
\n\u914d\u5907\u53ef\u7ef4\u62a4\u6321\u677f\u7684VPM-17\u9002\u7528\u4e8e\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u9540\u819c\u573a\u666f<\/p>\n

\u771f\u7a7a\u70ed\u5904\u7406<\/a><\/strong>
\n\u70ed\u5904\u7406\u8fc7\u7a0b\u771f\u7a7a\u5ea6\u6d4b\u63a7\uff08\u53ef\u9009\u5de5\u4e1a\u7ea7\u6321\u677f\u4e0e\u6d82\u5c42\u9632\u62a4\uff09<\/p>\n

\u7a7a\u95f4\u6a21\u62df<\/a><\/strong>
\n\u592a\u7a7a\u6781\u7aef\u73af\u5883\u6a21\u62df\u4e2d\u7684\u771f\u7a7a\u6c14\u4f53\u538b\u529b\u6d4b\u91cf<\/p>\n

\u89c4\u683c\u53c2\u6570<\/strong><\/p>\n

\u6d4b\u91cf\u8303\u56f4\uff08mbar\uff09<\/strong><\/h3>\n