{"id":242,"date":"2025-03-27T15:42:47","date_gmt":"2025-03-27T07:42:47","guid":{"rendered":"https:\/\/www.bihec.com\/sens4-vacuum\/?p=242"},"modified":"2025-03-27T15:42:47","modified_gmt":"2025-03-27T07:42:47","slug":"sens4-vpm-4-smartpirani-lite%e7%9c%9f%e7%a9%ba%e5%8f%98%e9%80%81%e5%99%a8","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/sens4-vacuum\/sens4-vpm-4-smartpirani-lite%e7%9c%9f%e7%a9%ba%e5%8f%98%e9%80%81%e5%99%a8\/","title":{"rendered":"sens4 VPM-4 SmartPirani Lite\u771f\u7a7a\u53d8\u9001\u5668"},"content":{"rendered":"
VPM-4 SmartPirani™ Lite\u771f\u7a7a\u53d8\u9001\u5668
\n| \u771f\u7a7a\u6d4b\u91cf |<\/p>\n
VPM-4 MEMS\u76ae\u62c9\u5c3c\u4f20\u611f\u5668<\/a> \u8010\u8150\u8680\u6027\u80fd \u6570\u5b57\u63a5\u53e3 \u8fc7\u7a0b\u63a7\u5236 VPM-4 SmartPirani™ Lite\u771f\u7a7a\u53d8\u9001\u5668\u91c7\u7528\u5c16\u7aef\u6280\u672f\uff0c\u63d0\u4f9b\u884c\u4e1a\u9886\u5148\u7684\u6027\u80fd\u8868\u73b0\uff0c\u901a\u8fc7\u5c06\u70ed\u5bfc\u5f0f\u771f\u7a7a\u8ba1\u7684\u53ef\u7528\u6d4b\u91cf\u8303\u56f4\u6269\u5c551-3\u4e2a\u6570\u91cf\u7ea7\uff0c\u6811\u7acb\u4e86\u65b0\u7684\u6027\u80fd\u6807\u51c6\u3002<\/p>\n SmartPirani™\u91c7\u7528\u5148\u8fdb\u7684MEMS\uff08\u5fae\u673a\u7535\u7cfb\u7edf\uff09\u4f20\u611f\u5668\u6280\u672f\uff0c\u7ed3\u5408\u524d\u6cbf\u6570\u5b57\u4fe1\u53f7\u5904\u7406\u67b6\u6784\u4e0e\u521b\u65b0\u6d4b\u91cf\u7b97\u6cd5\u3002\u914d\u5408\u7cbe\u5bc6\u81ea\u52a8\u5316\u5236\u9020\u4e0e\u6821\u51c6\u5de5\u827a\uff0c\u6253\u9020\u51fa\u8fd9\u6b3e\u6027\u80fd\u65e0\u4e0e\u4f26\u6bd4\u7684\u72ec\u7279\u4ea7\u54c1\u3002SmartPirani™ Lite\u4e13\u4e3a\u771f\u7a7a\u5f00\u5173\u529f\u80fd\u8bbe\u8ba1\uff0c\u6d4b\u91cf\u4e0a\u9650\u4e3a10\u6beb\u5df4\u3002\u82e5\u9700\u8986\u76d6\u81f3\u5927\u6c14\u538b\u53ca\u66f4\u9ad8\u538b\u529b\u7684\u5168\u91cf\u7a0b\u6d4b\u91cf\uff0c\u8bf7\u9009\u62e9VPM-5 SmartPirani™\u53d8\u9001\u5668\u3002<\/p>\n \u9886\u5148\u7684\u771f\u7a7a\u6d4b\u91cf\u6280\u672f VPM-4\u6d4b\u91cf\u8303\u56f4<\/strong> SmartPirani™\u53d8\u9001\u5668\u7cfb\u5217\u8fd8\u5305\u542b\uff1a<\/p>\n \u5e94\u5bf9\u4e25\u82db\u5e94\u7528\u7684\u5353\u8d8a\u6027\u80fd<\/strong> \u591a\u91cd\u9632\u62a4\u89e3\u51b3\u65b9\u6848<\/strong> \u9897\u7c92\u9632\u62a4\u8bbe\u8ba1<\/strong> CSA\u00a0Certified: Certificate 1175739<\/p>\n EN\/IEC 60950-1 Certified<\/td>\n<\/tr>\n VPM-4 SmartPirani™ Lite\u771f\u7a7a\u53d8\u9001\u5668 | \u771f\u7a7a\u6d4b\u91cf | VPM-4 MEMS\u76ae\u62c9\u5c3c\u4f20\u611f\u5668 \u5bbd\u91cf\u7a0bMEMS\u76ae\u62c9\u5c3c\u4f20\u611f\u5668\uff0c\u6d4b\u91cf\u8303\u56f41.0E-6\u81f310\u6beb <\/p>\n","protected":false},"author":12,"featured_media":245,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[4],"tags":[20,19],"yoast_head":"\n
\n\u5bbd\u91cf\u7a0bMEMS\u76ae\u62c9\u5c3c\u4f20\u611f\u5668\uff0c\u6d4b\u91cf\u8303\u56f41.0E-6\u81f310\u6beb\u5df4<\/p>\n
\n\u53ef\u9009\u9676\u74f7\u6216\u805a\u5bf9\u4e8c\u7532\u82ef\u4f20\u611f\u5668\u4fdd\u62a4\u5c42<\/p>\n
\n\u914d\u5907RS-232\u548cRS-485\u6570\u5b57\u63a5\u53e3\uff0c\u4fbf\u4e8e\u7cfb\u7edf\u96c6\u6210<\/p>\n
\n\u53ef\u7f16\u7a0b\u8bbe\u5b9a\u70b9\u7ee7\u7535\u5668\uff0c\u5b9e\u73b0\u771f\u7a7a\u5f00\u5173\u529f\u80fd<\/p>\n
\nVPM-4 SmartPirani™ Lite\u53d8\u9001\u5668\u4ee5\u5353\u8d8a\u6027\u80fd\u91cd\u65b0\u5b9a\u4e49\u771f\u7a7a\u6d4b\u91cf\u6807\u51c6\uff0c\u5c06\u70ed\u5bfc\u5f0f\u771f\u7a7a\u8ba1\u7684\u53ef\u7528\u6d4b\u91cf\u8303\u56f4\u7a81\u7834\u6027\u6269\u5c55\u81f31E-6\u91cf\u7ea7\u3002<\/p>\n
\nSmartPirani™ Lite\u7684\u6269\u5c55\u91cf\u7a0b\u4f7f\u5176\u80fd\u5e94\u7528\u4e8e\u4f20\u7edf\u9700\u70ed\u9634\u6781\u7535\u79bb\u89c4\u6216\u51b7\u9634\u6781\u7535\u79bb\u89c4\u7684\u9886\u57df\u3002\u8be5\u4ea7\u54c1\u9488\u5bf9\u4f4e\u91cf\u7a0b\u6d4b\u91cf\u6027\u80fd\u8fdb\u884c\u4f18\u5316\uff0c\u4e0a\u9650\u6d4b\u91cf\u8303\u56f4\u53ef\u8fbe10\u6beb\u5df4\uff087.5\u6258\uff09\u3002<\/p>\n\n
<\/p>\n
\n\u4e3a\u9002\u5e94\u8150\u8680\u6027\u53ca\u6d3b\u6027\u6c14\u4f53\u73af\u5883\uff0cSmartPirani™\u53ef\u9009\u914d\u9632\u62a4\u9540\u5c42\uff0c\u4e3a\u4f20\u611f\u5668\u63d0\u4f9b\u9ad8\u6548\u4fdd\u62a4\u5c4f\u969c\u3002<\/p>\n
\nSmartPirani™\u53d8\u9001\u5668\u7cfb\u5217\u73b0\u63d0\u4f9b\u9676\u74f7\u6216\u805a\u5bf9\u4e8c\u7532\u82ef\uff08Parylene\uff09\u9632\u62a4\u5c42\u9009\u9879\uff0c\u6709\u6548\u9632\u6b62\u4f20\u611f\u5668\u6750\u6599\u8150\u8680\u6c27\u5316\uff1a<\/p>\n\n
\n\u9488\u5bf9\u5b58\u5728\u9897\u7c92\u7269\u7684\u771f\u7a7a\u5de5\u827a\u73af\u5883\uff0cSmartPirani™\u53ef\u52a0\u88c5\u9632\u62a4\u6321\u677f\u963b\u9694\u5b8f\u89c2\u9897\u7c92\u3002\u7ed3\u5408\u53ef\u9009\u9632\u62a4\u9540\u5c42\u6280\u672f\uff0c\u65b0\u4e00\u4ee3\u53d8\u9001\u5668\u4e13\u4e3a\u5728\u6781\u7aef\u771f\u7a7a\u73af\u5883\u4e2d\u7a33\u5b9a\u8fd0\u884c\u800c\u8bbe\u8ba1\u3002<\/p>\n<\/p>\n
\n\n
\n \n Specifications<\/h4>\n<\/td>\n
<\/td>\n<\/tr>\n \n Measuring range in mbar<\/td>\n 1\u00d710-6 to 10 mbar (7.5\u00d710-7 to 7.5\u00a0Torr)<\/td>\n<\/tr>\n \n Measuring principle 1\u00d710-6 to 10\u00a0mbar<\/td>\n MEMS Pirani thermal conductivity<\/td>\n<\/tr>\n \n Accuracy 1\u00d710-5 to 9.99\u00d710-5<\/td>\n 25% of reading<\/td>\n<\/tr>\n \n Accuracy 1\u00d710-4 to 9.99\u00d710-1\u00a0mbar<\/td>\n 5% of reading<\/td>\n<\/tr>\n \n Accuracy 1.00 to 10 mbar<\/td>\n 30% of reading<\/td>\n<\/tr>\n \n Hysteresis 1\u00d710-3 to 10 mbar (ISO19685:2017<\/td>\n 1%<\/td>\n<\/tr>\n \n Analog output resolution<\/td>\n 16 bit (150 \u03bcV)<\/td>\n<\/tr>\n \n Analog output update rate<\/td>\n 124 Hz<\/td>\n<\/tr>\n \n Response time (ISO 19685:2017)<\/td>\n <20 ms<\/td>\n<\/tr>\n \n Temperature compensation<\/td>\n +10 to +50 \u00b0C<\/td>\n<\/tr>\n \n Solid state relay set point range<\/td>\n 5\u00d710-6 to 1333 mbar (3.75\u00d710-6 to 1000 Torr)<\/td>\n<\/tr>\n \n Solid state relay contact rating<\/td>\n 50 V, 100 mArms \/ mADC<\/td>\n<\/tr>\n \n Solid state relay approvals<\/td>\n UL Recognized: File E76270<\/p>\n \n Environment conditions<\/strong><\/td>\n <\/td>\n<\/tr>\n \n Operating ambient temperature<\/td>\n -20 to +50 \u00b0C<\/td>\n<\/tr>\n \n Media temperature<\/td>\n -20 to +50 \u00b0C<\/td>\n<\/tr>\n \n Storage ambient temperature<\/td>\n -40 to +120 \u00b0C<\/td>\n<\/tr>\n \n Bake-out temperature (non-operating)<\/td>\n +120 \u00b0C<\/td>\n<\/tr>\n \n Maximum media pressure(3)<\/td>\n 10 bar absolute<\/td>\n<\/tr>\n \n Mounting position<\/td>\n Arbitrary<\/td>\n<\/tr>\n \n Protection rating, EN 60529\/A2:2013<\/td>\n IP40<\/td>\n<\/tr>\n \n Humidity, IEC 68-2-38<\/td>\n 98%, non-condensing<\/td>\n<\/tr>\n \n Power supply<\/strong><\/td>\n <\/td>\n<\/tr>\n \n Supply voltage<\/td>\n 12-30 VDC<\/td>\n<\/tr>\n \n Power consumption<\/td>\n 240 mW (max)<\/td>\n<\/tr>\n \n Reverse polarity protection<\/td>\n Yes<\/td>\n<\/tr>\n \n Overvoltage protection<\/td>\n Yes<\/td>\n<\/tr>\n \n Internal fuse<\/td>\n 100 mA (thermal recoverable)<\/td>\n<\/tr>\n \n Materials<\/strong><\/td>\n <\/td>\n<\/tr>\n \n Enclosure<\/td>\n SS 1.4307 \/ AISI 304L \/ Aluminum 6061<\/td>\n<\/tr>\n \n Vacuum Process flange (media wetted)<\/td>\n SS 1.4401 \/ AISI 316<\/td>\n<\/tr>\n \n Vacuum exposed materials (media wetted) Standard version<\/td>\n 316 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, gold, Viton\u00ae, low out-gassing epoxy resin,<\/td>\n<\/tr>\n \n Vacuum exposed materials (media wetted) Parylene protected version<\/td>\n 316 Stainless steel, Viton\u00ae, Parylene<\/td>\n<\/tr>\n \n Vacuum exposed materials (media wetted) Ceramic protected version<\/td>\n 316 Stainless steel, Viton\u00ae, Aluminum oxide ceramic (AI2O3)<\/td>\n<\/tr>\n \n Process leak tightness<\/td>\n <1\u00b710-9 mbar\u00b7l\/s<\/td>\n<\/tr>\n \n Reliability<\/strong><\/td>\n <\/td>\n<\/tr>\n \n MTBF (Mean Time Between Failure)<\/td>\n 13.092.170 hours<\/td>\n<\/tr>\n \n Failure rate FIT (Failure In Time, where time=10E+9 hours)<\/td>\n 76,38<\/td>\n<\/tr>\n \n Approvals<\/strong><\/td>\n <\/td>\n<\/tr>\n \n CE<\/td>\n EMC directive 2014\/30\/EU<\/td>\n<\/tr>\n \n RoHS compliance<\/td>\n Directive EU 2015\/863<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n