{"id":256,"date":"2025-03-27T16:22:11","date_gmt":"2025-03-27T08:22:11","guid":{"rendered":"https:\/\/www.bihec.com\/sens4-vacuum\/?p=256"},"modified":"2025-03-27T16:22:11","modified_gmt":"2025-03-27T08:22:11","slug":"sens4-vdm-5-dicap%e8%86%9c%e7%89%87%e5%bc%8f%e7%9c%9f%e7%a9%ba%e5%8f%98%e9%80%81%e5%99%a8","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/sens4-vacuum\/sens4-vdm-5-dicap%e8%86%9c%e7%89%87%e5%bc%8f%e7%9c%9f%e7%a9%ba%e5%8f%98%e9%80%81%e5%99%a8\/","title":{"rendered":"sens4 VDM-5 DiCAP™\u819c\u7247\u5f0f\u771f\u7a7a\u53d8\u9001\u5668"},"content":{"rendered":"
sens4 VPM-7 ATM\u771f\u7a7a\u4f20\u611f\u5668<\/a>\u3001sens4 VPM-7 SmartPirani™ ATM\u771f\u7a7a\u4f20\u611f\u5668<\/a>\u3001sens4 VPM-7\u771f\u7a7a\u4f20\u611f\u5668<\/a>\u3001sens4 VPM-7\u771f\u7a7a\u8ba1<\/a><\/p>\n VDM-5 DiCAP™ \u819c\u7247\u5f0f\u771f\u7a7a\u53d8\u9001\u5668<\/strong><\/p>\n \u53cc\u819c\u7247\u4f20\u611f\u5668\u6280\u672f<\/strong> \u5353\u8d8a\u7684\u8010\u8150\u8680\u6027\u80fd<\/strong> \u7075\u6d3b\u7684\u63a5\u53e3\u914d\u7f6e<\/strong> \u9ad8\u6027\u4ef7\u6bd4\u89e3\u51b3\u65b9\u6848<\/strong> \u5178\u578b\u5e94\u7528<\/strong> <\/p>\n VDM-5 DiCAP™\u4f20\u611f\u5668\u4ee5\u4e00\u4f53\u5f0f\u6d4b\u91cf\u65b9\u6848\u4e3a\u5404\u7c7b\u771f\u7a7a\u5e94\u7528\u6811\u7acb\u65b0\u6807\u6746\u3002\u51765.0E-3\u81f31333\u6beb\u5df4\u7684\u6c14\u4f53\u7c7b\u578b\u65e0\u5173\u6d4b\u91cf\u8303\u56f4\u517c\u5177\u6210\u672c\u6548\u76ca\uff0c\u4f7f\u4e4b\u5728\u4f17\u591a\u771f\u7a7a\u8ba1\u4e2d\u8131\u9896\u800c\u51fa\u3002<\/p>\n \u5728\u6c14\u4f53\u6210\u5206\u53ef\u80fd\u53d8\u5316\u7684\u771f\u7a7a\u73af\u5883\u4e2d\uff0c\u4f20\u7edf\u4f9d\u8d56\u6c14\u4f53\u7c7b\u578b\u7684\u76ae\u62c9\u5c3c\u771f\u7a7a\u8ba1\u5e38\u51fa\u73b0\u6d4b\u91cf\u504f\u5dee\u3002VDM-5\u91c7\u7528\u7cbe\u5bc6\u7535\u5bb9\u5f0f\u8584\u819c\u89c4\uff08CDG\uff09\u4f20\u611f\u5668\uff0c\u5f7b\u5e95\u6d88\u9664\u6c14\u4f53\u4f9d\u8d56\u6027\uff0c\u5373\u4f7f\u6c14\u4f53\u7279\u6027\u53d1\u751f\u53d8\u5316\u4e5f\u80fd\u786e\u4fdd\u6d4b\u91cf\u7cbe\u51c6\u3002<\/p>\n \u91cd\u65b0\u5b9a\u4e49\u771f\u7a7a\u6d4b\u91cf<\/strong> \u80dc\u4efb\u4e25\u82db\u5de5\u51b5\u7684\u5353\u8d8a\u6027\u80fd<\/strong> VDM-5 DiCAP™\u4f20\u611f\u5668\u7cfb\u5217\u63d0\u4f9b\u9676\u74f7\u6216\u805a\u5bf9\u4e8c\u7532\u82ef\uff08Parylene\uff09\u53ef\u9009\u4fdd\u62a4\u5c42\uff0c\u786e\u4fdd\u4f20\u611f\u6750\u6599\u514d\u53d7\u8150\u8680\u6c27\u5316\u5a01\u80c1\uff1a<\/p>\n \u9488\u5bf9\u5b58\u5728\u9897\u7c92\u7269\u5a01\u80c1\u7684\u771f\u7a7a\u5de5\u827a\uff0cDiCAP™\u4f20\u611f\u5668\u53ef\u52a0\u88c5\u9632\u62a4\u6321\u677f\u963b\u9694\u5b8f\u89c2\u9897\u7c92\u3002\u7ed3\u5408\u591a\u91cd\u4fdd\u62a4\u9540\u5c42\u9009\u9879\uff0c\u8be5\u7cfb\u5217\u4ea7\u54c1\u4e13\u4e3a\u5728\u6311\u6218\u6027\u771f\u7a7a\u73af\u5883\u4e2d\u7a33\u5b9a\u8fd0\u884c\u800c\u8bbe\u8ba1\u3002 \u5e94\u7528\u4e0e\u5e02\u573a \u7269\u7406\u6c14\u76f8\u6c89\u79ef (PVD)<\/strong> \u771f\u7a7a\u7089\u5e94\u7528<\/strong> \u592a\u7a7a\u73af\u5883\u6a21\u62df<\/strong> \u771f\u7a7a\u84b8\u998f<\/strong> \u534a\u5bfc\u4f53\u884c\u4e1a<\/strong> \u7b49\u79bb\u5b50\u706d\u83cc<\/strong> CSA Certified: Certificate 1175739<\/p>\n EN\/IEC 60950-1 Certified<\/td>\n<\/tr>\n sens4 VPM-7 ATM\u771f\u7a7a\u4f20\u611f\u5668\u3001sens4 VPM-7 SmartPirani™ ATM\u771f\u7a7a\u4f20\u611f\u5668\u3001sens4 VPM-7\u771f\u7a7a\u4f20\u611f\u5668\u3001sens4 VPM-7 <\/p>\n","protected":false},"author":12,"featured_media":254,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[4],"tags":[29,28,27,30],"yoast_head":"\n
\n\u2022 5.0E-3\u81f31333\u6beb\u5df4\u5bbd\u91cf\u7a0b\u6d4b\u91cf
\n\u2022 \u6c14\u4f53\u7c7b\u578b\u65e0\u5173\u7684\u7cbe\u786e\u6d4b\u91cf<\/p>\n
\n\u2022 \u53ef\u9009\u9676\u74f7\u6216\u805a\u5bf9\u4e8c\u7532\u82ef(Parylene)\u4f20\u611f\u5668\u4fdd\u62a4\u6d82\u5c42
\n\u2022 \u9002\u7528\u4e8e\u8150\u8680\u6027\u6c14\u4f53\u548c\u6076\u52a3\u5de5\u827a\u73af\u5883<\/p>\n
\n\u2022 \u6570\u5b57\u63a5\u53e3\uff08\u4fbf\u4e8e\u7cfb\u7edf\u96c6\u6210\uff09
\n\u2022 \u6a21\u62df\u91cf\u8f93\u51fa\uff08\u517c\u5bb9\u4f20\u7edf\u7cfb\u7edf\uff09
\n\u2022 \u8bbe\u5b9a\u70b9\u7ee7\u7535\u5668\uff08\u7528\u4e8e\u8fc7\u7a0b\u63a7\u5236\uff09<\/p>\n
\n\u2022 \u5355\u53f0\u8bbe\u5907\u96c6\u6210\u53cc\u7535\u5bb9\u5f0f\u819c\u7247\u89c4\u529f\u80fd
\n\u2022 \u964d\u4f4e\u7cfb\u7edf\u590d\u6742\u6027\u548c\u603b\u4f53\u62e5\u6709\u6210\u672c<\/p>\n
\n\u2713 \u534a\u5bfc\u4f53\u5de5\u827a\u8bbe\u5907
\n\u2713 \u771f\u7a7a\u9540\u819c\u7cfb\u7edf
\n\u2713 \u5206\u6790\u4eea\u5668
\n\u2713 \u79d1\u7814\u5b9e\u9a8c\u88c5\u7f6e<\/p>\n
\nVDM-5 DiCAP™ \u662f\u4e00\u6b3e\u521b\u65b0\u7684\u591a\u4f20\u611f\u5668\u771f\u7a7a\u8ba1\uff0c\u65e2\u80fd\u63d0\u5347\u4f20\u7edf\u76ae\u62c9\u5c3c\u771f\u7a7a\u8ba1\u5e94\u7528\u7684\u6027\u80fd\uff0c\u4e5f\u53ef\u4f5c\u4e3a\u7ecf\u6d4e\u9ad8\u6548\u7684\u4e00\u4f53\u5316\u89e3\u51b3\u65b9\u6848\uff0c\u66ff\u4ee3\u5206\u7acb\u7684\u7535\u5bb9\u5f0f\u538b\u529b\u8ba1\u4e0e\u76ae\u62c9\u5c3c\u771f\u7a7a\u8ba1\u7ec4\u5408\u3002<\/p>\n
\n\u9762\u5bf9\u8150\u8680\u6027\u6216\u6d3b\u6027\u6c14\u4f53\u7684\u5e94\u7528\u73af\u5883\uff0cDiCAP™\u53ef\u9009\u914d\u5171\u5f62\u4fdd\u62a4\u9540\u5c42\uff0c\u5f62\u6210\u6709\u6548\u9632\u62a4\u5c4f\u969c\u3002<\/p>\n\n
<\/p>\n
\nVDM-5 DiCAP™ \u4e13\u4e3a\u5148\u8fdb\u771f\u7a7a\u5de5\u827a\u7684\u53ef\u9760\u6d4b\u91cf\u4e0e\u63a7\u5236\u800c\u8bbe\u8ba1\uff0c\u9002\u7528\u4e8e\u5de5\u4e1a\u4e0e\u79d1\u5b66\u9886\u57df\u7684\u591a\u79cd\u5e94\u7528\u3002\u6211\u4eec\u63d0\u4f9b\u591a\u79cd VDM-5 \u914d\u7f6e\u65b9\u6848\uff0c\u4ee5\u6ee1\u8db3\u4e0d\u540c\u5e94\u7528\u573a\u666f\u7684\u591a\u6837\u5316\u9700\u6c42\u3002<\/p>\n
\nPVD \u9540\u819c
\n\u914d\u5907\u53ef\u7ef4\u62a4\u6321\u677f\u4fdd\u62a4\u7684 VDM-5\uff0c\u80fd\u5728\u7269\u7406\u6c14\u76f8\u6c89\u79ef (PVD) \u9540\u819c\u5e94\u7528\u4e2d\u5b9e\u73b0\u957f\u6548\u7a33\u5b9a\u8fd0\u884c\u3002<\/p>\n
\n\u771f\u7a7a\u70ed\u5904\u7406
\n\u5728\u771f\u7a7a\u70ed\u5904\u7406\u8fc7\u7a0b\u4e2d\u7cbe\u786e\u6d4b\u91cf\u4e0e\u63a7\u5236\u771f\u7a7a\u5ea6\u3002\u5de5\u4e1a\u5e94\u7528\u53ef\u9009\u914d\u6321\u677f\u53ca\u9540\u5c42\u4fdd\u62a4\u7ec4\u4ef6\u3002<\/p>\n
\n\u592a\u7a7a\u6a21\u62df
\n\u5728\u6a21\u62df\u6781\u7aef\u592a\u7a7a\u73af\u5883\u65f6\uff0c\u7cbe\u51c6\u6d4b\u91cf\u771f\u7a7a\u6c14\u4f53\u538b\u529b\u3002<\/p>\n
\n\u84b8\u998f\u5de5\u827a
\n\u7528\u4e8e\u6c22\u6c14\u50a8\u7f50\u53ca\u8f93\u9001\u7ba1\u9053\u4e2d\u7edd\u7f18\u771f\u7a7a\u7684\u6d4b\u91cf\u4e0e\u76d1\u6d4b\u3002<\/p>\n
\n\u534a\u5bfc\u4f53\u5236\u9020
\n\u9002\u7528\u4e8e\u5316\u5b66\u6c14\u76f8\u6c89\u79ef (CVD)\u3001\u7269\u7406\u6c14\u76f8\u6c89\u79ef (PVD) \u53ca\u534a\u5bfc\u4f53\u524d\u7ea7\u7ba1\u7ebf\u7684\u771f\u7a7a\u6d4b\u91cf\u3002\u53ef\u9009\u914d\u9676\u74f7\u6297\u8150\u8680\u4f20\u611f\u5668\u3002<\/p>\n
\n\u8fc7\u6c27\u5316\u6c22\u706d\u83cc
\n\u5229\u7528\u53cc\u4f20\u611f\u5668\u4e00\u4f53\u5316\u8bbe\u8ba1\uff0c\u4e3a\u8fc7\u6c27\u5316\u6c22\u706d\u83cc\u5de5\u827a\u63d0\u4f9b\u5168\u9762\u6d4b\u91cf\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n\n\n
\n \n Specifications<\/h4>\n<\/td>\n
<\/td>\n<\/tr>\n \n Measuring range in mbar<\/td>\n 5E-3 to 1333 mbar (3.75E-3 to 1000 Torr)<\/td>\n<\/tr>\n \n Measuring principle 5E-3 to 3.99 mbar<\/td>\n Capacitance Diaphragm Gauge (CDG)<\/td>\n<\/tr>\n \n Measuring principle 4 to 5.99 mbar<\/td>\n Blended CDG \/ Piezo Diaphragm<\/td>\n<\/tr>\n \n Measuring principle 6 to 1333 mbar<\/td>\n Piezo Diaphragm<\/td>\n<\/tr>\n \n Accuracy 5E-3 to 9.99E-3 mbar<\/td>\n 5% of reading<\/td>\n<\/tr>\n \n Accuracy 1E-2 to 799 mbar<\/td>\n 0.5% of reading<\/td>\n<\/tr>\n \n Accuracy 800 to 1099 mbar<\/td>\n 0.25% of reading<\/td>\n<\/tr>\n \n Accuracy 1100 to 1333 mbar<\/td>\n 0.5% reading<\/td>\n<\/tr>\n \n Hysteresis 1E-3 to 10 mbar (ISO19685:2017)<\/td>\n 1%<\/td>\n<\/tr>\n \n Hysteresis 10 to 1333 mbar (ISO19685:2017)<\/td>\n 0.1%<\/td>\n<\/tr>\n \n Analog output resolution<\/td>\n 16 bit (150 \u03bcV)<\/td>\n<\/tr>\n \n Analog output update rate<\/td>\n 124 Hz<\/td>\n<\/tr>\n \n Response time (ISO 19685:2017)<\/td>\n <20 ms<\/td>\n<\/tr>\n \n Temperature compensation<\/td>\n +10 to +50 \u00b0C<\/td>\n<\/tr>\n \n Solid state relay set point range<\/td>\n 5E-6 to 1333 mbar (3.75E-6 to 1000 Torr)<\/td>\n<\/tr>\n \n Solid state relay contact rating<\/td>\n 50 V, 100 mArms \/ mADC<\/td>\n<\/tr>\n \n Solid state relay approvals<\/td>\n UL Recognized: File E76270<\/p>\n \n Environment conditions<\/strong><\/td>\n <\/td>\n<\/tr>\n \n Operating ambient temperature<\/td>\n -20 to +50 \u00b0C<\/td>\n<\/tr>\n \n Media temperature<\/td>\n -20 to +50 \u00b0C<\/td>\n<\/tr>\n \n Storage ambient temperature<\/td>\n -20 to +80 \u00b0C<\/td>\n<\/tr>\n \n Bake-out temperature (non-operating)<\/td>\n +80 \u00b0C<\/td>\n<\/tr>\n \n Maximum media pressure(3)<\/td>\n 4 bar absolute<\/td>\n<\/tr>\n \n Mounting position<\/td>\n Arbitrary (4)<\/td>\n<\/tr>\n \n Protection rating, EN 60529\/A2:2013<\/td>\n IP40<\/td>\n<\/tr>\n \n Humidity, IEC 68-2-38<\/td>\n 98%, non-condensing<\/td>\n<\/tr>\n \n Power supply<\/strong><\/td>\n <\/td>\n<\/tr>\n \n Supply voltage<\/td>\n 12-30 VDC<\/td>\n<\/tr>\n \n Power consumption<\/td>\n 350 mW (max)<\/td>\n<\/tr>\n \n Reverse polarity protection<\/td>\n Yes<\/td>\n<\/tr>\n \n Overvoltage protection<\/td>\n Yes<\/td>\n<\/tr>\n \n Internal fuse<\/td>\n 100 mA (thermal recoverable)<\/td>\n<\/tr>\n \n Materials<\/strong><\/td>\n <\/td>\n<\/tr>\n \n Enclosure<\/td>\n SS 1.4307 \/ AISI 304L \/ Aluminum 6061<\/td>\n<\/tr>\n \n Vacuum Process flange (media wetted)<\/td>\n SS 1.4401 \/ AISI 316<\/td>\n<\/tr>\n \n Vacuum exposed materials (media wetted) Standard version<\/td>\n 316 Stainless steel, Kovar, glass, silicon, , AI2O3, gold, Viton\u00ae, low out-gassing epoxy resin, solder, RO4305, vitreous silica<\/td>\n<\/tr>\n \n Vacuum exposed materials (media wetted) Parylene protected version<\/td>\n 316 Stainless steel, Viton\u00ae, Parylene<\/td>\n<\/tr>\n \n Vacuum exposed materials (media wetted) Ceramic protected version<\/td>\n 316 Stainless steel, Viton\u00ae, Aluminum oxide ceramic (AI2O3)<\/td>\n<\/tr>\n \n Process leak tightness<\/td>\n <1\u00b710-9 mbar\u00b7l\/s<\/td>\n<\/tr>\n \n Approvals<\/strong><\/td>\n <\/td>\n<\/tr>\n \n CE<\/td>\n EMC directive 2014\/30\/EU<\/td>\n<\/tr>\n \n RoHS compliance<\/td>\n Directive EU 2015\/863<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n