{"id":263,"date":"2025-03-27T17:31:12","date_gmt":"2025-03-27T09:31:12","guid":{"rendered":"https:\/\/www.bihec.com\/sens4-vacuum\/?p=263"},"modified":"2025-03-27T17:32:01","modified_gmt":"2025-03-27T09:32:01","slug":"sens4-vpm-17-tricap-atm%e7%9c%9f%e7%a9%ba%e4%bc%a0%e6%84%9f%e5%99%a8","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/sens4-vacuum\/sens4-vpm-17-tricap-atm%e7%9c%9f%e7%a9%ba%e4%bc%a0%e6%84%9f%e5%99%a8\/","title":{"rendered":"sens4 VPM-17 TriCAP ATM\u771f\u7a7a\u4f20\u611f\u5668"},"content":{"rendered":"

\u8d85\u5bbd\u6d4b\u91cf\u8303\u56f4
\n1.0E-6\u81f31333\u6beb\u5df4\u76849\u4e2a\u91cf\u7a0b\uff0c\u5176\u4e2d5E-3\u81f31333\u6beb\u5df4\u533a\u95f4\u652f\u6301\u6c14\u4f53\u7c7b\u578b\u65e0\u5173\u6d4b\u91cf<\/p>\n

\u521b\u65b0\u56db\u91cd\u4f20\u611f\u5668\u7ec4\u5408
\nMEMS\u76ae\u62c9\u5c3c\u3001\u7535\u5bb9\u8584\u819c\u3001\u538b\u7535\u8584\u819c\u4e0e\u5927\u6c14\u538b\u4f20\u611f\u5668\u7684\u667a\u80fd\u878d\u5408<\/p>\n

CDG\u81ea\u52a8\u8c03\u96f6\u529f\u80fd
\n\u81ea\u52a8\u5f52\u96f6\u6280\u672f\u5f7b\u5e95\u514d\u9664\u4e86\u624b\u52a8\u8c03\u6821\u9700\u6c42<\/p>\n

\u5927\u6c14\u53c2\u8003\u5f00\u5173\u6a21\u5f0f
\n\u57fa\u4e8e\u5927\u6c14\u538b\u7684\u76f8\u5bf9\u6d4b\u91cf\u5b9e\u73b0\u771f\u7a7a\u7cfb\u7edf\u7cbe\u786e\u6392\u6c14\u63a7\u5236<\/p>\n

VPM-17 TriCAP™ ATM\u771f\u7a7a\u4f20\u611f\u5668\u6811\u7acb\u4e86\u5168\u65b0\u6807\u6746\uff0c\u4e3a\u5e7f\u6cdb\u771f\u7a7a\u5e94\u7528\u63d0\u4f9b\u4e00\u4f53\u5316\u6d4b\u91cf\u89e3\u51b3\u65b9\u6848\u3002\u4e0e\u4f20\u7edf\u771f\u7a7a\u8ba1\u4e0d\u540c\uff0c\u8be5\u8bbe\u5907\u4e0d\u4ec5\u5177\u59075.0E-3\u81f31333 mbar\u7684\u6c14\u4f53\u7c7b\u578b\u65e0\u5173\u578b\u7ecf\u6d4e\u6d4b\u91cf\u8303\u56f4\uff0c\u8fd8\u96c6\u6210\u53ef\u4f4e\u81f31E-6 mbar\u7684\u76ae\u62c9\u5c3c\u70ed\u635f\u8017\u6d4b\u91cf\u80fd\u529b\u3002<\/p>\n

\u5728\u6c14\u4f53\u6210\u5206\u53ef\u80fd\u53d8\u5316\u7684\u771f\u7a7a\u5e94\u7528\u4e2d\uff0c\u4f20\u7edf\u4f9d\u8d56\u6c14\u4f53\u7c7b\u578b\u7684\u76ae\u62c9\u5c3c\u89c4\u6613\u5bfc\u81f4\u6d4b\u91cf\u8bef\u5dee\u3002TriCAP™ ATM\u4f20\u611f\u5668\u91c7\u7528\u7cbe\u5bc6\u7535\u5bb9\u5f0f\u8584\u819c\u89c4\uff08CDG\uff09\u6280\u672f\uff0c\u5f7b\u5e95\u6d88\u9664\u6c14\u4f53\u4f9d\u8d56\u6027\uff0c\u5373\u4f7f\u6c14\u4f53\u7279\u6027\u53d8\u5316\u4e5f\u80fd\u786e\u4fdd\u6d4b\u91cf\u7cbe\u51c6\u5ea6\u3002<\/p>\n

\u9664\u771f\u7a7a\u6d4b\u91cf\u5916\uff0cVPM-17\u8fd8\u80fd\u5b9e\u73b0\u76f8\u5bf9\u4e8e\u5927\u6c14\u538b\u7684\u5dee\u538b\u6d4b\u91cf\uff0c\u4e3a\u771f\u7a7a\u7cfb\u7edf\u6392\u6c14\u8fc7\u7a0b\u63d0\u4f9b\u7cbe\u786e\u63a7\u5236\u3002<\/p>\n

\u91cd\u65b0\u5b9a\u4e49\u771f\u7a7a\u6d4b\u91cf\u6807\u51c6
\nTriCAP™ ATM\u771f\u7a7a\u8ba1\u5f00\u521b\u6027\u5730\u91c7\u7528\u591a\u4f20\u611f\u5668\u878d\u5408\u6280\u672f\uff0c\u65e2\u80fd\u4f5c\u4e3a\u4f20\u7edf\u76ae\u62c9\u5c3c\u89c4\u5e94\u7528\u7684\u6027\u80fd\u5347\u7ea7\u65b9\u6848\uff0c\u53c8\u53ef\u66ff\u4ee3\u5206\u7acb\u7684\u7535\u5bb9\u5f0f\u538b\u529b\u8ba1\u4e0e\u76ae\u62c9\u5c3c\u89c4\u7ec4\u5408\uff0c\u63d0\u4f9b\u9ad8\u6027\u4ef7\u6bd4\u7684\u4e00\u4f53\u5316\u6d4b\u91cf\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n

\"\"<\/p>\n

CDG\u81ea\u52a8\u96f6\u70b9\u6821\u51c6\u6280\u672f<\/strong>
\n\u96c6\u6210\u7684MEMS\u76ae\u62c9\u5c3c\u70ed\u635f\u8017\u4f20\u611f\u5668\u5c06\u6d4b\u91cf\u8303\u56f4\u6269\u5c55\u81f31E-6 mbar\uff0c\u5e76\u4e3a\u7535\u5bb9\u5f0f\u538b\u529b\u8ba1\u5f15\u5165\u521b\u65b0\u6027\u81ea\u52a8\u96f6\u70b9\u6821\u51c6\u529f\u80fd\uff0c\u5f7b\u5e95\u6d88\u9664\u4e86\u4f20\u7edf\u7535\u5bb9\u8584\u819c\u89c4\u9700\u624b\u52a8\u8c03\u96f6\u7684\u64cd\u4f5c\u9700\u6c42\u3002\u65e0\u9700\u6309\u952e\u8c03\u96f6\u2014\u2014\u4ec5\u9700\u62bd\u771f\u7a7a\u81f3\u81ea\u52a8\u6821\u51c6\u70b9\uff0c\u7535\u5bb9\u8584\u819c\u89c4\u5373\u81ea\u52a8\u5b8c\u6210\u6821\u51c6\uff0c\u968f\u65f6\u63d0\u4f9b\u7cbe\u786e\u6d4b\u91cf\u3002<\/p>\n

\u4e25\u82db\u5de5\u51b5\u5e94\u5bf9\u65b9\u6848<\/strong>
\n\u9488\u5bf9\u53ef\u80fd\u63a5\u89e6\u8150\u8680\u6027\u6216\u6d3b\u6027\u6c14\u4f53\u7684\u5e94\u7528\u573a\u666f\uff0cTriCAP™\u53ef\u9009\u914d\u5171\u5f62\u4fdd\u62a4\u6d82\u5c42\u4f5c\u4e3a\u9ad8\u6548\u9632\u62a4\u5c4f\u969c\u3002<\/p>\n

\u8be5\u7cfb\u5217\u4f20\u611f\u5668\u8fd8\u53ef\u9009\u914d\u9676\u74f7\u6216\u6d3e\u745e\u6797\uff08Parylene\uff09\u9632\u62a4\u5c42\uff1a<\/p>\n