{"id":263,"date":"2025-03-27T17:31:12","date_gmt":"2025-03-27T09:31:12","guid":{"rendered":"https:\/\/www.bihec.com\/sens4-vacuum\/?p=263"},"modified":"2025-03-27T17:32:01","modified_gmt":"2025-03-27T09:32:01","slug":"sens4-vpm-17-tricap-atm%e7%9c%9f%e7%a9%ba%e4%bc%a0%e6%84%9f%e5%99%a8","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/sens4-vacuum\/sens4-vpm-17-tricap-atm%e7%9c%9f%e7%a9%ba%e4%bc%a0%e6%84%9f%e5%99%a8\/","title":{"rendered":"sens4 VPM-17 TriCAP ATM\u771f\u7a7a\u4f20\u611f\u5668"},"content":{"rendered":"<p>\u8d85\u5bbd\u6d4b\u91cf\u8303\u56f4<br \/>\n1.0E-6\u81f31333\u6beb\u5df4\u76849\u4e2a\u91cf\u7a0b\uff0c\u5176\u4e2d5E-3\u81f31333\u6beb\u5df4\u533a\u95f4\u652f\u6301\u6c14\u4f53\u7c7b\u578b\u65e0\u5173\u6d4b\u91cf<\/p>\n<p>\u521b\u65b0\u56db\u91cd\u4f20\u611f\u5668\u7ec4\u5408<br \/>\nMEMS\u76ae\u62c9\u5c3c\u3001\u7535\u5bb9\u8584\u819c\u3001\u538b\u7535\u8584\u819c\u4e0e\u5927\u6c14\u538b\u4f20\u611f\u5668\u7684\u667a\u80fd\u878d\u5408<\/p>\n<p>CDG\u81ea\u52a8\u8c03\u96f6\u529f\u80fd<br \/>\n\u81ea\u52a8\u5f52\u96f6\u6280\u672f\u5f7b\u5e95\u514d\u9664\u4e86\u624b\u52a8\u8c03\u6821\u9700\u6c42<\/p>\n<p>\u5927\u6c14\u53c2\u8003\u5f00\u5173\u6a21\u5f0f<br \/>\n\u57fa\u4e8e\u5927\u6c14\u538b\u7684\u76f8\u5bf9\u6d4b\u91cf\u5b9e\u73b0\u771f\u7a7a\u7cfb\u7edf\u7cbe\u786e\u6392\u6c14\u63a7\u5236<\/p>\n<p>VPM-17 TriCAP&#x2122; ATM\u771f\u7a7a\u4f20\u611f\u5668\u6811\u7acb\u4e86\u5168\u65b0\u6807\u6746\uff0c\u4e3a\u5e7f\u6cdb\u771f\u7a7a\u5e94\u7528\u63d0\u4f9b\u4e00\u4f53\u5316\u6d4b\u91cf\u89e3\u51b3\u65b9\u6848\u3002\u4e0e\u4f20\u7edf\u771f\u7a7a\u8ba1\u4e0d\u540c\uff0c\u8be5\u8bbe\u5907\u4e0d\u4ec5\u5177\u59075.0E-3\u81f31333 mbar\u7684\u6c14\u4f53\u7c7b\u578b\u65e0\u5173\u578b\u7ecf\u6d4e\u6d4b\u91cf\u8303\u56f4\uff0c\u8fd8\u96c6\u6210\u53ef\u4f4e\u81f31E-6 mbar\u7684\u76ae\u62c9\u5c3c\u70ed\u635f\u8017\u6d4b\u91cf\u80fd\u529b\u3002<\/p>\n<p>\u5728\u6c14\u4f53\u6210\u5206\u53ef\u80fd\u53d8\u5316\u7684\u771f\u7a7a\u5e94\u7528\u4e2d\uff0c\u4f20\u7edf\u4f9d\u8d56\u6c14\u4f53\u7c7b\u578b\u7684\u76ae\u62c9\u5c3c\u89c4\u6613\u5bfc\u81f4\u6d4b\u91cf\u8bef\u5dee\u3002TriCAP&#x2122; ATM\u4f20\u611f\u5668\u91c7\u7528\u7cbe\u5bc6\u7535\u5bb9\u5f0f\u8584\u819c\u89c4\uff08CDG\uff09\u6280\u672f\uff0c\u5f7b\u5e95\u6d88\u9664\u6c14\u4f53\u4f9d\u8d56\u6027\uff0c\u5373\u4f7f\u6c14\u4f53\u7279\u6027\u53d8\u5316\u4e5f\u80fd\u786e\u4fdd\u6d4b\u91cf\u7cbe\u51c6\u5ea6\u3002<\/p>\n<p>\u9664\u771f\u7a7a\u6d4b\u91cf\u5916\uff0cVPM-17\u8fd8\u80fd\u5b9e\u73b0\u76f8\u5bf9\u4e8e\u5927\u6c14\u538b\u7684\u5dee\u538b\u6d4b\u91cf\uff0c\u4e3a\u771f\u7a7a\u7cfb\u7edf\u6392\u6c14\u8fc7\u7a0b\u63d0\u4f9b\u7cbe\u786e\u63a7\u5236\u3002<\/p>\n<p>\u91cd\u65b0\u5b9a\u4e49\u771f\u7a7a\u6d4b\u91cf\u6807\u51c6<br \/>\nTriCAP&#x2122; ATM\u771f\u7a7a\u8ba1\u5f00\u521b\u6027\u5730\u91c7\u7528\u591a\u4f20\u611f\u5668\u878d\u5408\u6280\u672f\uff0c\u65e2\u80fd\u4f5c\u4e3a\u4f20\u7edf\u76ae\u62c9\u5c3c\u89c4\u5e94\u7528\u7684\u6027\u80fd\u5347\u7ea7\u65b9\u6848\uff0c\u53c8\u53ef\u66ff\u4ee3\u5206\u7acb\u7684\u7535\u5bb9\u5f0f\u538b\u529b\u8ba1\u4e0e\u76ae\u62c9\u5c3c\u89c4\u7ec4\u5408\uff0c\u63d0\u4f9b\u9ad8\u6027\u4ef7\u6bd4\u7684\u4e00\u4f53\u5316\u6d4b\u91cf\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n<p id=\"mknCvSK\"><img loading=\"lazy\" width=\"795\" height=\"274\" class=\"alignnone size-full wp-image-264 \" src=\"https:\/\/www.bihec.com\/sens4-vacuum\/wp-content\/uploads\/sites\/1977\/2025\/03\/img_67e517ae9f6cc.png\" alt=\"\" srcset=\"https:\/\/www.bihec.com\/sens4-vacuum\/wp-content\/uploads\/sites\/1977\/2025\/03\/img_67e517ae9f6cc.png 795w, https:\/\/www.bihec.com\/sens4-vacuum\/wp-content\/uploads\/sites\/1977\/2025\/03\/img_67e517ae9f6cc-300x103.png 300w, https:\/\/www.bihec.com\/sens4-vacuum\/wp-content\/uploads\/sites\/1977\/2025\/03\/img_67e517ae9f6cc-768x265.png 768w, https:\/\/www.bihec.com\/sens4-vacuum\/wp-content\/uploads\/sites\/1977\/2025\/03\/img_67e517ae9f6cc-500x172.png 500w\" sizes=\"(max-width: 795px) 100vw, 795px\" \/><\/p>\n<p><strong>CDG\u81ea\u52a8\u96f6\u70b9\u6821\u51c6\u6280\u672f<\/strong><br \/>\n\u96c6\u6210\u7684MEMS\u76ae\u62c9\u5c3c\u70ed\u635f\u8017\u4f20\u611f\u5668\u5c06\u6d4b\u91cf\u8303\u56f4\u6269\u5c55\u81f31E-6 mbar\uff0c\u5e76\u4e3a\u7535\u5bb9\u5f0f\u538b\u529b\u8ba1\u5f15\u5165\u521b\u65b0\u6027\u81ea\u52a8\u96f6\u70b9\u6821\u51c6\u529f\u80fd\uff0c\u5f7b\u5e95\u6d88\u9664\u4e86\u4f20\u7edf\u7535\u5bb9\u8584\u819c\u89c4\u9700\u624b\u52a8\u8c03\u96f6\u7684\u64cd\u4f5c\u9700\u6c42\u3002\u65e0\u9700\u6309\u952e\u8c03\u96f6\u2014\u2014\u4ec5\u9700\u62bd\u771f\u7a7a\u81f3\u81ea\u52a8\u6821\u51c6\u70b9\uff0c\u7535\u5bb9\u8584\u819c\u89c4\u5373\u81ea\u52a8\u5b8c\u6210\u6821\u51c6\uff0c\u968f\u65f6\u63d0\u4f9b\u7cbe\u786e\u6d4b\u91cf\u3002<\/p>\n<p><strong>\u4e25\u82db\u5de5\u51b5\u5e94\u5bf9\u65b9\u6848<\/strong><br \/>\n\u9488\u5bf9\u53ef\u80fd\u63a5\u89e6\u8150\u8680\u6027\u6216\u6d3b\u6027\u6c14\u4f53\u7684\u5e94\u7528\u573a\u666f\uff0cTriCAP&#x2122;\u53ef\u9009\u914d\u5171\u5f62\u4fdd\u62a4\u6d82\u5c42\u4f5c\u4e3a\u9ad8\u6548\u9632\u62a4\u5c4f\u969c\u3002<\/p>\n<p>\u8be5\u7cfb\u5217\u4f20\u611f\u5668\u8fd8\u53ef\u9009\u914d\u9676\u74f7\u6216\u6d3e\u745e\u6797\uff08Parylene\uff09\u9632\u62a4\u5c42\uff1a<\/p>\n<ul>\n<li><strong>\u9676\u74f7\u5c42<\/strong>\u5177\u6709\u5353\u8d8a\u7684\u8010\u8150\u8680\u6027\uff0c\u5e7f\u6cdb\u7528\u4e8e\u7535\u5bb9\u8584\u819c\u89c4\u7684\u771f\u7a7a\u4f20\u611f\u5668\u819c\u7247<\/li>\n<li><strong>\u6d3e\u745e\u6797<\/strong>\u4f5c\u4e3a\u4e00\u79cd\u7279\u79cd\u805a\u5408\u7269\uff0c\u517c\u5177\u4f18\u5f02\u8010\u8150\u8680\u6027\u4e0e\u758f\u6c34\u6027\uff0c\u7279\u522b\u9002\u5408\u51b7\u51bb\u5e72\u71e5\u3001\u706d\u83cc\u7b49\u533b\u7597\u5e94\u7528<\/li>\n<\/ul>\n<p>\u5728\u5b58\u5728\u9897\u7c92\u6c61\u67d3\u7684\u771f\u7a7a\u5de5\u827a\u4e2d\uff0cTriCAP&#x2122;\u53ef\u52a0\u88c5\u9632\u62a4\u6321\u677f\u963b\u9694\u5b8f\u89c2\u9897\u7c92\u3002\u7ed3\u5408\u4e0a\u8ff0\u9632\u62a4\u6d82\u5c42\u9009\u9879\uff0c\u8be5\u7cfb\u5217\u4f20\u611f\u5668\u4e13\u4e3a\u8010\u53d7\u6781\u7aef\u771f\u7a7a\u73af\u5883\u800c\u8bbe\u8ba1\u3002<\/p>\n<table class=\"table table-bordered o_table\">\n<tbody>\n<tr>\n<td class=\"bg-o-color-1\">\n<h4>Specifications<\/h4>\n<\/td>\n<td class=\"bg-o-color-1\"><\/td>\n<\/tr>\n<tr>\n<td>Measuring range in mbar<\/td>\n<td>1E-6 to 1333 mbar (7.5E-7 to 1000 Torr)<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Measuring principle 1E-6 to 1E-3 mbar<\/td>\n<td class=\"bg-100\">MEMS Pirani thermal conductivity<\/td>\n<\/tr>\n<tr>\n<td>Measuring principle 1E-3 to 5E-3\u00a0mbar<\/td>\n<td>Blended MEMS Pirani \/ CDG<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Measuring principle 5E-3 to 3.99\u00a0mbar<\/td>\n<td class=\"bg-100\">Capacitance Diaphragm Gauge (CDG)<\/td>\n<\/tr>\n<tr>\n<td>Measuring principle 4\u00a0to 5.99\u00a0mbar<\/td>\n<td>Blended CDG \/ Piezo Diaphragm<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Measuring principle 6\u00a0to 1333\u00a0mbar<\/td>\n<td class=\"bg-100\">Piezo Diaphragm<\/td>\n<\/tr>\n<tr>\n<td>Accuracy 1E-5 to\u00a09.99E-5 mbar<\/td>\n<td>25% of reading<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Accuracy 1E-4 to 9.99E-3 mbar<\/td>\n<td class=\"bg-100\">5% of reading<\/td>\n<\/tr>\n<tr>\n<td>Accuracy 1E-2\u00a0to 799\u00a0mbar<\/td>\n<td>0.5% of reading<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Accuracy 800\u00a0to 1099\u00a0mbar<\/td>\n<td class=\"bg-100\">0.25% of reading<\/td>\n<\/tr>\n<tr>\n<td>Accuracy 1100 to 1333 mbar<\/td>\n<td>0.5% reading<\/td>\n<\/tr>\n<tr>\n<td>Barometric measurement range<\/td>\n<td>300 to 1200 mbar<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Barometric accuracy<\/td>\n<td class=\"bg-100\">+\/- 0.5 mbar<\/td>\n<\/tr>\n<tr>\n<td>Atmospheric referenced pressure output range<\/td>\n<td>&#8211; 1333 to + 1333 mbar<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Hysteresis 1E-3 to 10 mbar (ISO19685:2017)<\/td>\n<td class=\"bg-100\">1%<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-o-color-4\">Hysteresis 10 to 1333 mbar (ISO19685:2017)<\/td>\n<td class=\"bg-o-color-4\">0.1%<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Analog output resolution<\/td>\n<td class=\"bg-100\">16 bit (150 \u03bcV)<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-o-color-4\">Analog output update rate<\/td>\n<td class=\"bg-o-color-4\">124 Hz<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Response time (ISO 19685:2017)<\/td>\n<td class=\"bg-100\">&lt;20 ms<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-o-color-4\">Temperature compensation<\/td>\n<td class=\"bg-o-color-4\">+10 to +50 \u00b0C<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Solid state relay set point range<\/td>\n<td class=\"bg-100\">5E-6 to 1333 mbar (3.75E-6 to 1000 Torr)<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-o-color-4\">Solid state relay contact rating<\/td>\n<td class=\"bg-o-color-4\">50 V, 100 mArms \/ mADC<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Solid state relay approvals<\/td>\n<td class=\"bg-100\">UL Recognized: File E76270<\/p>\n<p>CSA\u00a0Certified: Certificate 1175739<\/p>\n<p>EN\/IEC 60950-1 Certified<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-o-color-1\"><strong>Environment conditions<\/strong><\/td>\n<td class=\"bg-o-color-1\"><\/td>\n<\/tr>\n<tr>\n<td>Operating ambient temperature<\/td>\n<td>-20 to +50 \u00b0C<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Media temperature<\/td>\n<td class=\"bg-100\">-20 to +50 \u00b0C<\/td>\n<\/tr>\n<tr>\n<td>Storage ambient temperature<\/td>\n<td>-20 to +80 \u00b0C<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Bake-out temperature (non-operating)<\/td>\n<td class=\"bg-100\">+80 \u00b0C<\/td>\n<\/tr>\n<tr>\n<td>Maximum media pressure(3)<\/td>\n<td>4 bar absolute<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Mounting position<\/td>\n<td class=\"bg-100\">Arbitrary (4)<\/td>\n<\/tr>\n<tr>\n<td>Protection rating, EN 60529\/A2:2013<\/td>\n<td>IP40<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Humidity, IEC 68-2-38<\/td>\n<td class=\"bg-100\">98%, non-condensing<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-o-color-1\"><strong>Power supply<\/strong><\/td>\n<td class=\"bg-o-color-1\"><\/td>\n<\/tr>\n<tr>\n<td>Supply voltage<\/td>\n<td>12-30 VDC<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Power consumption<\/td>\n<td class=\"bg-100\">350 mW (max)<\/td>\n<\/tr>\n<tr>\n<td>Reverse polarity protection<\/td>\n<td>Yes<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Overvoltage protection<\/td>\n<td class=\"bg-100\">Yes<\/td>\n<\/tr>\n<tr>\n<td>Internal fuse<\/td>\n<td>100 mA (thermal recoverable)<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-o-color-1\"><strong>Materials<\/strong><\/td>\n<td class=\"bg-o-color-1\"><\/td>\n<\/tr>\n<tr>\n<td>Enclosure<\/td>\n<td>SS 1.4307 \/ AISI 304L \/ Aluminum 6061<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Vacuum Process flange (media wetted)<\/td>\n<td class=\"bg-100\">SS 1.4401 \/ AISI 316<\/td>\n<\/tr>\n<tr>\n<td>Vacuum exposed materials (media wetted) Standard version<\/td>\n<td>316 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, AI2O3, gold, Viton\u00ae, low out-gassing epoxy resin, solder, RO4305,\u00a0vitreous silica<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Vacuum exposed materials (media wetted) Parylene protected version<\/td>\n<td class=\"bg-100\">316 Stainless steel, Viton\u00ae, Parylene<\/td>\n<\/tr>\n<tr>\n<td>Vacuum exposed materials (media wetted) Ceramic protected version<\/td>\n<td>316 Stainless steel, Viton\u00ae, Aluminum oxide ceramic (AI2O3)<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Process leak tightness<\/td>\n<td class=\"bg-100\">&lt;1\u00b710-9 mbar\u00b7l\/s<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-o-color-1\"><strong>Approvals<\/strong><\/td>\n<td class=\"bg-o-color-1\"><\/td>\n<\/tr>\n<tr>\n<td>CE<\/td>\n<td>EMC directive 2014\/30\/EU<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">RoHS compliance<\/td>\n<td class=\"bg-100\">Directive EU 2015\/863<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<br><div class=\"tagcloud\"><a href=\"https:\/\/www.bihec.com\/sens4-vacuum\/tag\/sens4-vpm-17-tricap-atm%e7%9c%9f%e7%a9%ba%e4%bc%a0%e6%84%9f%e5%99%a8\/\" class=\"tag-cloud-link tag-link-0 tag-link-position-1\" style=\"font-size: 8pt;\" aria-label=\"sens4 VPM-17 TriCAP ATM\u771f\u7a7a\u4f20\u611f\u5668 (1\u4e2a\u9879\u76ee)\">sens4 VPM-17 TriCAP ATM\u771f\u7a7a\u4f20\u611f\u5668<\/a><\/div>","protected":false},"excerpt":{"rendered":"<p>\u8d85\u5bbd\u6d4b\u91cf\u8303\u56f4 1.0E-6\u81f31333\u6beb\u5df4\u76849\u4e2a\u91cf\u7a0b\uff0c\u5176\u4e2d5E-3\u81f31333\u6beb\u5df4\u533a\u95f4\u652f\u6301\u6c14\u4f53\u7c7b\u578b\u65e0\u5173\u6d4b\u91cf \u521b\u65b0\u56db\u91cd\u4f20\u611f\u5668\u7ec4\u5408 MEMS\u76ae\u62c9\u5c3c\u3001\u7535\u5bb9\u8584\u819c\u3001\u538b\u7535\u8584\u819c\u4e0e\u5927\u6c14\u538b\u4f20\u611f\u5668\u7684\u667a\u80fd\u878d <\/p>\n","protected":false},"author":12,"featured_media":228,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[1,4],"tags":[36],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v17.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>sens4 VPM-17 TriCAP 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