Sens4\u4e0e\u5176\u4ed6\u4f9b\u5e94\u5546\u7684\u4f20\u7edf\u5bfc\u7ebf\u76ae\u62c9\u5c3c\u548cMEMS \u76ae\u62c9\u5c3c\u4f20\u611f\u5668\u76f8\u6bd4\uff0cSmartPirani™\u7684\u57fa\u672c\u7cbe\u5ea6\u548c\u52a8\u6001\u8303\u56f4\u66f4\u80dc\u4e00\u7b79\u3002\u5728\u67d0\u4e9b\u5e94\u7528\u4e2d\uff0c\u8d85\u5bbd\u7684\u6d4b\u91cf\u8303\u56f4\u6d88\u9664\u4e86\u5bf9\u989d\u5916\u6602\u8d35\u7684\u9ad8\u771f\u7a7a\u7535\u79bb\u8ba1\u7684\u9700\u6c42\u3002<\/span><\/p>\n

\u53ef\u7f16\u7a0b\u4f20\u611f\u5668\u8bbe\u7f6e\u548c\u53c2\u6570<\/span><\/h2>\n
Sens4 \u7528\u6237\u53ef\u901a\u8fc7\u521b\u65b0\u7684 S4-Connect™ \u6570\u5b57\u901a\u4fe1\u63a5\u53e3\u4ece PC \u6216\u667a\u80fd\u624b\u673a\u5bf9\u4f20\u611f\u5668\u8bbe\u7f6e\u548c\u53c2\u6570\u8fdb\u884c\u7f16\u7a0b\u3002\u5e26\u6709 RS-232 \u6216 RS-485 \u4e32\u884c\u63a5\u53e3\u7684\u4f20\u611f\u5668\u53ef\u4ee5\u901a\u8fc7\u4e32\u884c\u63a5\u53e3\u6216 S4-Connect™ \u63a5\u53e3\u8fdb\u884c\u914d\u7f6e\u3002\u6570\u5b57\u63a5\u53e3\u652f\u6301\u8bca\u65ad\u3001\u9884\u6d4b\u6027\u7ef4\u62a4\u3001\u7ef4\u4fee\u3001\u6821\u51c6\u3001\u8bbe\u5b9a\u503c\u914d\u7f6e\u3001\u6a21\u62df\u8f93\u51fa\u7f29\u653e\u548c\u5b9e\u65f6\u771f\u7a7a\u538b\u529b\u6d4b\u91cf\u503c\u7684\u91c7\u96c6\uff0c\u4ee5\u4fbf\u5728\u5c4f\u5e55\u4e0a\u663e\u793a\u3002S4-Connect™ USB \u7f16\u7a0b\u5668\u4e0e\u514d\u8d39\u3001\u76f4\u89c2\u7684\u914d\u7f6e\u8f6f\u4ef6\u76f8\u7ed3\u5408\uff0c\u662f\u7528\u4e8e\u4f20\u611f\u5668\u7f16\u7a0b\u3001\u5b9e\u65f6\u6d4b\u91cf\u548c\u8bca\u65ad\u7684\u5373\u63d2\u5373\u7528\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n
\u901a\u8fc7\u53ef\u9760\u800c\u7a33\u5065\u7684\u8bbe\u5b9a\u70b9\u7ee7\u7535\u5668\u63a7\u5236\u6765\u63a7\u5236\u771f\u7a7a\u538b\u529b<\/span><\/h2>\n
Sens4 SmartPirani™ \u771f\u7a7a\u4f20\u611f\u5668\u914d\u6709\u4e09\u4e2a\u72ec\u7acb\u7684\u56fa\u6001\u5f00\u5173\u7ee7\u7535\u5668\uff0c\u53ef\u7528\u4e8e\u6cf5\u3001\u9600\u95e8\u3001\u5b89\u5168\u8054\u9501\u7535\u8def\u548c\u5176\u4ed6\u5916\u90e8\u8bbe\u5907\u7684\u5916\u90e8\u63a7\u5236\u3002\u57fa\u672c\u63a7\u5236\u4f7f\u7528\u5177\u6709\u53ef\u7f16\u7a0b\u8bbe\u5b9a\u70b9\u548c\u8fdf\u6ede\u503c\u7684\u5f00\/\u5173\u8c03\u8282\u3002\u6bcf\u4e2a\u56fa\u6001\u7ee7\u7535\u5668\u90fd\u63d0\u4f9b\u5e38\u95ed\u548c\u5e38\u5f00\u89e6\u70b9\u3002<\/p>\n
\u4e0e\u673a\u7535\u7ee7\u7535\u5668\u76f8\u6bd4\uff0c\u56fa\u6001\u7ee7\u7535\u5668\u5177\u6709\u66f4\u9ad8\u7684\u53ef\u9760\u6027\u548c\u66f4\u5feb\u7684\u5f00\u5173\u65f6\u95f4\uff0c\u540c\u65f6\u63d0\u4f9b\u65e0\u7535\u5f27\u89e6\u70b9\uff0c\u5e76\u4e14\u5728\u5f00\u5173\u89e6\u70b9\u65f6\u4e0d\u4f1a\u4ea7\u751f EMI\uff08\u7535\u78c1\u5e72\u6270\uff09\u3002<\/p>\n
Sens4 SmartPirani™ \u7ee7\u7535\u5668\u7ecf\u4e45\u8010\u7528\uff0c\u5df2\u901a\u8fc7 UL \u8ba4\u8bc1\u3001CSA \u8ba4\u8bc1\u548c EN\/IEC 60950-1 \u8ba4\u8bc1\uff0c\u5728\u7528\u4e8e\u63a7\u5236\u5173\u952e\u771f\u7a7a\u8fc7\u7a0b\u548c\u9ad8\u5faa\u73af\u5e94\u7528\u65f6\u5177\u6709\u6700\u5927\u7684\u4fe1\u5fc3\u3002<\/p>\n
\u5bf9\u4e8e\u9700\u8981\u5927\u6c14\u5f00\u5173\u529f\u80fd\u7684\u5e94\u7528\uff0c\u5982\u8d1f\u8f7d\u9501\u771f\u7a7a\u7cfb\u7edf\uff0cVPM-7<\/a> SmartPirani™ ATM\u00a0\u63d0\u4f9b\u4e0e VPM-5 \u76f8\u540c\u7684\u6027\u80fd\u3001\u7279\u6027\u548c\u529f\u80fd\uff0c\u4f46\u5177\u6709\u989d\u5916\u7684\u7cbe\u5bc6\u5927\u6c14\u5f00\u5173\u529f\u80fd\u3002<\/p>\n
\u7528\u4e8e\u5916\u90e8\u8bfb\u6570\u7684\u6a21\u62df\u7535\u538b\u8f93\u51fa<\/span><\/h2>\n
Sens4 SmartPirani™\u771f\u7a7a\u4f20\u611f\u5668\u5177\u6709\u597d\u7684\u7684\u529f\u80fd\u548c\u667a\u80fd\u6280\u672f\uff0c\u4f46\u8be5\u4f20\u611f\u5668\u53ef\u4ee5\u4f5c\u4e3a\u72ec\u7acb\u7684\u6a21\u62df\u8bbe\u5907\u8fd0\u884c\uff0c\u63d0\u4f9b\u7535\u538b\u548c\u8fd4\u56de\u6d4b\u91cf\u4fe1\u53f7\u3002\u6a21\u62df\u7535\u538b\u8f93\u51fa\u53ef\u901a\u8fc7 S4-Connect™ \u6216 RS-232\/RS-485 \u63a5\u53e3\u914d\u7f6e\u4e3a 0-10 VDC \u8303\u56f4\u5185\u7684\u4efb\u4f55\u4efb\u610f\u7f29\u653e\u3002\u6a21\u62df\u8f93\u51fa\u7f29\u653e\u529f\u80fd\u53ef\u5728\u6709\u9650\u7684\u538b\u529b\u8303\u56f4\u5185\u653e\u5927\u4fe1\u53f7\u3002<\/p>\n
\u6b64\u5916\uff0c\u8fd8\u63d0\u4f9b\u591a\u79cd\u6a21\u62df\u8f93\u51fa\u7f29\u653e\u9009\u9879\uff0c\u4ee5\u6a21\u62df\u5176\u4ed6\u4f9b\u5e94\u5546\u7684\u771f\u7a7a\u8ba1\u548c\u4f20\u611f\u5668\u3002<\/p>\n
\u81ea\u5b9a\u4e49\u8bbe\u7f6e<\/span><\/h2>\n
Sens4 SmartPirani™\u771f\u7a7a\u4f20\u611f\u5668\u53ef\u4ee5\u5b9a\u5236\u914d\u7f6e\uff0c\u4ee5\u6ee1\u8db3\u7279\u5b9a\u7684\u5e94\u7528\u8981\u6c42\u3002\u9884\u914d\u7f6e\u9009\u9879\u7684\u793a\u4f8b\u5305\u62ec\u6d4b\u91cf\u8303\u56f4\u3001\u771f\u7a7a\u538b\u529b\u5355\u4f4d\u3001\u8bbe\u5b9a\u503c\u914d\u7f6e\u548c\u8f93\u51fa\u4fe1\u53f7\u7f29\u653e\u3002\u5b9a\u5236\u4ea7\u54c1\u5c06\u88ab\u5206\u914d\u4e00\u4e2a\u552f\u4e00\u7684\u96f6\u4ef6\u7f16\u53f7\uff0c\u4ee5\u4fbf\u5c06\u6765\u8f7b\u677e\u7b80\u5355\u5730\u91cd\u65b0\u8ba2\u8d2d\u3002<\/p>\n
Sens4 SMARTPIRANI™\u771f\u7a7a\u4f20\u611f\u5668\u7684\u5e94\u7528<\/span><\/h3>\n
\n
\u8d28\u8c31\u4eea<\/span><\/li>\n
\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c<\/span><\/li>\n
\u7089\u819b\u70ed\u5904\u7406<\/span><\/li>\n
\u73bb\u7483\u3001\u5149\u5b66\u3001\u5de5\u5177\u3001\u5305\u88c5\u3001\u88c5\u9970\u7684PVD\u6d82\u5c42<\/span><\/li>\n
\u5236\u51b7\u5236\u9020\u4e0e\u670d\u52a1<\/span><\/li>\n
\u534a\u5bfc\u4f53\u52a0\u5de5\u8bbe\u5907<\/span><\/li>\n
\u771f\u7a7a\u6cf5\u670d\u52a1<\/span><\/li>\n<\/ul>\n
SENS4 VPM-5<\/a> \u771f\u7a7a\u538b\u529b\u4f20\u611f\u5668guige<\/p>\n\n\n\n<\/colgroup>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\n
\n
Specifications<\/p>\n<\/div>\n<\/td>\n
\n
<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Measuring range<\/p>\n<\/div>\n<\/td>\n
\n
\n
1\u00d710^{-6<\/sup><\/span>\u00a0to 1333 mbar (7.5\u00d710^{-7<\/sup><\/span>\u00a0to 1000 Torr)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n}}
\n
\n
Measuring principle 1×10^{-6<\/sup>\u00a0to 1.5 mbar<\/p>\n<\/div>\n<\/td>\n}
\n
\n
MEMS Pirani thermal conductivity (Heat-loss)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Measuring principle 2 to 1333 mbar<\/p>\n<\/div>\n<\/td>\n
\n
\n
MEMS piezo resistive diaphragm<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Measuring principle 1.5 to 2 mbar<\/p>\n<\/div>\n<\/td>\n
\n
\n
Blended MEMS Pirani \/ piezo reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Accuracy 1\u00d710^{-5<\/sup>\u00a0to 9.99\u00d710^{-5<\/sup><\/p>\n<\/div>\n<\/td>\n}}
\n
\n
25% of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Accuracy 1\u00d710^{-4<\/sup>\u00a0to 7.99 mbar<\/p>\n<\/div>\n<\/td>\n}
\n
\n
5 % of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Accuracy 8.00 to 99.9 mbar<\/p>\n<\/div>\n<\/td>\n
\n
\n
1% of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Accuracy 100 to 800 mbar<\/p>\n<\/div>\n<\/td>\n
\n
\n
0.5% of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Accuracy 800 to 1099 mbar<\/p>\n<\/div>\n<\/td>\n
\n
\n
0.25 % of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Accuracy 1100 to 1333 mbar<\/p>\n<\/div>\n<\/td>\n
\n
\n
0.5% of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Maximum measuring resolution<\/p>\n<\/div>\n<\/td>\n
\n
\n
1.0E-7 mbar<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Output signal 1<\/p>\n<\/div>\n<\/td>\n
\n
\n
1 VDC \/ decade (0.5VDC at 1.0E-6 mbar)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Output signal 2 (MKS 901P, 910, 925 Emulation)<\/p>\n<\/div>\n<\/td>\n
\n
\n
1 VDC \/ decade (1.0VDC at 1.0E-5 Torr)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Output signal 3 (MKS GP 275 Convectron^{\u00ae<\/sup>)<\/p>\n<\/div>\n<\/td>\n}
\n
\n
0.375 to 5.659 VDC<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Output signal 4 (MKS 523)<\/p>\n<\/div>\n<\/td>\n
\n
\n
0.5 VDC \/ decade (MKS 523)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Output signal 5 (Inficon PSG500, PSG502, PSG510, PSG512 )<\/p>\n<\/div>\n<\/td>\n
\n
\n
1.9 – 10 VDC (Inficon PSG55x, Leybold TTR91)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Output signal 6 (Leybold TTR91, TTR96, TTR101)<\/p>\n<\/div>\n<\/td>\n
\n
\n
1.5 – 8.5 VDC (Pfeiffer TPR260\/27x\/28x)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Output signal 7 (MKS GP 275 Convectron^{\u00ae<\/sup>)<\/p>\n<\/div>\n<\/td>\n}
\n
\n
1.9 – 9.1 VDC<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Output signal 8 (MKS GP 390 MicroIon)<\/p>\n<\/div>\n<\/td>\n
\n
\n
0.5 VDC \/ decade<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Output Signal 9 (MKS 971, 972, 974B)<\/p>\n<\/div>\n<\/td>\n
\n
\n
0.5 VDC \/ decade (MKS 971B, 972B, 974B)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Output signal 10 (Inficon Gemini output 1)<\/p>\n<\/div>\n<\/td>\n
\n
\n
1 VDC \/ decade<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Output signal 11 (Inficon Gemini output 2)<\/p>\n<\/div>\n<\/td>\n
\n
\n
1.33\u00a0 VDC \/ decade<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Output signal 12 (Inficon Gemini output 3)<\/p>\n<\/div>\n<\/td>\n
\n
\n
0.6 VDC \/ decade<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Output signal resolution<\/p>\n<\/div>\n<\/td>\n
\n
\n
16 bit<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Solid state relay contact rating (optional)<\/p>\n<\/div>\n<\/td>\n
\n
\n
250 mA, 50 VDC \/ VAC peak<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Environment conditions<\/p>\n<\/div>\n<\/td>\n
\n
<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Operating ambient temperature<\/p>\n<\/div>\n<\/td>\n
\n
\n
-40 to +50 \u00b0C (-40 to +122 \u00b0F)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Media temperature<\/p>\n<\/div>\n<\/td>\n
\n
\n
-20 to +50 \u00b0C (-58 to 122 \u00b0F)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Storage ambient temperature<\/p>\n<\/div>\n<\/td>\n
\n
\n
-40 to +125 \u00b0C\u00a0 (-40 to +257 \u00b0F)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Maximum media pressure<\/p>\n<\/div>\n<\/td>\n
\n
\n
10 bar<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Mounting position<\/p>\n<\/div>\n<\/td>\n
\n
\n
Arbitrary<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Protection rating, EN 60529\/A2:2013<\/p>\n<\/div>\n<\/td>\n
\n
\n
IP40<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Humidity, IEC 68-2-38<\/p>\n<\/div>\n<\/td>\n
\n
\n
98%, non-condensing<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Power supply<\/p>\n<\/div>\n<\/td>\n
\n
<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Supply voltage<\/p>\n<\/div>\n<\/td>\n
\n
\n
12-30 VDC<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Power consumption<\/p>\n<\/div>\n<\/td>\n
\n
\n
350 mW (Max)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Reverse polarity protection<\/p>\n<\/div>\n<\/td>\n
\n
\n
Yes<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Overvoltage protection<\/p>\n<\/div>\n<\/td>\n
\n
\n
Yes<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Internal fuse<\/p>\n<\/div>\n<\/td>\n
\n
\n
100 mA (Thermal recoverable)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Materials<\/p>\n<\/div>\n<\/td>\n
\n
<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Vacuum process flange<\/p>\n<\/div>\n<\/td>\n
\n
\n
316 stainless steel<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Enclosure<\/p>\n<\/div>\n<\/td>\n
\n
\n
316 stainless steel \/ Aluminum<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
Vacuum exposed materials (media wetted)<\/p>\n<\/div>\n<\/td>\n
\n
\n
316 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO_{2<\/sub>, Si_{3<\/sub>N_{4<\/sub>, gold, Viton\u00ae, low out-gassing epoxy resin, solder, RO4305<\/p>\n<\/div>\n<\/td>\n<\/tr>\n}}}
\n
\n
Vacuum exposed materials (media wetted) Ceramic protected<\/p>\n<\/div>\n<\/td>\n
\n
\n
316 Stainless steel, Viton^{\u00ae<\/sup>, Aluminum oxide ceramic (AI_{2<\/sub>O_{3<\/sub>)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n}}}
\n
\n
Vacuum exposed materials (media wetted) Parylene protected<\/p>\n<\/div>\n<\/td>\n
\n
\n
316 Stainless steel, Viton^{\u00ae<\/sup>, Parylene<\/p>\n<\/div>\n<\/td>\n<\/tr>\n}
\n
\n
Process leak tightness<\/p>\n<\/div>\n<\/td>\n
\n
\n
<1\u00b710^{-9<\/sup>\u00a0mbar\u00b7l\/s<\/p>\n<\/div>\n<\/td>\n<\/tr>\n}
\n
\n
Approvals<\/p>\n<\/div>\n<\/td>\n
\n
<\/div>\n<\/td>\n<\/tr>\n
\n
\n
CE<\/p>\n<\/div>\n<\/td>\n
\n
\n
EMC directive 2014\/30\/EU<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n
\n
RoHS compliance<\/p>\n<\/div>\n<\/td>\n
\n
\n
Directive EU 2015\/863<\/p>\n<\/div>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
SENS4<\/a>\n SENS4 VPM-5<\/a>\n SENS4\u4ee3\u7406<\/a>\n SENS4\u4f20\u611f\u5668<\/a>\n SENS4\u771f\u7a7a\u4f20\u611f\u5668<\/a>\n VPM-5<\/a>\n \u4e39\u9ea6SENS4<\/a>\n \u4f20\u611f\u5668<\/a>\n \u5bbd\u91cf\u7a0b\u771f\u7a7a\u4f20\u611f\u5668<\/a>\n \u771f\u7a7a\u4f20\u611f\u5668<\/a>\n \u771f\u7a7a\u538b\u529b\u4f20\u611f\u5668<\/a>\n \u771f\u7a7a\u6d4b\u91cf<\/a><\/div>","protected":false},"excerpt":{"rendered":"
\u4e39\u9ea6 SENS4 VPM-5 \u771f\u7a7a\u538b\u529b\u4f20\u611f\u5668,SMARTPIRANI™ \u5bbd\u91cf\u7a0b\u76ae\u62c9\u5c3c\u4f20\u611f\u5668 Sens4 \u5f00\u53d1\u3001\u5236\u9020\u548c\u9500\u552e\u7528\u4e8e\u5de5\u4e1a\u548c\u79d1\u5b66\u5e94\u7528\u7684\u771f\u7a7a\u3001\u538b\u529b\u548c\u6e29\u5ea6\u6d4b\u91cf\u548c\u63a7\u5236 <\/p>\n","protected":false},"author":29,"featured_media":212,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[29,3],"tags":[4,39,40,42,41,6,5,11,10,8,9,7],"_links":{"self":[{"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/posts\/211"}],"collection":[{"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/users\/29"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/comments?post=211"}],"version-history":[{"count":1,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/posts\/211\/revisions"}],"predecessor-version":[{"id":213,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/posts\/211\/revisions\/213"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/media\/212"}],"wp:attachment":[{"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/media?parent=211"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/categories?post=211"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/tags?post=211"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}

\n \n Specifications<\/p>\n<\/div>\n<\/td>\n	\n <\/div>\n<\/td>\n<\/tr>\n
\n \n Measuring range<\/p>\n<\/div>\n<\/td>\n	\n \n 1\u00d710^{-6<\/sup><\/span>\u00a0to 1333 mbar (7.5\u00d710^{-7<\/sup><\/span>\u00a0to 1000 Torr)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n}}
\n \n Measuring principle 1×10^{-6<\/sup>\u00a0to 1.5 mbar<\/p>\n<\/div>\n<\/td>\n}	\n \n MEMS Pirani thermal conductivity (Heat-loss)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Measuring principle 2 to 1333 mbar<\/p>\n<\/div>\n<\/td>\n	\n \n MEMS piezo resistive diaphragm<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Measuring principle 1.5 to 2 mbar<\/p>\n<\/div>\n<\/td>\n	\n \n Blended MEMS Pirani \/ piezo reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Accuracy 1\u00d710^{-5<\/sup>\u00a0to 9.99\u00d710^{-5<\/sup><\/p>\n<\/div>\n<\/td>\n}}	\n \n 25% of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Accuracy 1\u00d710^{-4<\/sup>\u00a0to 7.99 mbar<\/p>\n<\/div>\n<\/td>\n}	\n \n 5 % of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Accuracy 8.00 to 99.9 mbar<\/p>\n<\/div>\n<\/td>\n	\n \n 1% of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Accuracy 100 to 800 mbar<\/p>\n<\/div>\n<\/td>\n	\n \n 0.5% of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Accuracy 800 to 1099 mbar<\/p>\n<\/div>\n<\/td>\n	\n \n 0.25 % of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Accuracy 1100 to 1333 mbar<\/p>\n<\/div>\n<\/td>\n	\n \n 0.5% of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Maximum measuring resolution<\/p>\n<\/div>\n<\/td>\n	\n \n 1.0E-7 mbar<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Output signal 1<\/p>\n<\/div>\n<\/td>\n	\n \n 1 VDC \/ decade (0.5VDC at 1.0E-6 mbar)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Output signal 2 (MKS 901P, 910, 925 Emulation)<\/p>\n<\/div>\n<\/td>\n	\n \n 1 VDC \/ decade (1.0VDC at 1.0E-5 Torr)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Output signal 3 (MKS GP 275 Convectron^{\u00ae<\/sup>)<\/p>\n<\/div>\n<\/td>\n}	\n \n 0.375 to 5.659 VDC<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Output signal 4 (MKS 523)<\/p>\n<\/div>\n<\/td>\n	\n \n 0.5 VDC \/ decade (MKS 523)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Output signal 5 (Inficon PSG500, PSG502, PSG510, PSG512 )<\/p>\n<\/div>\n<\/td>\n	\n \n 1.9 – 10 VDC (Inficon PSG55x, Leybold TTR91)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Output signal 6 (Leybold TTR91, TTR96, TTR101)<\/p>\n<\/div>\n<\/td>\n	\n \n 1.5 – 8.5 VDC (Pfeiffer TPR260\/27x\/28x)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Output signal 7 (MKS GP 275 Convectron^{\u00ae<\/sup>)<\/p>\n<\/div>\n<\/td>\n}	\n \n 1.9 – 9.1 VDC<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Output signal 8 (MKS GP 390 MicroIon)<\/p>\n<\/div>\n<\/td>\n	\n \n 0.5 VDC \/ decade<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Output Signal 9 (MKS 971, 972, 974B)<\/p>\n<\/div>\n<\/td>\n	\n \n 0.5 VDC \/ decade (MKS 971B, 972B, 974B)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Output signal 10 (Inficon Gemini output 1)<\/p>\n<\/div>\n<\/td>\n	\n \n 1 VDC \/ decade<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Output signal 11 (Inficon Gemini output 2)<\/p>\n<\/div>\n<\/td>\n	\n \n 1.33\u00a0 VDC \/ decade<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Output signal 12 (Inficon Gemini output 3)<\/p>\n<\/div>\n<\/td>\n	\n \n 0.6 VDC \/ decade<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Output signal resolution<\/p>\n<\/div>\n<\/td>\n	\n \n 16 bit<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Solid state relay contact rating (optional)<\/p>\n<\/div>\n<\/td>\n	\n \n 250 mA, 50 VDC \/ VAC peak<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Environment conditions<\/p>\n<\/div>\n<\/td>\n	\n <\/div>\n<\/td>\n<\/tr>\n
\n \n Operating ambient temperature<\/p>\n<\/div>\n<\/td>\n	\n \n -40 to +50 \u00b0C (-40 to +122 \u00b0F)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Media temperature<\/p>\n<\/div>\n<\/td>\n	\n \n -20 to +50 \u00b0C (-58 to 122 \u00b0F)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Storage ambient temperature<\/p>\n<\/div>\n<\/td>\n	\n \n -40 to +125 \u00b0C\u00a0 (-40 to +257 \u00b0F)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Maximum media pressure<\/p>\n<\/div>\n<\/td>\n	\n \n 10 bar<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Mounting position<\/p>\n<\/div>\n<\/td>\n	\n \n Arbitrary<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Protection rating, EN 60529\/A2:2013<\/p>\n<\/div>\n<\/td>\n	\n \n IP40<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Humidity, IEC 68-2-38<\/p>\n<\/div>\n<\/td>\n	\n \n 98%, non-condensing<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Power supply<\/p>\n<\/div>\n<\/td>\n	\n <\/div>\n<\/td>\n<\/tr>\n
\n \n Supply voltage<\/p>\n<\/div>\n<\/td>\n	\n \n 12-30 VDC<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Power consumption<\/p>\n<\/div>\n<\/td>\n	\n \n 350 mW (Max)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Reverse polarity protection<\/p>\n<\/div>\n<\/td>\n	\n \n Yes<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Overvoltage protection<\/p>\n<\/div>\n<\/td>\n	\n \n Yes<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Internal fuse<\/p>\n<\/div>\n<\/td>\n	\n \n 100 mA (Thermal recoverable)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Materials<\/p>\n<\/div>\n<\/td>\n	\n <\/div>\n<\/td>\n<\/tr>\n
\n \n Vacuum process flange<\/p>\n<\/div>\n<\/td>\n	\n \n 316 stainless steel<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Enclosure<\/p>\n<\/div>\n<\/td>\n	\n \n 316 stainless steel \/ Aluminum<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n Vacuum exposed materials (media wetted)<\/p>\n<\/div>\n<\/td>\n	\n \n 316 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO_{2<\/sub>, Si_{3<\/sub>N_{4<\/sub>, gold, Viton\u00ae, low out-gassing epoxy resin, solder, RO4305<\/p>\n<\/div>\n<\/td>\n<\/tr>\n}}}
\n \n Vacuum exposed materials (media wetted) Ceramic protected<\/p>\n<\/div>\n<\/td>\n	\n \n 316 Stainless steel, Viton^{\u00ae<\/sup>, Aluminum oxide ceramic (AI_{2<\/sub>O_{3<\/sub>)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n}}}
\n \n Vacuum exposed materials (media wetted) Parylene protected<\/p>\n<\/div>\n<\/td>\n	\n \n 316 Stainless steel, Viton^{\u00ae<\/sup>, Parylene<\/p>\n<\/div>\n<\/td>\n<\/tr>\n}
\n \n Process leak tightness<\/p>\n<\/div>\n<\/td>\n	\n \n <1\u00b710^{-9<\/sup>\u00a0mbar\u00b7l\/s<\/p>\n<\/div>\n<\/td>\n<\/tr>\n}
\n \n Approvals<\/p>\n<\/div>\n<\/td>\n	\n <\/div>\n<\/td>\n<\/tr>\n
\n \n CE<\/p>\n<\/div>\n<\/td>\n	\n \n EMC directive 2014\/30\/EU<\/p>\n<\/div>\n<\/td>\n<\/tr>\n
\n \n RoHS compliance<\/p>\n<\/div>\n<\/td>\n	\n \n Directive EU 2015\/863<\/p>\n<\/div>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n SENS4<\/a>\n SENS4 VPM-5<\/a>\n SENS4\u4ee3\u7406<\/a>\n SENS4\u4f20\u611f\u5668<\/a>\n SENS4\u771f\u7a7a\u4f20\u611f\u5668<\/a>\n VPM-5<\/a>\n \u4e39\u9ea6SENS4<\/a>\n \u4f20\u611f\u5668<\/a>\n \u5bbd\u91cf\u7a0b\u771f\u7a7a\u4f20\u611f\u5668<\/a>\n \u771f\u7a7a\u4f20\u611f\u5668<\/a>\n \u771f\u7a7a\u538b\u529b\u4f20\u611f\u5668<\/a>\n \u771f\u7a7a\u6d4b\u91cf<\/a><\/div>","protected":false},"excerpt":{"rendered":" \u4e39\u9ea6 SENS4 VPM-5 \u771f\u7a7a\u538b\u529b\u4f20\u611f\u5668,SMARTPIRANI™ \u5bbd\u91cf\u7a0b\u76ae\u62c9\u5c3c\u4f20\u611f\u5668 Sens4 \u5f00\u53d1\u3001\u5236\u9020\u548c\u9500\u552e\u7528\u4e8e\u5de5\u4e1a\u548c\u79d1\u5b66\u5e94\u7528\u7684\u771f\u7a7a\u3001\u538b\u529b\u548c\u6e29\u5ea6\u6d4b\u91cf\u548c\u63a7\u5236 <\/p>\n","protected":false},"author":29,"featured_media":212,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[29,3],"tags":[4,39,40,42,41,6,5,11,10,8,9,7],"_links":{"self":[{"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/posts\/211"}],"collection":[{"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/users\/29"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/comments?post=211"}],"version-history":[{"count":1,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/posts\/211\/revisions"}],"predecessor-version":[{"id":213,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/posts\/211\/revisions\/213"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/media\/212"}],"wp:attachment":[{"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/media?parent=211"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/categories?post=211"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/tags?post=211"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}