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Silicon Materials<\/a>, Inc. \u7684 \u6676\u5706<\/a>\u5236\u9020\u8fc7\u7a0b\u5b8c\u5168\u900f\u660e\u3002\u6240\u6709\u6676\u5706\u751f\u4ea7\u4ece\u521d\u59cb\u7684 \u591a\u6676\u7845<\/a>\u6279\u6b21\u5230\u6700\u7ec8\u5305\u88c5\u5747\u53ef\u8ffd\u6eaf\u3002\u4ea7\u54c1\u7684\u7a33\u5b9a\u6027\u6e90\u4e8e\u5bf9\u6574\u4e2a\u5236\u9020\u5468\u671f\u7684\u4e25\u683c\u63a7\u5236\u3002\u8fd9\u4e9b\u4f18\u52bf\u4f7f Silicon Materials, Inc. \u6210\u4e3a\u4f18\u79c0\u7684\u957f\u671f\u5408\u4f5c\u4f19\u4f34\u3002<\/p>\n

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CZ\uff08\u76f4\u62c9\u6cd5\uff09\u6676\u5706<\/strong>\n\n
\u5c3a\u5bf8\u8303\u56f4\uff1a50.8mm \u81f3 450mm<\/li>\n
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FZ\uff08\u6d6e\u533a\u6cd5\uff09\u6676\u5706<\/strong>\n\n
\u5c3a\u5bf8\u8303\u56f4\uff1a50.8mm \u81f3 150mm<\/li>\n
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\u4f18\u52bf<\/strong><\/h4>\n
\n
\u9ad8\u8d28\u91cf<\/strong>\uff1a\u4e25\u683c\u7684\u8d28\u91cf\u63a7\u5236\u548c\u751f\u4ea7\u6d41\u7a0b\uff0c\u786e\u4fdd\u4ea7\u54c1\u4e00\u81f4\u6027\u3002<\/li>\n
\u7075\u6d3b\u6027<\/strong>\uff1a\u652f\u6301\u5ba2\u6237\u5b9a\u5236\u9700\u6c42\uff0c\u5305\u62ec\u5c3a\u5bf8\u3001\u63ba\u6742\u3001\u6676\u5411\u548c\u539a\u5ea6\u3002<\/li>\n
\u53ef\u9760\u6027<\/strong>\uff1a\u6240\u6709\u4ea7\u54c1\u5747\u53ef\u8ffd\u6eaf\uff0c\u786e\u4fdd\u900f\u660e\u5ea6\u548c\u53ef\u4fe1\u5ea6\u3002<\/li>\n<\/ul>\n8 \u82f1\u5bf8\uff08200.0\u6beb\u7c73\uff09\u7845\u6676\u5706<\/a>\u89c4\u683c<\/strong><\/h3>\n
\n
\u6750\u6599\u7279\u6027<\/strong><\/h4>\n\n\n\n\n\n\n\n\n\n\n
\u53c2\u6570<\/th>\n \u7279\u6027<\/th>\n ASTM \u63a7\u5236\u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n
\u751f\u957f\u65b9\u6cd5<\/td>\n \u76f4\u62c9\u6cd5\uff08Cz\uff09\u3001\u6d6e\u533a\u6cd5\uff08Fz\uff09\u3001\u78c1\u63a7\u76f4\u62c9\u6cd5\uff08MCz\uff09<\/td>\n \u2013<\/td>\n<\/tr>\n
\u7c7b\u578b\/\u63ba\u6742<\/td>\n P \u578b \u2013 \u787c\uff08Boron\uff09
\nN \u578b \u2013 \u78f7\uff08Phosphorous\uff09
\nN \u578b \u2013 \u9511\uff08Antimony\uff09
\nN \u578b \u2013 \u7837\uff08Arsenic\uff09
\n\u672a\u63ba\u6742\uff08Undoped\uff09<\/td>\n F42<\/td>\n<\/tr>\n
\u6676\u5411<\/td>\n <100>\u3001<111>\u3001<110>\u3001<112>\uff0c\u53ef\u6839\u636e\u5ba2\u6237\u8981\u6c42\u63d0\u4f9b\u5207\u5272\u65b9\u5411\uff08slice OFF\uff09<\/td>\n F26<\/td>\n<\/tr>\n
\u6c27\u542b\u91cf<\/td>\n 10-19 ppmA\uff0c\u53ef\u6839\u636e\u5ba2\u6237\u8981\u6c42\u63d0\u4f9b\u5b9a\u5236\u516c\u5dee<\/td>\n F121<\/td>\n<\/tr>\n
\u78b3\u542b\u91cf<\/td>\n < 1 ppmA\uff0c\u53ef\u6839\u636e\u5ba2\u6237\u8981\u6c42\u63d0\u4f9b\u5b9a\u5236\u516c\u5dee<\/td>\n F123<\/td>\n<\/tr>\n
\u7535\u963b\u7387\u8303\u56f4<\/td>\n \u2013 P \u578b\uff08\u787c\uff09\uff1a0.001 \u2013 50 \u6b27\u59c6\u00b7\u5398\u7c73
\n\u2013 N \u578b\uff08\u78f7\uff09\uff1a0.1 \u2013 40 \u6b27\u59c6\u00b7\u5398\u7c73
\n\u2013 N \u578b\uff08\u9511\uff09\uff1a0.01 \u2013 0.025 \u6b27\u59c6\u00b7\u5398\u7c73
\n\u2013 N \u578b\uff08\u7837\uff09\uff1a0.001 \u2013 0.005 \u6b27\u59c6\u00b7\u5398\u7c73
\n\u2013 \u672a\u63ba\u6742\uff1a> 100 \u6b27\u59c6\u00b7\u5398\u7c73
\n\u53ef\u6839\u636e\u5ba2\u6237\u8981\u6c42\u63d0\u4f9b\u5b9a\u5236\u516c\u5dee<\/td>\n F84<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n
\u673a\u68b0\u7279\u6027<\/strong><\/h4>\n\n\n\n\n\n\n\n\n\n\n\n
\u53c2\u6570<\/th>\n Prime A<\/th>\n Prime B<\/th>\n Test<\/th>\n ASTM \u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n
\u76f4\u5f84<\/td>\n 200 \u00b1 0.2 mm<\/td>\n 200 \u00b1 0.2 mm<\/td>\n 200 \u00b1 0.5 mm<\/td>\n F2074<\/td>\n<\/tr>\n
\u539a\u5ea6<\/td>\n 725 \u00b1 20 \u00b5m\uff08\u6807\u51c6\uff09
\n600 \u00b1 20 \u00b5m
\n1000 \u00b1 20 \u00b5m
\n1200 \u00b1 20 \u00b5m
\n1300 \u00b1 20 \u00b5m
\n1500 \u00b1 20 \u00b5m<\/td>\n 725 \u00b1 25 \u00b5m\uff08\u6807\u51c6\uff09
\n600 \u00b1 25 \u00b5m
\n1000 \u00b1 25 \u00b5m
\n1200 \u00b1 25 \u00b5m
\n1300 \u00b1 25 \u00b5m
\n1500 \u00b1 25 \u00b5m<\/td>\n 725 \u00b1 50 \u00b5m\uff08\u6807\u51c6\uff09
\n600 \u00b1 50 \u00b5m
\n1000 \u00b1 50 \u00b5m
\n1200 \u00b1 50 \u00b5m
\n1300 \u00b1 50 \u00b5m
\n1500 \u00b1 50 \u00b5m<\/td>\n F533<\/td>\n<\/tr>\n
TTV\uff08\u603b\u539a\u5ea6\u53d8\u5316\uff09<\/td>\n < 5 \u00b5m<\/td>\n < 10 \u00b5m<\/td>\n < 15 \u00b5m<\/td>\n F533<\/td>\n<\/tr>\n
\u5f2f\u66f2\u5ea6\uff08Bow\uff09<\/td>\n < 30 \u00b5m<\/td>\n < 30 \u00b5m<\/td>\n < 40 \u00b5m<\/td>\n F534<\/td>\n<\/tr>\n
\u7fd8\u66f2\u5ea6\uff08Warp\uff09<\/td>\n < 30 \u00b5m<\/td>\n < 30 \u00b5m<\/td>\n < 40 \u00b5m<\/td>\n F657<\/td>\n<\/tr>\n
\u8fb9\u7f18\u5012\u89d2<\/td>\n \u7b26\u5408 SEMI \u6807\u51c6\u6216\u5ba2\u6237\u8981\u6c42<\/td>\n \u2013<\/td>\n \u2013<\/td>\n F928<\/td>\n<\/tr>\n
\u6807\u8bb0<\/td>\n \u4ec5 Jeida \u6807\u51c6\u5e73\u8fb9\uff0c\u63d0\u4f9b\u7f3a\u53e3<\/td>\n F847, F671<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n
\u8868\u9762\u8d28\u91cf<\/strong><\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u53c2\u6570<\/th>\n Prime A<\/th>\n Prime B<\/th>\n Test<\/th>\n ASTM \u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n
\u6b63\u9762\u6807\u51c6<\/strong><\/td>\n <\/td>\n <\/td>\n <\/td>\n <\/td>\n<\/tr>\n
\u8868\u9762\u72b6\u6001<\/td>\n \u5316\u5b66\u673a\u68b0\u629b\u5149\uff08CMP\uff09<\/td>\n \u2013<\/td>\n \u2013<\/td>\n F523<\/td>\n<\/tr>\n
\u8868\u9762\u7c97\u7cd9\u5ea6<\/td>\n < 2 \u00c5<\/td>\n < 2 \u00c5<\/td>\n < 2 \u00c5<\/td>\n \u2013<\/td>\n<\/tr>\n
\u6c61\u67d3\u9897\u7c92\uff08>0.3 \u00b5m\uff09<\/td>\n < 30<\/td>\n < 30<\/td>\n < 40<\/td>\n F523<\/td>\n<\/tr>\n
\u96fe\u5ea6\u3001\u51f9\u5751\u3001\u6a58\u76ae<\/td>\n \u65e0<\/td>\n \u65e0<\/td>\n \u65e0<\/td>\n F523<\/td>\n<\/tr>\n
\u952f\u75d5\u3001\u6761\u7eb9<\/td>\n \u65e0<\/td>\n \u65e0<\/td>\n \u65e0<\/td>\n F523<\/td>\n<\/tr>\n
\u80cc\u9762\u6807\u51c6<\/strong><\/td>\n <\/td>\n <\/td>\n <\/td>\n <\/td>\n<\/tr>\n
\u8868\u9762\u72b6\u6001<\/td>\n \u78b1\u8680\u523b<\/td>\n \u2013<\/td>\n \u2013<\/td>\n F523<\/td>\n<\/tr>\n
\u88c2\u7eb9\u3001\u952f\u75d5\u3001\u6c61\u6e0d<\/td>\n \u65e0<\/td>\n \u65e0<\/td>\n \u65e0<\/td>\n F523<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n
\u5305\u88c5\u9009\u9879<\/strong><\/h4>\n\n\n\n\n\n\n\n
\u5305\u88c5\u7c7b\u578b<\/th>\n \u5305\u88c5\u888b\u63cf\u8ff0<\/th>\n<\/tr>\n<\/thead>\n
3 \u90e8\u5206\u6676\u5706\u76d2\uff0c2 \u888b<\/td>\n \u900f\u660e\u7acb\u4f53\u888b\uff0cA\/S \u84dd\u8272\u5e73\u888b<\/td>\n<\/tr>\n
\u5355\u6676\u5706\u8fd0\u8f93\u76d2\uff0c3 \u888b<\/td>\n \u900f\u660e\u7acb\u4f53\u888b\uff0c\u94dd\u5236\u7acb\u4f53\u888b\uff0cA\/S \u84dd\u8272\u5e73\u888b<\/td>\n<\/tr>\n
\u74f6\u88c5 Tyvek \u5206\u9694<\/td>\n \u2013<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n
\u5907\u6ce8<\/strong><\/h3>\n
\n
\u6240\u6709\u89c4\u683c\u53ef\u6839\u636e\u5ba2\u6237\u9700\u6c42\u8fdb\u884c\u8c03\u6574\u3002<\/li>\n
\u63d0\u4f9b\u7b26\u5408 SEMI \u6807\u51c6\u6216\u5ba2\u6237\u6307\u5b9a\u8981\u6c42\u7684\u5b9a\u5236\u670d\u52a1\u3002<\/li>\n<\/ul>\n<\/div>\n<\/div>\n<\/div>\n
Silicon Materials<\/a>\n \u591a\u6676\u7845<\/a>\n \u5b9a\u5236\u6676\u5706<\/a>\n \u5b9a\u5236\u8584\u819c<\/a>\n \u6676\u5706<\/a>\n \u7845\u6676\u7247<\/a>\n \u7845\u7247<\/a><\/div>","protected":false},"excerpt":{"rendered":"
Silicon Materials, Inc. \u7684\u6676\u5706\u5236\u9020\u8fc7\u7a0b\u5b8c\u5168\u900f\u660e\u3002\u6240\u6709\u6676\u5706\u751f\u4ea7\u4ece\u521d\u59cb\u7684\u591a\u6676\u7845\u6279\u6b21\u5230\u6700\u7ec8\u5305\u88c5\u5747\u53ef\u8ffd\u6eaf\u3002\u4ea7\u54c1\u7684\u7a33\u5b9a\u6027\u6e90\u4e8e\u5bf9\u6574\u4e2a\u5236\u9020\u5468\u671f\u7684\u4e25\u683c\u63a7\u5236\u3002\u8fd9\u4e9b\u4f18\u52bf\u4f7f Si <\/p>\n","protected":false},"author":31,"featured_media":221,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[1],"tags":[4,6,9,10,8,7,5],"yoast_head":"\n\u7f8e\u56fdSilicon Materials 8\u82f1\u5bf8(200.0mm)\u7845\u6676\u5706 \u7845\u6676\u7247 \u6676\u5706\u63ba\u6742 \u539a\u5ea6250\u20131800\u5fae\u7c73 - Silicon Materials \u7845\u7247 \u591a\u6676\u7845 \u7845\u6676\u7247 \u6676\u5706 \u5b9a\u5236\u6676\u5706 \u5b9a\u5236\u8584\u819c<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.bihec.com\/silicon-materials\/8\u82f1\u5bf8\u7845\u7247-2\/\" \/>\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u7f8e\u56fdSilicon Materials 8\u82f1\u5bf8(200.0mm)\u7845\u6676\u5706 \u7845\u6676\u7247 \u6676\u5706\u63ba\u6742 \u539a\u5ea6250\u20131800\u5fae\u7c73 - 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\u4ea7\u54c1<\/strong><\/h3>\nSilicon Materials, Inc. \u63d0\u4f9b\u591a\u79cd\u89c4\u683c\u7684\u6676\u5706\u53ca\u76f8\u5173\u670d\u52a1\uff0c\u6ee1\u8db3\u534a\u5bfc\u4f53\u884c\u4e1a\u7684\u4e0d\u540c\u9700\u6c42\u3002<\/p>\n

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Silicon Materials, Inc. \u63d0\u4f9b\u591a\u79cd\u89c4\u683c\u7684\u6676\u5706\u53ca\u76f8\u5173\u670d\u52a1\uff0c\u6ee1\u8db3\u534a\u5bfc\u4f53\u884c\u4e1a\u7684\u4e0d\u540c\u9700\u6c42\u3002<\/p>\n