{"id":366,"date":"2021-07-08T12:05:14","date_gmt":"2021-07-08T04:05:14","guid":{"rendered":"https:\/\/www.bihec.com\/thermionics\/?p=366"},"modified":"2021-07-08T12:05:14","modified_gmt":"2021-07-08T04:05:14","slug":"rcrf-series-3-kw-rod-fed-e-gun-3kw-rcrf%e7%b3%bb%e5%88%97%e7%94%b5%e5%ad%90%e6%9e%aa-%e7%9c%9f%e7%a9%ba%e9%95%80%e8%86%9c-2","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/thermionics\/rcrf-series-3-kw-rod-fed-e-gun-3kw-rcrf%e7%b3%bb%e5%88%97%e7%94%b5%e5%ad%90%e6%9e%aa-%e7%9c%9f%e7%a9%ba%e9%95%80%e8%86%9c-2\/","title":{"rendered":"RCRF Series 3 kW Rod-Fed e-Gun 3kW RCRF\u7cfb\u5217\u7535\u5b50\u67aa \u771f\u7a7a\u9540\u819c"},"content":{"rendered":"
RCRF<\/a> Series 3 kW<\/a> Rod-Fed e-Gun 3kW RCRF\u7cfb\u5217\u7535\u5b50\u67aa<\/a> \u771f\u7a7a\u9540\u819c<\/a><\/p>\n <\/p>\n The 3 kW RCRF Series rod-fed e-Gun uses evaporant source material in the form of a rod up to 3\/8″ in diameter, which is fed continuously into the crucible using an external linear feedthrough. Film thickness may be controlled using a rate monitor and are available mounted on various flanges.<\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n UHV Compatible<\/strong><\/p>\n Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11<\/sup>\u00a0Torr.<\/p>\n Mounting and Configurations<\/strong><\/p>\n Knudsen Cell Replacement<\/strong><\/p>\n e-Guns can evaporate difficult materials, ie.: carbon, niobium, and silicon.<\/p>\n A rod-fed e-Gun, complete with all the necessary utility and mechanical feedthroughs, installed on a 4.5″ O.D. ConFlat mounting flange, is available as a direct replacement for existing Knudsen cell furnaces on Varian\/Intevac, Perkin-Elmer, Riber, EPI and VG systems.<\/p>\n<\/div>\n Specifications<\/strong><\/p>\nRCRF Series 3 kW Rod-Fed e-Gun<\/span><\/h3>\n
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