\n
Features<\/strong><\/p>\n\n
\n- True XY sweep with full crucible coverage<\/li>\n
- Sweep coils included with source<\/li>\n
- Enhanced beam collimation<\/li>\n
- Plug-in emitter module<\/li>\n
- Enhanced high-stability cooling<\/li>\n
- Cross-contamination shielding<\/li>\n
- Rugged design<\/li>\n
- Optional auto-indexer<\/li>\n<\/ul>\n<\/div>\n
\n
\u00a0The operating principle of the multiple crucible e-Gun is identical to the single crucible source with the following advantages:<\/p>\n
\n- Large supply of evaporant\u2014When every crucible is filled with the same source material, an increased volume of evaporant can be evaporated in a single vacuum cycle.<\/li>\n
- Deposition of up to eight different materials in one vacuum cycle\u2014A different material can be put in each crucible and deposited in any sequence during a single vacuum cycle. The deposition rates are the same as those of the single crucible model. Only one crucible is heated at a time. The single filament remains stationary and the crucible head is indexed into position by the drive handle. Therefore, the evaporation always originates from exactly the same position in the vacuum chamber. The inactive crucibles are shielded from the heated crucibles by the magnetic pole pieces, thereby eliminating contamination between crucibles.<\/li>\n<\/ul>\n
High Vacuum Compatible<\/strong><\/p>\nMetal and elastomer seals, measured base pressure: 2 x 10-9<\/sup>\u00a0Torr.<\/p>\nInterchangeable Crucibles<\/strong><\/p>\nThe main crucible wheel can be removed from the top of the source without total source disassembly. This flexibility allows field upgrades.<\/p>\n
Specials<\/strong><\/p>\nAll multiple crucible e-Guns can be mounted on larger diameter ConFlat or rectangular PyraFlat flanges, single or back-to-back.<\/p>\n
\n
Specifications<\/strong><\/p>\n\n\n\nOperating Pressure<\/td>\n | Below 5 x 10-5<\/sup>\u00a0Torr is desirable for best operation<\/td>\n<\/tr>\n\nBeam Voltage<\/td>\n | 4,000 V<\/td>\n<\/tr>\n | \nBeam Current<\/td>\n | 0\u2013750 mA continuously variable<\/td>\n<\/tr>\n | \nMaximum Power<\/td>\n | 3,000 W<\/td>\n<\/tr>\n | \nCooling Water<\/td>\n | 1.5 gpm<\/td>\n<\/tr>\n | \nMaximum Bakeout Temperature<\/td>\n | 120\u00b0C (150\u00b0F)<\/td>\n<\/tr>\n | \nCrucible Volume<\/td>\n | 2.24 cc x 4, 6, or 8 crucibles<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n
3kW\u7535\u5b50\u67aa<\/a>\nMBE<\/a>\nthermionics<\/a>\n\u591a\u5769\u57da\u65cb\u8f6c\u7535\u5b50\u67aa<\/a>\n\u591a\u5769\u57da\u7535\u5b50\u67aa<\/a>\n\u65cb\u8f6c\u7535\u5b50\u67aa<\/a>\n\u771f\u7a7a\u9540\u819c<\/a><\/div>","protected":false},"excerpt":{"rendered":"RCR Series 3 kW Multiple Crucible Rotary e-Guns™ RCR\u7cfb\u52173kW\u65cb\u8f6c\u7535\u5b50\u67aa \u591a\u5769\u57da RCR Series 3 kW <\/p>\n","protected":false},"author":19,"featured_media":125,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[7],"tags":[44,50,17,49,48,47,39],"_links":{"self":[{"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/posts\/585"}],"collection":[{"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/users\/19"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/comments?post=585"}],"version-history":[{"count":1,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/posts\/585\/revisions"}],"predecessor-version":[{"id":590,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/posts\/585\/revisions\/590"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/media\/125"}],"wp:attachment":[{"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/media?parent=585"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/categories?post=585"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/tags?post=585"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}} | |