{"id":919,"date":"2024-11-24T19:49:47","date_gmt":"2024-11-24T11:49:47","guid":{"rendered":"https:\/\/www.bihec.com\/thermionics\/?p=919"},"modified":"2024-11-24T19:49:47","modified_gmt":"2024-11-24T11:49:47","slug":"thermionics-hanks-hm2-hydra-dynamic-source-e-gun-evaporation-source-hanks-%e7%b3%bb%e5%88%97%e8%92%b8%e5%8f%91%e6%ba%90%e7%94%b5%e5%ad%90%e6%9e%aa-2","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/thermionics\/thermionics-hanks-hm2-hydra-dynamic-source-e-gun-evaporation-source-hanks-%e7%b3%bb%e5%88%97%e8%92%b8%e5%8f%91%e6%ba%90%e7%94%b5%e5%ad%90%e6%9e%aa-2\/","title":{"rendered":"Thermionics Hanks HM2 Hydra, Dynamic Source e-Gun™ Evaporation Source Hanks \u7cfb\u5217\u84b8\u53d1\u6e90\u7535\u5b50\u67aa"},"content":{"rendered":"

$\"\"$ <\/p>\n

Our High-Efficiency Hanks HM\u00b2 e-Guns<\/a>™ provide patented and award winning modular magnet beam focusing system with enhanced beam collimation, eliminating beam curl.<\/p>\n

HM\u00b2 e-Guns™ are also 2\/3 the size of standard e-Guns and 350% more efficient magnetically.<\/p>\n

Our High-Efficiency Hanks HM\u00b2 e-Guns™ provide patented and award winning modular magnet beam focusing system with enhanced beam collimation, eliminating beam curl. Our innovative Hanks HM\u00b2 Hydra design consists of one (1) or two (2) compact array(s) of crucibles and emitters which translate linearly with respect to each other to provide for the co-deposition of up-to six different materials simultaneously.<\/p>\n

HM\u00b2 e-Guns™ are also 2\/3 the size of standard e-Guns and 350% more efficient magnetically.<\/p>\n

\u6211\u4eec\u7684\u9ad8\u6548Hanks HM\u00b2e-Guns™\u63d0\u4f9b\u83b7\u5f97\u4e13\u5229\u548c\u5c61\u83b7\u6b8a\u8363\u7684\u6a21\u5757\u5316\u78c1\u675f\u805a\u7126\u7cfb\u7edf\uff0c\u5177\u6709\u589e\u5f3a\u7684\u5149\u675f\u51c6\u76f4\u6027\uff0c\u6d88\u9664\u4e86\u5149\u675f\u5377\u66f2\u3002\u6211\u4eec\u521b\u65b0\u7684Hanks HM\u00b2Hydra\u8bbe\u8ba1\u7531\u4e00\uff081\uff09\u6216\u4e24\uff082\uff09\u4e2a\u7d27\u51d1\u7684\u5769\u57da\u548c\u53d1\u5c04\u5668\u9635\u5217\u7ec4\u6210\uff0c\u5b83\u4eec\u5f7c\u6b64\u7ebf\u6027\u5e73\u79fb\uff0c\u53ef\u540c\u65f6\u63d0\u4f9b\u591a\u8fbe\u516d\u79cd\u4e0d\u540c\u6750\u6599\u7684\u5171\u6c89\u79ef\u3002
\nHM\u00b2e-Guns™\u7684\u5c3a\u5bf8\u4e5f\u662f\u6807\u51c6e-Guns\u76842\/3\uff0c\u78c1\u6027\u6548\u7387\u63d0\u9ad8\u4e86350%\u3002<\/p>\n

Features:<\/strong><\/h3>\n\n
Optimized emitter and sweep coil assemblies<\/li>\n
Eliminations of pole pieces \u2013 vertically mounted magnets results in less magnetic flux<\/li>\n
0-200 Hz sweep, repeatable, uniform evaporation, no \u201ctunneling\u201d and source material eruptions<\/li>\n
Precise and stable evaporation rates as low as 1-2 A\/sec<\/li>\n
35% smaller than traditional evaporation sources with equivalent volume, evaporation rate and power capacity<\/li>\n
\u00a0Available in HV [2\u00d710^{-9<\/sup>\u00a0Torr] and UHV [2\u00d710^{-11<\/sup>\u00a0Torr]<\/li>\n}}
Ideal for sequential or co-evaporation<\/li>\n
Power Supplies, Crucible Liners and other Accessories available<\/li>\n<\/ul>\n
\u7279\u5f81\uff1a
\n\u4f18\u5316\u7684\u53d1\u5c04\u5668\u548c\u626b\u63cf\u7ebf\u5708\u7ec4\u4ef6
\n\u6d88\u9664\u78c1\u6781\u7247\u2014\u2014\u5782\u76f4\u5b89\u88c5\u7684\u78c1\u94c1\u5bfc\u81f4\u78c1\u901a\u91cf\u51cf\u5c11
\n0-200Hz\u626b\u9891\uff0c\u53ef\u91cd\u590d\uff0c\u5747\u5300\u84b8\u53d1\uff0c\u65e0\u201c\u96a7\u9053\u6548\u5e94\u201d\u548c\u6e90\u7269\u8d28\u55b7\u53d1
\n\u7cbe\u786e\u7a33\u5b9a\u7684\u84b8\u53d1\u901f\u7387\u4f4e\u81f31-2A\/sec
\n\u6bd4\u4f20\u7edf \u84b8\u53d1\u6e90<\/a>\u5c0f35%\uff0c\u5177\u6709\u540c\u7b49\u4f53\u79ef\u3001\u84b8\u53d1\u7387\u548c\u529f\u7387\u5bb9\u91cf
\n\u6709\u9ad8\u538b[2\u00d710-9Torr]\u548c\u7279\u9ad8\u538b[2 x 10-11Torr]\u4e24\u79cd
\n\u975e\u5e38\u9002\u5408\u987a\u5e8f\u84b8\u53d1\u6216\u5171\u84b8\u53d1
\n\u63d0\u4f9b\u7535\u6e90\u3001\u5769\u57da\u886c\u91cc\u548c\u5176\u4ed6\u914d\u4ef6<\/p>\n
<\/p>\n
Models:<\/h3>\n
\n
Single<\/strong>\u2014 7 cc to 156 cc single crucible \/ 1 emitter \u2013 6-20 kW<\/li>\n
Single Rotary<\/strong>\u2014 7 cc to 25 cc \u2013 4 crucible \/ 1 emitter \u2013 6 & 10 kW<\/li>\n
Twin™<\/strong>\u2014 10 cc, 15 cc, 40 cc \u2013 2\u00a0crucible \/ 2 emitter \u2013 10 & 15 kW<\/li>\n
Triad™\u00a0<\/strong>\u2014 10 cc, 15 cc, 40 cc \u2013 3 crucible \/ 3 emitter \u2013 6 & 10 kW<\/li>\n
Quadra<\/strong>\u2014 10 cc, 15 cc, 40 cc \u2013 4 crucible \/ 4 emitter \u2013 6 & 10 kW<\/li>\n
Hydra-1™<\/strong>\u2014\u00a0Single array of 5 crucibles \/ 1-3 emitters (see Hydra description below for more details)<\/li>\n
Hydra-2™<\/strong>\u2014\u00a0Dual array of 5 crucibles \/ 1-3 emitters, totaling 10 crucibles \/ 2-6 emitters (see Hydra description below for more details)<\/li>\n<\/ul>\n
Hanks HM\u00b2 e-Guns are manufactured and protected under one or more of the following patents: 4,835,789; 4,891,821; 4,947,404<\/p>\n
<\/p>\n
Hanks HM\u00b2 Hydra e-Gun™<\/h3>\n
Our innovative Hanks HM\u00b2 Hydra design consists of one (1) or two (2) compact array(s) of crucibles and emitters which translate linearly with respect to each other to provide for the co-deposition of up-to six different materials simultaneously.<\/p>\n
The Hydra configuration\u2019s efficient utilization of space allows for four (4) different combinations of six crucibles and up to forty-two permutations of two-metal combinations, are available for co-deposition in a single vacuum pumpdown.<\/p>\n
The Hydra eliminates adjacent source interactions without complex beam directions and bulky field shunting components. Thus, the co-evaporation design allows close source proximity for uniform coating and material interaction. Additionally, individual water cooling for each source prevents steam build-up and the inclusion of separate sweep coils for each source and promotes the total independence of the operation parameters of each source from the adjacent source.<\/p>\n
Hanks HM\u00b2Hydra \u7535\u5b50\u67aa<\/a>™
\n\u6211\u4eec\u521b\u65b0\u7684Hanks HM\u00b2Hydra\u8bbe\u8ba1\u7531\u4e00\uff081\uff09\u6216\u4e24\uff082\uff09\u4e2a\u7d27\u51d1\u7684\u5769\u57da\u548c\u53d1\u5c04\u5668\u9635\u5217\u7ec4\u6210\uff0c\u5b83\u4eec\u5f7c\u6b64\u7ebf\u6027\u5e73\u79fb\uff0c\u53ef\u540c\u65f6\u63d0\u4f9b\u591a\u8fbe\u516d\u79cd\u4e0d\u540c\u6750\u6599\u7684\u5171\u6c89\u79ef\u3002
\nHydra\u914d\u7f6e\u5bf9\u7a7a\u95f4\u7684\u6709\u6548\u5229\u7528\u5141\u8bb8\u516d\u4e2a\u5769\u57da\u7684\u56db\uff084\uff09\u79cd\u4e0d\u540c\u7ec4\u5408\u548c\u4e24\u79cd\u91d1\u5c5e\u7ec4\u5408\u7684\u591a\u8fbe\u56db\u5341\u4e8c\u79cd\u6392\u5217\uff0c\u53ef\u5728\u5355\u4e2a\u771f\u7a7a\u6cf5\u4e2d\u8fdb\u884c\u5171\u6c89\u79ef\u3002
\nHydra\u6d88\u9664\u4e86\u76f8\u90bb\u6e90\u7684\u76f8\u4e92\u4f5c\u7528\uff0c\u800c\u65e0\u9700\u590d\u6742\u7684\u6ce2\u675f\u65b9\u5411\u548c\u7b28\u91cd\u7684\u573a\u5206\u6d41\u7ec4\u4ef6\u3002\u56e0\u6b64\uff0c\u5171\u84b8\u53d1\u8bbe\u8ba1\u5141\u8bb8\u63a5\u8fd1\u6e90\uff0c\u4ee5\u5b9e\u73b0\u5747\u5300\u7684\u6d82\u5c42\u548c\u6750\u6599\u76f8\u4e92\u4f5c\u7528\u3002\u6b64\u5916\uff0c\u6bcf\u4e2a\u6c34\u6e90\u7684\u5355\u72ec\u6c34\u51b7\u53ef\u4ee5\u9632\u6b62\u84b8\u6c7d\u79ef\u805a\uff0c\u5e76\u4e3a\u6bcf\u4e2a\u6c34\u6e90\u914d\u5907\u5355\u72ec\u7684\u626b\u63a0\u7ebf\u5708\uff0c\u4ece\u800c\u4fc3\u8fdb\u6bcf\u4e2a\u6c34\u6e90\u7684\u8fd0\u884c\u53c2\u6570\u4e0e\u76f8\u90bb\u6c34\u6e90\u7684\u5b8c\u5168\u72ec\u7acb\u3002<\/p>\n
Hydra-1 & 2\u00a0Specifications<\/h3>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Feature<\/td>\n 10 kW Model<\/td>\n 15 kW Model<\/td>\n<\/tr>\n
Maximum Power<\/td>\n 10 kW<\/td>\n 15 kW<\/td>\n<\/tr>\n
Crucible volume<\/td>\n 10\/15 cc<\/td>\n 40 cc<\/td>\n<\/tr>\n
Emission voltage<\/td>\n 10 kV<\/td>\n 10 kV<\/td>\n<\/tr>\n
Emission current<\/td>\n 0 to 1.0 A<\/td>\n 0 to 1.5 A<\/td>\n<\/tr>\n
Filament<\/td>\n 700 W<\/td>\n 700 W<\/td>\n<\/tr>\n
E-beam deflection<\/td>\n 220\u00b0<\/td>\n 220\u00b0<\/td>\n<\/tr>\n
Beam spot size<\/td>\n .25\u2033 diameter<\/td>\n .25\u2033 diameter<\/td>\n<\/tr>\n
Evaporation rate (for aluminum)<\/td>\n 1 gm\/min at 10 kW 3.6 microns at 25 cm<\/td>\n 1.5 gm\/min at 15 kW 50,000 \u00c5 min<\/td>\n<\/tr>\n
X and Y sweep<\/td>\n Hyper-Unimelt Sweep (0-200 Hz)<\/td>\n Hyper-Unimelt sweep (0-200 Hz)<\/td>\n<\/tr>\n
Water<\/td>\n 3.0 gpm\/crucible, common return (up to 30 gpm)<\/td>\n 3.0 gpm\/crucible, common return (up to 30 gpm)<\/td>\n<\/tr>\n
Crucible material<\/td>\n OFE copper<\/td>\n OFE copper<\/td>\n<\/tr>\n
Bakeout temp<\/td>\n 230\u00b0C (446\u00b0F)<\/td>\n 230\u00b0C (446\u00b0F)<\/td>\n<\/tr>\n
e-Gun size\u2013single array<\/td>\n 6.25\u2033 x 5.5\u2033 x 15\u2033<\/td>\n 6.25\u2033 x 5.75\u2033 x 15\u2033<\/td>\n<\/tr>\n
e-Gun size\u2013double array<\/td>\n 6.25\u2033 x 11\u2033 x 15\u2033<\/td>\n 6.25\u2033 x 11.5\u2033 x 15\u2033<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
Hanks HM2 Hydra<\/a>\n Thermionics Northwest<\/a>\n \u7ebf\u6027\u7535\u5b50\u67aa<\/a>\n \u7f8e\u56fdThermionics<\/a><\/div>","protected":false},"excerpt":{"rendered":"
Our High-Efficiency Hanks HM\u00b2 e-Guns™ provide patented and award winning modular ma <\/p>\n","protected":false},"author":19,"featured_media":609,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[3,7],"tags":[148,27,45,57],"_links":{"self":[{"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/posts\/919"}],"collection":[{"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/users\/19"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/comments?post=919"}],"version-history":[{"count":1,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/posts\/919\/revisions"}],"predecessor-version":[{"id":931,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/posts\/919\/revisions\/931"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/media\/609"}],"wp:attachment":[{"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/media?parent=919"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/categories?post=919"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/tags?post=919"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}

Feature<\/td>\n	10 kW Model<\/td>\n	15 kW Model<\/td>\n<\/tr>\n
Maximum Power<\/td>\n	10 kW<\/td>\n	15 kW<\/td>\n<\/tr>\n
Crucible volume<\/td>\n	10\/15 cc<\/td>\n	40 cc<\/td>\n<\/tr>\n
Emission voltage<\/td>\n	10 kV<\/td>\n	10 kV<\/td>\n<\/tr>\n
Emission current<\/td>\n	0 to 1.0 A<\/td>\n	0 to 1.5 A<\/td>\n<\/tr>\n
Filament<\/td>\n	700 W<\/td>\n	700 W<\/td>\n<\/tr>\n
E-beam deflection<\/td>\n	220\u00b0<\/td>\n	220\u00b0<\/td>\n<\/tr>\n
Beam spot size<\/td>\n	.25\u2033 diameter<\/td>\n	.25\u2033 diameter<\/td>\n<\/tr>\n
Evaporation rate (for aluminum)<\/td>\n	1 gm\/min at 10 kW 3.6 microns at 25 cm<\/td>\n	1.5 gm\/min at 15 kW 50,000 \u00c5 min<\/td>\n<\/tr>\n
X and Y sweep<\/td>\n	Hyper-Unimelt Sweep (0-200 Hz)<\/td>\n	Hyper-Unimelt sweep (0-200 Hz)<\/td>\n<\/tr>\n
Water<\/td>\n	3.0 gpm\/crucible, common return (up to 30 gpm)<\/td>\n	3.0 gpm\/crucible, common return (up to 30 gpm)<\/td>\n<\/tr>\n
Crucible material<\/td>\n	OFE copper<\/td>\n	OFE copper<\/td>\n<\/tr>\n
Bakeout temp<\/td>\n	230\u00b0C (446\u00b0F)<\/td>\n	230\u00b0C (446\u00b0F)<\/td>\n<\/tr>\n
e-Gun size\u2013single array<\/td>\n	6.25\u2033 x 5.5\u2033 x 15\u2033<\/td>\n	6.25\u2033 x 5.75\u2033 x 15\u2033<\/td>\n<\/tr>\n
e-Gun size\u2013double array<\/td>\n	6.25\u2033 x 11\u2033 x 15\u2033<\/td>\n	6.25\u2033 x 11.5\u2033 x 15\u2033<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n Hanks HM2 Hydra<\/a>\n Thermionics Northwest<\/a>\n \u7ebf\u6027\u7535\u5b50\u67aa<\/a>\n \u7f8e\u56fdThermionics<\/a><\/div>","protected":false},"excerpt":{"rendered":" Our High-Efficiency Hanks HM\u00b2 e-Guns™ provide patented and award winning modular ma <\/p>\n","protected":false},"author":19,"featured_media":609,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[3,7],"tags":[148,27,45,57],"_links":{"self":[{"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/posts\/919"}],"collection":[{"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/users\/19"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/comments?post=919"}],"version-history":[{"count":1,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/posts\/919\/revisions"}],"predecessor-version":[{"id":931,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/posts\/919\/revisions\/931"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/media\/609"}],"wp:attachment":[{"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/media?parent=919"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/categories?post=919"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bihec.com\/thermionics\/wp-json\/wp\/v2\/tags?post=919"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}