\u6b8b\u4f59\u6c14\u4f53\u5206\u6790\u4eea<\/a>\u2014RGA\uff09\uff0c\u6d4b\u91cf\u6bcf\u79cd\u611f\u5174\u8da3\u8d28\u91cf\u7684\u6d53\u5ea6\u3002<\/p>\nUGA Windows \u8f6f\u4ef6\u63d0\u4f9b\u4e86\u56fe\u5f62\u7528\u6237\u754c\u9762\uff0c\u7528\u4e8e\u590d\u6742\u7684\u56fe\u5f62\u7ed8\u5236\u548c\u6570\u636e\u5206\u6790\u3002\u8f6f\u4ef6\u8fd8\u5141\u8bb8\u8fdc\u7a0b\u63a7\u5236\u7cfb\u7edf\u7684\u9600\u95e8\u3001\u52a0\u70ed\u5668\u548c\u6cf5\u3002<\/p>\n
\u5bf9\u4e8e 10\u207b\u00b9 \u5230 10\u207b\u2074 Torr \u8303\u56f4\u7684\u6c14\u4f53\u91c7\u6837\uff0c\u4f7f\u7528\u771f\u7a7a\u5165\u53e3\u7ec4\u4ef6\u3002\u53ea\u9700\u5c06 2 \u00be\u201d CF \u8f6c\u63a5\u5230 \u00bc\u201d \u7ba1\u9002\u914d\u5668\u8fde\u63a5\u5230 CF \u7aef\u53e3\uff0c\u5e76\u8c03\u6574\u7ba1\u7684\u957f\u5ea6\u4ee5\u9002\u5e94\u5165\u53e3\u538b\u529b\u3002<\/p>\n
\u5bf9\u4e8e\u8d85\u9ad8\u771f\u7a7a (UHV) \u5e94\u7528\uff08<10\u207b\u2074 Torr\uff09\uff0c\u53ef\u4ee5\u76f4\u63a5\u63a5\u5165 RGA\u3002\u771f\u7a7a\u5165\u53e3\u7ec4\u4ef6\u7684\u4efb\u4f55 2 \u00be\u201d CF \u7aef\u53e3\u90fd\u53ef\u4ee5\u7528\u6765\u8fde\u63a5\u5230\u60a8\u7684\u771f\u7a7a\u5ba4\u3002<\/p>\n
\u591a\u6bdb\u7ec6\u7ba1\u5165\u53e3\uff08\u4ec5 UG \u7cfb\u5217\uff09<\/strong><\/p>\n\u53ef\u9009\u7684\u591a\u7aef\u53e3\u91c7\u6837\u5165\u53e3\u5305\u542b 16 \u4e2a\u5b89\u88c5\u5728\u6b67\u7ba1\u4e0a\u7684\u9600\u95e8\uff0c\u53ef\u4e0e\u5404\u79cd\u6bdb\u7ec6\u7ba1\u4e00\u8d77\u4f7f\u7528\u3002<\/p>\n
\u52a0\u70ed\u5ba4\uff08\u4ec5 UG \u7cfb\u5217\uff09<\/strong><\/p>\nUGA \u7cfb\u7edf\u914d\u5907\u4e86\u7528\u4e8e\u771f\u7a7a\u5ba4\uff08\u5305\u62ec RGA\uff09\u3001\u6da1\u8f6e\u6cf5\u8fde\u63a5\u5668\u548c\u771f\u7a7a\u5165\u53e3\u7ec4\u4ef6\u7684\u72ec\u7acb\u52a0\u70ed\u5668\u3002\u5728\u70d8\u70e4\u8fc7\u7a0b\u4e2d\uff0c\u7cfb\u7edf\u53ef\u52a0\u70ed\u81f3 120 \u00b0C\u3002<\/p>\n
\u53cc\u9694\u819c\u6cf5\uff08\u4ec5 UG \u7cfb\u5217\uff09<\/strong><\/p>\n\u4f7f\u7528\u5355\u72ec\u7684\u9694\u819c\u6cf5\u5904\u7406\u65c1\u8def\u6d41\u91cf\u548c\u6da1\u8f6e\u6cf5\u7684\u80cc\u538b\u3002\u8fd9\u79cd\u7ed3\u6784\u5141\u8bb8\u5206\u6790\u8150\u8680\u6027\u6c14\u4f53\uff08\u5982\u6c2f\u3001\u6c1f\u7b49\uff09\u800c\u4e0d\u4f1a\u635f\u574f RGA \u548c\u6da1\u8f6e\u6cf5\uff0c\u5e76\u51e0\u4e4e\u6d88\u9664\u4e86\u56de\u6d41\u95ee\u9898\u3002\u6d4b\u91cf\u4f4e\u8d28\u91cf\u6c14\u4f53\uff08\u5982\u6c22\u3001\u6c26\u7b49\uff09\u7684\u9ad8\u6d53\u5ea6\u4e5f\u4e0d\u518d\u662f\u95ee\u9898\u3002<\/p>\n
\u6da1\u8f6e\u6cf5\u6392\u6c14\uff08UGA \u548c ULT \u7cfb\u5217\uff09<\/strong><\/p>\n\u53ef\u9009\u7684\u9600\u95e8\u548c\u6da1\u8f6e\u6cf5\u6392\u6c14\u5165\u53e3\u9002\u7528\u4e8e\u5e0c\u671b\u7528\u5e72\u6c2e\uff08\u6216\u5176\u4ed6\u60f0\u6027\u6c14\u4f53\uff09\u6392\u6c14\u7684\u7528\u6237\u3002\u8fd9\u53ef\u4ee5\u4fdd\u6301\u6cf5\u4e0d\u53d7\u7a7a\u6c14\u4e2d\u6c34\u5206\u548c\u5176\u4ed6\u6c61\u67d3\u7269\u7684\u5f71\u54cd\u3002<\/p>\n
\u8f6f\u4ef6\u7cfb\u7edf\u63a7\u5236<\/strong><\/p>\nUGA \u7cfb\u7edf\u53ef\u4ee5\u901a\u8fc7\u524d\u9762\u677f\u6216\u8ba1\u7b97\u673a\u8fdb\u884c\u63a7\u5236\u3002\u63d0\u4f9b\u624b\u52a8\u6216\u81ea\u52a8\u63a7\u5236\u6240\u6709\u7cfb\u7edf\u7ec4\u4ef6\u7684\u9009\u9879\u3002<\/p>\n
\u4f7f\u7528 UGA \u8f6f\u4ef6\u8fdb\u884c\u6570\u636e\u6d4b\u91cf\u548c\u663e\u793a\u3002\u76f4\u89c2\u7684\u7528\u6237\u754c\u9762\u4f7f\u6d4b\u91cf\u53d8\u5f97\u5feb\u901f\u800c\u7b80\u5355\u3002\u6570\u636e\u53ef\u4ee5\u5b9e\u65f6\u6355\u83b7\u548c\u663e\u793a\uff0c\u6216\u6839\u636e\u8bbe\u5b9a\u65f6\u95f4\u8fdb\u884c\u91c7\u96c6\u3002<\/p>\n
\u529f\u80fd\u5305\u62ec\u6a21\u62df\u548c\u76f4\u65b9\u56fe\u626b\u63cf\u6a21\u5f0f\u3001\u538b\u529b\u4e0e\u65f6\u95f4\u56fe\u3001\u6cc4\u6f0f\u68c0\u6d4b\u3001\u6c14\u4f53\u5e93\u548c\u5728\u7ebf\u5e2e\u52a9\u3002<\/p>\n
RGA \u53c2\u6570\u4e5f\u53ef\u4ee5\u901a\u8fc7\u9ad8\u7ea7 ASCII \u547d\u4ee4\u96c6\u8fdb\u884c\u63a7\u5236\u548c\u76d1\u6d4b\u3002\u6807\u51c6\u7684 RS-232 \u548c\u4ee5\u592a\u7f51\u63a5\u53e3\u7528\u4e8e\u4e0e PC \u7684\u6570\u636e\u8fde\u63a5\u3002<\/p>\n
\u6a21\u62df\u6a21\u5f0f<\/strong><\/p>\nUGA \u5206\u6790\u4eea\u63d0\u4f9b\u4e86\u5e02\u573a\u4e0a\u6700\u5177\u6027\u4ef7\u6bd4\u7684\u7cfb\u7edf\u3002\u5b83\u4eec\u63d0\u4f9b\u66f4\u591a\u6027\u80fd\u3001\u66f4\u597d\u7684\u529f\u80fd\uff0c\u5e76\u4e14\u4ef7\u683c\u8fdc\u4f4e\u4e8e\u7ade\u4e89\u5bf9\u624b<\/p>\n
UGA \u7cfb\u5217\u89c4\u683c<\/strong><\/p>\n\u5165\u53e3\uff08UGA \u7cfb\u5217\uff09<\/em>*<\/p>\n\n\u7c7b\u578b\uff1a\u4e0d\u9508\u94a2\u548c PEEK \u6bdb\u7ec6\u7ba1\uff0c\u4e24\u4e2a\u989d\u5916\u7684 2-3\/4″ CF \u7aef\u53e3<\/li>\n \u6d41\u91cf\uff1a1 \u81f3 10 \u6beb\u5347\u6bcf\u5206\u949f\uff08\u5927\u6c14\u538b\u529b\u4e0b\uff09<\/li>\n \u538b\u529b\uff1a\u7ea6 10\u207b\u2074 mbar \u81f3\u51e0 bar\uff08\u53d6\u51b3\u4e8e\u8fde\u63a5\u7aef\u53e3\u548c\u6bdb\u7ec6\u7ba1\uff09<\/li>\n<\/ul>\n\u8d28\u8c31\u4eea<\/strong><\/p>\n\n\u7c7b\u578b\uff1a\u56db\u6781\u6746\uff08RGA\uff09<\/li>\n \u63a2\u6d4b\u5668\uff1a\u6cd5\u62c9\u7b2c\u676f\u548c\u7535\u5b50\u500d\u589e\u5668<\/li>\n \u8303\u56f4\uff1a100\u3001200 \u6216 300 \u539f\u5b50\u8d28\u91cf\u5355\u4f4d\uff08amu\uff09<\/li>\n \u5206\u8fa8\u7387\uff1a\u5728\u5cf0\u503c\u9ad8\u5ea6\u7684 10% \u65f6\u4f18\u4e8e 0.5 amu<\/li>\n \u68c0\u6d4b\u9650\uff1a\u4f4e\u4e8e 1 ppm<\/li>\n \u64cd\u4f5c\u538b\u529b\uff1a5 \u00d7 10\u207b\u2076 mbar<\/li>\n<\/ul>\n\u8fde\u63a5\uff08UGA \u7cfb\u5217\uff09<\/em>*<\/p>\n\n\u6837\u54c1\u5165\u53e3\uff1a\n\n1 mbar \u81f3 1 bar\uff1a1\/8″ Ultra-Torr\u00ae \u914d\u4ef6<\/li>\n 10\u207b\u00b9 \u81f3 10\u207b\u2074 mbar\uff1a2-3\/4″ CF \u6cd5\u5170\u7aef\u53e3<\/li>\n <10\u207b\u2074 mbar\uff1a2-3\/4″ CF \u6cd5\u5170\u7aef\u53e3<\/li>\n \u8ba1\u7b97\u673a\u63a5\u53e3\uff1aRS-232, \u4ee5\u592a\u7f51<\/li>\n<\/ul>\n<\/li>\n<\/ul>\nUGA \u8f6f\u4ef6<\/strong><\/p>\n\n\u8f6f\u4ef6\uff1aWindows \u5e94\u7528\u7a0b\u5e8f\uff0c\u63a7\u5236 UGA \u7cfb\u7edf\uff0c\u5305\u62ec RGA\u3002<\/li>\n<\/ul>\n\u7cfb\u7edf<\/strong><\/p>\n\n\u9ad8\u771f\u7a7a\u6cf5\uff1a\u6df7\u5408\u6da1\u8f6e\u5206\u5b50\u6cf5<\/li>\n \u9694\u819c\u6cf5\uff1a\u5148\u8fdb\u4f4e\u538b\u6cf5<\/li>\n<\/ul>\n\u6750\u6599<\/strong><\/p>\n\n\u7ed3\u6784\uff1aSS304 \u548c SS316<\/li>\n \u7edd\u7f18\u6750\u6599\uff1a\u94dd\u571f\u77ff\uff0c\u9676\u74f7<\/li>\n \u5bc6\u5c01\u6750\u6599\uff1aViton\u00ae\u3001buna-N \u548c\u6c30\u5316\u4e01\u4e8c\u70ef\u6a61\u80f6\uff0c\u94dc\u57ab\u7247<\/li>\n \u5176\u4ed6\uff1a\u94dd\uff0cTygon\u00ae<\/li>\n<\/ul>\n\u4e00\u822c<\/strong><\/p>\n\n\u542f\u52a8\u65f6\u95f4\uff1a\u4ece\u5b8c\u5168\u505c\u6b62\u5230\u542f\u52a8\u9700\u8981 8 \u5206\u949f<\/li>\n \u6700\u5927\u73af\u5883\u6e29\u5ea6\uff1a35 \u00b0C<\/li>\n \u70d8\u70e4\u6e29\u5ea6\uff1a120 \u00b0C\uff08\u53d7\u63a7\u52a0\u70ed\u5668\uff0c\u4ec5 UG \u7cfb\u5217\uff09<\/li>\n \u7535\u6e90\u8981\u6c42\uff1a720 W\uff0c85 \u81f3 264 VAC \u6216 120 \u81f3 370 VDC\uff0c47 \u81f3 63 Hz<\/li>\n \u5c3a\u5bf8\uff1a12″ \u00d7 11″ \u00d7 27″\uff08\u5bbd \u00d7 \u9ad8 \u00d7 \u957f\uff09<\/li>\n \u91cd\u91cf\uff1aUGA 85 \u78c5\uff0cULT 75 \u78c5<\/li>\n \u4fdd\u4fee\uff1a\u6750\u6599\u6216\u5de5\u827a\u7f3a\u9677\u4e00\u5e74\u4fdd\u4fee\u3002\u6cf5\u5bc6\u5c01\u548c\u9694\u819c\u4fdd\u4fee 90 \u5929<\/li>\n<\/ul>\n <\/p>\nSRS,Stanford Research Systems,UGA100,UGA200,UGA300,ULT100,ULT200,ULT300,\u901a\u7528\u6c14\u4f53\u5206\u6790\u4eea<\/figcaption><\/figure>\nhttps:\/\/www.bihec.com\/think-srs\/UGA100,UGA200,UGA300,ULT100,ULT200,ULT300\/<\/a><\/p>\nSRS<\/a>\n Stanford Research Systems<\/a>\n UGA100<\/a>\n UGA200<\/a>\n UGA300<\/a>\n ULT100<\/a>\n ULT200<\/a>\n ULT300<\/a>\n \u901a\u7528\u6c14\u4f53\u5206\u6790\u4eea<\/a><\/div>","protected":false},"excerpt":{"rendered":"SRS,Stanford Research Systems,UGA100,UGA200,UGA300,ULT100,ULT200,ULT300,\u901a\u7528\u6c14\u4f53\u5206\u6790\u4eea \u901a\u7528\u6c14\u4f53\u5206\u6790\u4eea UG <\/p>\n","protected":false},"author":27,"featured_media":298,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[148],"tags":[4,5,149,150,151,152,153,154,155],"yoast_head":"\n
SRS,Stanford Research Systems,UGA100,UGA200,UGA300,ULT100,ULT200,ULT300,\u901a\u7528\u6c14\u4f53\u5206\u6790\u4eea<\/title>\n \n \n \n \n \n \n \n \n \n \n \n\t \n\t \n \n \n\t \n\t \n\t \n