{"id":225,"date":"2025-03-28T15:43:07","date_gmt":"2025-03-28T07:43:07","guid":{"rendered":"https:\/\/www.bihec.com\/universitywafer\/?p=225"},"modified":"2025-03-28T15:43:07","modified_gmt":"2025-03-28T07:43:07","slug":"universitywaferalgan-gan%e5%bc%82%e8%b4%a8%e7%bb%93%e6%9e%84%e6%99%b6%e5%9c%86p%e5%9e%8b","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/universitywafer\/universitywaferalgan-gan%e5%bc%82%e8%b4%a8%e7%bb%93%e6%9e%84%e6%99%b6%e5%9c%86p%e5%9e%8b\/","title":{"rendered":"UniversityWafer,AlGaN\/GaN\u5f02\u8d28\u7ed3\u6784\u6676\u5706,P\u578b"},"content":{"rendered":"<p><a href=\"https:\/\/www.bihec.com\/universitywafer\/tag\/universitywafer\/\" title=\"View all posts in UniversityWafer\" target=\"_blank\">UniversityWafer<\/a>,<a href=\"https:\/\/www.bihec.com\/universitywafer\/tag\/algan-gan%e5%bc%82%e8%b4%a8%e7%bb%93%e6%9e%84%e6%99%b6%e5%9c%86\/\" title=\"View all posts in AlGaN\/GaN\u5f02\u8d28\u7ed3\u6784\u6676\u5706\" target=\"_blank\">AlGaN\/GaN\u5f02\u8d28\u7ed3\u6784\u6676\u5706<\/a>,<a href=\"https:\/\/www.bihec.com\/universitywafer\/tag\/p%e5%9e%8b\/\" title=\"View all posts in P\u578b\" target=\"_blank\">P\u578b<\/a>,AlGaN\u886c\u5e95\uff08\u706f\u5177\/\u6fc0\u5149\u5668\/LED\u5e94\u7528\uff09,\u886c\u5e95\uff1a\u84dd\u5b9d\u77f3[A]\u6676\u5706,\u8868\u9762\u5904\u7406,\u5916\u5ef6\u5c42<\/p>\n<h3><strong>AlGaN\u886c\u5e95\uff08\u706f\u5177\/\u6fc0\u5149\u5668\/LED\u5e94\u7528\uff09<\/strong><\/h3>\n<p><strong>\u9ad8\u7ea7\u987e\u95ee\u79d1\u5b66\u5bb6\u8be2\u4ef7<\/strong>\uff1a<\/p>\n<ul>\n<li><strong>\u9700\u6c42<\/strong>\uff1a\u84dd\u5b9d\u77f3\u886c\u5e95\u9540AlGaN\u6d82\u5c42\n<ul>\n<li><strong>\u5c3a\u5bf8<\/strong>\uff1a\u76f4\u5f84\u22651cm<\/li>\n<li><strong>\u539a\u5ea6<\/strong>\uff1a200-500\u03bcm<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<h3><strong>UniversityWafer<\/strong><\/h3>\n<p><strong>\u4ea7\u54c1\u7f16\u53f7DA18<\/strong>\uff1a<\/p>\n<ul>\n<li><strong>\u886c\u5e95<\/strong>\uff1a\u84dd\u5b9d\u77f3[A]\u6676\u5706\n<ul>\n<li>\u76f4\u5f84\uff1a50.8\u00b10.3mm<\/li>\n<li>\u539a\u5ea6\uff1a430\u00b125\u03bcm<\/li>\n<li>\u6676\u5411\uff1aC\u9762\u00b10.2\u00b0<\/li>\n<li>\u4e3b\u5e73\u8fb9\u957f\u5ea6\uff1a16.0\u00b11.0mm<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u8868\u9762\u5904\u7406<\/strong>\uff1a\n<ul>\n<li>\u53cc\u9762\u5916\u5ef6\u7ea7\u629b\u5149<\/li>\n<li>\u8868\u9762\u7c97\u7cd9\u5ea6Ra\uff1c0.3nm\uff08AFM\u68c0\u6d4b\uff09<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u5916\u5ef6\u5c42<\/strong>\uff1a\n<ul>\n<li>\u672a\u63ba\u6742Al\u2080.\u2083GaN\uff08[100]\u6676\u5411\uff09<\/li>\n<li>\u539a\u5ea6\uff1a1\u03bcm<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p><strong>\u6ce8<\/strong>\uff1a\u53c2\u8003\u7f16\u53f7#164039\u83b7\u53d6\u4ef7\u683c\u8be6\u60c5<\/p>\n<h3><strong>AlGaN\/GaN\u5f02\u8d28\u7ed3\u6784\u6676\u5706\u9700\u6c42<\/strong><\/h3>\n<p><strong>\u535a\u58eb\u5019\u9009\u4eba\u8be2\u4ef7<\/strong>\uff1a<\/p>\n<ul>\n<li><strong>Al\u2082O\u2083 2\u82f1\u5bf8<\/strong>\uff1a375-400\u03bcm SSP\u7ea7\uff08\u7528\u4e8eMOVPE\u6cd5\u6c89\u79efAlGaN\/GaN\u5f02\u8d28\u7ed3\u6784\uff09<\/li>\n<li><strong>SiC 4H 2\u82f1\u5bf8<\/strong>\uff1a375-400\u03bcm\u7edd\u7f18\u578b\uff08GaN\u6676\u4f53\u7ba1\u5e94\u7528\uff09<\/li>\n<li><strong>Si (111) 2\u82f1\u5bf8<\/strong>\uff1a375-400\u03bcm\u9ad8\u963b\u578b\uff08\u6676\u4f53\u7ba1\u5236\u9020\uff09<br \/>\n<strong>\u7528\u9014<\/strong>\uff1aHFET\u6280\u672f\u8f6c\u79fb\uff08\u53c2\u8003\u7f16\u53f7#171068\uff09<\/li>\n<\/ul>\n<h3><strong>P\u578bAlGaN\u6a21\u677f<\/strong><\/h3>\n<p><strong>\u535a\u58eb\u540e\u7814\u7a76\u9700\u6c42<\/strong>\uff1a<\/p>\n<ul>\n<li><strong>P\u578bGaN\/AlGaN\u6a21\u677f<\/strong>\uff1a\n<ul>\n<li>\u886c\u5e95\uff1a\u84dd\u5b9d\u77f3\/\u77f3\u82f1\uff08\u65b9\u5f62\u4f18\u5148\uff0c\u7194\u70b9\u22651000\u00b0C\uff09<\/li>\n<li>\u539a\u5ea6\uff1a0.3-0.8\u03bcm\uff08Mg\u63ba\u6742\uff09<\/li>\n<li><strong>\u9700\u63d0\u4f9b\u5b8c\u6574\u6280\u672f\u6570\u636e<\/strong>\uff08\u7535\u5b66\/\u5149\u5b66\/\u673a\u68b0\/\u8868\u9762\u7279\u6027\uff09<br \/>\n<strong>\u5907\u6ce8<\/strong>\uff1a\u5706\u5f62\u886c\u5e95\u53ef\u63a5\u53d7\u5355\u7247\u91c7\u8d2d\uff08\u53c2\u8003\u7f16\u53f7#197858\uff09<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<h3><strong>\u7814\u7a76\u7ea7AlGaN\u886c\u5e95<\/strong><\/h3>\n<p><strong>\u9500\u552e\u5de5\u7a0b\u5e08\u8be2\u4ef7<\/strong>\uff1a<\/p>\n<ul>\n<li><strong>2\u82f1\u5bf8c\u9762\u84dd\u5b9d\u77f3\u886c\u5e95<\/strong>\uff1a\n<ul>\n<li>AlGaN\u5c42\u539a\u5ea6\uff1a200-300nm<\/li>\n<li>Si\u63ba\u6742\u6d53\u5ea6\uff1a3-5\u00d710\u00b9\u2078\/cm\u00b3<\/li>\n<li>Al\u7ec4\u5206\uff1a20%\u4e0e40%\u4e24\u79cd<br \/>\n| \u886c\u5e95 | \u76f4\u5f84 | \u7f13\u51b2\u5c42 | \u5916\u5ef6\u5c42\/\u63ba\u6742 | \u539a\u5ea6 |<br \/>\n|&#8212;&#8212;|&#8212;&#8212;|&#8212;&#8212;&#8211;|&#8212;&#8212;&#8212;&#8212;|&#8212;&#8212;|<br \/>\n| \u84dd\u5b9d\u77f3 | 2&#8243; | 50nm AlN | \u672c\u5f81GaN | 100nm |<br \/>\n| \u84dd\u5b9d\u77f3 | 2&#8243; | 50nm AlN | \u672c\u5f81GaN | 300nm |<br \/>\n| \u84dd\u5b9d\u77f3 | 2&#8243; | 50nm AlN | \u672c\u5f81Al10%GaN | 300nm |<br \/>\n| \u84dd\u5b9d\u77f3 | 2&#8243; | 50nm AlN | Si\u63ba\u6742Al20%GaN | 250nm |<br \/>\n| \u84dd\u5b9d\u77f3 | 2&#8243; | 50nm AlN | Si\u63ba\u6742Al40%GaN | 250nm |<br \/>\n\uff08\u53c2\u8003\u7f16\u53f7#102784\uff09<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<figure id=\"attachment_226\" aria-describedby=\"caption-attachment-226\" style=\"width: 442px\" class=\"wp-caption alignnone\"><img loading=\"lazy\" class=\"  wp-image-226\" src=\"https:\/\/www.bihec.com\/universitywafer\/wp-content\/uploads\/sites\/1989\/2025\/03\/img_67e6515a66954.png\" alt=\"UniversityWafer,AlGaN\/GaN\u5f02\u8d28\u7ed3\u6784\u6676\u5706,P\u578b\" width=\"442\" height=\"505\" srcset=\"https:\/\/www.bihec.com\/universitywafer\/wp-content\/uploads\/sites\/1989\/2025\/03\/img_67e6515a66954.png 646w, https:\/\/www.bihec.com\/universitywafer\/wp-content\/uploads\/sites\/1989\/2025\/03\/img_67e6515a66954-263x300.png 263w, https:\/\/www.bihec.com\/universitywafer\/wp-content\/uploads\/sites\/1989\/2025\/03\/img_67e6515a66954-500x571.png 500w\" sizes=\"(max-width: 442px) 100vw, 442px\" \/><figcaption id=\"caption-attachment-226\" class=\"wp-caption-text\">UniversityWafer,AlGaN\/GaN\u5f02\u8d28\u7ed3\u6784\u6676\u5706,P\u578b<\/figcaption><\/figure>\n<p><span id=\"sample-permalink\"><a href=\"https:\/\/www.bihec.com\/universitywafer\/?p=225&amp;preview=true\" target=\"wp-preview-225\" rel=\"noopener\">https:\/\/www.bihec.com\/universitywafer\/<span id=\"editable-post-name\">UniversityWafer,AlGaN\/GaN\u5f02\u8d28\u7ed3\u6784\u6676\u5706,P\u578b<\/span>\/<\/a><\/span><\/p>\n<p><a href=\"https:\/\/zhuanlan.zhihu.com\/p\/1888975773022536260\">https:\/\/zhuanlan.zhihu.com\/p\/1888975773022536260<\/a><\/p>\n<br><div class=\"tagcloud\"><a href=\"https:\/\/www.bihec.com\/universitywafer\/tag\/algan-gan%e5%bc%82%e8%b4%a8%e7%bb%93%e6%9e%84%e6%99%b6%e5%9c%86\/\" class=\"tag-cloud-link tag-link-0 tag-link-position-1\" style=\"font-size: 8pt;\" aria-label=\"AlGaN\/GaN\u5f02\u8d28\u7ed3\u6784\u6676\u5706 (1\u4e2a\u9879\u76ee)\">AlGaN\/GaN\u5f02\u8d28\u7ed3\u6784\u6676\u5706<\/a>\n<a href=\"https:\/\/www.bihec.com\/universitywafer\/tag\/p%e5%9e%8b\/\" class=\"tag-cloud-link tag-link-1 tag-link-position-2\" style=\"font-size: 13.185185185185pt;\" aria-label=\"P\u578b (3\u4e2a\u9879\u76ee)\">P\u578b<\/a>\n<a href=\"https:\/\/www.bihec.com\/universitywafer\/tag\/universitywafer\/\" class=\"tag-cloud-link tag-link-2 tag-link-position-3\" style=\"font-size: 22pt;\" aria-label=\"UniversityWafer (12\u4e2a\u9879\u76ee)\">UniversityWafer<\/a>\n<a href=\"https:\/\/www.bihec.com\/universitywafer\/tag\/universitywafer%e6%99%b6%e5%9c%86\/\" class=\"tag-cloud-link tag-link-3 tag-link-position-4\" style=\"font-size: 11.111111111111pt;\" aria-label=\"universitywafer\u6676\u5706 (2\u4e2a\u9879\u76ee)\">universitywafer\u6676\u5706<\/a>\n<a 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