{"id":210,"date":"2024-07-09T17:10:13","date_gmt":"2024-07-09T09:10:13","guid":{"rendered":"https:\/\/www.bihec.com\/vactechniche\/?p=210"},"modified":"2024-07-09T17:10:13","modified_gmt":"2024-07-09T09:10:13","slug":"%e7%a1%ab%e6%97%8f%e5%8c%96%e7%89%a9%e8%96%84%e8%86%9c%e6%b2%89%e7%a7%af%e7%bb%bc%e8%bf%b0chalcogenide-thin-films-deposition-a-complete-overview","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/vactechniche\/%e7%a1%ab%e6%97%8f%e5%8c%96%e7%89%a9%e8%96%84%e8%86%9c%e6%b2%89%e7%a7%af%e7%bb%bc%e8%bf%b0chalcogenide-thin-films-deposition-a-complete-overview\/","title":{"rendered":"\u786b\u65cf\u5316\u7269\u8584\u819c\u6c89\u79ef\u7efc\u8ff0CHALCOGENIDE THIN FILMS DEPOSITION | A COMPLETE OVERVIEW"},"content":{"rendered":"

\u786b\u65cf\u5316\u7269\u8584\u819c\u6c89\u79ef<\/a>\u7efc\u8ff0CHALCOGENIDE THIN FILMS DEPOSITION | A COMPLETE OVERVIEW<\/p>\n

\"\"<\/p>\n

\u786b\u65cf\u5316\u5408\u7269\u8584\u819c\u6c89\u79ef<\/a>
\n\u786b\u65cf\u5316\u5408\u7269\u662f\u542b\u6709\u5143\u7d20\u5468\u671f\u8868\u7b2c16\u65cf\u5143\u7d20\uff08\u786b\u3001\u7852\u3001\u78b2\u7b49\uff09\u4e2d\u7684\u81f3\u5c11\u4e00\u79cd\u786b\u65cf\u5143\u7d20\u7684\u6750\u6599\u3002\u786b\u65cf\u5316\u5408\u7269\u4e8c\u5143\u3001\u4e09\u5143\u548c\u56db\u5143\u884d\u751f\u7269\u5e7f\u6cdb\u7528\u4e8e\u5149\u4f0f\u3001\u5149\u50ac\u5316\u5242\u3001\u4f20\u611f\u5668\u3001\u71c3\u6599\u7535\u6c60\u548c\u7535\u6c60\u5236\u9020\u3002<\/p>\n

 <\/p>\n

\u786b\u65cf\u5316\u5408\u7269\u7684\u6027\u8d28
\n\u786b\u65cf\u5316\u5408\u7269\uff0c\u5982\u8fc7\u6e21\u91d1\u5c5e
\u786b\u65cf\u5316\u7269<\/a>\uff0c\u542b\u6709\u786b\u65cf\u9634\u79bb\u5b50\uff0c\u5982S2\u2212\u3001Se2\u2212\u6216Te2\u2212\uff0c\u4ee5\u53ca\u81f3\u5c11\u4e00\u79cd\u6b63\u7535\u5143\u7d20\u3002\u786b\u65cf\u5316\u5408\u7269\u5177\u6709\u7a84\u5e26\u9699\u80fd\u91cf\uff0c\u8fd9\u5bfc\u81f4\u786b\u65cf\u5316\u5408\u7269\u73bb\u7483\u7684\u7279\u6b8a\u5149\u5b66\u6027\u8d28\uff0c\u5982\u9ad8\u6298\u5c04\u7387\u3001\u7ea2\u5916\uff08IR\uff09\u900f\u660e\u5ea6\u3001\u975e\u7ebf\u6027\u5149\u5b66\u6027\u8d28\u548c\u4ece\u975e\u6676\u5230\u7ed3\u6676\u7684\u53ef\u9006\u76f8\u53d8\u3002\u786b\u7cfb\u73bb\u7483\u53ef\u4ee5\u629b\u5149\u6216\u52a0\u5de5\u6210\u5e73\u9762\u3001\u7403\u5f62\u6216\u5176\u4ed6\u5f62\u72b6\uff0c\u7528\u4e8e\u5404\u79cd\u5e94\u7528\u3002<\/p>\n

 <\/p>\n

\u786b\u65cf\u5316\u5408\u7269\u7684\u8584\u819c\u5e94\u7528
\n\u786b\u65cf\u5316\u5408\u7269\u8584\u819c\u4ee5\u5176\u7a84\u5e26\u9699\u80fd\u91cf\u3001\u65e0\u6bd2\u6027\u3001\u751f\u7269\u76f8\u5bb9\u6027\u3001\u7ecf\u6d4e\u6027\u548c\u6613\u5408\u6210\u6027\u800c\u88ab\u5e7f\u6cdb\u5e94\u7528\u3002\u786b\u65cf\u5316\u5408\u7269\u8584\u819c\u53ef\u7528\u4e8e\u751f\u4ea7\uff1a
\n\u5149\u4f0f\u7535\u6c60
\n\u592a\u9633\u80fd\u7535\u6c60
\n\u71c3\u6599\u7535\u6c60
\n\u7535\u6c60
\n\u6c14\u4f53\u4f20\u611f\u5668
\n\u8d85\u7ea7\u7535\u5bb9\u5668
\n\u5149\u5b66\u6210\u50cf
\n\u5168\u606f\u56fe\u8bb0\u5f55
\n\u5149\u5b66\u5927\u5bb9\u91cf\u5b58\u50a8\u5668
\n\u7ea2\u5916\u5149\u7ea4<\/p>\n

 <\/p>\n

\u786b\u7cfb\u73bb\u7483\u548c\u900f\u955c\u5728\u67d0\u4e9b\u5e94\u7528\u4e2d\u53ef\u4ee5\u53d6\u4ee3\u6602\u8d35\u7684\u6750\u6599\uff0c\u5982Ge\u3001ZnSe\u548cZnS\u3002\u786b\u7cfb\u73bb\u7483\u5177\u6709\u826f\u597d\u7684\u8272\u6563\u3001\u826f\u597d\u7684\u900f\u5c04\u7387\u3001\u53ef\u5ffd\u7565\u7684\u7531\u4e8e\u6e29\u5ea6\u53d8\u5316\u5f15\u8d77\u7684\u6298\u5c04\u7387\u53d8\u5316\uff08\u0394n\/\u0394T\uff09\u4ee5\u53ca\u5bbd\u7684\u5e26\u5bbd\u3002<\/p>\n

 <\/p>\n

\u786b\u65cf\u5316\u5408\u7269\u8584\u819c\u6c89\u79ef\u65b9\u6cd5
\n\u8584\u819c\u7684\u5149\u5b66\u6027\u80fd\u548c\u5176\u4ed6\u7279\u6027\uff08\u70ed\u3001\u673a\u68b0\u3001\u7535\u963b\u3001\u5316\u5b66\u3001\u5149\u654f\u7b49\uff09\u5728\u5f88\u5927\u7a0b\u5ea6\u4e0a\u53d6\u51b3\u4e8e\u6c89\u79ef\u65b9\u6cd5\u3002\u6839\u636e\u8584\u819c\u7684\u6c89\u79ef\u65b9\u5f0f\uff0c\u53ef\u4ee5\u63a7\u5236\u5316\u5b66\u8ba1\u91cf\u3001\u7ed3\u6784\u3001\u7f3a\u9677\u72b6\u6001\u548c\u8bb8\u591a\u5176\u4ed6\u7279\u5f81\u3002\u786b\u65cf\u5316\u5408\u7269\u8584\u819c\u53ef\u4ee5\u901a\u8fc7\u5316\u5b66\u6216\u7269\u7406\u9014\u5f84\u6c89\u79ef\uff0c\u5982\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08PVD\uff09\u6280\u672f\u3002<\/p>\n

 <\/p>\n

\u786b\u7cfb\u5316\u5408\u7269\u8584\u819c\u7684\u5316\u5b66\u6c89\u79ef
\n\u786b\u65cf\u5316\u7269\u53ef\u4ee5\u5728\u79f0\u4e3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09\u7684\u5316\u5b66\u8fc7\u7a0b\u4e2d\u4ece\u6c14\u76f8\u6c89\u79ef\u3002\u5728\u8fd9\u79cd\u65b9\u6cd5\u4e2d\uff0c\u6c14\u4f53\u524d\u4f53\u5728\u6c14\u76f8\u6216\u886c\u5e95-\u6c14\u4f53\u754c\u9762\u53cd\u5e94\uff0c\u5728\u886c\u5e95\u4e0a\u4ea7\u751f\u8584\u819c\uff0c\u56e0\u6b64\u8584\u819c\u7684\u6210\u5206\u4e0e\u6c14\u4f53\u4e0d\u540c\u3002CVD\u6280\u672f\u5177\u6709\u4f7f\u7528\u9ad8\u7eaf\u5ea6\u524d\u4f53\u548c\u9ad8\u6c89\u79ef\u901f\u7387\uff08\u7ea61\u03bcm\/min\uff09\u5f62\u6210\u539a\u5ea6\uff08\u548c\u6210\u5206\uff09\u5747\u5300\u7684\u819c\u7684\u4f18\u70b9\u3002\u7136\u800c\uff0c\u8fd9\u79cd\u6c89\u79ef\u6280\u672f\u4e5f\u6709\u5176\u7f3a\u70b9\uff0c\u4f8b\u5982\u662f\u4e00\u79cd\u9ad8\u6e29\u5de5\u827a\uff0c\u5e76\u4e14\u53ef\u4ee5\u901a\u8fc7\u8fd9\u79cd\u65b9\u6cd5\u6d82\u8986\u7684\u6750\u6599\u8303\u56f4\u6709\u9650\u3002<\/p>\n

 <\/p>\n

\u70ed\u84b8\u53d1
\n\u70ed\u84b8\u53d1\u6cd5\u7528\u4e8e\u6c89\u79ef\u4e8c\u5143\u786b\u7cfb\u5316\u5408\u7269\u6750\u6599\uff0c\u5982as-S\uff08Se\uff09\u548cGe-S\uff08Se\uff09\u3002\u8be5\u65b9\u6cd5\u4e5f\u7528\u4e8e\u6c89\u79ef\u7528\u4e8eX\u5c04\u7ebf\u654f\u611f\u5e73\u677f\u7684\u975e\u6676\u7852\u3002\u70ed\u84b8\u53d1\u5728\u8584\u819c\u6c89\u79ef\u65b9\u6cd5\u4e2d\u975e\u5e38\u6d41\u884c\uff0c\u56e0\u4e3a\u5b83\u7b80\u5355\u3001\u4f4e\u6210\u672c\u3001\u53ef\u91cd\u590d\u6027\u3001\u826f\u597d\u7684\u5de5\u827a\u63a7\u5236\u4ee5\u53ca\u5728\u5927\u9762\u79ef\u7684\u57fa\u5e95\u4e0a\u6d82\u8986\u5143\u7d20\u3001\u5408\u91d1\u548c\u5316\u5408\u7269\u6d82\u5c42\u7684\u80fd\u529b\u3002<\/p>\n

 <\/p>\n

\u786b\u7cfb\u5316\u5408\u7269\u8584\u819c\u6c89\u79ef\u4e2d\u7684\u6e85\u5c04
\n\u6e85\u5c04\u662f\u5e7f\u6cdb\u5e94\u7528\u786b\u7cfb\u5316\u5408\u7269\u8584\u819c\u7684\u6700\u5408\u9002\u7684\u65b9\u6cd5\u4e4b\u4e00\u3002\u5b83\u53ef\u4ee5\u7528\u4e8e\u6c89\u79ef\u4e8c\u5143\uff08\u4f8b\u5982a-Ge-Te\uff09\u3001\u4e09\u5143\uff08\u4f8b\u5982a-Ge-Ga-S\uff09\u6216\u591a\u7ec4\u5206\uff08\u4f8b\u5982a-Ag-In-Sb-Te\uff09\u73bb\u7483\u3002\u6e85\u5c04\u662f\u7528\u4e8e\u6c89\u79ef\u7528\u4e8e\u5149\u5b66\u548c\u7535\u6c14\u6570\u636e\u5b58\u50a8\u5e94\u7528\u7684\u786b\u65cf\u5316\u7269\u819c\u7684\u4e3b\u8981\u5de5\u4e1a\u6280\u672f\u3002
\n\u4f7f\u7528\u6e85\u5c04\u65b9\u6cd5\u5728\u6240\u6709\u886c\u5e95\u533a\u57df\u4e2d\u6700\u597d\u5730\u5b9e\u73b0\u539a\u5ea6\u5747\u5300\u6027\u63a7\u5236\uff0c\u4f46\u662f\u4f7f\u7528\u8be5\u65b9\u6cd5\u786b\u65cf\u5316\u5408\u7269\u6750\u6599\u7684\u6c89\u79ef\u901f\u7387\u4f4e\u5e76\u4e14\u5c0f\u4e8e\u6bcf\u79d21nm\u3002\u7531\u4e8e\u5927\u591a\u6570\u786b\u65cf\u5316\u5408\u7269\u6750\u6599\u7684\u7535\u5bfc\u7387\u8f83\u4f4e\uff0c\u56e0\u6b64\u5efa\u8bae\u5bf9\u8fd9\u4e9b\u6750\u6599\u4f7f\u7528RF\u6e85\u5c04\u548c\u80cc\u9540\u9776\u6750\u3002<\/p>\n

 <\/p>\n

\u786b\u7cfb\u5316\u5408\u7269\u8584\u819c\u6c89\u79ef\u4e2d\u7684\u8109\u51b2\u6fc0\u5149
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 <\/p>\n

 <\/p>\n

References<\/strong><\/h3>\n
    \n
  1. https:\/\/chalcogenide.net\/what-are-chalcogenides\/#:~:text=Chalcogenides %20are %20materials %2 0containing %20one ,3%20eV%2C%20depending%20on%20composition.<\/li>\n
  2. Muslih, E. Y., Munir, B., & Khan, M. M. (2021). Advances in chalcogenides and chalcogenides-based nanomaterials such as sulfides, selenides, and tellurides. In chalcogenide-based nanomaterials as photocatalysts (pp. 7-31). Elsevier.<\/li>\n
  3. Khan, M. M. (2023). Semiconductors as photocatalysts: visible-light active materials. In Mohammad Mansoob Khan, Theoretical Concepts of Photocatalysis (pp. 53-75). Elsevier.<\/li>\n
  4. Orava, J., Kohoutek, T., & Wagner, T. (2014). Deposition techniques for chalcogenide thin films. In Chalcogenide glasses (pp. 265-309). Woodhead Publishing.<\/li>\n
  5. Tripathi, S., Kumar, B., & Dwivedi, D. K. (2018, November). Chalcogenide glasses: thin film deposition techniques and applications in the field of electronics. In 2018 5th IEEE Uttar Pradesh Section International Conference on Electrical, Electronics and Computer Engineering (UPCON) (pp. 1-4). IEEE.<\/li>\n<\/ol>\n
    \u786b\u65cf\u5316\u7269<\/a>\n\u786b\u65cf\u5316\u7269\u8584\u819c\u6c89\u79ef<\/a>\n\u8584\u819c\u6c89\u79ef<\/a><\/div>","protected":false},"excerpt":{"rendered":"

    \u786b\u65cf\u5316\u7269\u8584\u819c\u6c89\u79ef\u7efc\u8ff0CHALCOGENIDE THIN FILMS DEPOSITION | A COMPLETE OVERVIEW \u786b\u65cf\u5316\u5408\u7269\u8584\u819c\u6c89\u79ef \u786b\u65cf\u5316\u5408\u7269\u662f\u542b\u6709\u5143\u7d20\u5468\u671f\u8868 <\/p>\n","protected":false},"author":19,"featured_media":211,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[1],"tags":[29,28,30],"_links":{"self":[{"href":"https:\/\/www.bihec.com\/vactechniche\/wp-json\/wp\/v2\/posts\/210"}],"collection":[{"href":"https:\/\/www.bihec.com\/vactechniche\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bihec.com\/vactechniche\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/vactechniche\/wp-json\/wp\/v2\/users\/19"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/vactechniche\/wp-json\/wp\/v2\/comments?post=210"}],"version-history":[{"count":1,"href":"https:\/\/www.bihec.com\/vactechniche\/wp-json\/wp\/v2\/posts\/210\/revisions"}],"predecessor-version":[{"id":212,"href":"https:\/\/www.bihec.com\/vactechniche\/wp-json\/wp\/v2\/posts\/210\/revisions\/212"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/vactechniche\/wp-json\/wp\/v2\/media\/211"}],"wp:attachment":[{"href":"https:\/\/www.bihec.com\/vactechniche\/wp-json\/wp\/v2\/media?parent=210"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bihec.com\/vactechniche\/wp-json\/wp\/v2\/categories?post=210"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bihec.com\/vactechniche\/wp-json\/wp\/v2\/tags?post=210"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}