{"id":247,"date":"2025-03-27T13:38:38","date_gmt":"2025-03-27T05:38:38","guid":{"rendered":"https:\/\/www.bihec.com\/vacuumtechnology-vti\/?p=247"},"modified":"2025-03-27T13:38:38","modified_gmt":"2025-03-27T05:38:38","slug":"vtifslc-3fslc-4fslc-5fslc-6fslc%e5%9b%ba%e5%ae%9a%e5%bc%8f%e5%97%85%e6%8e%a2%e6%af%9b%e7%bb%86%e7%ae%a1%e6%bc%8f%e5%ad%94","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/vacuumtechnology-vti\/vtifslc-3fslc-4fslc-5fslc-6fslc%e5%9b%ba%e5%ae%9a%e5%bc%8f%e5%97%85%e6%8e%a2%e6%af%9b%e7%bb%86%e7%ae%a1%e6%bc%8f%e5%ad%94\/","title":{"rendered":"VTI,FSLC-3,FSLC-4,FSLC-5,FSLC-6,FSLC\u56fa\u5b9a\u5f0f\u55c5\u63a2\u6bdb\u7ec6\u7ba1\u6f0f\u5b54"},"content":{"rendered":"<p><a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/vti\/\" title=\"View all posts in VTI\" target=\"_blank\">VTI<\/a>,<a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/fslc-3\/\" title=\"View all posts in FSLC-3\" target=\"_blank\">FSLC-3<\/a>,<a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/fslc-4\/\" title=\"View all posts in FSLC-4\" target=\"_blank\">FSLC-4<\/a>,<a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/fslc-5\/\" title=\"View all posts in FSLC-5\" target=\"_blank\">FSLC-5<\/a>,<a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/fslc-6\/\" title=\"View all posts in FSLC-6\" target=\"_blank\">FSLC-6<\/a>,<a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/fslc%e5%9b%ba%e5%ae%9a%e5%bc%8f%e5%97%85%e6%8e%a2%e6%af%9b%e7%bb%86%e7%ae%a1%e6%bc%8f%e5%ad%94\/\" title=\"View all posts in FSLC\u56fa\u5b9a\u5f0f\u55c5\u63a2\u6bdb\u7ec6\u7ba1\u6f0f\u5b54\" target=\"_blank\">FSLC\u56fa\u5b9a\u5f0f\u55c5\u63a2\u6bdb\u7ec6\u7ba1\u6f0f\u5b54<\/a>,FSLC\u6f0f\u5b54\u6807\u51c6\u5668\u4e13\u4e3a\u6821\u51c6\u55c5\u63a2\u5f0f\u68c0\u6f0f\u4eea\u800c\u5f00\u53d1\uff0c\u9002\u7528\u4e8eE-4\u81f3E-6 atmcc\/sec\u7684\u6807\u51c6\u55c5\u63a2\u8303\u56f4\uff0c\u7279\u6b8a\u914d\u7f6e\u4e0b\u53ef\u652f\u6301\u9ad8\u8fbe0.1 atm-cc\/sec\uff08E-1 atmcc\/sec\uff09\u7684\u6cc4\u6f0f\u7387\u6821\u51c6\u3002<\/p>\n<p><strong>FSLC \u2013 \u56fa\u5b9a\u5f0f\u55c5\u63a2\u6bdb\u7ec6\u7ba1\u6f0f\u5b54<\/strong><\/p>\n<p><strong>\u6982\u8ff0<\/strong><br \/>\nFSLC\u6f0f\u5b54\u6807\u51c6\u5668\u4e13\u4e3a\u6821\u51c6\u55c5\u63a2\u5f0f\u68c0\u6f0f\u4eea\u800c\u5f00\u53d1\uff0c\u9002\u7528\u4e8eE-4\u81f3E-6 atmcc\/sec\u7684\u6807\u51c6\u55c5\u63a2\u8303\u56f4\uff0c\u7279\u6b8a\u914d\u7f6e\u4e0b\u53ef\u652f\u6301\u9ad8\u8fbe0.1 atm-cc\/sec\uff08E-1 atmcc\/sec\uff09\u7684\u6cc4\u6f0f\u7387\u6821\u51c6\u3002<\/p>\n<p>\u8be5\u578b\u53f7\u6700\u521d\u4e3a\u6c26\u6c14\u55c5\u63a2\u68c0\u6f0f\u4eea\u6821\u51c6\u8bbe\u8ba1\uff0c\u540c\u65f6\u4e5f\u53ef\u5b8c\u7f8e\u9002\u914d\u516d\u6c1f\u5316\u786b\uff08SF6\uff09\u3001\u6c16\u6c14\u3001\u4e8c\u6c27\u5316\u78b3\u3001\u6c22\u6c14\u7b49\u591a\u79cd\u6c14\u4f53\u7684\u6821\u51c6\u5e94\u7528\u3002<\/p>\n<p>\u6240\u6709\u6bdb\u7ec6\u7ba1\u6f0f\u5b54\u5747\u5b58\u5728\u5835\u585e\u98ce\u9669\uff0c\u82e5\u5ba2\u6237\u9700\u5728\u975e\u6d01\u51c0\u73af\u5883\u4e2d\u4f7f\u7528\uff0c\u5efa\u8bae\u9009\u7528\u7279\u6c1f\u9f99\u6e17\u900f\u5f0f\u6f0f\u5b54\u3002<\/p>\n<p><strong>\u89c4\u683c\u53c2\u6570<\/strong><\/p>\n<ul>\n<li><strong>\u7a33\u5b9a\u6027<\/strong>\uff1a\u6d41\u91cf\u4e0d\u53d7\u6e29\u5ea6\u5f71\u54cd<\/li>\n<li><strong>\u901a\u7528\u6027<\/strong>\uff1a\u5b8c\u6574\u8986\u76d6\u55c5\u63a2\u68c0\u6d4b\u6240\u9700\u6cc4\u6f0f\u7387\u8303\u56f4<\/li>\n<li><strong>\u8010\u7528\u6027<\/strong>\uff1a\u4e0d\u9508\u94a2\u6bdb\u7ec6\u7ba1\u5143\u4ef6<\/li>\n<li><strong>\u53ef\u9760\u6027<\/strong>\uff1a\u63a2\u5934\u5b9a\u4f4d\u7b80\u4fbf\uff0c\u7ed3\u679c\u53ef\u91cd\u590d<\/li>\n<li><strong>\u591a\u6c14\u4f53\u9002\u914d<\/strong>\uff1a\u517c\u5bb9\u516d\u6c1f\u5316\u786b\u7b49\u591a\u79cd\u6c14\u4f53<\/li>\n<li><strong>\u8ba4\u8bc1\u6807\u51c6<\/strong>\uff1a\u7b26\u5408ISO\u8981\u6c42\uff0c\u63d0\u4f9bNIST\u53ef\u6eaf\u6e90\u3001A2LA\u8ba4\u8bc1\u7684\u6821\u51c6\u8bc1\u4e66<\/li>\n<\/ul>\n<figure id=\"attachment_249\" aria-describedby=\"caption-attachment-249\" style=\"width: 382px\" class=\"wp-caption alignnone\"><img loading=\"lazy\" class=\"  wp-image-249\" src=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/wp-content\/uploads\/sites\/1964\/2025\/03\/img_67e4e3e24e4d5.png\" alt=\"VTI,FSLC-3,FSLC-4,FSLC-5,FSLC-6,FSLC\u56fa\u5b9a\u5f0f\u55c5\u63a2\u6bdb\u7ec6\u7ba1\u6f0f\u5b54\" width=\"382\" height=\"301\" srcset=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/wp-content\/uploads\/sites\/1964\/2025\/03\/img_67e4e3e24e4d5.png 789w, https:\/\/www.bihec.com\/vacuumtechnology-vti\/wp-content\/uploads\/sites\/1964\/2025\/03\/img_67e4e3e24e4d5-300x237.png 300w, https:\/\/www.bihec.com\/vacuumtechnology-vti\/wp-content\/uploads\/sites\/1964\/2025\/03\/img_67e4e3e24e4d5-768x606.png 768w, https:\/\/www.bihec.com\/vacuumtechnology-vti\/wp-content\/uploads\/sites\/1964\/2025\/03\/img_67e4e3e24e4d5-500x395.png 500w\" sizes=\"(max-width: 382px) 100vw, 382px\" \/><figcaption id=\"caption-attachment-249\" class=\"wp-caption-text\">VTI,FSLC-3,FSLC-4,FSLC-5,FSLC-6,FSLC\u56fa\u5b9a\u5f0f\u55c5\u63a2\u6bdb\u7ec6\u7ba1\u6f0f\u5b54<\/figcaption><\/figure>\n<p><span id=\"sample-permalink\"><a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/?p=247&amp;preview=true\" target=\"wp-preview-247\" rel=\"noopener\">https:\/\/www.bihec.com\/vacuumtechnology-vti\/<span id=\"editable-post-name\">VTI,FSLC-3,FSLC-4,FSLC-5,FSLC-6,FSLC\u56fa\u5b9a\u5f0f\u55c5\u63a2\u6bdb\u7ec6\u7ba1\u6f0f\u5b54<\/span>\/<\/a><\/span><\/p>\n<p><a href=\"https:\/\/zhuanlan.zhihu.com\/p\/1888276490417848517\">https:\/\/zhuanlan.zhihu.com\/p\/1888276490417848517<\/a><\/p>\n<br><div class=\"tagcloud\"><a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/fslc-3\/\" class=\"tag-cloud-link tag-link-0 tag-link-position-1\" style=\"font-size: 8pt;\" aria-label=\"FSLC-3 (1\u4e2a\u9879\u76ee)\">FSLC-3<\/a>\n<a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/fslc-4\/\" class=\"tag-cloud-link tag-link-1 tag-link-position-2\" style=\"font-size: 8pt;\" aria-label=\"FSLC-4 (1\u4e2a\u9879\u76ee)\">FSLC-4<\/a>\n<a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/fslc-5\/\" class=\"tag-cloud-link tag-link-2 tag-link-position-3\" style=\"font-size: 8pt;\" aria-label=\"FSLC-5 (1\u4e2a\u9879\u76ee)\">FSLC-5<\/a>\n<a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/fslc-6\/\" class=\"tag-cloud-link tag-link-3 tag-link-position-4\" style=\"font-size: 8pt;\" aria-label=\"FSLC-6 (1\u4e2a\u9879\u76ee)\">FSLC-6<\/a>\n<a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/fslc%e5%9b%ba%e5%ae%9a%e5%bc%8f%e5%97%85%e6%8e%a2%e6%af%9b%e7%bb%86%e7%ae%a1%e6%bc%8f%e5%ad%94\/\" class=\"tag-cloud-link tag-link-4 tag-link-position-5\" style=\"font-size: 8pt;\" aria-label=\"FSLC\u56fa\u5b9a\u5f0f\u55c5\u63a2\u6bdb\u7ec6\u7ba1\u6f0f\u5b54 (1\u4e2a\u9879\u76ee)\">FSLC\u56fa\u5b9a\u5f0f\u55c5\u63a2\u6bdb\u7ec6\u7ba1\u6f0f\u5b54<\/a>\n<a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/vti\/\" class=\"tag-cloud-link tag-link-5 tag-link-position-6\" style=\"font-size: 22pt;\" aria-label=\"VTI (20\u4e2a\u9879\u76ee)\">VTI<\/a>\n<a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/vti-fslc%e5%9b%ba%e5%ae%9a%e5%bc%8f%e5%97%85%e6%8e%a2%e6%af%9b%e7%bb%86%e7%ae%a1%e6%bc%8f%e5%ad%94\/\" class=\"tag-cloud-link tag-link-6 tag-link-position-7\" style=\"font-size: 8pt;\" aria-label=\"VTI FSLC\u56fa\u5b9a\u5f0f\u55c5\u63a2\u6bdb\u7ec6\u7ba1\u6f0f\u5b54 (1\u4e2a\u9879\u76ee)\">VTI FSLC\u56fa\u5b9a\u5f0f\u55c5\u63a2\u6bdb\u7ec6\u7ba1\u6f0f\u5b54<\/a>\n<a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/vti%e4%b8%ad%e5%9b%bd%e4%bb%a3%e7%90%86\/\" class=\"tag-cloud-link tag-link-7 tag-link-position-8\" style=\"font-size: 21.450980392157pt;\" aria-label=\"VTI\u4e2d\u56fd\u4ee3\u7406 (18\u4e2a\u9879\u76ee)\">VTI\u4e2d\u56fd\u4ee3\u7406<\/a>\n<a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/vti%e6%b3%84%e9%9c%b2%e6%a3%80%e6%b5%8b%e5%99%a8\/\" class=\"tag-cloud-link tag-link-8 tag-link-position-9\" style=\"font-size: 17.607843137255pt;\" aria-label=\"VTI\u6cc4\u9732\u68c0\u6d4b\u5668 (9\u4e2a\u9879\u76ee)\">VTI\u6cc4\u9732\u68c0\u6d4b\u5668<\/a>\n<a href=\"https:\/\/www.bihec.com\/vacuumtechnology-vti\/tag\/vti%e8%bf%9b%e5%8f%a3%e4%bb%a3%e7%90%86\/\" class=\"tag-cloud-link tag-link-9 tag-link-position-10\" style=\"font-size: 21.450980392157pt;\" aria-label=\"VTI\u8fdb\u53e3\u4ee3\u7406 (18\u4e2a\u9879\u76ee)\">VTI\u8fdb\u53e3\u4ee3\u7406<\/a><\/div>","protected":false},"excerpt":{"rendered":"<p>VTI,FSLC-3,FSLC-4,FSLC-5,FSLC-6,FSLC\u56fa\u5b9a\u5f0f\u55c5\u63a2\u6bdb\u7ec6\u7ba1\u6f0f\u5b54,FSLC\u6f0f\u5b54\u6807\u51c6\u5668\u4e13\u4e3a\u6821\u51c6\u55c5\u63a2\u5f0f\u68c0\u6f0f\u4eea\u800c\u5f00\u53d1\uff0c\u9002\u7528\u4e8eE-4\u81f3E-6 atmcc\/sec <\/p>\n","protected":false},"author":27,"featured_media":0,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[4,5],"tags":[69,70,71,72,73,7,74,23,15,22],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v17.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>VTI,FSLC-3,FSLC-4,FSLC-5,FSLC-6,FSLC\u56fa\u5b9a\u5f0f\u55c5\u63a2\u6bdb\u7ec6\u7ba1\u6f0f\u5b54<\/title>\n<meta name=\"description\" content=\"VTI,FSLC-3,FSLC-4,FSLC-5,FSLC-6,FSLC\u56fa\u5b9a\u5f0f\u55c5\u63a2\u6bdb\u7ec6\u7ba1\u6f0f\u5b54,FSLC\u6f0f\u5b54\u6807\u51c6\u5668\u4e13\u4e3a\u6821\u51c6\u55c5\u63a2\u5f0f\u68c0\u6f0f\u4eea\u800c\u5f00\u53d1\uff0c\u9002\u7528\u4e8eE-4\u81f3E-6 atmcc\/sec\u7684\u6807\u51c6\u55c5\u63a2\u8303\u56f4\u3002\u6797\u7ecf\u740617717970703\uff08\u5fae\u4fe1\u540c\u53f7\uff09\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, 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