{"id":241,"date":"2025-03-21T14:47:12","date_gmt":"2025-03-21T06:47:12","guid":{"rendered":"https:\/\/www.bihec.com\/waferpro-wafers\/?p=241"},"modified":"2025-03-21T14:47:12","modified_gmt":"2025-03-21T06:47:12","slug":"waferpro%e6%b0%ae%e5%8c%96%e7%a1%85%e6%99%b6%e5%9c%86-si%e2%82%83n%e2%82%84lpcvd%e5%92%8cpecvd%e6%b0%ae%e5%8c%96%e7%89%a9waferpro%e8%bf%9b%e5%8f%a3%e4%bb%a3%e7%90%86","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/waferpro-wafers\/waferpro%e6%b0%ae%e5%8c%96%e7%a1%85%e6%99%b6%e5%9c%86-si%e2%82%83n%e2%82%84lpcvd%e5%92%8cpecvd%e6%b0%ae%e5%8c%96%e7%89%a9waferpro%e8%bf%9b%e5%8f%a3%e4%bb%a3%e7%90%86\/","title":{"rendered":"waferpro,\u6c2e\u5316\u7845\u6676\u5706 (Si\u2083N\u2084),LPCVD\u548cPECVD\u6c2e\u5316\u7269,waferpro\u8fdb\u53e3\u4ee3\u7406"},"content":{"rendered":"<p>waferpro,<a href=\"https:\/\/www.bihec.com\/waferpro-wafers\/tag\/%e6%b0%ae%e5%8c%96%e7%a1%85%e6%99%b6%e5%9c%86-si%e2%82%83n%e2%82%84\/\" title=\"View all posts in \u6c2e\u5316\u7845\u6676\u5706 (Si\u2083N\u2084)\" target=\"_blank\">\u6c2e\u5316\u7845\u6676\u5706 (Si\u2083N\u2084)<\/a>,<a href=\"https:\/\/www.bihec.com\/waferpro-wafers\/tag\/lpcvd%e5%92%8cpecvd%e6%b0%ae%e5%8c%96%e7%89%a9\/\" title=\"View all posts in LPCVD\u548cPECVD\u6c2e\u5316\u7269\" target=\"_blank\">LPCVD\u548cPECVD\u6c2e\u5316\u7269<\/a>,waferpro\u8fdb\u53e3\u4ee3\u7406,<a href=\"https:\/\/www.bihec.com\/waferpro-wafers\/tag\/waferpro\/\" title=\"View all posts in WaferPro\" target=\"_blank\">WaferPro<\/a>\u00a0\u4e3a\u60a8\u7684<a href=\"https:\/\/www.bihec.com\/waferpro-wafers\/tag\/%e7%a1%85%e7%89%87\/\" title=\"View all posts in \u7845\u7247\" target=\"_blank\">\u7845\u7247<\/a>\u9700\u6c42\u63d0\u4f9b\u591a\u79cd\u8584\u819c\u5904\u7406\u9009\u9879\u3002\u8fd9\u5305\u62ec LPCVD \u6c2e\u5316\u7845\uff0c\u6211\u4eec\u53ef\u4ee5\u63d0\u4f9b\u5316\u5b66\u8ba1\u91cf\u6bd4 LPCVD \u6c2e\u5316\u7845\u3001\u4f4e\u5e94\u529b LPCVD 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\u53ef\u9009\u3002<\/p>\n<p>\u652f\u6301\u4efb\u610f\u6570\u91cf\u7684\u8ba2\u8d2d\uff0c\u6700\u5c0f\u6279\u91cf\u8ba2\u5355\u4e3a 25 \u7247\u6676\u5706\u3002<\/p>\n<p>&nbsp;<\/p>\n<p><strong>LPCVD\u548cPECVD\u6c2e\u5316\u7269\u7684\u7c7b\u578b<\/strong><\/p>\n<p data-start=\"25\" data-end=\"58\"><strong>LPCVD\u6c2e\u5316\u7269 \u2013 \u4f4e\u538b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6c2e\u5316\u7269<\/strong><\/p>\n<ul data-start=\"59\" data-end=\"119\">\n<li data-start=\"59\" data-end=\"74\">\u540c\u65f6\u6c89\u79ef\u5728\u6676\u5706\u7684\u4e24\u4fa7\u3002<\/li>\n<li data-start=\"75\" data-end=\"92\">\u9002\u7528\u4e8e\u5bf9\u6e29\u5ea6\u4e0d\u654f\u611f\u7684\u573a\u5408\u3002<\/li>\n<li data-start=\"93\" data-end=\"119\">\u8f83\u9ad8\u7684\u5de5\u827a\u6e29\u5ea6\uff0c\u751f\u6210\u66f4\u7a33\u5b9a\u3001\u66f4\u9ad8\u7eaf\u5ea6\u7684\u8584\u819c\u3002<\/li>\n<\/ul>\n<p data-start=\"121\" data-end=\"158\"><strong>PECVD\u6c2e\u5316\u7269 \u2013 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data-end=\"340\">\u4f4e\u5e94\u529bLPCVD\u6c2e\u5316\u7269<\/strong><\/p>\n<ul data-start=\"343\" data-end=\"402\">\n<li data-start=\"343\" data-end=\"373\">\u819c\u539a\u5ea6\uff1a100\u00c5 \u2013 20,000\u00c5\uff08\u4e24\u4fa7\uff09<\/li>\n<li data-start=\"374\" data-end=\"402\">\u819c\u5e94\u529b\uff1a&lt;250\u00b150 MPa \u62c9\u4f38\u5e94\u529b<\/li>\n<\/ul>\n<p data-start=\"409\" data-end=\"432\"><strong data-start=\"414\" data-end=\"430\">\u8d85\u4f4e\u5e94\u529bLPCVD\u6c2e\u5316\u7269<\/strong><\/p>\n<ul data-start=\"433\" data-end=\"492\">\n<li data-start=\"433\" data-end=\"463\">\u819c\u539a\u5ea6\uff1a100\u00c5 \u2013 20,000\u00c5\uff08\u4e24\u4fa7\uff09<\/li>\n<li data-start=\"464\" data-end=\"492\">\u819c\u5e94\u529b\uff1a&lt;100\u00b150 MPa \u62c9\u4f38\u5e94\u529b<\/li>\n<\/ul>\n<p data-start=\"499\" data-end=\"518\"><strong data-start=\"504\" data-end=\"516\">PECVD\u6c2e\u5316\u7269<\/strong><\/p>\n<ul data-start=\"519\" data-end=\"576\">\n<li data-start=\"519\" 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data-start=\"447\" data-end=\"462\"><strong data-start=\"452\" data-end=\"460\">\u5fae\u53cd\u5e94\u5668<\/strong><\/p>\n<p data-start=\"463\" data-end=\"490\" data-is-last-node=\"\" data-is-only-node=\"\">\u7845\u6c2e\u5316\u7269\u7684\u6297\u6c61\u67d3\u8868\u9762\u6709\u52a9\u4e8e\u7528\u4e8e\u7279\u6b8a\u5316\u5b66\u53cd\u5e94\u7684\u5fae\u53cd\u5e94\u5668<\/p>\n<p>&nbsp;<\/p>\n<p><strong>\u6211\u4eec\u7545\u9500\u7684\u4ea7\u54c1<\/strong><\/p>\n<p id=\"ZBZMGOt\"><img loading=\"lazy\" width=\"2230\" height=\"409\" class=\"alignnone size-full wp-image-243 \" src=\"https:\/\/www.bihec.com\/waferpro-wafers\/wp-content\/uploads\/sites\/1939\/2025\/03\/img_67dd092cf0b6a.png\" alt=\"\" srcset=\"https:\/\/www.bihec.com\/waferpro-wafers\/wp-content\/uploads\/sites\/1939\/2025\/03\/img_67dd092cf0b6a.png 2230w, https:\/\/www.bihec.com\/waferpro-wafers\/wp-content\/uploads\/sites\/1939\/2025\/03\/img_67dd092cf0b6a-300x55.png 300w, 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sizes=\"(max-width: 2230px) 100vw, 2230px\" \/><\/p>\n<p id=\"SirnDVq\"><img loading=\"lazy\" width=\"2226\" height=\"404\" class=\"alignnone size-full wp-image-244 \" src=\"https:\/\/www.bihec.com\/waferpro-wafers\/wp-content\/uploads\/sites\/1939\/2025\/03\/img_67dd094156030.png\" alt=\"\" srcset=\"https:\/\/www.bihec.com\/waferpro-wafers\/wp-content\/uploads\/sites\/1939\/2025\/03\/img_67dd094156030.png 2226w, https:\/\/www.bihec.com\/waferpro-wafers\/wp-content\/uploads\/sites\/1939\/2025\/03\/img_67dd094156030-300x54.png 300w, https:\/\/www.bihec.com\/waferpro-wafers\/wp-content\/uploads\/sites\/1939\/2025\/03\/img_67dd094156030-1024x186.png 1024w, https:\/\/www.bihec.com\/waferpro-wafers\/wp-content\/uploads\/sites\/1939\/2025\/03\/img_67dd094156030-768x139.png 768w, https:\/\/www.bihec.com\/waferpro-wafers\/wp-content\/uploads\/sites\/1939\/2025\/03\/img_67dd094156030-1536x279.png 1536w, 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