{"id":240,"date":"2025-04-16T16:06:25","date_gmt":"2025-04-16T08:06:25","guid":{"rendered":"https:\/\/www.bihec.com\/waferpro\/?p=240"},"modified":"2025-04-16T16:06:25","modified_gmt":"2025-04-16T08:06:25","slug":"waferpro-si3n4-%e6%b0%ae%e5%8c%96%e7%a1%85%e6%99%b6%e5%9c%86","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/waferpro\/waferpro-si3n4-%e6%b0%ae%e5%8c%96%e7%a1%85%e6%99%b6%e5%9c%86\/","title":{"rendered":"WaferPro Si3N4 \u6c2e\u5316\u7845\u6676\u5706"},"content":{"rendered":"
WaferPro Si3N4 \u6c2e\u5316\u7845\u6676\u5706<\/a><\/p>\n WaferPro \u4e3a\u60a8\u7684\u7845<\/a>\u9700\u6c42\u63d0\u4f9b\u4e86\u591a\u79cd\u8584\u819c\u52a0\u5de5\u9009\u9879\u3002\u8fd9\u5305\u62ec LPCVD<\/a> \u6c2e\u5316\u7269\uff0cWaferPro \u53ef\u4ee5\u4e3a\u6676\u5706<\/a>\u63d0\u4f9b\u5316\u5b66\u8ba1\u91cf LPCVD \u6c2e\u5316\u7269\u6216\u4f4e\u5e94\u529b LPCVD \u6c2e\u5316\u7269\uff0c\u4ee5\u53ca\u8d85\u4f4e\u5e94\u529b LPCVD \u6c2e\u5316\u7269\u3002\u6211\u4eec\u8fd8\u63d0\u4f9b\u9ad8\u8d28\u91cf\u7684 PECVD<\/a> \u6c2e\u5316\u7269\u3001\u4f4e\u5e94\u529b PECVD \u6c2e\u5316\u7269\u548c PECVD \u6c27\u6c2e\u5316\u7269\u3002\u6676\u5706\u76f4\u5f84\u4e3a 2 \u82f1\u5bf8\u81f3 300 \u6beb\u7c73\uff0c\u6c2e\u5316\u7269\u539a\u5ea6\u4e3a 100\u00c5 \u81f3 20,000\u00c5\u3002<\/p>\n \u53ef\u4ee5\u8ba2\u8d2d\u4efb\u610f\u6570\u91cf\u7684\u6676\u5706\uff0c\u6700\u5c0f\u6279\u91cf\u8ba2\u8d2d\u91cf\u4e3a 25 \u7247\u6676\u5706\u3002<\/p>\n LPCVD \u6c2e\u5316\u7269 \u2013 \u4f4e\u538b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6c2e\u5316\u7269<\/strong><\/p>\n – \u540c\u65f6\u5e94\u7528\u4e8e\u6676\u5706\u7684\u4e24\u4fa7\u3002<\/p>\n – \u5728\u6e29\u5ea6\u4e0d\u5173\u952e\u7684\u5730\u65b9\u4f7f\u7528\u3002<\/p>\n – \u66f4\u9ad8\u7684\u6e29\u5ea6\u8fc7\u7a0b\uff0c\u5bfc\u81f4\u66f4\u7a33\u5b9a\u3001\u66f4\u9ad8\u7eaf\u5ea6\u7684\u8584\u819c\u3002<\/p>\n PECVD \u6c2e\u5316\u7269 \u2013 \u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6c2e\u5316\u7269<\/strong><\/p>\n – \u4ec5\u5e94\u7528\u4e8e\u6676\u5706\u7684\u4e00\u4fa7\u3002<\/p>\n – \u66f4\u9002\u5408\u9700\u8981\u4f4e\u6e29\u5de5\u827a\u65f6\u3002<\/p>\n \u5728 WaferPro\uff0c\u8d28\u91cf\u662f\u6c2e\u5316\u7845\u8584\u819c\u7684\u91cd\u4e2d\u4e4b\u91cd\u3002\u6211\u4eec\u5229\u7528\u5148\u8fdb\u7684\u4f4e\u538b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef \uff08LPCVD\uff09 \u548c\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef \uff08PECVD\uff09 \u5de5\u827a\u6765\u751f\u4ea7\u6c2e\u5316\u7269\u8584\u819c\uff0c\u8fd9\u4e9b\u8584\u819c\u4ee5\u5176\u7a33\u5b9a\u6027\u3001\u4e00\u81f4\u6027\u548c\u5bf9\u5668\u4ef6\u5236\u9020\u81f3\u5173\u91cd\u8981\u7684\u51fa\u8272\u7269\u7406\u7279\u6027\u800c\u95fb\u540d\u3002<\/p>\n \u901a\u8fc7\u5bf9\u6211\u4eec\u4e13\u6709\u6c89\u79ef\u6280\u672f\u7684\u5e7f\u6cdb\u7814\u7a76\u548c\u6301\u7eed\u6539\u8fdb\uff0c\u6211\u4eec\u80fd\u591f\u4f18\u5316\u5173\u952e\u7684\u6c2e\u5316\u7269\u8584\u819c\u8d28\u91cf\uff0c\u5982\u4e00\u81f4\u6027\u3001\u5747\u5300\u539a\u5ea6\u3001\u4f4e\u5185\u5728\u5e94\u529b\u3001\u9ad8\u6e29\u4e0b\u7684\u70ed\u7a33\u5b9a\u6027\u548c\u7cbe\u786e\u7684\u6210\u5206\u63a7\u5236\u3002\u56e0\u6b64\uff0c\u6211\u4eec\u7684 LPCVD \u548c PECVD \u6c2e\u5316\u7269\u8584\u819c\u53ef\u6cbf\u6676\u5706\u8fb9\u7f18\u3001\u9ad8\u7eb5\u6a2a\u6bd4\u7279\u5f81\u4ee5\u53ca\u7ed3\u6784\u5316\u6216\u56fe\u6848\u8868\u9762\u63d0\u4f9b\u51fa\u8272\u7684\u53f0\u9636\u8986\u76d6\u7387\uff0c\u540c\u65f6\u4fdd\u6301\u65e0\u9488\u5b54\u5b8c\u6574\u6027\u3002<\/p>\n \u8fd9\u79cd\u8d28\u91cf\u6c34\u5e73\u4e3a\u6211\u4eec\u7684\u5ba2\u6237\u63d0\u4f9b\u4e86\u975e\u5e38\u9ad8\u7684\u5236\u9020\u826f\u7387\uff0c\u5e76\u652f\u6301\u5546\u4e1a\u534a\u5bfc\u4f53\u751f\u4ea7\u6240\u5fc5\u9700\u7684\u53ef\u9760\u3001\u53ef\u91cd\u590d\u7684\u5668\u4ef6\u6027\u80fd\u3002\u65e0\u8bba\u5e94\u7528\u9700\u8981\u8d85\u4f4e\u7f3a\u9677\u7edd\u7f18\u4f53\u3001\u6269\u6563\u5c4f\u969c\u3001\u673a\u68b0\u589e\u5f3a\u5c42\u8fd8\u662f\u5148\u8fdb\u7684\u4ecb\u7535\u6750\u6599\uff0c\u6211\u4eec\u7684\u6c2e\u5316\u7269\u8584\u819c\u90fd\u5177\u6709\u7ecf\u8fc7\u9a8c\u8bc1\u7684\u7a33\u5b9a\u6027\u548c\u4e00\u81f4\u6027\uff0c\u53ef\u4ee5\u6ee1\u8db3\u9700\u6c42\u3002<\/p>\n \u6211\u4eec\u7684\u4e13\u4e1a\u6280\u672f\u9500\u552e\u4ee3\u8868\u62e5\u6709\u6570\u5341\u5e74\u7684\u7efc\u5408\u7ecf\u9a8c\uff0c\u53ef\u5e2e\u52a9\u5ba2\u6237\u4e3a\u7845\u6676\u7247\u5236\u9020\u548c\u5148\u8fdb\u5fae\u7535\u5b50\u5668\u4ef6\u63d0\u4f9b PECVD \u548c LPCVD \u6c2e\u5316\u7269\u8584\u819c\u89e3\u51b3\u65b9\u6848\u3002\u8bf7\u7acb\u5373\u8054\u7cfb\u6211\u4eec\uff0c\u8ba8\u8bba\u6211\u4eec\u7684\u4f18\u8d28\u6c2e\u5316\u7269\u8584\u819c\u5982\u4f55\u5e2e\u52a9\u60a8\u63d0\u9ad8\u4ea7\u91cf\u3001\u964d\u4f4e\u6210\u672c\u5e76\u901a\u8fc7\u521b\u65b0\u4ea7\u54c1\u66f4\u5feb\u5730\u8fdb\u5165\u5e02\u573a\u3002\u6211\u4eec\u63d0\u4f9b\u5168\u7403\u8fd0\u8f93\uff0c\u5e76\u51c6\u5907\u4e3a\u60a8\u7684\u5236\u9020\u6210\u529f\u63d0\u4f9b\u4f18\u8d28\u7684\u6c2e\u5316\u7269\u8584\u819c\uff01<\/p>\n WaferPro Si3N4 \u6c2e\u5316\u7845\u6676\u5706 WaferPro \u4e3a\u60a8\u7684\u7845\u9700\u6c42\u63d0\u4f9b\u4e86\u591a\u79cd\u8584\u819c\u52a0\u5de5\u9009\u9879\u3002\u8fd9\u5305\u62ec LPCVD \u6c2e\u5316\u7269\uff0cWaferPro \u53ef\u4ee5\u4e3a\u6676\u5706\u63d0\u4f9b\u5316\u5b66\u8ba1\u91cf LPCVD \u6c2e <\/p>\n","protected":false},"author":33,"featured_media":241,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[8],"tags":[46,47,43,44,18,13,12,11,45,10],"yoast_head":"\nLPCVD \u548c PECVD \u6c2e\u5316\u7269\u7684\u7c7b\u578b<\/h2>\n
<\/p>\n