{"id":159,"date":"2024-08-28T13:39:55","date_gmt":"2024-08-28T05:39:55","guid":{"rendered":"https:\/\/www.bihec.com\/beamimaging-\/?p=159"},"modified":"2024-08-28T13:39:55","modified_gmt":"2024-08-28T05:39:55","slug":"beam-imaging-rfis-100%e7%a6%bb%e5%ad%90%e6%ba%90%e8%a3%85%e7%bd%ae%e3%80%81%e5%b0%84%e9%a2%91%e7%a6%bb%e5%ad%90%e6%ba%90%e3%80%81g-1%e5%92%8cg-2%e5%9e%8b%e7%a6%bb%e5%ad%90%e6%9e%aa%e5%8a%a0%e9%80%9f","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/beamimaging-\/beam-imaging-rfis-100%e7%a6%bb%e5%ad%90%e6%ba%90%e8%a3%85%e7%bd%ae%e3%80%81%e5%b0%84%e9%a2%91%e7%a6%bb%e5%ad%90%e6%ba%90%e3%80%81g-1%e5%92%8cg-2%e5%9e%8b%e7%a6%bb%e5%ad%90%e6%9e%aa%e5%8a%a0%e9%80%9f\/","title":{"rendered":"Beam Imaging RFIS-100\u79bb\u5b50\u6e90\u88c5\u7f6e\u3001\u5c04\u9891\u79bb\u5b50\u6e90\u3001G-1\u548cG-2\u578b\u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf\u3001RF\u79bb\u5b50\u6e90"},"content":{"rendered":"

Beam Imaging RFIS-100\u79bb\u5b50\u6e90\u88c5\u7f6e<\/a>\u3001\u5c04\u9891\u79bb\u5b50\u6e90<\/a>\u3001G-1\u548cG-2\u578b\u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf<\/a>\u3001RF\u79bb\u5b50\u6e90<\/a><\/h3>\n
\n

BIS<\/strong>\u4ecb\u7ecd\u4e86\u65b0\u578bRFIS-100\u79bb\u5b50\u6e90<\/a>\u88c5\u7f6e\u3002RFIS-100\u88ab\u8bbe\u8ba1\u6210\u53ef\u6839\u636e\u6807\u51c6\u8fdb\u884c\u6539\u88c5G-1\u548cG-2\u578b\u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf\u3002\u79bb\u5b50\u6e90\u572813.56 MHz\u7684RF\u7535\u6e90\u4e0b\u5de5\u4f5c\uff0c\u624b\u52a8\u8c03\u8282\u5339\u914d\u7f51\u7edc\u4ee5\u4ea7\u751f\u7535\u611f\u8026\u5408\u7b49\u79bb\u5b50\u4f53(ICP)\u3002\u4e0e\u6807\u51c6\u7684Colutron\u70ed\u9634\u6781DC\u653e\u7535\u6e90\u76f8\u6bd4\uff0cRF\u79bb\u5b50\u6e90\u5177\u6709\u8bb8\u591a\u4f18\u70b9\uff0c\u5305\u62ec\u7ef4\u62a4\u95f4\u9694\u65f6\u95f4\u66f4\u957f\uff0c\u5c24\u5176\u662f\u4f7f\u7528\u6c27\u6c14\u548c\u6d3b\u6027\u6c14\u4f53\u65f6\uff0c\u4ee5\u53ca\u66f4\u9ad8\u7684\u675f\u6d41\u3002<\/p>\n

\"RFIS-100\"<\/p>\n

\"\"<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Ion Source Flange<\/th>\n6\u201d (152mm) Conflat<\/td>\n<\/tr>\n
RF Power Supply<\/th>\n13.56MHz, 500W<\/td>\n<\/tr>\n
Sputter Target, Metal Ions (Optional)<\/th>\n200V, 0.5A<\/td>\n<\/tr>\n
RF Antenna<\/th>\n6.5 Turn, 2mm diameter Cu tube, water cooled, 1\/8\u2033 VCR<\/td>\n<\/tr>\n
Gas Isolator<\/th>\n10kV Isolation, 1\/8\u201d Swagelok input<\/td>\n<\/tr>\n
RF Antenna Feedthrough<\/th>\n5kV Isolation, Copper, 1\/8\u2033 VCR<\/td>\n<\/tr>\n
Plasma Start Circuit<\/th>\n12kV Isolation feedthrough<\/td>\n<\/tr>\n
Water Cooling Requirement<\/th>\n1 Liter\/min (RF Antenna)<\/td>\n<\/tr>\n
Force Air Cooling Requirement<\/th>\nFan built into Plexiglas Enclosure for High Voltage Safety protection. (Fan Specification:47 CFM, 12VDC, 200mA)<\/td>\n<\/tr>\n
RF Match Network<\/th>\nTwo Vacuum variable capacitors (Tune, Load), 10-1200 pF, 4kV (Nominal), 6kV (Max), 75A (Manual Tune), Pmax=15kW (@40MHz)<\/td>\n<\/tr>\n
RFMB-100 Match Box Input Connections (5)<\/th>\n2 X 1\/4\u201d Swagelok, Water cooling, RF Antenna, 1\/8\u201d Swagelok, Source Gas Inlet, RF Type N, Male, BNC, Male, Sputter Target Supply<\/td>\n<\/tr>\n
\u6a21\u578b<\/th>\nRFIS-100, RFIS-101, RFIS-007, RFIS-010, RFMB-100, RFMB-200<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

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\n
\n
\"RFIS-100\"<\/a><\/div>
\u79bb\u5b50\u6e90\u90e8\u4ef6<\/figcaption><\/figure>\n
\n
\"RFIS-100\"<\/a><\/div>
RFIS-101\u79bb\u5b50\u6e90\u7ec4\u4ef6<\/figcaption><\/figure>\n
\n
\"RFIS-100\"<\/a><\/div>
\u5e26\u76fe\u724c\u7684RFIS-100<\/figcaption><\/figure>\n
\n
\"RFIS-100\"<\/a><\/div>
RFIS-100\u5e26\u5339\u914d\u7f51\u7edc<\/figcaption><\/figure>\n<\/div>\n<\/div>\n
Beam Imaging RFIS-100\u79bb\u5b50\u6e90\u88c5\u7f6e<\/a>\nG-1\u548cG-2\u578b\u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf<\/a>\nRF\u79bb\u5b50\u6e90<\/a>\n\u5c04\u9891\u79bb\u5b50\u6e90<\/a><\/div>","protected":false},"excerpt":{"rendered":"

Beam Imaging RFIS-100\u79bb\u5b50\u6e90\u88c5\u7f6e\u3001\u5c04\u9891\u79bb\u5b50\u6e90\u3001G-1\u548cG-2\u578b\u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf\u3001RF\u79bb\u5b50\u6e90 BIS\u4ecb\u7ecd\u4e86\u65b0\u578bRFIS-100\u79bb\u5b50\u6e90\u88c5\u7f6e\u3002RFIS-100\u88ab\u8bbe\u8ba1\u6210 <\/p>\n","protected":false},"author":12,"featured_media":162,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[26],"tags":[27,29,30,28],"yoast_head":"\nBeam Imaging RFIS-100\u79bb\u5b50\u6e90\u88c5\u7f6e\u3001\u5c04\u9891\u79bb\u5b50\u6e90\u3001G-1\u548cG-2\u578b\u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf\u3001RF\u79bb\u5b50\u6e90<\/title>\n<meta name=\"description\" content=\"Beam Imaging RFIS-100\u79bb\u5b50\u6e90\u88c5\u7f6e\u3001\u5c04\u9891\u79bb\u5b50\u6e90\u3001G-1\u548cG-2\u578b\u79bb\u5b50\u67aa\u52a0\u901f\u5668\u7cfb\u7edf\u3001RF\u79bb\u5b50\u6e90\" 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