\u4ea7\u54c1\u63cf\u8ff0![\"\"](\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2020\/04\/HF\u6c14\u76f8\u8680\u523b\u673a-300x300.jpg\")
<\/span><\/h2>\n
VPE<\/a>\u7531\u53cd\u5e94\u5ba4\u548c\u76d6\u5b50\u7ec4\u6210\u3002\u52a0\u70ed\u5143\u4ef6\u96c6\u6210\u5728\u76d6\u5b50\u4e2d\u3002\u5b83\u63a7\u5236\u8981\u8680\u523b\u7684\u57fa\u677f\u7684\u6e29\u5ea6\u3002\u53ef\u4ee5\u901a\u8fc7\u4e24\u79cd\u65b9\u5f0f\u5b9e\u73b0\u6676\u5706\u5939\u7d27\uff1a\u53ef\u4ee5\u4f7f\u7528\u5939\u7d27\u73af\u5c06\u6676\u5706\u673a\u68b0\u5939\u7d27\u3002\u62e7\u7d27\u662f\u4ece\u8bbe\u5907\u7684\u80cc\u9762\u5b8c\u6210\u7684\uff0c\u8be5\u8bbe\u5907\u6c38\u8fdc\u4e0d\u4f1a\u4e0eHF\u84b8\u6c14\u63a5\u89e6\u30023\u4e2a\u87ba\u6bcd\u6613\u4e8e\u6234\u4e0a\u9632\u62a4\u624b\u5957\u3002\u53e6\u4e00\u79cd\u9009\u62e9\u662f\u9759\u7535\u5939\u7d27\u3002\u5355\u4e2a\u82af\u7247\uff08\u957f\u4e8e10\u6beb\u7c73\uff09\u4ee5\u53ca\u6676\u7247\u90fd\u53ef\u4ee5\u88ab\u5939\u5728\u52a0\u70ed\u5143\u4ef6\u4e0a\u3002\u4fdd\u62a4\u6676\u7247\u7684\u80cc\u9762\u4e0d\u53d7\u8680\u523b\u3002<\/span><\/p>\n
MEMS<\/a>\u7684\u7c98\u7740<\/h2>\n
\u4e8c\u6c27\u5316\u7845<\/a>\u901a\u5e38\u7528\u4f5c\u5fae\u673a\u68b0\u7ed3\u6784\u7684\u727a\u7272\u5c42\u3002\u4f8b\u5982\uff0c\u7edd\u7f18\u4f53\u4e0a\u7845\uff08SOI\uff09\u6676\u7247\u4e0a\u7684\u6df1\u53cd\u5e94\u79bb\u5b50\u8680\u523b<\/a>\uff08DRIE\uff09\u5668\u4ef6\u901a\u5e38\u5728\u6db2\u6001\u6c22\u6c1f\u9178\uff08HF\uff09\u4e2d\u91ca\u653e\u3002
\n\u7528\u53bb\u79bb\u5b50\u6c34\u51b2\u6d17\u6676\u7247\u540e\uff0c\u6c34\u7684\u8868\u9762\u5f20\u529b\u7834\u574f\u4e86\u91ca\u653e\u7684\u7ed3\u6784\u6216\u7ed3\u6784\u5f7c\u6b64\u7c98\u9644\u3002<\/p>\n
Solution<\/h2>\n\u5728HF\u84b8\u6c14\u4e2d\u8680\u523b\u4e8c\u6c27\u5316\u7845\u662f\u4e00\u79cd\u51c6\u5e72\u71e5\u8fc7\u7a0b\u3002\u7531\u4e8eHF\u84b8\u6c14\u6c14\u6c1b\u4e2d\u7684\u6e7f\u5ea6\uff0c\u6676\u7247\u4e0a\u4f1a\u5f62\u6210\u975e\u5e38\u8584\u7684\u6c34\u819c\u3002HF\u88ab\u5438\u6536\u5e76\u8680\u523b\u4e8c\u6c27\u5316\u7845\uff08SiO2\uff09\u3002\u5728\u53cd\u5e94\u671f\u95f4\uff0c\u4ea7\u751f\u7845\u70f7\u548c\u6c34\u3002\u7845\u70f7\u4ee5\u6c14\u76f8\u9038\u51fa\u3002\u6709\u8da3\u7684\u662f\uff0c\u5728\u8be5\u53cd\u5e94\u4e2d\u6c34\u8d77\u5f15\u53d1\u5242\u7684\u4f5c\u7528\uff0c\u5e76\u7531\u8be5\u8fc7\u7a0b\u672c\u8eab\u4ea7\u751f\u3002\u5728\u52a0\u70ed\u57fa\u677f\u65f6\uff0c\u53ef\u4ee5\u901a\u8fc7\u63a7\u5236\u8868\u9762\u4e0a\u7684\u6c34\u91cf\u6765\u8c03\u8282\u8680\u523b\u901f\u7387\u3002\u57284-6 um \/ hrs\u7684\u8680\u523b\u901f\u7387\u4e0b\uff0c\u5927\u591a\u6570\u7ed3\u6784\u90fd\u53ef\u4ee5\u91ca\u653e\u800c\u4e0d\u4f1a\u7c98\u9644\u3002<\/p>\n
\u5e94\u7528<\/span><\/h2>\n-\u514d\u7c98MEMS\u91ca\u653e<\/span>
\n-\u7ed3\u6784\u51cf\u8584<\/span>
\n-SOI\u886c\u5e95\u4e0a\u7ed3\u6784\u7684\u65e0\u5212\u7247\u91ca\u653e<\/span>
\n-\u8680\u523b\u901f\u7387\u53ef\u57280\u81f3\u7ea630 \u00b5m \/ h\u4e4b\u95f4\u8c03\u8282<\/span>
\n-\u5355\u9762SiO2\u8680\u523b\uff08\u5728\u5904\u7406\u8fc7\u7a0b\u4e2d\u53d7\u5230\u80cc\u9762\u4fdd\u62a4\uff09<\/span><\/p>\n<\/div>\n<\/div>\n
\u6280\u672f\uff1a\u6c14\u76f8\u8680\u523b<\/span><\/h2>\n
-\u514d\u7c98MEMS\u91ca\u653e<\/span>
\n-\u7ed3\u6784\u51cf\u8584<\/span>
\n-SOI\u886c\u5e95\u4e0a\u7ed3\u6784\u7684\u65e0\u5212\u7247\u91ca\u653e<\/span>
\n-\u8680\u523b\u901f\u7387\u53ef\u57280\u81f3\u7ea630 \u00b5m \/ h\u4e4b\u95f4\u8c03\u8282<\/span>
\n-\u5355\u9762SiO2\u8680\u523b\uff08\u5728\u5904\u7406\u8fc7\u7a0b\u4e2d\u53d7\u5230\u80cc\u9762\u4fdd\u62a4\uff09<\/span><\/p>\n<\/div>\n<\/div>\n
\u6280\u672f\uff1a\u6c14\u76f8\u8680\u523b<\/span><\/h2>\n
1966\u5e74\uff0cHolmes\uff06Snell\u8fdb\u884c\u4e86\u6c14\u76f8\u8680\u523b\u7684\u7b2c\u4e00\u4e2a\u5b9e\u9a8c[1]\u3002\u4ed6\u4eec\u89c2\u5bdf\u5230\uff0c\u5373\u4f7f\u6676\u5706\u4e0d\u5728\u8680\u523b\u6d74\u4e2d\u800c\u662f\u63a5\u8fd1\u6676\u5706\uff0c\u6676\u5706\u4e0a\u7684\u4e8c\u6c27\u5316\u7845\u4e5f\u4ee5\u53ef\u6bd4\u7684\u8680\u523b\u901f\u7387\u8680\u523b\u3002Helms\uff06Deal\u786e\u5b9a\u6c34\u7684\u4f5c\u7528\u662f\u4e3a\u8868\u9762\u7684HF\u63d0\u4f9b\u51b7\u51dd\u7684\u6eb6\u5242\u4ecb\u8d28\u3002\u5965\u82ac\u4f2f\u683c\u7b49\u3002[2]\u63d0\u51fa\u4e86\u4e00\u4e2a\u4e24\u6b65\u53cd\u5e94\uff0c\u5176\u4e2d\u9996\u5148\u901a\u8fc7\u5438\u9644\u6c34\uff08H2O\uff09\u5f62\u6210\u7845\u70f7\u9187\u57fa\u56e2\u6765\u6253\u5f00\u6c27\u5316\u7269\u8868\u9762\u3002\u968f\u540e\uff0c\u7845\u70f7\u9187\u57fa\u56e2\u53d7\u5230HF\u7684\u653b\u51fb\uff1a<\/span>
\nSiO <\/span>2<\/span><\/sub>\u00a0+ 2H\u00a0<\/span>2<\/span><\/sub>\u00a0O-> Si\uff08OH\uff09<\/span>4<\/span><\/sub>
\nSi\uff08OH\uff09<\/span>4<\/span><\/sub>\u00a0+ 4HF-> SiF\u00a0<\/span>4<\/span><\/sub>\u00a0+ 4H\u00a0<\/span>2<\/span><\/sub>\u00a0O<\/span>
\n\u4e0a\u5f0f\u8868\u660e\uff0c\u6c34\u8d77\u8680\u523b\u8fc7\u7a0b\u7684\u5f15\u53d1\u5242\u4ee5\u53ca\u53cd\u5e94\u7269\u7684\u4f5c\u7528\u3002\u8fd9\u4e00\u4e8b\u5b9e\u8868\u660e\uff0c\u53ef\u4ee5\u5bf9\u8680\u523b\u5de5\u827a\u8fdb\u884c\u6e29\u5ea6\u63a7\u5236\uff0c\u4ee5\u4f7f\u542f\u52a8\u5de5\u827a\u6240\u9700\u7684\u6c34\u91cf\u548c\u53cd\u5e94\u7269\u6c34\u7684\u91cf\u4fdd\u6301\u5e73\u8861\u3002\u5728idonus<\/a>\u7684\u6c7d\u76f8\u523b\u8680\u673a\u4e2d\uff0c\u8fd9\u79cd\u5e73\u8861\u662f\u901a\u8fc7\u52a0\u70ed\u6676\u7247\u6765\u5b9e\u73b0\u7684\u3002\u6676\u7247\u4e0a\u7684\u6c34\u819c\u5728\u4e2d\u7b49\u6e29\u5ea6\u4e0b\u84b8\u53d1\u3002\u8680\u523b\u901f\u7387\u968f\u6e29\u5ea6\u5347\u9ad8\u800c\u964d\u4f4e\uff0c\u5e76\u5728\u9ad8\u4e8e50\u00b0C\u7684\u6e29\u5ea6\u4e0b\u5b8c\u5168\u505c\u6b62\u3002<\/span>
\n\u5728\u7ea65 \u00b5m \/ h\u7684\u8680\u523b\u901f\u7387\u4e0b\u5b9e\u73b0\u4e86\u65e0\u7c98\u9644\u7684MEMS\u91ca\u653e\u3002<\/span><\/p>\n
[2] M. Offenberg\uff0cB\u3002Elsner\u548cF.L\u00e4rmer\uff0c\u201c\u84b8\u6c14HF\u8680\u523b<\/a>\u5728\u8868\u9762\u5fae\u52a0\u5de5\u4e2d\u53bb\u9664\u727a\u7272\u6c27\u5316\u7269\u201d\uff0c\u6269\u5c55\u6458\u8981\uff1a\u7535\u5316\u5b66\u3002Soc\u3002\u79cb\u5b63\u4f1a\u8bae\uff08\u8fc8\u963f\u5bc6\u6d77\u6ee9\uff09\u7b2c94-2\u5377\uff0c\u7b2c1056-7\u9875\uff0c1994\u5e74\u3002<\/span><\/p>\n
![\"\"](\"https:\/\/www.idonus.com\/images\/products\/VPE\/vpe_reaction_chamber_temp_control.jpg\")
<\/p>\n\u53cd\u5e94\u5ba4\u6e29\u5ea6\u63a7\u5236<\/span><\/h2>\n\u4e8c\u6c27\u5316\u7845\u7684\u8680\u523b\u901f\u7387\u968f\u53cd\u5e94\u5ba4\u4e2d\u6db2\u6001HF\u7684\u6e29\u5ea6\u800c\u7565\u6709\u53d8\u5316\u3002HF\u7684\u6e29\u5ea6\u53d6\u51b3\u4e8e\u6d01\u51c0\u5ba4\u7684\u73af\u5883\u6e29\u5ea6\u3002\u53e6\u5916\uff0cHF\u5728\u957f\u65f6\u95f4\u7684\u8680\u523b\u8fc7\u7a0b\u4e2d\u52a0\u70ed\uff0c\u8fd9\u5bfc\u81f4\u6676\u7247\u4e4b\u95f4\u7684\u8680\u523b\u901f\u7387\u589e\u52a0\uff0c\u76f4\u5230\u7cfb\u7edf\u7a33\u5b9a\u4e3a\u6b62\u3002\u4e3a\u4e86\u7a33\u5b9a\u523b\u8680\u901f\u7387\uff0c\u6211\u4eec\u5728\u5bb9\u5668\u4e2d\u5f00\u53d1\u4e86\u4e00\u4e2a\u5177\u6709\u53ef\u63a7\u6e29\u5ea6\u7684HF\u53cd\u5e94\u5ba4\u3002HF\u7684\u6e29\u5ea6\u53ef\u4ee5\u901a\u8fc7\u9644\u52a0\u63a7\u5236\u5668\u8fdb\u884c\u8c03\u8282\u3002\u73c0\u8033\u5e16\u5143\u4ef6\u53ef\u6839\u636e\u6240\u9700\u7684\u5de5\u827a\u53c2\u6570\u6765\u52a0\u70ed\u6216\u51b7\u5374\u9178\u3002<\/p>\n
<\/p>\n
HF\u84b8\u6c14\u76f8\u8680\u523b\u673a<\/a>\nHF\u8680\u523b<\/a>\nidonus<\/a>\nMEMS\u5668\u4ef6<\/a>\nMEMS\u9020\u8bbe\u5907<\/a>\n\u745e\u58ebIDONUS<\/a><\/div>","protected":false},"excerpt":{"rendered":"HF\u6c14\u76f8\u8680\u523b\u673a \u4ea7\u54c1\u63cf\u8ff0 VPE\u7531\u53cd\u5e94\u5ba4\u548c\u76d6\u5b50\u7ec4\u6210\u3002\u52a0\u70ed\u5143\u4ef6\u96c6\u6210\u5728\u76d6\u5b50\u4e2d\u3002\u5b83\u63a7\u5236\u8981\u8680\u523b\u7684\u57fa\u677f\u7684\u6e29\u5ea6\u3002\u53ef\u4ee5\u901a\u8fc7\u4e24\u79cd\u65b9\u5f0f\u5b9e\u73b0\u6676\u5706\u5939\u7d27\uff1a\u53ef\u4ee5\u4f7f\u7528\u5939\u7d27\u73af\u5c06\u6676\u5706\u673a\u68b0\u5939\u7d27\u3002\u62e7\u7d27\u662f\u4ece\u8bbe\u5907\u7684\u80cc\u9762\u5b8c <\/p>\n","protected":false},"author":10,"featured_media":298,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[72,101],"tags":[9,32,7,38,13,73],"yoast_head":"\n
\u745e\u58ebIdonus MEMS\u5236\u9020\u8bbe\u5907 HF\u6c14\u76f8\u8680\u523b\u673a - Idonus\u76f8\u8680\u523b\u7cfb\u7edf\u7ea2\u5916\u663e\u5fae\u955c<\/title>\n<meta name=\"description\" content=\"HF\u6c14\u76f8\u8680\u523b\u673a\u4ea7\u54c1\u63cf\u8ff0VPE\u7531\u53cd\u5e94\u5ba4\u548c\u76d6\u5b50\u7ec4\u6210\u3002\u52a0\u70ed\u5143\u4ef6\u96c6\u6210\u5728\u76d6\u5b50\u4e2d\u3002\u5b83\u63a7\u5236\u8981\u8680\u523b\u7684\u57fa\u677f\u7684\u6e29\u5ea6\u3002\u53ef\u4ee5\u901a\u8fc7\u4e24\u79cd\u65b9\u5f0f\u5b9e\u73b0\u6676\u5706\u5939\u7d27\uff1a\u53ef\u4ee5\u4f7f\u7528\u5939\u7d27\u73af\u5c06\u6676\u5706\u673a\u68b0\u5939\u7d27\u3002\u62e7\u7d27\u662f\u4ece\u8bbe\u5907\u7684\u80cc\u9762\u5b8c\u6210\u7684\uff0c\u8be5\u8bbe\u5907\u6c38\u8fdc\u4e0d\u4f1a\u4e0eHF\u84b8\u6c14\u63a5\u89e6\u30023\u4e2a\u87ba\u6bcd\u6613\u4e8e\u6234\u4e0a\u9632\u62a4\u624b\u5957\u3002\u53e6\u4e00\u79cd\u9009\u62e9\u662f\u9759\u7535\u5939\u7d27\u3002\u5355\u4e2a\u82af\u7247\uff08\u957f\u4e8e10\u6beb\u7c73\uff09\u4ee5\u53ca\u6676\u7247\u90fd\u53ef\u4ee5\u88ab\u5939\u5728\u52a0\u70ed\u5143\u4ef6\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.bihec.com\/idonus\/\u745e\u58ebidonus-mems\u5236\u9020\u8bbe\u5907-hf\u6c14\u76f8\u8680\u523b\u673a\/\" \/>\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u745e\u58ebIdonus MEMS\u5236\u9020\u8bbe\u5907 HF\u6c14\u76f8\u8680\u523b\u673a - Idonus\u76f8\u8680\u523b\u7cfb\u7edf\u7ea2\u5916\u663e\u5fae\u955c\" \/>\n<meta property=\"og:description\" content=\"HF\u6c14\u76f8\u8680\u523b\u673a\u4ea7\u54c1\u63cf\u8ff0VPE\u7531\u53cd\u5e94\u5ba4\u548c\u76d6\u5b50\u7ec4\u6210\u3002\u52a0\u70ed\u5143\u4ef6\u96c6\u6210\u5728\u76d6\u5b50\u4e2d\u3002\u5b83\u63a7\u5236\u8981\u8680\u523b\u7684\u57fa\u677f\u7684\u6e29\u5ea6\u3002\u53ef\u4ee5\u901a\u8fc7\u4e24\u79cd\u65b9\u5f0f\u5b9e\u73b0\u6676\u5706\u5939\u7d27\uff1a\u53ef\u4ee5\u4f7f\u7528\u5939\u7d27\u73af\u5c06\u6676\u5706\u673a\u68b0\u5939\u7d27\u3002\u62e7\u7d27\u662f\u4ece\u8bbe\u5907\u7684\u80cc\u9762\u5b8c\u6210\u7684\uff0c\u8be5\u8bbe\u5907\u6c38\u8fdc\u4e0d\u4f1a\u4e0eHF\u84b8\u6c14\u63a5\u89e6\u30023\u4e2a\u87ba\u6bcd\u6613\u4e8e\u6234\u4e0a\u9632\u62a4\u624b\u5957\u3002\u53e6\u4e00\u79cd\u9009\u62e9\u662f\u9759\u7535\u5939\u7d27\u3002\u5355\u4e2a\u82af\u7247\uff08\u957f\u4e8e10\u6beb\u7c73\uff09\u4ee5\u53ca\u6676\u7247\u90fd\u53ef\u4ee5\u88ab\u5939\u5728\u52a0\u70ed\u5143\u4ef6\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.bihec.com\/idonus\/\u745e\u58ebidonus-mems\u5236\u9020\u8bbe\u5907-hf\u6c14\u76f8\u8680\u523b\u673a\/\" \/>\n<meta property=\"og:site_name\" content=\"Idonus\u76f8\u8680\u523b\u7cfb\u7edf\u7ea2\u5916\u663e\u5fae\u955c\" \/>\n<meta property=\"article:published_time\" content=\"2020-04-10T01:47:19+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2020\/04\/HF\u6c14\u76f8\u8680\u523b\u673a.jpg?v=1586482777\" \/>\n\t<meta property=\"og:image:width\" content=\"750\" \/>\n\t<meta property=\"og:image:height\" content=\"750\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"\u4f5c\u8005\" \/>\n\t<meta name=\"twitter:data1\" content=\"\u5218\u793c\u9e4f 139-1685-4983 (\u5fae\u4fe1\u540c\u53f7\uff09\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.bihec.com\/idonus\/#website\",\"url\":\"https:\/\/www.bihec.com\/idonus\/\",\"name\":\"Idonus\\u76f8\\u8680\\u523b\\u7cfb\\u7edf\\u7ea2\\u5916\\u663e\\u5fae\\u955c\",\"description\":\"\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.bihec.com\/idonus\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"zh-CN\"},{\"@type\":\"ImageObject\",\"@id\":\"https:\/\/www.bihec.com\/idonus\/%e7%91%9e%e5%a3%abidonus-mems%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/#primaryimage\",\"inLanguage\":\"zh-CN\",\"url\":\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2020\/04\/HF\\u6c14\\u76f8\\u8680\\u523b\\u673a.jpg?v=1586482777\",\"contentUrl\":\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2020\/04\/HF\\u6c14\\u76f8\\u8680\\u523b\\u673a.jpg?v=1586482777\",\"width\":750,\"height\":750},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.bihec.com\/idonus\/%e7%91%9e%e5%a3%abidonus-mems%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/#webpage\",\"url\":\"https:\/\/www.bihec.com\/idonus\/%e7%91%9e%e5%a3%abidonus-mems%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/\",\"name\":\"\\u745e\\u58ebIdonus MEMS\\u5236\\u9020\\u8bbe\\u5907 HF\\u6c14\\u76f8\\u8680\\u523b\\u673a - Idonus\\u76f8\\u8680\\u523b\\u7cfb\\u7edf\\u7ea2\\u5916\\u663e\\u5fae\\u955c\",\"isPartOf\":{\"@id\":\"https:\/\/www.bihec.com\/idonus\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.bihec.com\/idonus\/%e7%91%9e%e5%a3%abidonus-mems%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/#primaryimage\"},\"datePublished\":\"2020-04-10T01:47:19+00:00\",\"dateModified\":\"2020-04-10T01:47:19+00:00\",\"author\":{\"@id\":\"https:\/\/www.bihec.com\/idonus\/#\/schema\/person\/3c64dcbb9da6a4c68cdf82eaedc12203\"},\"description\":\"HF\\u6c14\\u76f8\\u8680\\u523b\\u673a\\u4ea7\\u54c1\\u63cf\\u8ff0VPE\\u7531\\u53cd\\u5e94\\u5ba4\\u548c\\u76d6\\u5b50\\u7ec4\\u6210\\u3002\\u52a0\\u70ed\\u5143\\u4ef6\\u96c6\\u6210\\u5728\\u76d6\\u5b50\\u4e2d\\u3002\\u5b83\\u63a7\\u5236\\u8981\\u8680\\u523b\\u7684\\u57fa\\u677f\\u7684\\u6e29\\u5ea6\\u3002\\u53ef\\u4ee5\\u901a\\u8fc7\\u4e24\\u79cd\\u65b9\\u5f0f\\u5b9e\\u73b0\\u6676\\u5706\\u5939\\u7d27\\uff1a\\u53ef\\u4ee5\\u4f7f\\u7528\\u5939\\u7d27\\u73af\\u5c06\\u6676\\u5706\\u673a\\u68b0\\u5939\\u7d27\\u3002\\u62e7\\u7d27\\u662f\\u4ece\\u8bbe\\u5907\\u7684\\u80cc\\u9762\\u5b8c\\u6210\\u7684\\uff0c\\u8be5\\u8bbe\\u5907\\u6c38\\u8fdc\\u4e0d\\u4f1a\\u4e0eHF\\u84b8\\u6c14\\u63a5\\u89e6\\u30023\\u4e2a\\u87ba\\u6bcd\\u6613\\u4e8e\\u6234\\u4e0a\\u9632\\u62a4\\u624b\\u5957\\u3002\\u53e6\\u4e00\\u79cd\\u9009\\u62e9\\u662f\\u9759\\u7535\\u5939\\u7d27\\u3002\\u5355\\u4e2a\\u82af\\u7247\\uff08\\u957f\\u4e8e10\\u6beb\\u7c73\\uff09\\u4ee5\\u53ca\\u6676\\u7247\\u90fd\\u53ef\\u4ee5\\u88ab\\u5939\\u5728\\u52a0\\u70ed\\u5143\\u4ef6\",\"breadcrumb\":{\"@id\":\"https:\/\/www.bihec.com\/idonus\/%e7%91%9e%e5%a3%abidonus-mems%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/#breadcrumb\"},\"inLanguage\":\"zh-CN\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.bihec.com\/idonus\/%e7%91%9e%e5%a3%abidonus-mems%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.bihec.com\/idonus\/%e7%91%9e%e5%a3%abidonus-mems%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\\u9996\\u9875\",\"item\":\"https:\/\/www.bihec.com\/idonus\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\\u745e\\u58ebIdonus MEMS\\u5236\\u9020\\u8bbe\\u5907 HF\\u6c14\\u76f8\\u8680\\u523b\\u673a\"}]},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.bihec.com\/idonus\/#\/schema\/person\/3c64dcbb9da6a4c68cdf82eaedc12203\",\"name\":\"\\u5218\\u793c\\u9e4f 139-1685-4983 (\\u5fae\\u4fe1\\u540c\\u53f7\\uff09\",\"description\":\"\\u7535\\u8bdd\\uff1a400-840-1510 \\u4f20\\u771f\\uff1a021-51062822 Email\\uff1ainfo@bihec.com\",\"url\":\"https:\/\/www.bihec.com\/idonus\/author\/huangbihec-com\/\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"\u745e\u58ebIdonus MEMS\u5236\u9020\u8bbe\u5907 HF\u6c14\u76f8\u8680\u523b\u673a - Idonus\u76f8\u8680\u523b\u7cfb\u7edf\u7ea2\u5916\u663e\u5fae\u955c","description":"HF\u6c14\u76f8\u8680\u523b\u673a\u4ea7\u54c1\u63cf\u8ff0VPE\u7531\u53cd\u5e94\u5ba4\u548c\u76d6\u5b50\u7ec4\u6210\u3002\u52a0\u70ed\u5143\u4ef6\u96c6\u6210\u5728\u76d6\u5b50\u4e2d\u3002\u5b83\u63a7\u5236\u8981\u8680\u523b\u7684\u57fa\u677f\u7684\u6e29\u5ea6\u3002\u53ef\u4ee5\u901a\u8fc7\u4e24\u79cd\u65b9\u5f0f\u5b9e\u73b0\u6676\u5706\u5939\u7d27\uff1a\u53ef\u4ee5\u4f7f\u7528\u5939\u7d27\u73af\u5c06\u6676\u5706\u673a\u68b0\u5939\u7d27\u3002\u62e7\u7d27\u662f\u4ece\u8bbe\u5907\u7684\u80cc\u9762\u5b8c\u6210\u7684\uff0c\u8be5\u8bbe\u5907\u6c38\u8fdc\u4e0d\u4f1a\u4e0eHF\u84b8\u6c14\u63a5\u89e6\u30023\u4e2a\u87ba\u6bcd\u6613\u4e8e\u6234\u4e0a\u9632\u62a4\u624b\u5957\u3002\u53e6\u4e00\u79cd\u9009\u62e9\u662f\u9759\u7535\u5939\u7d27\u3002\u5355\u4e2a\u82af\u7247\uff08\u957f\u4e8e10\u6beb\u7c73\uff09\u4ee5\u53ca\u6676\u7247\u90fd\u53ef\u4ee5\u88ab\u5939\u5728\u52a0\u70ed\u5143\u4ef6","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.bihec.com\/idonus\/\u745e\u58ebidonus-mems\u5236\u9020\u8bbe\u5907-hf\u6c14\u76f8\u8680\u523b\u673a\/","og_locale":"zh_CN","og_type":"article","og_title":"\u745e\u58ebIdonus MEMS\u5236\u9020\u8bbe\u5907 HF\u6c14\u76f8\u8680\u523b\u673a - Idonus\u76f8\u8680\u523b\u7cfb\u7edf\u7ea2\u5916\u663e\u5fae\u955c","og_description":"HF\u6c14\u76f8\u8680\u523b\u673a\u4ea7\u54c1\u63cf\u8ff0VPE\u7531\u53cd\u5e94\u5ba4\u548c\u76d6\u5b50\u7ec4\u6210\u3002\u52a0\u70ed\u5143\u4ef6\u96c6\u6210\u5728\u76d6\u5b50\u4e2d\u3002\u5b83\u63a7\u5236\u8981\u8680\u523b\u7684\u57fa\u677f\u7684\u6e29\u5ea6\u3002\u53ef\u4ee5\u901a\u8fc7\u4e24\u79cd\u65b9\u5f0f\u5b9e\u73b0\u6676\u5706\u5939\u7d27\uff1a\u53ef\u4ee5\u4f7f\u7528\u5939\u7d27\u73af\u5c06\u6676\u5706\u673a\u68b0\u5939\u7d27\u3002\u62e7\u7d27\u662f\u4ece\u8bbe\u5907\u7684\u80cc\u9762\u5b8c\u6210\u7684\uff0c\u8be5\u8bbe\u5907\u6c38\u8fdc\u4e0d\u4f1a\u4e0eHF\u84b8\u6c14\u63a5\u89e6\u30023\u4e2a\u87ba\u6bcd\u6613\u4e8e\u6234\u4e0a\u9632\u62a4\u624b\u5957\u3002\u53e6\u4e00\u79cd\u9009\u62e9\u662f\u9759\u7535\u5939\u7d27\u3002\u5355\u4e2a\u82af\u7247\uff08\u957f\u4e8e10\u6beb\u7c73\uff09\u4ee5\u53ca\u6676\u7247\u90fd\u53ef\u4ee5\u88ab\u5939\u5728\u52a0\u70ed\u5143\u4ef6","og_url":"https:\/\/www.bihec.com\/idonus\/\u745e\u58ebidonus-mems\u5236\u9020\u8bbe\u5907-hf\u6c14\u76f8\u8680\u523b\u673a\/","og_site_name":"Idonus\u76f8\u8680\u523b\u7cfb\u7edf\u7ea2\u5916\u663e\u5fae\u955c","article_published_time":"2020-04-10T01:47:19+00:00","og_image":[{"width":750,"height":750,"url":"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2020\/04\/HF\u6c14\u76f8\u8680\u523b\u673a.jpg?v=1586482777","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_misc":{"\u4f5c\u8005":"\u5218\u793c\u9e4f 139-1685-4983 (\u5fae\u4fe1\u540c\u53f7\uff09"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebSite","@id":"https:\/\/www.bihec.com\/idonus\/#website","url":"https:\/\/www.bihec.com\/idonus\/","name":"Idonus\u76f8\u8680\u523b\u7cfb\u7edf\u7ea2\u5916\u663e\u5fae\u955c","description":"","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.bihec.com\/idonus\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"zh-CN"},{"@type":"ImageObject","@id":"https:\/\/www.bihec.com\/idonus\/%e7%91%9e%e5%a3%abidonus-mems%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/#primaryimage","inLanguage":"zh-CN","url":"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2020\/04\/HF\u6c14\u76f8\u8680\u523b\u673a.jpg?v=1586482777","contentUrl":"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2020\/04\/HF\u6c14\u76f8\u8680\u523b\u673a.jpg?v=1586482777","width":750,"height":750},{"@type":"WebPage","@id":"https:\/\/www.bihec.com\/idonus\/%e7%91%9e%e5%a3%abidonus-mems%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/#webpage","url":"https:\/\/www.bihec.com\/idonus\/%e7%91%9e%e5%a3%abidonus-mems%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/","name":"\u745e\u58ebIdonus MEMS\u5236\u9020\u8bbe\u5907 HF\u6c14\u76f8\u8680\u523b\u673a - Idonus\u76f8\u8680\u523b\u7cfb\u7edf\u7ea2\u5916\u663e\u5fae\u955c","isPartOf":{"@id":"https:\/\/www.bihec.com\/idonus\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.bihec.com\/idonus\/%e7%91%9e%e5%a3%abidonus-mems%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/#primaryimage"},"datePublished":"2020-04-10T01:47:19+00:00","dateModified":"2020-04-10T01:47:19+00:00","author":{"@id":"https:\/\/www.bihec.com\/idonus\/#\/schema\/person\/3c64dcbb9da6a4c68cdf82eaedc12203"},"description":"HF\u6c14\u76f8\u8680\u523b\u673a\u4ea7\u54c1\u63cf\u8ff0VPE\u7531\u53cd\u5e94\u5ba4\u548c\u76d6\u5b50\u7ec4\u6210\u3002\u52a0\u70ed\u5143\u4ef6\u96c6\u6210\u5728\u76d6\u5b50\u4e2d\u3002\u5b83\u63a7\u5236\u8981\u8680\u523b\u7684\u57fa\u677f\u7684\u6e29\u5ea6\u3002\u53ef\u4ee5\u901a\u8fc7\u4e24\u79cd\u65b9\u5f0f\u5b9e\u73b0\u6676\u5706\u5939\u7d27\uff1a\u53ef\u4ee5\u4f7f\u7528\u5939\u7d27\u73af\u5c06\u6676\u5706\u673a\u68b0\u5939\u7d27\u3002\u62e7\u7d27\u662f\u4ece\u8bbe\u5907\u7684\u80cc\u9762\u5b8c\u6210\u7684\uff0c\u8be5\u8bbe\u5907\u6c38\u8fdc\u4e0d\u4f1a\u4e0eHF\u84b8\u6c14\u63a5\u89e6\u30023\u4e2a\u87ba\u6bcd\u6613\u4e8e\u6234\u4e0a\u9632\u62a4\u624b\u5957\u3002\u53e6\u4e00\u79cd\u9009\u62e9\u662f\u9759\u7535\u5939\u7d27\u3002\u5355\u4e2a\u82af\u7247\uff08\u957f\u4e8e10\u6beb\u7c73\uff09\u4ee5\u53ca\u6676\u7247\u90fd\u53ef\u4ee5\u88ab\u5939\u5728\u52a0\u70ed\u5143\u4ef6","breadcrumb":{"@id":"https:\/\/www.bihec.com\/idonus\/%e7%91%9e%e5%a3%abidonus-mems%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/#breadcrumb"},"inLanguage":"zh-CN","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.bihec.com\/idonus\/%e7%91%9e%e5%a3%abidonus-mems%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/www.bihec.com\/idonus\/%e7%91%9e%e5%a3%abidonus-mems%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/www.bihec.com\/idonus\/"},{"@type":"ListItem","position":2,"name":"\u745e\u58ebIdonus MEMS\u5236\u9020\u8bbe\u5907 HF\u6c14\u76f8\u8680\u523b\u673a"}]},{"@type":"Person","@id":"https:\/\/www.bihec.com\/idonus\/#\/schema\/person\/3c64dcbb9da6a4c68cdf82eaedc12203","name":"\u5218\u793c\u9e4f 139-1685-4983 (\u5fae\u4fe1\u540c\u53f7\uff09","description":"\u7535\u8bdd\uff1a400-840-1510 \u4f20\u771f\uff1a021-51062822 Email\uff1ainfo@bihec.com","url":"https:\/\/www.bihec.com\/idonus\/author\/huangbihec-com\/"}]}},"_links":{"self":[{"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/posts\/297"}],"collection":[{"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/users\/10"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/comments?post=297"}],"version-history":[{"count":1,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/posts\/297\/revisions"}],"predecessor-version":[{"id":299,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/posts\/297\/revisions\/299"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/media\/298"}],"wp:attachment":[{"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/media?parent=297"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/categories?post=297"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bihec.com\/idonus\/wp-json\/wp\/v2\/tags?post=297"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}
HF\u6c14\u76f8\u8680\u523b\u673a \u4ea7\u54c1\u63cf\u8ff0 VPE\u7531\u53cd\u5e94\u5ba4\u548c\u76d6\u5b50\u7ec4\u6210\u3002\u52a0\u70ed\u5143\u4ef6\u96c6\u6210\u5728\u76d6\u5b50\u4e2d\u3002\u5b83\u63a7\u5236\u8981\u8680\u523b\u7684\u57fa\u677f\u7684\u6e29\u5ea6\u3002\u53ef\u4ee5\u901a\u8fc7\u4e24\u79cd\u65b9\u5f0f\u5b9e\u73b0\u6676\u5706\u5939\u7d27\uff1a\u53ef\u4ee5\u4f7f\u7528\u5939\u7d27\u73af\u5c06\u6676\u5706\u673a\u68b0\u5939\u7d27\u3002\u62e7\u7d27\u662f\u4ece\u8bbe\u5907\u7684\u80cc\u9762\u5b8c <\/p>\n","protected":false},"author":10,"featured_media":298,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[72,101],"tags":[9,32,7,38,13,73],"yoast_head":"\n