{"id":787,"date":"2025-03-28T16:01:00","date_gmt":"2025-03-28T08:01:00","guid":{"rendered":"https:\/\/www.bihec.com\/idonus\/?p=787"},"modified":"2025-03-28T16:01:00","modified_gmt":"2025-03-28T08:01:00","slug":"%e7%ba%a2%e5%a4%96%e5%85%89%e6%99%b6%e5%9c%86%e6%a3%80%e6%b5%8b%e6%98%be%e5%be%ae%e9%95%9c-%e7%ba%a2%e5%a4%96%e6%98%be%e5%be%ae%e9%95%9c-mems%e5%99%a8%e4%bb%b6%e6%a3%80%e6%b5%8b-%e6%99%b6%e5%9c%86","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/idonus\/%e7%ba%a2%e5%a4%96%e5%85%89%e6%99%b6%e5%9c%86%e6%a3%80%e6%b5%8b%e6%98%be%e5%be%ae%e9%95%9c-%e7%ba%a2%e5%a4%96%e6%98%be%e5%be%ae%e9%95%9c-mems%e5%99%a8%e4%bb%b6%e6%a3%80%e6%b5%8b-%e6%99%b6%e5%9c%86\/","title":{"rendered":"\u7ea2\u5916\u5149\u6676\u5706\u68c0\u6d4b\u663e\u5fae\u955c \u7ea2\u5916\u663e\u5fae\u955c MEMS\u5668\u4ef6\u68c0\u6d4b \u6676\u5706\u523b\u8680\u901f\u7387\u6d4b\u91cf \u7194\u878d\u952e\u5408\u68c0\u6d4b"},"content":{"rendered":"<p class=\"\" data-start=\"0\" data-end=\"77\"><a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e7%a1%85\/\" title=\"View all posts in \u7845\" target=\"_blank\">\u7845<\/a>\u5bf9\u7ea2\u5916\u5149\u900f\u660e\u3002\u6211\u4eec\u7684<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e7%ba%a2%e5%a4%96%e5%85%89%e6%99%b6%e5%9c%86%e6%a3%80%e6%b5%8b%e6%98%be%e5%be%ae%e9%95%9c\/\" title=\"View all posts in \u7ea2\u5916\u5149\u6676\u5706\u68c0\u6d4b\u663e\u5fae\u955c\" target=\"_blank\">\u7ea2\u5916\u5149\u6676\u5706\u68c0\u6d4b\u663e\u5fae\u955c<\/a>\uff08IRM\uff09\u4ece\u57fa\u677f\u80cc\u9762\u7167\u5c04\u7845\u57fa\u6750\u6599\uff0c\u5e76\u6355\u6349\u900f\u8fc7\u57fa\u677f\u7684\u5149\u7ebf\u3002\u56e0\u6b64\uff0c\u53ef\u4ee5\u68c0\u6d4b\u4f20\u7edf\u663e\u5fae\u955c\u65e0\u6cd5\u89c2\u5bdf\u5230\u7684\u7845\u57fa\u677f\u5185\u90e8\u73b0\u8c61\u3002<\/p>\n<p class=\"\" data-start=\"79\" data-end=\"165\">\u8be5\u663e\u5fae\u955c\u914d\u5907\u957f\u5de5\u4f5c\u8ddd\u79bb\u7269\u955c\uff0c\u5e76\u5e26\u6709\u4e09\u6863\u53d8\u7126\uff0c\u7528\u6237\u53ef\u9009\u62e9\u5408\u9002\u7684\u89c6\u91ce\u548c\u653e\u5927\u500d\u7387\u3002<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e7%ba%a2%e5%a4%96%e6%95%8f%e6%84%9f%e7%9b%b8%e6%9c%ba\/\" title=\"View all posts in \u7ea2\u5916\u654f\u611f\u76f8\u673a\" target=\"_blank\">\u7ea2\u5916\u654f\u611f\u76f8\u673a<\/a>\u901a\u8fc7USB\u5c06\u68c0\u6d4b\u8bbe\u5907\u7684\u56fe\u50cf\u4f20\u8f93\u81f3\u8ba1\u7b97\u673a\u3002\u4f7f\u75285\u500d\u7269\u955c\u65f6\uff0c\u5206\u8fa8\u7387\u53ef\u8fbe\u4f18\u4e8e3 \u00b5m\u3002<\/p>\n<p class=\"\" data-start=\"167\" data-end=\"208\">\u6b64\u5916\uff0c\u8be5\u663e\u5fae\u955c\u8fd8\u914d\u5907\u4e86\u9876\u90e8\u7167\u660e\u529f\u80fd\uff0c\u4f7f\u5176\u53ef\u7528\u4e8e\u5e38\u89c4\u6a21\u5f0f\uff0c\u5e76\u7528\u4e8e\u68c0\u6d4b\u6676\u5706\u7684\u6b63\u9762\u3002<\/p>\n<p class=\"\" data-start=\"210\" data-end=\"303\"><a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e7%ba%a2%e5%a4%96%e6%98%be%e5%be%ae%e9%95%9c\/\" title=\"View all posts in \u7ea2\u5916\u663e\u5fae\u955c\" target=\"_blank\">\u7ea2\u5916\u663e\u5fae\u955c<\/a>\u914d\u6709XY\u79fb\u52a8\u5e73\u53f0\uff0c\u53ef\u5bb9\u7eb38\u82f1\u5bf8\u6216\u66f4\u5c0f\u5c3a\u5bf8\u7684\u6676\u5706\u3002\u5e73\u53f0\u91c7\u7528\u7535\u673a\u9a71\u52a8\uff0c\u5e76\u53ef\u901a\u8fc7\u64cd\u7eb5\u6746\u63a7\u5236\u3002\u5bf9\u4e8e\u5b9e\u9a8c\u5ba4\u73af\u5883\uff0c\u8be5\u663e\u5fae\u955c\u8fd8\u53ef\u9009\u914d\u7ecf\u6d4e\u578b\u624b\u52a8XY\u79fb\u52a8\u5e73\u53f0\uff0c\u4ee5\u66ff\u4ee3\u5168\u81ea\u52a8\u88c5\u7f6e\u3002\u8be6\u60c5\u8bf7\u8054\u7cfb\u6211\u4eec\u3002<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<table>\n<tbody>\n<tr>\n<td>\n<h3><img loading=\"lazy\" width=\"394\" height=\"295\" class=\"size-full wp-image-788 alignnone\" src=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e651382ed28.png\" alt=\"\" srcset=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e651382ed28.png?v=1743147320 394w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e651382ed28-300x225.png?v=1743147320 300w\" sizes=\"(max-width: 394px) 100vw, 394px\" \/><\/h3>\n<\/td>\n<td valign=\"top\">\n<h3><strong>\u7ea2\u5916\u663e\u5fae\u955c\u7684\u7279\u70b9\uff1a<\/strong><\/h3>\n<ul>\n<li>\u80cc\u9762\u7ea2\u5916\u7167\u660e<\/li>\n<li>\u9876\u90e8\u7167\u660e<\/li>\n<li>\u9002\u7528\u4e8e8\u82f1\u5bf8\u53ca\u4ee5\u4e0b\u6676\u5706\u7684XY\u79fb\u52a8\u5e73\u53f0<\/li>\n<li>\u957f\u5de5\u4f5c\u8ddd\u79bb\u7269\u955c<\/li>\n<li>\u4e09\u6863\u53d8\u7126<\/li>\n<li>\u7ea2\u5916\u654f\u611f\u76f8\u673a<\/li>\n<li>\u8ba1\u7b97\u673a\u7aef\u68c0\u6d4b<\/li>\n<\/ul>\n<\/td>\n<\/tr>\n<tr>\n<td>\n<p><figure id=\"attachment_789\" aria-describedby=\"caption-attachment-789\" style=\"width: 394px\" class=\"wp-caption aligncenter\"><img loading=\"lazy\" class=\"wp-image-789 size-full\" src=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e65190139dd.png\" alt=\"\" width=\"394\" height=\"295\" srcset=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e65190139dd.png?v=1743147408 394w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e65190139dd-300x225.png?v=1743147408 300w\" sizes=\"(max-width: 394px) 100vw, 394px\" \/><figcaption id=\"caption-attachment-789\" class=\"wp-caption-text\">\u7ea2\u5916\u6676\u5706\u68c0\u6d4b\u663e\u5fae\u955c\u914d\u5907\u9876\u90e8\u548c\u80cc\u9762\u7167\u660e\uff0c\u53ef\u7528\u4e8e\u68c0\u6d4b\u7845\u57fa\u6750\u6599\u5185\u90e8\u73b0\u8c61\uff0c\u540c\u65f6\u4e5f\u53ef\u4f5c\u4e3a\u5e38\u89c4\u663e\u5fae\u955c\u4f7f\u7528\u3002<\/figcaption><\/figure><\/td>\n<td>\n<p><figure id=\"attachment_790\" aria-describedby=\"caption-attachment-790\" style=\"width: 526px\" class=\"wp-caption alignnone\"><img loading=\"lazy\" class=\"wp-image-790 size-full\" src=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e651f5e0271.png\" alt=\"\" width=\"526\" height=\"213\" srcset=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e651f5e0271.png?v=1743147510 526w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e651f5e0271-300x121.png?v=1743147510 300w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e651f5e0271-500x202.png?v=1743147510 500w\" sizes=\"(max-width: 526px) 100vw, 526px\" \/><figcaption id=\"caption-attachment-790\" class=\"wp-caption-text\">\u7ea2\u5916\u548c\u53ef\u89c1\u5149\u7167\u660e\u5f3a\u5ea6\u63a7\u5236\uff1a\u663e\u5fae\u955c\u53ef\u7528\u4e8e\u7ea2\u5916\u6210\u50cf\uff0c\u540c\u65f6\u4e5f\u53ef\u4f5c\u4e3a\u5e38\u89c4\u663e\u5fae\u955c\uff0c\u4f7f\u7528\u9876\u90e8\u53ef\u89c1\u5149\u7167\u660e\u3002<\/figcaption><\/figure><\/td>\n<\/tr>\n<tr>\n<td>\n<h3>\u5e94\u7528\u9886\u57df\uff1a<\/h3>\n<ul>\n<li>\u91ca\u653e\u540e\u7684<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/mems%e5%99%a8%e4%bb%b6%e6%a3%80%e6%b5%8b\/\" title=\"View all posts in MEMS\u5668\u4ef6\u68c0\u6d4b\" target=\"_blank\">MEMS\u5668\u4ef6\u68c0\u6d4b<\/a><\/li>\n<li>\u57cb\u5c42\u6750\u6599\uff08\u5982SOI\u6676\u5706\uff09\u523b\u8680\u901f\u7387\u6d4b\u91cf<\/li>\n<li><a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e7%86%94%e8%9e%8d%e9%94%ae%e5%90%88%e6%a3%80%e6%b5%8b\/\" title=\"View all posts in \u7194\u878d\u952e\u5408\u68c0\u6d4b\" target=\"_blank\">\u7194\u878d\u952e\u5408\u68c0\u6d4b<\/a><\/li>\n<li>\u7845\u6676\u5706\/\u82af\u7247\u7684\u80cc\u9762\u5bf9\u51c6<\/li>\n<li>\u8d28\u91cf\u63a7\u5236<\/li>\n<\/ul>\n<\/td>\n<td>\n<h3>\u4f18\u70b9\uff1a<\/h3>\n<ul>\n<li>\u53ef\u9760\u5236\u9020\u66f4\u5c0f\u7684<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/mems\/\" title=\"View all posts in MEMS\" target=\"_blank\">MEMS<\/a>\u951a\u70b9\uff0c\u63d0\u9ad8\u586b\u5145\u56e0\u5b50<\/li>\n<li>\u9876\u90e8\u548c\u80cc\u90e8\u7167\u660e<\/li>\n<li>\u5c0f\u5de7\u7684\u5360\u5730\u9762\u79ef<\/li>\n<li>\u9ad8\u5206\u8fa8\u7387\uff085\u500d\u7269\u955c\u4e0b\u5c0f\u4e8e3\u5fae\u7c73\uff09<\/li>\n<li>\u6613\u4e8e\u4f7f\u7528\uff0c\u7acb\u5373\u83b7\u5f97\u7ed3\u679c<\/li>\n<\/ul>\n<\/td>\n<\/tr>\n<tr>\n<td valign=\"top\">\n<p><figure id=\"attachment_794\" aria-describedby=\"caption-attachment-794\" style=\"width: 300px\" class=\"wp-caption alignnone\"><img loading=\"lazy\" class=\"wp-image-794 size-medium\" src=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e653cbca299-300x283.png\" alt=\"\" width=\"300\" height=\"283\" srcset=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e653cbca299-300x283.png?v=1743147980 300w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e653cbca299.png?v=1743147980 412w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><figcaption id=\"caption-attachment-794\" class=\"wp-caption-text\">\u8fd9\u662f\u5728\u7845\u7edd\u7f18\u4f53\uff08SOI\uff09\u6676\u5706\u4e0a\u5236\u9020\u7684\u5fae\u7ed3\u6784\u90e8\u5206\u7684\u9876\u90e8\u89c6\u56fe\u3002<\/figcaption><\/figure><\/td>\n<td>\n<p><figure id=\"attachment_795\" aria-describedby=\"caption-attachment-795\" style=\"width: 300px\" class=\"wp-caption alignnone\"><img loading=\"lazy\" class=\"wp-image-795 size-medium\" src=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e653d0b5e9f-300x283.png\" alt=\"\" width=\"300\" height=\"283\" srcset=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e653d0b5e9f-300x283.png?v=1743147985 300w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e653d0b5e9f.png?v=1743147985 422w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><figcaption id=\"caption-attachment-795\" class=\"wp-caption-text\">\u8fd9\u662f\u76f8\u540c\u533a\u57df\u7ecf\u8fc760\u5206\u949fHF\u84b8\u6c14\u76f8\u523b\u8680\u540e\u7684\u7ea2\u5916\u56fe\u50cf\u3002\u57cb\u85cf\u7684SiO2\u5c42\u7684\u4e0b\u523b\u8680\u53d8\u5f97\u53ef\u89c1\uff0c\u4ece\u800c\u80fd\u591f\u786e\u5b9a\u5df2\u91ca\u653e\u548c\u672a\u91ca\u653e\u7684\u90e8\u5206\u3002<\/figcaption><\/figure><\/td>\n<\/tr>\n<tr>\n<td>\n<p><figure id=\"attachment_796\" aria-describedby=\"caption-attachment-796\" style=\"width: 300px\" class=\"wp-caption alignnone\"><img loading=\"lazy\" class=\"wp-image-796 size-medium\" src=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e653d6a36f6-300x229.png\" alt=\"\" width=\"300\" height=\"229\" srcset=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e653d6a36f6-300x229.png?v=1743147990 300w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e653d6a36f6.png?v=1743147990 441w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><figcaption id=\"caption-attachment-796\" class=\"wp-caption-text\">\u7845\u878d\u5408\u952e\u5408\u7684\u68c0\u67e5\uff1a\u5728\u8fd9\u79cd\u60c5\u51b5\u4e0b\uff0c\u4e00\u7247\u7ecf\u8fc7\u6df1\u53cd\u5e94\u79bb\u5b50\u523b\u8680\uff08DRIE\uff09\u7ed3\u6784\u5316\u7684\u6676\u5706\u4e0e\u53e6\u4e00\u7247\u6676\u5706\u8fdb\u884c\u4e86\u878d\u5408\u952e\u5408\u3002\u4efb\u4f55\u5982\u6c14\u5b54\u6216\u5bf9\u51c6\u95ee\u9898\u7b49\u6545\u969c\u90fd\u53ef\u4ee5\u901a\u8fc7\u7ea2\u5916\u5149<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e5%8f%af%e8%a7%86%e5%8c%96\/\" title=\"View all posts in \u53ef\u89c6\u5316\" target=\"_blank\">\u53ef\u89c6\u5316<\/a>\u3002<\/figcaption><\/figure><\/td>\n<td>\n<p><figure id=\"attachment_797\" aria-describedby=\"caption-attachment-797\" style=\"width: 300px\" class=\"wp-caption alignnone\"><img loading=\"lazy\" class=\"wp-image-797 size-medium\" src=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e653dbdeece-300x292.png\" alt=\"\" width=\"300\" height=\"292\" srcset=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e653dbdeece-300x292.png?v=1743147996 300w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e653dbdeece.png?v=1743147996 389w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><figcaption id=\"caption-attachment-797\" class=\"wp-caption-text\">\u914d\u5907\u6210\u672c\u6548\u76ca\u578b\u624b\u52a8XY\u5e73\u79fb\u53f0\u7684<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/ir%e6%98%be%e5%be%ae%e9%95%9c\/\" title=\"View all posts in IR\u663e\u5fae\u955c\" target=\"_blank\">IR\u663e\u5fae\u955c<\/a>\uff0c\u9002\u7528\u4e8e\u5b9e\u9a8c\u5ba4\u4f7f\u7528\u3002<\/figcaption><\/figure><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<figure id=\"attachment_798\" aria-describedby=\"caption-attachment-798\" style=\"width: 983px\" class=\"wp-caption alignleft\"><img loading=\"lazy\" class=\"wp-image-798 size-full\" src=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e65438456b7.png\" alt=\"\" width=\"983\" height=\"738\" srcset=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e65438456b7.png?v=1743148090 983w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e65438456b7-300x225.png?v=1743148090 300w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e65438456b7-768x577.png?v=1743148090 768w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e65438456b7-500x375.png?v=1743148090 500w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e65438456b7-800x601.png?v=1743148090 800w\" sizes=\"(max-width: 983px) 100vw, 983px\" \/><figcaption id=\"caption-attachment-798\" class=\"wp-caption-text\">Windows\u7684\u56fe\u5f62\u7528\u6237\u754c\u9762\u5141\u8bb8\u7528\u6237\u901a\u8fc7PC\u64cd\u4f5c\u663e\u5fae\u955c\u3002\u5b83\u5b9e\u73b0\u4e86\u5bf9\u663e\u5fae\u955c\u7684\u5b8c\u5168\u63a7\u5236\uff0c\u5e76\u80fd\u591f\u5728\u7528\u6237\u5b9a\u4e49\u7684\u6676\u5706\u7f51\u683c\u4e0a\u81ea\u52a8\u83b7\u53d6\u56fe\u50cf\u3002<\/figcaption><\/figure>\n<figure id=\"attachment_799\" aria-describedby=\"caption-attachment-799\" style=\"width: 969px\" class=\"wp-caption alignleft\"><img loading=\"lazy\" class=\"wp-image-799 size-full\" src=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e654451d8c5.png\" alt=\"\" width=\"969\" height=\"723\" srcset=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e654451d8c5.png?v=1743148102 969w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/03\/img_67e654451d8c5-300x224.png?v=1743148102 300w, 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