板式基板支架
專用于不同沉積技術(shù)的樣品架(基板、板、晶片、鉬塊),例如 MBE、磁控濺射、熱蒸發(fā)等。
描述
專用于不同沉積技術(shù)的樣品架(晶片、鉬塊),例如 MBE、磁控濺射、熱蒸發(fā)等。標(biāo)準(zhǔn)尺寸為 2 英寸、3 英寸、4 英寸(可根據(jù)要求提供 6 英寸、8 英寸或更大)。該樣品架可針對單個和多個其他類型的樣品架進(jìn)行配置,例如旗形板。標(biāo)準(zhǔn)材料為鉬或鈦,可根據(jù)要求提供其他材料。
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