{"id":862,"date":"2024-12-06T14:18:09","date_gmt":"2024-12-06T06:18:09","guid":{"rendered":"https:\/\/www.bihec.com\/prevac\/?p=862"},"modified":"2024-12-06T14:18:09","modified_gmt":"2024-12-06T06:18:09","slug":"%e6%b3%a2%e5%85%b0-prevac-electron-beam-evaporator-ebv-40a1-%e7%94%b5%e5%ad%90%e6%9d%9f%e8%92%b8%e5%8f%91%e5%99%a8-%e7%94%b5%e5%ad%90%e6%9d%9f%e8%92%b8%e5%8f%91%e6%ba%90-ebv-40a1","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/prevac\/%e6%b3%a2%e5%85%b0-prevac-electron-beam-evaporator-ebv-40a1-%e7%94%b5%e5%ad%90%e6%9d%9f%e8%92%b8%e5%8f%91%e5%99%a8-%e7%94%b5%e5%ad%90%e6%9d%9f%e8%92%b8%e5%8f%91%e6%ba%90-ebv-40a1\/","title":{"rendered":"\u6ce2\u5170 PREVAC Electron beam evaporator EBV 40A1 \u7535\u5b50\u675f\u84b8\u53d1\u5668 \u7535\u5b50\u675f\u84b8\u53d1\u6e90 EBV 40A1"},"content":{"rendered":"

\u7535\u5b50\u675f\u84b8\u53d1\u5668<\/a>EBV 40A1<\/a>\u4e13\u4e3a\u8d85\u7eaf\u4e9a\u5355\u5c42\u548c\u591a\u5c42MBE<\/a>\u8584\u819c\u751f\u957f\u800c\u8bbe\u8ba1\u3002<\/p>\n

\"\"<\/p>\n

\u63cf\u8ff0<\/strong><\/p>\n

\u7cbe\u786e\u5b9a\u4e49\u7684\u84b8\u53d1\u5242\u675f\u610f\u5473\u7740\u5728\u6837\u54c1\u4e0a\u9ad8\u5ea6\u5747\u5300\u7684\u6c89\u79ef\uff0c\u6c89\u79ef\u9762\u79ef\u7531\u7535\u5b50\u675f\u84b8\u53d1<\/a>\u5668\u5230\u6837\u54c1\u7684\u8ddd\u79bb\u548c\u6613\u4e8e\u66f4\u6362\u7684\u51fa\u53e3\u5b54\u4e4b\u4e00\u7684\u9009\u62e9\u51b3\u5b9a\u3002\u7535\u5b50<\/a>\u675f\u84b8\u53d1\u5668EBV 40A1\u914d\u7f6e\u6709\u624b\u52a8\u6216\u81ea\u52a8\u5feb\u95e8\u7684\u9009\u62e9\u3002\u81ea\u5b9a\u4e49\u63d2\u5165\u957f\u5ea6190-345\u6beb\u7c73\uff08\u6839\u636e\u8981\u6c42\u63d0\u4f9b\u5176\u4ed6\u957f\u5ea6\uff09<\/p>\n

\u7279\u6027<\/strong><\/p>\n

\u624b\u52a8\u6216\u7535\u52a8\u6c14\u52a8\u5feb\u95e8\uff0c\u96c6\u6210\u901a\u91cf\u76d1\u6d4b\u5668
\nW\/Th\u706f\u4e1d\uff0c\u7528\u4e8e\u4ece\u68d2\u72b6\u6750\u6599\u6216\u5c0f\u578b\u5bfc\u7535\u5769\u57da\u4e2d\u84b8\u53d1
\n\u591a\u79cd\u53ef\u66f4\u6362\u7684\u51fa\u53e3\u5b54
\n\u6574\u4f53\u6c34\u51b7
\n\u9002\u7528\u4e8e\u5404\u79cd\u6750\u6599
\n\u72ec\u7279\u7684\u9ad8\u53ef\u9760\u6027\u8bbe\u8ba1
\n\u6781\u9ad8\u7684\u529f\u7387\u5bc6\u5ea6
\n\u6781\u9ad8\u7684\u529f\u7387\u5bc6\u5ea6<\/p>\n

\u9009\u9879<\/strong><\/p>\n

\u5b9a\u5236\u63d2\u5165\u957f\u5ea6
\n\u6709\u6216\u6ca1\u6709\u96c6\u6210\u624b\u52a8\/\u7535\u52a8\u6c14\u52a8\u5feb\u95e8
\n\u7ebf\u6027\u79fb\u4f4d
\n\u5769\u57da<\/p>\n

\u6280\u672f\u53c2\u6570<\/strong><\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Mounting flange<\/td>\nDN 40CF (rotatable)<\/td>\n<\/tr>\n
Temp<\/a>erature range (for evaporated materials)<\/td>\n160 \u00b0C \u2013 2300 \u00b0C (3300 \u00b0C for molybdenum connector)<\/td>\n<\/tr>\n
Filament current<\/td>\ntypically 1.8 \u2013 2.2 A, max 2.3 A<\/td>\n<\/tr>\n
Evaporating rod diameter<\/td>\n2 mm standard (other on request), step 2 mm, wire feed 25 mm wire length 43 mm<\/td>\n<\/tr>\n
Water cooling (required)<\/td>\nwater flow: > 0.5 l\/min., temperature: 20-30 \u00b0C, max pressure: 6 bar<\/td>\n<\/tr>\n
Exit aperture diameters<\/td>\nset 1: ID 4, ID 6, ID 7.4 (standard) set 2: ID 10, ID 14, ID 19<\/td>\n<\/tr>\n
Type of shutter<\/td>\nmanual or pneumatic<\/td>\n<\/tr>\n
Power<\/td>\n\u2013 50 W\u00a0for high vapor pressure materials
\n\u2013 up to\u00a0200 W\u00a0for crucibles and thick wires<\/td>\n<\/tr>\n
Energy range<\/td>\n1 \u2013 1500 eV<\/td>\n<\/tr>\n
Cathode type<\/td>\nthoriated tungsten<\/td>\n<\/tr>\n
Crucible type (option)<\/td>\nKnudsen cell type made from: Mo, W, liner PBN, Al2<\/sub>O3<\/sub><\/td>\n<\/tr>\n
Crucibles volume<\/td>\n0.07 ml<\/td>\n<\/tr>\n
Evaporated materials<\/td>\nall typical materials according to\u00a0crucible type<\/td>\n<\/tr>\n
Others<\/td>\n\u2013 flux regulation via ion current incl. electrode, feedthrough, display unit and PID-regulator
\n\u2013 rear-loading evaporant<\/td>\n<\/tr>\n
Insertion length<\/td>\nmin. 190 mm (other on request) OD: 34.8 mm<\/td>\n<\/tr>\n
Deposition area<\/td>\ndependent on working distance (e.g. 6 mm for distance 25 mm \u2013 ID 4, 33 mm for distance 75 mm \u2013 ID 19)<\/td>\n<\/tr>\n
Working distance<\/td>\n25 \u2013 75 mm (optimum)<\/td>\n<\/tr>\n
Bakeout temperature<\/td>\nup to\u00a0250\u00b0C<\/td>\n<\/tr>\n
Working pressure<\/td>\n<10-5<\/sup>\u00a0mbar<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
EBV 40A1<\/a>\nElectron beam evaporator<\/a>\nPrevac<\/a>\n\u6ce2\u5170 PREVAC<\/a>\n\u7535\u5b50\u675f\u84b8\u53d1\u5668<\/a>\n\u7535\u5b50\u675f\u84b8\u53d1\u6e90<\/a><\/div>","protected":false},"excerpt":{"rendered":"

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