\n\u2022 \u9676\u74f7\u9632\u62a4\uff08\u7535\u5bb9\u89c4\u7ea7\u8010\u8150\u8680\uff09
\n\u2022 \u533b\u7528\u7ea7\u6d3e\u745e\u6797\u6d82\u5c42\uff08\u8010\u706d\u83cc\u5de5\u827a\uff09<\/li>\n
\u70ed\u9500\u578b\u53f7<\/strong>
\nVPM-5-10101211<\/strong>
\n\u2022 DN16KF\u6cd5\u5170 | RS-232\u63a5\u53e3 | mbar\u5355\u4f4d | 1\u7ec4\u7ee7\u7535\u5668 | 9\u9488D-sub<\/p>\n
VPM-5-10201211<\/strong>
\n\u2022 DN16KF\u6cd5\u5170 | RS-485\u63a5\u53e3 | mbar\u5355\u4f4d | 1\u7ec4\u7ee7\u7535\u5668 | 9\u9488D-sub<\/p>\n
\u6d4b\u63a7\u529f\u80fd<\/strong>
\n\u6a21\u62df\u8f93\u51fa<\/strong>
\n1 VDC\/\u5341\u8fdb\u5236\u7684\u6807\u51c6\u8f93\u51fa\uff08\u652f\u6301mbar\/Torr\/Pascal\uff09\uff0c\u517c\u5bb9\u4e3b\u6d41\u54c1\u724c\u66ff\u6362<\/p>\n
\u6570\u5b57\u63a5\u53e3<\/strong>
\nRS-232\/485\u652f\u6301\uff1a<\/p>\n
- \n
- \u5b9e\u65f6\u538b\u529b\u53ef\u89c6\u5316<\/li>\n
- \u8fdc\u7a0b\u8bca\u65ad\/\u6821\u51c6<\/li>\n
- \u8bbe\u5b9a\u70b9\u914d\u7f6e<\/li>\n<\/ul>\n
\u56fa\u6001\u7ee7\u7535\u5668<\/strong>
\n3\u7ec4UL\/CSA\u8ba4\u8bc1\u89e6\u70b9\uff1a<\/p>\n- \n
- \u65e0\u7535\u5f27\/\u96f6EMI<\/li>\n
- \u5f00\u5173\u901f\u5ea6\u63d0\u534710\u500d<\/li>\n<\/ul>\n
\u517c\u5bb9\u6027\u8bbe\u8ba1<\/strong><\/p>\n
- \n
- \u5f15\u811a\/\u4fe1\u53f7\/\u534f\u8bae\u5168\u517c\u5bb9\u4f20\u7edf\u76ae\u62c9\u5c3c\u89c4<\/li>\n
- S4-Connect\u6280\u672f\u901a\u8fc7\u7535\u6e90\u7ebf\u5b9e\u73b0\u6570\u5b57\u901a\u4fe1<\/li>\n<\/ul>\n
\u5e94\u7528\u9886\u57df<\/strong>
\nPVD\u9540\u819c<\/a><\/strong>\uff1a\u5e26\u53ef\u7ef4\u62a4\u6321\u677f\u7684\u9540\u819c\u65b9\u6848
\n\u771f\u7a7a\u70ed\u5904\u7406<\/a><\/strong>\uff1a\u5de5\u4e1a\u7ea7\u7089\u538b\u63a7\u5236
\n\u7a7a\u95f4\u6a21\u62df<\/a><\/strong>\uff1a\u6781\u7aef\u73af\u5883\u538b\u529b\u76d1\u6d4b
\n\u6c22\u80fd\u7cfb\u7edf<\/strong>\uff1a\u50a8\u6c22\u7f50\u771f\u7a7a\u7edd\u7f18\u76d1\u6d4b
\n\u534a\u5bfc\u4f53<\/strong>\uff1aCVD\/PVD\u5de5\u827a\u63a7\u5236
\n\u8d28\u8c31\u4eea<\/strong>\uff1a\u4f4e\u6c14\u538b\u6d4b\u91cf\u652f\u6301<\/p>\n\u6d4b\u91cf\u8303\u56f4\uff08mbar\uff09<\/strong><\/h3>\n
- \n
- \n
1\u00d710\u207b\u2076 \u81f3 1333 mbar\uff087.5\u00d710\u207b\u2077 \u81f3 1000 Torr\uff09<\/p>\n<\/li>\n<\/ul>\n
\u6d4b\u91cf\u539f\u7406<\/strong><\/h3>\n
- \n
- \n
1\u00d710\u207b\u2076 \u81f3 1.5 mbar\uff1aMEMS \u76ae\u62c9\u5c3c\uff08Pirani\uff09\u70ed\u5bfc\u7387<\/p>\n<\/li>\n
- \n
1.5 \u81f3 2 mbar\uff1a\u6df7\u5408 MEMS \u76ae\u62c9\u5c3c\/\u538b\u963b\u5f0f\u8bfb\u6570<\/p>\n<\/li>\n
- \n
2 \u81f3 1333 mbar\uff1aMEMS \u538b\u963b\u5f0f\u9694\u819c<\/p>\n<\/li>\n<\/ul>\n
\u7cbe\u5ea6<\/strong><\/h3>\n
- \n
- \n
1\u00d710\u207b\u2075 \u81f3 9.99\u00d710\u207b\u2075 mbar\uff1a\u8bfb\u6570\u7684 25%<\/p>\n<\/li>\n
- \n
1\u00d710\u207b\u2074 \u81f3 7.99 mbar\uff1a\u8bfb\u6570\u7684 5%<\/p>\n<\/li>\n
- \n
8.00 \u81f3 99.9 mbar\uff1a\u8bfb\u6570\u7684 1%<\/p>\n<\/li>\n
- \n
100 \u81f3 800 mbar\uff1a\u8bfb\u6570\u7684 0.5%<\/p>\n<\/li>\n
- \n
800 \u81f3 1099 mbar\uff1a\u8bfb\u6570\u7684 0.25%<\/p>\n<\/li>\n
- \n
1100 \u81f3 1333 mbar\uff1a\u8bfb\u6570\u7684 0.5%<\/p>\n<\/li>\n<\/ul>\n
\u6ede\u540e\u6027<\/strong><\/h3>\n
- \n
- \n
1\u00d710\u207b\u00b3 \u81f3 10 mbar\uff08\u7b26\u5408 ISO 19685:2017\uff09\uff1a1%<\/p>\n<\/li>\n
- \n
10 \u81f3 1333 mbar\uff08\u7b26\u5408 ISO 19685:2017\uff09\uff1a0.1%<\/p>\n<\/li>\n<\/ul>\n
\u6a21\u62df\u8f93\u51fa<\/strong><\/h3>\n
- \n
- \n
**\u5206\u8fa8\u7387\uff1a**16 \u4f4d\uff08150 \u03bcV\uff09<\/p>\n<\/li>\n
- \n
**\u66f4\u65b0\u901f\u7387\uff1a**124 Hz<\/p>\n<\/li>\n<\/ul>\n
\u54cd\u5e94\u65f6\u95f4\uff08\u7b26\u5408 ISO 19685:2017\uff09<\/strong><\/h3>\n
- \n
- \n
<20 \u6beb\u79d2<\/p>\n<\/li>\n<\/ul>\n
\u6e29\u5ea6\u8865\u507f<\/strong><\/h3>\n
- \n
- \n
+10 \u81f3 +50 \u00b0C<\/p>\n<\/li>\n<\/ul>\n
\u56fa\u6001\u7ee7\u7535\u5668\u8bbe\u5b9a\u8303\u56f4<\/strong><\/h3>\n
- \n
- \n
5\u00d710\u207b\u2076 \u81f3 1333 mbar\uff083.75\u00d710\u207b\u2076 \u81f3 1000 Torr\uff09<\/p>\n<\/li>\n<\/ul>\n
\u56fa\u6001\u7ee7\u7535\u5668\u89e6\u70b9\u989d\u5b9a\u503c<\/strong><\/h3>\n
- \n
- \n
50 V\uff0c100 mArms \/ mADC<\/p>\n<\/li>\n<\/ul>\n
\u56fa\u6001\u7ee7\u7535\u5668\u8ba4\u8bc1<\/strong><\/h3>\n
- \n
- \n
UL \u8ba4\u8bc1\uff1a\u6587\u4ef6\u53f7 E76270<\/p>\n<\/li>\n
- \n
CSA \u8ba4\u8bc1\uff1a\u8bc1\u4e66\u53f7 1175739<\/p>\n<\/li>\n
- \n
EN\/IEC 60950-1 \u8ba4\u8bc1<\/p>\n<\/li>\n<\/ul>\n
\u73af\u5883\u6761\u4ef6<\/strong><\/h3>\n
- \n
- \n
\u5de5\u4f5c\u73af\u5883\u6e29\u5ea6\uff1a<\/strong>-20 \u81f3 +50 \u00b0C<\/p>\n<\/li>\n
- \n
\u4ecb\u8d28\u6e29\u5ea6\uff1a<\/strong>-20 \u81f3 +50 \u00b0C<\/p>\n<\/li>\n
- \n
\u5b58\u50a8\u73af\u5883\u6e29\u5ea6\uff1a<\/strong>-40 \u81f3 +120 \u00b0C<\/p>\n<\/li>\n
- \n
\u70d8\u70e4\u6e29\u5ea6\uff08\u975e\u5de5\u4f5c\u72b6\u6001\uff09\uff1a<\/strong>+120 \u00b0C<\/p>\n<\/li>\n
- \n
**\u6700\u5927\u4ecb\u8d28\u538b\u529b(3)\uff1a**10 bar \u7edd\u538b<\/p>\n<\/li>\n
- \n
**\u5b89\u88c5\u4f4d\u7f6e\uff1a**\u4efb\u610f<\/p>\n<\/li>\n
- \n
**\u9632\u62a4\u7b49\u7ea7\uff08\u7b26\u5408 EN 60529\/A2:2013\uff09\uff1a**IP40<\/p>\n<\/li>\n
- \n
**\u6e7f\u5ea6\uff08\u7b26\u5408 IEC 68-2-38\uff09\uff1a**98%\uff0c\u975e\u51b7\u51dd<\/p>\n<\/li>\n<\/ul>\n
\u7535\u6e90<\/strong><\/h3>\n
- \n
- \n
**\u4f9b\u7535\u7535\u538b\uff1a**12-30 VDC<\/p>\n<\/li>\n
- \n
**\u529f\u8017\uff1a**\u6700\u5927 240 mW<\/p>\n<\/li>\n
- \n
**\u53cd\u63a5\u4fdd\u62a4\uff1a**\u662f<\/p>\n<\/li>\n
- \n
**\u8fc7\u538b\u4fdd\u62a4\uff1a**\u662f<\/p>\n<\/li>\n
- \n
**\u5185\u90e8\u4fdd\u9669\u4e1d\uff1a**100 mA\uff08\u70ed\u6062\u590d\u578b\uff09<\/p>\n<\/li>\n<\/ul>\n
\u6750\u6599<\/strong><\/h3>\n
- \n
- \n
**\u5916\u58f3\uff1a**SS 1.4307 \/ AISI 304L \/ \u94dd 6061<\/p>\n<\/li>\n
- \n
**\u771f\u7a7a\u5de5\u827a\u6cd5\u5170\uff08\u63a5\u89e6\u4ecb\u8d28\uff09\uff1a**SS 1.4401 \/ AISI 316<\/p>\n<\/li>\n<\/ul>\n
\u63a5\u89e6\u4ecb\u8d28\u7684\u771f\u7a7a\u66b4\u9732\u6750\u6599\uff08\u6807\u51c6\u7248\u672c\uff09<\/strong><\/h4>\n
- \n
- \n
316 \u4e0d\u9508\u94a2\u3001Kovar\u3001\u73bb\u7483\u3001\u7845\u3001\u954d\u3001\u94dd\u3001SiO\u2082\u3001Si\u2083N\u2084\u3001\u91d1\u3001Viton\u00ae\u3001\u4f4e\u6790\u6c14\u73af\u6c27\u6811\u8102\u3001\u710a\u6599\u3001RO4305<\/p>\n<\/li>\n<\/ul>\n
\u63a5\u89e6\u4ecb\u8d28\u7684\u771f\u7a7a\u66b4\u9732\u6750\u6599\uff08Parylene \u4fdd\u62a4\u7248\u672c\uff09<\/strong><\/h4>\n
- \n
- \n
316 \u4e0d\u9508\u94a2\u3001Viton\u00ae\u3001Parylene<\/p>\n<\/li>\n<\/ul>\n
\u63a5\u89e6\u4ecb\u8d28\u7684\u771f\u7a7a\u66b4\u9732\u6750\u6599\uff08\u9676\u74f7\u4fdd\u62a4\u7248\u672c\uff09<\/strong><\/h4>\n
- \n
- \n
316 \u4e0d\u9508\u94a2\u3001Viton\u00ae\u3001\u6c27\u5316\u94dd\u9676\u74f7 (Al\u2082O\u2083)<\/p>\n<\/li>\n<\/ul>\n
\u5de5\u827a\u6cc4\u6f0f\u5bc6\u5c01\u6027<\/strong><\/h3>\n
- \n
- \n
<1\u00d710\u207b\u2079 mbar\u00b7l\/s<\/p>\n<\/li>\n<\/ul>\n
\u53ef\u9760\u6027<\/strong><\/h3>\n
- \n
- \n
**MTBF\uff08\u5e73\u5747\u65e0\u6545\u969c\u65f6\u95f4\uff09\uff1a**13,092,170 \u5c0f\u65f6<\/p>\n<\/li>\n
- \n
**\u6545\u969c\u7387\uff08FIT\uff0c\u65f6\u95f4=10E+9 \u5c0f\u65f6\uff09\uff1a**76.38<\/p>\n<\/li>\n<\/ul>\n
\u8ba4\u8bc1<\/strong><\/h3>\n
- \n
- \n
**CE\uff1a**\u7b26\u5408 EMC \u6307\u4ee4 2014\/30\/EU<\/p>\n<\/li>\n
- \n
**RoHS \u5408\u89c4\u6027\uff1a**\u7b26\u5408 EU \u6307\u4ee4 2015\/863<\/p>\n<\/li>\n<\/ul>\n
![\"SENS4,VPM-5,SmartPirani™,\u771f\u7a7a\u53d8\u9001\u5668,\u8d85\u5bbd\u91cf\u7a0b\u8010\u8150\u8680\u771f\u7a7a\u8ba1\"](\"https:\/\/www.bihec.com\/sens4-vacuum-pressure\/wp-content\/uploads\/sites\/1979\/2025\/03\/img_67e53b5667f42.png\")
SENS4,VPM-5,SmartPirani™,\u771f\u7a7a\u53d8\u9001\u5668,\u8d85\u5bbd\u91cf\u7a0b\u8010\u8150\u8680\u771f\u7a7a\u8ba1<\/a><\/figcaption><\/figure>\n https:\/\/www.bihec.com\/sens4-vacuum-pressure\/SENS4,VPM-5,SmartPirani™,\u771f\u7a7a\u53d8\u9001\u5668,\u8d85\u5bbd\u91cf\u7a0b\u8010\u8150\u8680\u771f\u7a7a\u8ba1<\/span>\/<\/a><\/span><\/p>\n
https:\/\/zhuanlan.zhihu.com\/p\/1888637202159878582<\/a><\/p>\n
SENS4<\/a>\nSENS4 VPM-5\u771f\u7a7a\u53d8\u9001\u5668<\/a>\nSENS4\u4e2d\u56fd\u4ee3\u7406<\/a>\nSENS4\u771f\u7a7a\u53d8\u9001\u5668<\/a>\nSENS4\u8d85\u5bbd\u91cf\u7a0b\u8010\u8150\u8680\u771f\u7a7a\u8ba1<\/a>\nSENS4\u8fdb\u53e3\u4ee3\u7406<\/a>\nSmartPirani\u2122<\/a>\nVPM-5<\/a>\n\u771f\u7a7a\u53d8\u9001\u5668<\/a>\n\u8d85\u5bbd\u91cf\u7a0b\u8010\u8150\u8680\u771f\u7a7a\u8ba1<\/a><\/div>","protected":false},"excerpt":{"rendered":"SENS4,VPM-5,SmartPirani™,\u771f\u7a7a\u53d8\u9001\u5668,\u8d85\u5bbd\u91cf\u7a0b\u8010\u8150\u8680\u771f\u7a7a\u8ba1,\u57fa\u4e8eMEMS\u4f20\u611f\u5668\u4e0e\u6570\u5b57\u4fe1\u53f7\u5904\u7406\u521b\u65b0\u67b6\u6784\uff0c\u5c06\u70ed\u5bfc\u5f0f\u771f\u7a7a\u89c4\u91cf\u7a0b\u6269\u5c551-3\u4e2a\u6570\u91cf\u7ea7\uff0c\u6d88 <\/p>\n","protected":false},"author":27,"featured_media":251,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[4,5],"tags":[6,43,16,11,44,15,41,40,8,42],"yoast_head":"\n
SENS4,VPM-5,SmartPirani\u2122,\u771f\u7a7a\u53d8\u9001\u5668,\u8d85\u5bbd\u91cf\u7a0b\u8010\u8150\u8680\u771f\u7a7a\u8ba1<\/title>\n<meta name=\"description\" content=\"SENS4,VPM-5,SmartPirani\u2122,\u771f\u7a7a\u53d8\u9001\u5668,\u8d85\u5bbd\u91cf\u7a0b\u8010\u8150\u8680\u771f\u7a7a\u8ba1,\u57fa\u4e8eMEMS\u4f20\u611f\u5668\u4e0e\u6570\u5b57\u4fe1\u53f7\u5904\u7406\u521b\u65b0\u67b6\u6784\uff0c\u5c06\u70ed\u5bfc\u5f0f\u771f\u7a7a\u89c4\u91cf\u7a0b\u6269\u5c551-3\u4e2a\u6570\u91cf\u7ea7\uff0c\u6d88\u9664\u4f20\u7edf\u76ae\u62c9\u5c3c\u89c4\u6c14\u4f53\u4f9d\u8d56\u6027\uff0c\u7cbe\u5ea6\u5ab2\u7f8e\u7535\u5bb9\u89c4\u3002\u6797\u7ecf\u740617717970703\uff08\u5fae\u4fe1\u540c\u53f7\uff09\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" 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