\nSpecifications<\/h4>\n<\/td>\n | <\/td>\n<\/tr>\n |
| Measuring range in mbar<\/td>\n | 0.1 to 1333 mbar (0.1 to 1000 Torr)<\/td>\n<\/tr>\n |
| Measuring principle<\/td>\n | Ceramic diaphragm piezo resistive<\/td>\n<\/tr>\n |
| Accuracy 100 to 1333 mbar<\/td>\n | 0.5% of reading<\/td>\n<\/tr>\n |
| Accuracy 1 to 99.9 mbar<\/td>\n | 0.05% of full scale (1333 mbar)<\/td>\n<\/tr>\n |
| Hysteresis 0.1\u00a0to 10 mbar (ISO19685:2017)<\/td>\n | 1%<\/td>\n<\/tr>\n |
| Hysteresis 10 to 1200 mbar (ISO19685:2017)<\/td>\n | 0.1%<\/td>\n<\/tr>\n |
| Analog output resolution<\/td>\n | 16 bit (150 \u03bcV)<\/td>\n<\/tr>\n |
| Analog output update rate<\/td>\n | 560 Hz<\/td>\n<\/tr>\n |
| Response time (ISO 19685:2017)<\/td>\n | <20 ms<\/td>\n<\/tr>\n |
| Temperature compensation<\/td>\n | +10 to +50 \u00b0C<\/td>\n<\/tr>\n |
| Solid state relay set point range<\/td>\n | 1 to 1333 mbar (0.75 to 1000 Torr)<\/td>\n<\/tr>\n |
| Solid state relay contact rating<\/td>\n | 50 V, 100 mArms \/ mADC<\/td>\n<\/tr>\n |
| Solid state relay approvals<\/td>\n | UL Recognized: File E76270<\/p>\n CSA\u00a0Certified: Certificate 1175739<\/p>\n EN\/IEC 60950-1 Certified<\/td>\n<\/tr>\n |
| Environment conditions<\/strong><\/td>\n | <\/td>\n<\/tr>\n |
| Operating ambient temperature<\/td>\n | -20 to +50 \u00b0C<\/td>\n<\/tr>\n |
| Media temperature<\/td>\n | -20 to +50 \u00b0C<\/td>\n<\/tr>\n |
| Storage ambient temperature<\/td>\n | -40 to +80 \u00b0C<\/td>\n<\/tr>\n |
| Bake-out temperature (non-operating)<\/td>\n | +80 \u00b0C<\/td>\n<\/tr>\n |
| Maximum media pressure(3)<\/td>\n | 2 bar absolute (29 psia)<\/td>\n<\/tr>\n |
| Burst pressure(4)<\/td>\n | 4 bar absolute (58 psia)<\/td>\n<\/tr>\n |
| Mounting position<\/td>\n | Arbitrary<\/td>\n<\/tr>\n |
| Protection rating, EN 60529\/A2:2013<\/td>\n | IP40<\/td>\n<\/tr>\n |
| Humidity, IEC 68-2-38<\/td>\n | 98%, non-condensing<\/td>\n<\/tr>\n |
| Power supply<\/strong><\/td>\n | <\/td>\n<\/tr>\n |
| Supply voltage<\/td>\n | 12-30 VDC<\/td>\n<\/tr>\n |
| Power consumption<\/td>\n | 240 mW (max)<\/td>\n<\/tr>\n |
| Reverse polarity protection<\/td>\n | Yes<\/td>\n<\/tr>\n |
| Overvoltage protection<\/td>\n | Yes<\/td>\n<\/tr>\n |
| Internal fuse<\/td>\n | 100 mA (thermal recoverable)<\/td>\n<\/tr>\n |
| Materials<\/strong><\/td>\n | <\/td>\n<\/tr>\n |
| Enclosure<\/td>\n | SS 1.4307 \/ AISI 304L \/ Aluminum 6061<\/td>\n<\/tr>\n |
| Vacuum Process flange (media wetted)<\/td>\n | SS 1.4401 \/ AISI 316<\/td>\n<\/tr>\n |
| Vacuum exposed materials (media wetted) Standard version<\/td>\n | 316 Stainless steel, Viton\u00ae, Aluminum oxide ceramic (AI2O3)<\/td>\n<\/tr>\n |
| Vacuum exposed materials (media wetted) Parylene protected version<\/td>\n | 316 Stainless steel, Viton\u00ae, Parylene<\/td>\n<\/tr>\n |
| Process leak tightness<\/td>\n | <1\u00b710-9 mbar\u00b7l\/s<\/td>\n<\/tr>\n |
| Approvals<\/strong><\/td>\n | <\/td>\n<\/tr>\n |
| CE<\/td>\n | EMC directive 2014\/30\/EU<\/td>\n<\/tr>\n |
| RoHS compliance<\/td>\n | Directive EU 2015\/863<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
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