{"id":989,"date":"2024-11-30T16:27:22","date_gmt":"2024-11-30T08:27:22","guid":{"rendered":"https:\/\/www.bihec.com\/thermionics\/?p=989"},"modified":"2024-11-30T16:27:22","modified_gmt":"2024-11-30T08:27:22","slug":"%e7%be%8e%e5%9b%bdthermionics-hcr-series-rotary-e-gun-evaporation-source-series-hcr-%e7%b3%bb%e5%88%97%e7%9c%9f%e7%a9%ba%e9%95%80%e8%86%9c%e7%94%b5%e5%ad%90%e6%9e%aa","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/thermionics\/%e7%be%8e%e5%9b%bdthermionics-hcr-series-rotary-e-gun-evaporation-source-series-hcr-%e7%b3%bb%e5%88%97%e7%9c%9f%e7%a9%ba%e9%95%80%e8%86%9c%e7%94%b5%e5%ad%90%e6%9e%aa\/","title":{"rendered":"\u7f8e\u56fdThermionics HCR Series Rotary e-Gun™ Evaporation Source Series: HCR \u7cfb\u5217\u771f\u7a7a\u9540\u819c\u7535\u5b50\u67aa"},"content":{"rendered":"

\"\"<\/p>\n

Evaporation Source Series: HCR Rotary e-Gun™<\/h3>\n

The HCR series Rotary e-Gun™ is available in 3 to 8 crucible versions allowing sequential deposition of up to 8 plus materials. Standard mounting is on a 12\u2033 O.D. CF flange and includes auto indexer and all mechanical and electrical connections.<\/p>\n

\u7279\u6027
\n\u53ef\u63d0\u4f9b3\u81f38\u4e2a\u5769\u57da
\n270\u00b0\u5149\u675f\u504f\u8f6c
\n\u591a\u5769\u57da<\/a>\uff0c\u65cb\u8f6c\u8bbe\u8ba1
\n\u53ef\u4e92\u6362\u5769\u57da\u7ec4\u4ef6
\n\u957f\u5bff\u547d\u53d1\u5c04\u5668\u7ec4\u4ef6
\n\u6613\u4e8e\u66f4\u6362\u706f\u4e1d
\n\u6c38\u78c1\u6881\u5b9a\u4f4d
\n\u6574\u4f53\u5f0f\u626b\u63a0\u7ebf\u5708
\n\u63d0\u4f9b\u5e95\u90e8\u6216\u4fa7\u9762\u9a71\u52a8<\/p>\n

Specifications<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Feature<\/td>\nSpecifications<\/td>\n<\/tr>\n
Maximum Power<\/td>\n10 kW<\/td>\n<\/tr>\n
Emission Voltage<\/td>\n-6 to -10 kV<\/td>\n<\/tr>\n
Emission Current<\/td>\n0 to 1 A<\/td>\n<\/tr>\n
Filament<\/td>\n700 W<\/td>\n<\/tr>\n
E-Beam Deflection<\/td>\n270\u00b0<\/td>\n<\/tr>\n
Beam Spot Size<\/td>\n.25\u2033 diameter, tight beam<\/td>\n<\/tr>\n
Evaporation Rate<\/td>\n1 gram\/min @ 10 kW
\n36,000 \u00c5\/min Al @ 10\u2033 (250 mm) source-to-substrate distance<\/td>\n<\/tr>\n
X and Y Sweep<\/td>\nLongitudinal and lateral control up to 200 Hz when operated with Thermionics sweep controller<\/td>\n<\/tr>\n
Water<\/td>\n3 gpm, 20\u00b0C, 50 psi pressure differential<\/td>\n<\/tr>\n
Crucible Material<\/td>\nOFE copper<\/td>\n<\/tr>\n
Bakeout Temperature<\/td>\n120\u00b0C (250\u00b0F)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u5b89\u88c5\u914d\u7f6e
\n\u6bcf\u4e2ae-Gun™\u90fd\u6709\u4e09\u79cd\u6807\u51c6\u5b89\u88c5\u914d\u7f6e\uff1a
\ne-Gun™\u5b89\u88c5\u5728PyraFlat\u6216ConFlat\u91d1\u5c5e\u5bc6\u5c01\u578b\u6cd5\u5170<\/a>\u4e0a\uff0c\u8be5\u6cd5\u5170\u4f7f\u7528\u6807\u51c6OFE\u94dc\u57ab\u7247
\ne-Gun™\u914d\u5907\u76f4\u5f84\u4e3a1\u82f1\u5bf8\u7684\u87ba\u6813\u5f0f\u5b89\u88c5\u5ea7\uff0c\u901a\u8fc7\u76f4\u5f84\u4e3a1\u201d\u7684\u5b54\u5b89\u88c5\uff0c\u5e76\u7531\u538b\u7f29O\u578b\u5708\u5bc6\u5c01
\ne-Gun™\u5355\u72ec\u4f7f\u7528\uff0c\u65e0\u5b89\u88c5\u6cd5\u5170
\n\u8bf7\u5728\u4e0b\u5355\u65f6\u6307\u5b9a\u5b89\u88c5\u914d\u7f6e\uff1b\u6210\u672c\u53ef\u80fd\u4e0d\u5305\u62ec\u87ba\u6813\u5f0f\u6216\u6cd5\u5170\u5f0f\u5b89\u88c5\u3002<\/p>\n

3 kW<\/a>\n3 kW e-Gun\u2122\u7535\u6e90<\/a>\n3kW\u7535\u5b50\u67aa<\/a>\nDE-14 coating system \u771f\u7a7a\u9540\u819c\u7cfb\u7edf<\/a>\nthermionics<\/a>\nThermionics Northwest<\/a>\n\u591a\u5769\u57da\u65cb\u8f6c\u7535\u5b50\u67aa<\/a>\n\u591a\u5769\u57da\u7535\u5b50\u67aa<\/a>\n\u7535\u5b50\u67aaTM<\/a>\n\u771f\u7a7a\u9540\u819c<\/a>\n\u7d27\u51d1\u578b\u7535\u5b50\u67aa<\/a>\n\u7ebf\u6027\u7535\u5b50\u67aa<\/a>\n\u7f8e\u56fdThermionics<\/a><\/div>","protected":false},"excerpt":{"rendered":"

Evaporation Source Series: HCR Rotary e-Gun™ The HCR series Rotary e-Gun™ is <\/p>\n","protected":false},"author":19,"featured_media":990,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[3,7],"tags":[41,56,44,36,17,27,49,48,187,39,55,45,57],"yoast_head":"\n\u7f8e\u56fdThermionics HCR Series Rotary e-Gun™ Evaporation Source Series: HCR \u7cfb\u5217\u771f\u7a7a\u9540\u819c\u7535\u5b50\u67aa - Thermionics \u9ad8\u771f\u7a7a\u6cf5 \u673a\u68b0\u81c2 \u673a\u68b0\u5f15\u7ebf \u7535\u5b50\u67aa \u771f\u7a7a\u9540\u819c\u7cfb\u7edf<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.bihec.com\/thermionics\/\u7f8e\u56fdthermionics-hcr-series-rotary-e-gun-evaporation-source-series-hcr-\u7cfb\u5217\u771f\u7a7a\u9540\u819c\u7535\u5b50\u67aa\/\" \/>\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u7f8e\u56fdThermionics HCR Series Rotary e-Gun™ Evaporation Source Series: HCR \u7cfb\u5217\u771f\u7a7a\u9540\u819c\u7535\u5b50\u67aa - Thermionics \u9ad8\u771f\u7a7a\u6cf5 \u673a\u68b0\u81c2 \u673a\u68b0\u5f15\u7ebf \u7535\u5b50\u67aa \u771f\u7a7a\u9540\u819c\u7cfb\u7edf\" \/>\n<meta property=\"og:description\" content=\"Evaporation Source Series: HCR Rotary e-Gun™ The HCR series Rotary e-Gun™ is\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.bihec.com\/thermionics\/\u7f8e\u56fdthermionics-hcr-series-rotary-e-gun-evaporation-source-series-hcr-\u7cfb\u5217\u771f\u7a7a\u9540\u819c\u7535\u5b50\u67aa\/\" \/>\n<meta property=\"og:site_name\" content=\"Thermionics \u9ad8\u771f\u7a7a\u6cf5 \u673a\u68b0\u81c2 \u673a\u68b0\u5f15\u7ebf \u7535\u5b50\u67aa \u771f\u7a7a\u9540\u819c\u7cfb\u7edf\" \/>\n<meta property=\"article:published_time\" content=\"2024-11-30T08:27:22+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.bihec.com\/thermionics\/wp-content\/uploads\/sites\/11\/2024\/11\/img_674acbd65df3e.png\" \/>\n\t<meta property=\"og:image:width\" content=\"1390\" \/>\n\t<meta property=\"og:image:height\" content=\"1043\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"\u4f5c\u8005\" \/>\n\t<meta name=\"twitter:data1\" content=\"1010 \u7535\u8bdd\uff1a15821107090\" \/>\n\t<meta name=\"twitter:label2\" content=\"\u9884\u8ba1\u9605\u8bfb\u65f6\u95f4\" \/>\n\t<meta name=\"twitter:data2\" content=\"1\u5206\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.bihec.com\/thermionics\/#website\",\"url\":\"https:\/\/www.bihec.com\/thermionics\/\",\"name\":\"Thermionics \\u9ad8\\u771f\\u7a7a\\u6cf5 \\u673a\\u68b0\\u81c2 \\u673a\\u68b0\\u5f15\\u7ebf \\u7535\\u5b50\\u67aa \\u771f\\u7a7a\\u9540\\u819c\\u7cfb\\u7edf\",\"description\":\"\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.bihec.com\/thermionics\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"zh-CN\"},{\"@type\":\"ImageObject\",\"@id\":\"https:\/\/www.bihec.com\/thermionics\/%e7%be%8e%e5%9b%bdthermionics-hcr-series-rotary-e-gun-evaporation-source-series-hcr-%e7%b3%bb%e5%88%97%e7%9c%9f%e7%a9%ba%e9%95%80%e8%86%9c%e7%94%b5%e5%ad%90%e6%9e%aa\/#primaryimage\",\"inLanguage\":\"zh-CN\",\"url\":\"https:\/\/www.bihec.com\/thermionics\/wp-content\/uploads\/sites\/11\/2024\/11\/img_674acbd65df3e.png\",\"contentUrl\":\"https:\/\/www.bihec.com\/thermionics\/wp-content\/uploads\/sites\/11\/2024\/11\/img_674acbd65df3e.png\",\"width\":1390,\"height\":1043},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.bihec.com\/thermionics\/%e7%be%8e%e5%9b%bdthermionics-hcr-series-rotary-e-gun-evaporation-source-series-hcr-%e7%b3%bb%e5%88%97%e7%9c%9f%e7%a9%ba%e9%95%80%e8%86%9c%e7%94%b5%e5%ad%90%e6%9e%aa\/#webpage\",\"url\":\"https:\/\/www.bihec.com\/thermionics\/%e7%be%8e%e5%9b%bdthermionics-hcr-series-rotary-e-gun-evaporation-source-series-hcr-%e7%b3%bb%e5%88%97%e7%9c%9f%e7%a9%ba%e9%95%80%e8%86%9c%e7%94%b5%e5%ad%90%e6%9e%aa\/\",\"name\":\"\\u7f8e\\u56fdThermionics HCR Series Rotary e-Gun™ Evaporation Source Series: HCR \\u7cfb\\u5217\\u771f\\u7a7a\\u9540\\u819c\\u7535\\u5b50\\u67aa - 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