{"id":37,"count":1,"description":"","link":"https:\/\/www.bihec.com\/vacuum-technology\/tag\/vslt-%e5%8f%af%e5%8f%98%e5%97%85%e6%8e%a2%e5%99%a8%e6%b3%84%e6%bc%8f%e7%89%b9%e6%b0%9f%e9%be%99\/","name":"VSLT\u2013\u53ef\u53d8\u55c5\u63a2\u5668\u6cc4\u6f0f\u7279\u6c1f\u9f99","slug":"vslt-%e5%8f%af%e5%8f%98%e5%97%85%e6%8e%a2%e5%99%a8%e6%b3%84%e6%bc%8f%e7%89%b9%e6%b0%9f%e9%be%99","taxonomy":"post_tag","meta":[],"yoast_head":"\n