{"id":247,"date":"2025-03-21T14:56:39","date_gmt":"2025-03-21T06:56:39","guid":{"rendered":"https:\/\/www.bihec.com\/waferpro-wafers\/?p=247"},"modified":"2025-03-21T14:56:39","modified_gmt":"2025-03-21T06:56:39","slug":"waferpro%e7%86%94%e8%9e%8d%e7%9f%b3%e8%8b%b1%e6%99%b6%e5%9c%86%e7%b4%ab%e5%a4%96%e7%ba%a7%e7%86%94%e8%9e%8d%e7%9f%b3%e8%8b%b1%e5%85%89%e5%ad%a6%e7%ba%a7%e7%86%94%e8%9e%8d%e7%9f%b3%e8%8b%b1","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/waferpro-wafers\/waferpro%e7%86%94%e8%9e%8d%e7%9f%b3%e8%8b%b1%e6%99%b6%e5%9c%86%e7%b4%ab%e5%a4%96%e7%ba%a7%e7%86%94%e8%9e%8d%e7%9f%b3%e8%8b%b1%e5%85%89%e5%ad%a6%e7%ba%a7%e7%86%94%e8%9e%8d%e7%9f%b3%e8%8b%b1\/","title":{"rendered":"WaferPro,\u7194\u878d\u77f3\u82f1\u6676\u5706,\u7d2b\u5916\u7ea7\u7194\u878d\u77f3\u82f1,\u5149\u5b66\u7ea7\u7194\u878d\u77f3\u82f1,\u5168\u5149\u8c31\u7194\u878d\u77f3\u82f1"},"content":{"rendered":"

WaferPro<\/a>,\u7194\u878d\u77f3\u82f1\u6676\u5706<\/a>,\u7d2b\u5916\u7ea7\u7194\u878d\u77f3\u82f1<\/a>,\u5149\u5b66\u7ea7\u7194\u878d\u77f3\u82f1<\/a>,\u5168\u5149\u8c31\u7194\u878d\u77f3\u82f1<\/a>,\u201c\u7194\u878d\u77f3\u82f1\u201d\u6216\u201c\u7194\u878d\u7845\u77f3\u201d\u662f\u77f3\u82f1\uff08SiO\u2082\uff09\u7684\u975e\u6676\u6001\u5f62\u5f0f\u3002\u4e0e\u787c\u7845\u9178\u76d0\u73bb\u7483\u76f8\u6bd4\uff0c\u7194\u878d\u77f3\u82f1\u4e0d\u542b\u4efb\u4f55\u6dfb\u52a0\u5242\uff0c\u56e0\u6b64\u4ee5\u7eaf\u51c0\u7684 SiO\u2082 \u5f62\u5f0f\u5b58\u5728\u3002\u4e0e\u666e\u901a\u73bb\u7483\u76f8\u6bd4\uff0c\u7194\u878d\u77f3\u82f1\u5728\u7ea2\u5916\u548c\u7d2b\u5916\u5149\u8c31\u8303\u56f4\u5185\u5177\u6709\u66f4\u9ad8\u7684\u900f\u5c04\u7387\u3002<\/p>\n

\u7194\u878d\u77f3\u82f1\u6676\u5706<\/strong><\/h3>\n

\u201c\u7194\u878d\u77f3\u82f1\u201d\u6216\u201c\u7194\u878d\u7845\u77f3\u201d\u662f\u77f3\u82f1\uff08SiO\u2082\uff09\u7684\u975e\u6676\u6001\u5f62\u5f0f\u3002\u4e0e\u787c\u7845\u9178\u76d0\u73bb\u7483\u76f8\u6bd4\uff0c\u7194\u878d\u77f3\u82f1\u4e0d\u542b\u4efb\u4f55\u6dfb\u52a0\u5242\uff0c\u56e0\u6b64\u4ee5\u7eaf\u51c0\u7684 SiO\u2082 \u5f62\u5f0f\u5b58\u5728\u3002\u4e0e\u666e\u901a\u73bb\u7483\u76f8\u6bd4\uff0c\u7194\u878d\u77f3\u82f1\u5728\u7ea2\u5916\u548c\u7d2b\u5916\u5149\u8c31\u8303\u56f4\u5185\u5177\u6709\u66f4\u9ad8\u7684\u900f\u5c04\u7387\u3002\u7194\u878d\u77f3\u82f1\u662f\u901a\u8fc7\u7194\u5316\u548c\u518d\u56fa\u5316\u8d85\u7eaf SiO\u2082 \u5236\u6210\u7684\u3002\u800c\u5408\u6210\u7194\u878d\u77f3\u82f1\u5219\u662f\u901a\u8fc7\u7845\u542b\u91cf\u4e30\u5bcc\u7684\u5316\u5b66\u524d\u9a71\u4f53\uff08\u5982 SiCl\u2084\uff09\u5728 H\u2082 + O\u2082 \u6c14\u6c1b\u4e2d\u6c14\u5316\u5e76\u6c27\u5316\u5236\u6210\u7684\u3002\u5728\u6b64\u8fc7\u7a0b\u4e2d\u5f62\u6210\u7684 SiO\u2082 \u7c89\u5c18\u4f1a\u5728\u57fa\u5e95\u4e0a\u7194\u5408\u6210\u77f3\u82f1\u3002\u7194\u878d\u77f3\u82f1\u5757\u88ab\u5207\u5272\u6210\u6676\u5706\u540e\uff0c\u6700\u7ec8\u8fdb\u884c\u629b\u5149\u3002<\/p>\n

\u7194\u878d\u77f3\u82f1\u6676\u5706\u7684\u7c7b\u578b<\/strong><\/h3>\n

WaferPro<\/strong>\u00a0\u63d0\u4f9b\u7531\u4ee5\u4e0b\u57fa\u5e95\u6750\u6599\u5236\u6210\u7684\u9ad8\u8d28\u91cf\u7194\u878d\u77f3\u82f1\u73bb\u7483\u6676\u5706\uff1a<\/p>\n

    \n
  1. \u7d2b\u5916\u7ea7\u7194\u878d\u77f3\u82f1 \u2013 JGS1<\/strong>
    \n\u7d2b\u5916\u7ea7\u7194\u878d\u77f3\u82f1\u6676\u5706\u5728\u7d2b\u5916\u5149\u8c31\u8303\u56f4\u5185\u5177\u6709\u9ad8\u900f\u660e\u5ea6\u3002\u5728\u53ef\u89c1\u5149\uff08VIS\uff09\u548c\u7d2b\u5916\u5149\uff08UV\uff09\u8303\u56f4\u5185\u7684\u900f\u5c04\u7387\u7ea6\u4e3a 90%\uff0c\u4ec5\u5728 220 \u81f3 150 nm \u4e4b\u95f4\u56e0\u53cd\u5c04\u635f\u5931\u800c\u964d\u81f3 0%\u3002\u5728\u7ea2\u5916\u8303\u56f4\u5185\uff0c\u901a\u5e38\u8f83\u9ad8\u7684 OH \u6d53\u5ea6\uff08\u7ea6 1000 ppm\uff09\u4f1a\u5bfc\u81f4\u6ce2\u957f > 1.2 \u03bcm \u7684\u5438\u6536\u5e26\u3002<\/li>\n
  2. \u5149\u5b66\u7ea7\u7194\u878d\u77f3\u82f1 \u2013 JGS2<\/strong>
    \n\u4e0e JGS1 \u6676\u5706\u76f8\u6bd4\uff0c\u4ef7\u683c\u663e\u8457\u8f83\u4f4e\u7684 JGS2 \u6676\u5706\u7684\u900f\u5c04\u8303\u56f4\u5411\u957f\u6ce2\u957f\u65b9\u5411\u504f\u79fb\u3002\u5728\u8fd9\u79cd\u60c5\u51b5\u4e0b\uff0c\u7d2b\u5916\u5438\u6536\u5f00\u59cb\u4e8e\u7ea6 270 nm \u6ce2\u957f\u4ee5\u4e0b\uff0c\u800c\u5728\u53ef\u89c1\u5149\u548c\u7ea2\u5916\u8303\u56f4\u5185\uff0c\u7531\u4e8e\u8f83\u4f4e\u7684 OH \u6d53\u5ea6\uff08\u901a\u5e38 < 300 ppm\uff09\uff0c\u900f\u5c04\u7387\u5728\u7ea6 2 \u03bcm \u6ce2\u957f\u5185\u4fdd\u6301\u5728\u7ea6 90%\u3002<\/li>\n
  3. \u5168\u5149\u8c31\u7194\u878d\u77f3\u82f1 \u2013 JGS3<\/strong>
    \n\u8fd9\u4e9b\u6676\u5706\u76f8\u5bf9\u66f4\u6602\u8d35\u3002\u5b83\u4eec\u5177\u6709\u6781\u4f4e\u7684 OH \u542b\u91cf\uff08\u901a\u5e38 < 10 ppm\uff09\uff0c\u5728\u7ea6 200 nm \u2013 3 \u03bcm \u7684\u5bbd\u5149\u8c31\u8303\u56f4\u5185\u8868\u73b0\u51fa > 80% \u7684\u9ad8\u900f\u660e\u5ea6\uff0c\u5728 250 \u2013 2.5 \u03bcm \u6ce2\u957f\u8303\u56f4\u5185\u7684\u900f\u5c04\u7387\u7ea6\u4e3a 90%\u3002<\/li>\n<\/ol>\n

    \u7194\u878d\u77f3\u82f1\u6676\u5706\u7684\u4e3b\u8981\u5e94\u7528<\/h3>\n

    \u5149\u63a9\u6a21<\/strong><\/h4>\n

    \u7194\u878d\u77f3\u82f1\u6676\u5706\u7528\u4e8e\u5236\u9020\u5149\u63a9\u6a21\uff0c\u5177\u6709\u9ad8\u5149\u5b66\u900f\u660e\u5ea6\uff0c\u9002\u7528\u4e8e\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u7684\u5149\u523b\u5de5\u827a\u3002<\/p>\n

    \u5149\u5b66<\/strong><\/h4>\n

    \u7194\u878d\u77f3\u82f1\u7528\u4e8e\u5236\u9020\u9ad8\u7cbe\u5ea6\u5149\u5b66\u5143\u4ef6\uff0c\u5982\u900f\u955c\u3001\u68f1\u955c\u3001\u6ee4\u5149\u7247\u3001\u975e\u7403\u9762\u955c\u548c\u884d\u5c04\u5143\u4ef6\u3002<\/p>\n

    \u5149\u7ea4<\/strong><\/h4>\n

    \u7194\u878d\u77f3\u82f1\u662f\u5236\u9020\u5149\u7ea4\u7684\u4e3b\u8981\u6750\u6599\u3002<\/p>\n

    MEMS\u4e0e\u4f20\u611f\u5668<\/strong><\/h4>\n

    \u7194\u878d\u77f3\u82f1\u6676\u5706\u4f5c\u4e3a\u57fa\u5e95\u6750\u6599\u7528\u4e8e\u5236\u9020MEMS\u5668\u4ef6\uff08\u5982\u52a0\u901f\u5ea6\u8ba1\uff09\u3001\u5149\u5b66\u4f20\u611f\u5668\u548c\u751f\u7269\u4f20\u611f\u5668\u3002<\/p>\n

    \u5149\u5b50\u5b66<\/strong><\/h4>\n

    \u7279\u79cd\u7194\u878d\u77f3\u82f1\u6676\u5706\u5177\u6709\u4e25\u683c\u89c4\u683c\uff0c\u53ef\u7528\u4e8e\u5236\u9020\u5149\u5b50\u5668\u4ef6\uff0c\u5982\u6ce2\u5bfc\u548c\u96c6\u6210\u5149\u5b66\u7535\u8def\u3002<\/p>\n

    \u534a\u5bfc\u4f53\u627f\u8f7d\/\u4eff\u771f\u6676\u5706<\/strong><\/h4>\n

    \u8d85\u5149\u6ed1\u7684\u7194\u878d\u77f3\u82f1\u6676\u5706\u53ef\u4f5c\u4e3a\u627f\u8f7d\u6676\u5706\uff0c\u652f\u6301\u5668\u4ef6\u6676\u5706\u5728\u80cc\u9762\u7814\u78e8\u8fc7\u7a0b\u4e2d\u4f7f\u7528\uff0c\u4e5f\u53ef\u4f5c\u4e3a\u5de5\u827a\u8bbe\u5907\u4e2d\u7684\u4eff\u771f\u6676\u5706\u3002<\/p>\n

    \u9ad8\u53ef\u9760\u6027\u7535\u5b50\u4ea7\u54c1<\/strong><\/h4>\n

    \u7194\u878d\u77f3\u82f1\u5177\u6709\u4f18\u5f02\u7684\u7edd\u7f18\u6027\u548c\u51fa\u8272\u7684\u70ed\/\u673a\u68b0\u7a33\u5b9a\u6027\uff0c\u9002\u7528\u4e8e\u822a\u7a7a\u822a\u5929\u548c\u56fd\u9632\u7cfb\u7edf\u3002<\/p>\n

    \u533b\u7597\u5668\u68b0<\/strong><\/h4>\n

    \u5fae\u578b\u5149\u5b66\u548c\u5fae\u6d41\u63a7\u7cfb\u7edf\u5229\u7528\u7194\u878d\u77f3\u82f1\uff0c\u53ef\u7528\u4e8e\u82af\u7247\u5b9e\u9a8c\u5ba4\u533b\u7597\u8bca\u65ad\u8bbe\u5907\u3002<\/p>\n

    \u6fc0\u5149\u6280\u672f<\/strong><\/h4>\n

    \u7194\u878d\u77f3\u82f1\u5177\u6709\u9ad8\u6fc0\u5149\u635f\u4f24\u9608\u503c\uff0c\u9002\u7528\u4e8e\u8d85\u5feb\u6fc0\u5149\u7cfb\u7edf\u3002<\/p>\n

    \u6211\u4eec\u7684\u52a0\u5de5\u80fd\u529b<\/strong><\/h3>\n
    \n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
    \u5c3a\u5bf8<\/th>\n\u82f1\u5bf8<\/th>\n2″<\/th>\n3″<\/th>\n4″<\/th>\n6″<\/th>\n8″<\/th>\n10″<\/th>\n12″<\/th>\n<\/tr>\n<\/thead>\n
    \u76f4\u5f84<\/td>\nmm<\/td>\n50.8<\/td>\n76.2<\/td>\n100<\/td>\n150<\/td>\n200<\/td>\n250<\/td>\n300<\/td>\n<\/tr>\n
    \u516c\u5dee (\u00b1)<\/td>\nmm<\/td>\n0.2<\/td>\n0.2<\/td>\n0.2<\/td>\n0.2<\/td>\n0.2<\/td>\n0.2<\/td>\n0.2<\/td>\n<\/tr>\n
    \u539a\u5ea6<\/td>\n\u00b5m<\/td>\n\u2265100<\/td>\n\u2265100<\/td>\n\u2265100<\/td>\n\u2265300<\/td>\n\u2265400<\/td>\n\u2265500<\/td>\n\u2265500<\/td>\n<\/tr>\n
    \u57fa\u51c6\u5e73\u8fb9<\/td>\nmm<\/td>\n32.5<\/td>\n32.5<\/td>\n32.5<\/td>\n57.5<\/td>\n\u534a\u5207\u53e3<\/td>\n\u534a\u5207\u53e3<\/td>\n\u534a\u5207\u53e3<\/td>\n<\/tr>\n
    LTV (5mm\u00d75mm)<\/td>\n\u00b5m<\/td>\n< 0.5<\/td>\n< 0.5<\/td>\n< 0.5<\/td>\n< 0.5<\/td>\n< 0.5<\/td>\n< 0.5<\/td>\n< 0.5<\/td>\n<\/tr>\n
    TTV<\/td>\n\u00b5m<\/td>\n< 2<\/td>\n< 2<\/td>\n< 2<\/td>\n< 3<\/td>\n< 3<\/td>\n< 5<\/td>\n< 5<\/td>\n<\/tr>\n
    \u5f2f\u66f2\u5ea6<\/td>\n\u00b5m<\/td>\n\u00b120<\/td>\n\u00b120<\/td>\n\u00b120<\/td>\n\u00b130<\/td>\n\u00b140<\/td>\n\u00b140<\/td>\n\u00b140<\/td>\n<\/tr>\n
    \u7fd8\u66f2\u5ea6<\/td>\n\u00b5m<\/td>\n\u226430<\/td>\n\u226430<\/td>\n\u226430<\/td>\n\u226440<\/td>\n\u226450<\/td>\n\u226450<\/td>\n\u226450<\/td>\n<\/tr>\n
    PLTV (5mm\u00d75mm) <0.4\u00b5m<\/td>\n%<\/td>\n\u226595%<\/td>\n\u226595%<\/td>\n\u226595%<\/td>\n\u226595%<\/td>\n\u226595%<\/td>\n\u226595%<\/td>\n\u226595%<\/td>\n<\/tr>\n
    \u8fb9\u7f18\u5706\u89d2<\/td>\nmm<\/td>\nSEMI \u6807\u51c6<\/td>\nSEMI \u6807\u51c6<\/td>\nSEMI \u6807\u51c6<\/td>\nSEMI \u6807\u51c6<\/td>\nSEMI \u6807\u51c6<\/td>\nSEMI \u6807\u51c6<\/td>\nSEMI \u6807\u51c6<\/td>\n<\/tr>\n
    \u8868\u9762\u7c7b\u578b<\/td>\n<\/td>\nSSP\/DSP<\/td>\nSSP\/DSP<\/td>\nSSP\/DSP<\/td>\nSSP\/DSP<\/td>\nSSP\/DSP<\/td>\nSSP\/DSP<\/td>\nSSP\/DSP<\/td>\n<\/tr>\n
    \u8868\u9762\u7c97\u7cd9\u5ea6<\/td>\nnm<\/td>\n\u22641<\/td>\n\u22641<\/td>\n\u22641<\/td>\n\u22641<\/td>\n\u22641<\/td>\n\u22641<\/td>\n\u22641<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n

    \u6211\u4eec\u7684\u7545\u9500\u4ea7\u54c1<\/strong><\/h3>\n

    \"\"<\/p>\n

    \"\"<\/p>\n

     <\/p>\n

    \"\"<\/p>\n

     <\/p>\n

    https:\/\/www.bihec.com\/waferpro-wafers\/WaferPro,\u7194\u878d\u77f3\u82f1\u6676\u5706,\u7d2b\u5916\u7ea7\u7194\u878d\u77f3\u82f1,\u5149\u5b66\u7ea7\u7194\u878d\u77f3\u82f1,\u5168\u5149\u8c31\u7194\u878d\u77f3\u82f1<\/span>\/<\/a><\/span><\/p>\n

    https:\/\/zhuanlan.zhihu.com\/p\/1886389327690449363<\/a><\/p>\n

     <\/p>\n

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