超高純度 (UHP) VCR型壓力調節器
DRA100系列是一種超高純度低壓調節器,表面光潔度為B.A. 25Ra、E.P. 10Ra或E.P. 5Ra,適用于高純度半導體制造、特種氣體和大宗氣體管線等設施。進口壓力為3000psig (210bar) 或600psig (42bar),出口壓力范圍為5psig (0.3bar) 至250psig (17bar)。
- 適配1/4”、3/8”、1/2”、和3/4” VCR類型接頭
- 非連接式隔膜設計
- 表面光潔度可達B.A. 25Ra、E.P. 10Ra或E.P. 5Ra微英寸
- 配有推鎖式手柄(DRASTAR專利 #10-1086199)
- 無螺紋設計:通過采用鎖板密封系統(DRASTAR專利 #10-0753280)增強了顆粒物的防止
- 所有焊接、組裝、測試和清潔工作均在Class 100和Class 10潔凈室內進行
- 設計證明壓力為最大額定值的150%
- 適用于半導體制造、特種氣體、大宗氣體管線及其他設施
推鎖式手柄操作簡便:DRASTAR的專利“推鎖式手柄”使操作更加簡便穩定;通過按下手柄進行“鎖定”,可防止由于氣體管道振動或環境變化導致的預設壓力值的輕微變化;反之,拉回手柄即可再次自由調節壓力值。
規格:
接口 (Ports)
- DRA100-A100S-xxx-4MS-GxS: 1/4″ 外螺紋
- DRA100-A100S-xxx-4FS-GxS: 1/4″ 內螺紋
- DRA100-A100S-xxx-8MS-GxS: 3/8″ 外螺紋
- DRA100-A100S-xxx-8FS-GxS: 3/8″ 內螺紋
- DRA100-A100S-xxx-2MS-GxS: 1/2″ 外螺紋
- DRA100-A100S-xxx-2FS-GxS: 1/2″ 內螺紋
- DRA100-A100S-xxx-3MS-GxS: 3/4″ 外螺紋
- DRA100-A100S-xxx-3FS-GxS: 3/4″ 內螺紋
設計壓力 (Design Pressure)
- 最高額定值的150%
泄漏率認證 (Leak Rate Certification)
- 可達到 1 x 10?? atm cc/sec 氦氣檢測
主體材料 (Body Materials)
- DRA100-A100x-xxx-xxS-GxS: 316L B.A. (25Ra)
- DRA100-B100x-xxx-xxS-GxS: 316L E.P. (10Ra)
- DRA100-C100x-xxx-xxS-GxS: 316L E.P.(P.E.P.)(5Ra)
- DRA100-D100x-xxx-xxS-GxS: 316L VAR E.P. (10Ra)
- DRA100-E100x-xxx-xxS-GxS: 316L VAR(P.E.P.) (5Ra)
閥蓋材料 (Bonnet Material)
- 鍍鎳黃銅 (可選316L不銹鋼)
隔膜 (Diaphragm)
- DRA100-x100S-xxx-xxS-GxS: 316L 不銹鋼
- DRA100-x100H-xxx-xxS-GxS: Hastelloy-C22
主閥 (Main Valve)
- DRA100-A100S-xxx-xxS-GxS: 316L不銹鋼 (標準)
- DRA100-B100H-xxx-xxS-GxS: Hastelloy-C22 (可選)
閥彈簧 (Valve Spring)
- DRA100-A100S-xxx-xxS-GxS: 316L不銹鋼 (標準)
- DRA100-B100H-xxx-xxS-GxS: Hastelloy-C22 (可選)
閥座 (Valve Seat)
- DRA100-B100S-xPx-xxS-GxS: PCTFE
- DRA100-B100S-xTx-xxS-GxS: Teflon
- DRA100-B100S-xVx-xxS-GxS: Vespel
進口壓力范圍 (Inlet Pressure Ranges)
- DRA100-A100S-Hxx-xxS-GxS: 3000psi (210bar)
- DRA100-A100S-Lxx-xxS-GxS: 600psi (42bar)
出口壓力范圍 (Outlet Pressure Ranges)
- DRA100-x025x-xxS-xMS-GxS: 25psi (1.7bar)
- DRA100-x050x-xxS-xMS-GxS: 50psi (3.4bar)
- DRA100-x100x-xxS-xMS-GxS: 100psi (7bar)
- DRA100-x250x-xxS-xMS-GxS: 250psi (17bar)
工作溫度 (Operating Temperature)
- PCTFE: -40°C ~ +60°C (-40°F ~ +140°F)
- Teflon: -40°C ~ +70°C (-40°F ~ +165°F)
- Vespel: -40°C ~ +170°C (-40°F ~ +350°F)
流量能力 (Flow Capacity)
- DRA100-x100x-xxS-4MS-GxS: 1/4″ Cv=0.06
- DRA100-x100x-xxO-4MS-GxS: 1/4″ Cv=0.2
- DRA100-x100x-xxS-8MS-GxS: 3/8″ Cv=0.2
- DRA100-x100x-xxS-2MS-GxS: 1/2″ Cv=0.5
- DRA100-x100x-xxO-2MS-GxS: 1/2″ Cv=1.2
- DRA100-x100x-xxS-3MS-GxS: 3/4″ Cv=1.2