Electronic Vacuum Regulator
Anodized Aluminum EVR-GSD8 with integrated QPV electronic pilot regulator

Equilibar electronic vacuum regulators allow vacuum control through a computerized command signal. The command signal is first sent to a small electronic regulator that produces a pilot signal to the reference port of the dome-loaded Equilibar Vacuum Regulator (EVR) to control the process pressure.

equilibar 電子真空調節器允許通過計算機化的命令信號進行真空控制。命令信號首先被發送到一個小型電子調節器, 該調節器產生一個導頻信號, 進入負載赤道真空調節器 (evr) 的參考端口, 以控制過程壓力。
equilibar 提供一系列精密電子壓力調節器, 以提供此試點參考信號。qpv 超分辨率和 epr-30hg 模型幾乎沒有滯后性或死帶, 從而能夠進行精確調整。

Equilibar offers a line of precision electronic pressure regulators to provide this pilot reference signal. The QPV ultra-resolution and the EPR-30Hg models have virtually no hysteresis or deadband, resulting in the capability to make precise adjustments.?equilibar 提供一系列精密電子壓力調節器, 以提供此試點參考信號。qpv 超分辨率和 epr-30hg 模型幾乎沒有滯后性或死帶, 從而能夠進行精確調整。

These regulators can be used in open loop mode or closed loop mode. In open loop mode, the vacuum setpoint is commanded using a computerized signal sent to the electronic pilot regulator. The pilot regulator produces that commanded pressure onto the EVR reference port to keep the process vacuum very close to the setpoint value. Open loop mode will result in a slight variability in vacuum pressure as flow rates increase.?這些調節器可在開環模式或閉環模式下使用。在開環模式下, 真空設定值使用發送到電子先導調節器的計算機信號進行命令。先導調節器在 evr 參考端口上產生所命令的壓力, 以使工藝真空非常接近設定值。開環模式將導致真空壓力的輕微變化, 隨著流量的增加。

In closed loop, or PID mode, the process vacuum pressure is monitored by a separate pressure sensor close to the process, and the command signal sent to the pilot regulator is adjusted to bring that process pressure to match the desired setpoint. This PID action can be accomplished inside the QPV electronic pressure regulator, or in the existing process control system. Closed loop control will result in more accuracy over a wide range of flow rates.?在閉環或 pid 模式下, 過程真空壓力由接近過程的單獨壓力傳感器進行監測, 并調整發送到先導調節器的命令信號, 使該過程壓力與所需的設定值相匹配。這種 pid 動作可以在 qpv 電子壓力調節器內完成, 也可以在現有的過程控制系統中完成。閉環控制將在廣泛的流量范圍內實現更高的精度。

Electronic Vacuum Regulator Details

This table details Equilibar Vacuum Regulators with inlet port sizes from 1/4″ to 1″.