紫外線照度計(jì)型號(hào)511
照度計(jì)特點(diǎn)
- 探頭到探頭可重復(fù)性小于1%。
- 實(shí)時(shí)測(cè)量。
- 單通道探頭
- 雙通道探頭功能
- 可互換的探頭
- 計(jì)算機(jī)接口
- 余弦響應(yīng)探頭
- 測(cè)量mw/cm2，峰值mw/cm2，mj/cm2（SP），累積mj/cm2（總時(shí)間-秒）和累積時(shí)間（總秒） 計(jì)算mw/cm2的平均值，計(jì)算mw/cm2的%均勻度和%偏離中心值 X10 范圍
- 電池在充電前大約可持續(xù)工作 18 小時(shí)
- 充電器可從 100-240 VAC、50-60 Hz 運(yùn)行，具有 UL、CE 和 TUV 批準(zhǔn)
全面的UV光測(cè)量
511型分析器包括一個(gè)實(shí)時(shí)計(jì)算機(jī)接口，非常適合測(cè)量幾個(gè)關(guān)鍵的均勻性參數(shù)并記錄這些數(shù)據(jù)。511型可以配置9個(gè)傳感器陣列，直徑4英寸的探頭或6英寸的11個(gè)傳感器探頭，用于測(cè)量“洪水暴露”表面，如紫外線固化的情況。另外還有一款專門設(shè)計(jì)的探頭，在6英寸的弧形陣列中有11個(gè)傳感器，用于佳能光刻掃描儀的掃描均勻性。
紫外線照度計(jì)型號(hào)511規(guī)格
Switch Functions: | - Red button – ON (hold for one second) Off when displayed and MORE (data review)
- Two black buttons for Mode, Reset SEL (select), Back (data review)
- Channel A, Channel B switch
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| Display: | |
| Range: | - mw/cm22?– 0.1 to 2500 (peak same)
- mj/cm22– .001 to 49,999
- Time – .001 to 49,999 seconds
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| Mode Selection: | mw/cm22 | - mw/cm22?and peak mw/cm22?continuous display
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| mj/cm22?&?mw/cm22 | - Single Pulse- mw/cm22?Time (seconds)
- Average mw/cm22?and Peak mw/cm22
- Readings update automatically with new signal or manual reset?(selectable)
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| 5 Point mw | - Five readings of mw/cm22in a *fixed pattern using a one second shutter opening (minimum) to read mw/cm22
- Display of average mw/cm22?and +/-% uniformity
- Display of +/-% deviation of each reading from center value
- Display of all five values (3 digits)
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| 5 Point mj | - Five readings of mj/cm22?in a *fixed pattern~shutter control
- Display of average nj/cm22?and +/-% uniformity
- Display of +/-% deviation from center reading
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| Display Pattern: |  |
| Power: | - Built in rechargeable battery – 18 hours operation (approx.)
- Recharge time 6 hours (unit off) – indicated by LED (goes dim and then off when fully charged)
- Low battery indication on display next to ‘OFF’
- Charger – 100-240 VAC, 50-60 Hz
- Charger is UL, CE, TUV approved
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| Probe Wavelengths: | - <220nm to 540nm and more>
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| Size: | - 5.5 in. W (14 cm) x 7.4 in. L (18.8 cm) x 1.5 in. H (3.8 cm)
- Aluminum casing
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| Weight: | |
這張圖準(zhǔn)確地表示了今天在微電子行業(yè)中使用的探頭的光譜響應(yīng)。該圖包括了探頭中使用的探測(cè)器的光譜響應(yīng)以及濾光玻璃的光譜響應(yīng)。
