High Voltage 冷陰極離子源Model SO-60 主要特點
? 產生大量的帶電荷離子
? 低功耗
? 使用壽命長
? 近光發射
? 束流范圍為10 – 150 μA（用于單獨充電離子），? 1 – 15 μA （用于雙電離子）
? 易于操作和維護

General description
The Model SO-60 cold cathode penning ion source is the HVEE version of the Frankfurt PIG ion source. The SO-60 ion source combines simplicity, low power consumption and long lifetime with a high yield of multiply charged ions. This makes the SO-60 ion source ideally suited for research applications in which a large variety of multiply charged ions are required on a routine basis.
The SO-60 ion source has been designed in such geometry that a low pressure plasma can easily be maintained without a hot filament.
The ionization chamber consists basically of an anode cylinder and two cathode rings facing both ends of the anode. By means of a relatively high discharge voltage and an axial magnetic field, a plasma is created from which the ions are extracted through one of the cathode rings.
This high discharge voltage and the low operating pressure make the SO-60 ion source especially suited for the production of multiply charged ions from gases.
Spare parts to cover the first needs are included with each SO-60 ion source. Other types of penning ion sources available from High Voltage Engineering are:
The Model SO-90 Sputter Penning Ion Source for sputtering of solid materials
The Model SO-100 Hot Cathode Penning ion source