EFG-7 / EGPS-1017 電子槍 Kimball電子槍 肯博爾電子槍
Energy Range 能量范圍:?10 eV to 1500 eV
Beam Current / Spot Size 束流范圍:?1 nA to 100 μA
Spot Size 光斑大小:?1mm to 100mm
Mounting 安裝法蘭:?2?CF, demountable option
Features/Options 選配:?Narrow-Angle Beam or Flood Beam, Electrostatic Focusing, Deflection, Rastering, Pulsing