EFG-7 / EGPS-2017 電子槍 kimball電子槍 肯博爾電子槍
Energy Range 能量范圍:?50 eV to 5k eV
Beam current 束流范圍:?1 nA to 100 μA
Spot Size 光斑大小:?1 mm to 100 mm
Mounting 安裝法蘭:?2?CF, demountable option
Features/Options 選配:?Flood Beam or Narrow-Angle Beam, Electrostatic Focusing, Deflection, Rastering, Pulsing