Ion Gun Systems離子槍

Kimball Physics ion gun systems, or ion sources, are used for surface physics, space physics, vacuum physics, charge neutralization, detection calibration, secondary ion mass spectrometry and ion injection for MBE.

Range of Operation

  • Energy Ranges:?10eV to 5 keV
  • Beam Current Ranges:?1 nA to 2 μA
  • Spot Size Ranges:?1 mm to 20 mm

Ion Sources

  • Electron impact ionization sources:
    – Inert gases (He, Ar, Xe, Ne)
    – Active gases (N2?or O2)
  • Solid state chemical reaction:
    – Alkali metal compound (Cs+, Li+, Na+, K+ or Rb+ ions)

Performance

  • Beam Current Stability:?±1.0% per hour with Emission Current Control or ±10% per hour after warm up without ECC for alkali metal sources.
  • Energy Stability:?± 0.01% per hour, ± 0.02% per 8 hours at full output.

Versatility

  • Flexible Controllers:?Independent fiber optic control and metering of functions such as ion energy, source, electron energy, field control, extract, focus, X – Y deflection and electron current control.
  • Gas feed ion sources allow for different ion species

Convenience

  • Customer-replaceable source assemblies
  • Storable control settings
  • Computer remote control / metering

Operational Capabilities

  • Fast capacitive beam or dual grid pulsing
  • Deflection / Rastering
  • Gun-mounted Faraday cups???

Ion Gun Systems
Gun Model Key Characteristics Specifications Features/Options
IGS-4

 

 Alkali metal
Cs+, Li+, Na+, K+, Rb+ 

2?CF Mounted

 Energy Range:?50 eV to 5 keV
Beam Current:?1 nA to 2 μA
Spot Size:?1 mm to 20 mm
  • Deflection
  • Pulsing
ILG-6

 

 Alkali metal
Cs+, Li+, Na+, K+, Rb+ 

2?CF Mounted

 Energy Range:?10 eV to 1 keV
Beam Current:?1 nA to 100 nA
Spot Size:?1 mm to 5 mm
  • Demountable
  • Deflection
  • Pulsing
  • Rastering
TEMPORARILY UNAVAILABLE
IGL-2101

 

 Gas fed
Inert (He, Ar, Xe, Ne)
Active (N2?or O2) 

2?CF Mounted

 Energy Range:?10 eV to 1 keV
Beam Current:?1 nA to 100 nA
Spot Size:?1 mm to 20 mm
  • Differential pumping
  • Deflection
  • Rastering
Energy Range:?10 eV to 5 keV
Beam Current:?1 nA to 100 nA
Spot Size:?1 mm to 20 mm

 

?Electron Gun
?ELG-2
?FRA-2X1-2
?EGA-1012
?EFG-7
?EGPS-1017
?EGPS-2017
?EGL-2022
?EGG-3101
?EGG-3103
?EGF-3104
?EMG-4212
?EGPS-3212
?EMG-4212
?EGPS-4212
?EMG-4103
?EMG-4215
?EMG-4210
?EGH-6002
?EGF-6115
?EGF-6104
?EGH-6210
?EGH-8101
?EGH-8103
?EGH-8105
?EGH-8201
?EGH-8202
?Ion Gun
?IGS-4
?ILG-6
?IGL-2101
?Cathodes
?Emitters
?ES-423E
?ES-423E-GR
?ES-440
?ES-042
?ES-044
?ES-046
?ES-015
?ES-064
?ES-066
?ES-525
?ES-526
?ES-529
?CB-104
?CB-105
?C423E
?A423E
?B423E
?C423E
?C423E
?C423E
?E423E
?HL423E
?H423E
?I423E
?JE423E
?JG423E
?JP423E
?J423E
?C423E
?O423E
?E423E
?P423E
?S423E
?SE423E
?G423E
?G423E
?Z423E
?ES-020
?ES-021
?ES-030
?ES-030
?ES-028
?ES-033
?ES-029
?FC-66
?FC-70
?FC-71
?FC-72
?FC-73
?FC-86B
?PHOS-RP22SS-B5X5-R500
?PHOS-UP22SS-B5X5-R500
?PHOS-RP22SS-B7X7-R750
?PHOS-UP22SS-B7X7-R750
?PHOS-RP22SS-C5X5-R1000
?PHOS-UP22SS-C5X5-R1000
?PHOS-RP22SS-C7X7-R1500
?PHOS-UP22SS-C7X7-R1500
?PHOS-RP22GL-B5X5-R500
?PHOS-UP22GL-B5X5-R500
?PHOS-RP22GL-B7X7-R750
?PHOS-UP22GL-B7X7-R750
?PHOS-RP22GL-C5X5-R1000
?PHOS-UP22GL-C5X5-R1000
?PHOS-RP22GL-C7X7-R1500
?PHOS-UP22GL-C7X7-R1500
?PHOS-RP22GL-CF2.75 P22
?PHOS-UP22GL-CF2.75 P22
?PHOS-RP22GL-CF4.5 P22
?PHOS-UP22GL-CF4.5 P22
?PHOS-RP22GL-CF6.0 P22
?PHOS-UP22GL-CF6.0 P22
?Faraday
?Faraday Cups
?Phosphor
?Phosphor Screens
?MCF133-SphCube-A6
?MCF275-SphCube-C6
?MCF275-SphCube-C4A8
?MCF275-SphCube-C5A4
?MCF275-SphCube-C6A8
?MCF450-SphCube-E6
?MCF450-SphCube-E6A8
?MCF450-SphCube-E6C8
?MCF450-SphCube-E6C8A12
?MCF600-SphCube-F6
?MCF600-SphCube-F6C8
?MCF600-SphCube-F6C8A24
?MCF800-SphCube-G6C8
?MCF133-SphTri-A5
?MCF275-SphTri-C5
?MCF450-SphSq-E2C4
?MCF450-SphSq-E2C3r1A4
?MCF600-SphSq-F2C4A8
?MCF600-SphSq-F2E4A4
?MCF600-SphSq-F2E4A8
?MCF800-SphSq-G2E4
?MCF800-SphSq-G2E4C4
?MCF800-SphSq-G2E4C4A16
?MCF600-SphPent-F2C5
?MCF600-SphPent-F2C5A2
?MCF275-SphHex-C2A6
?MCF275-SphHex-Cc2A6
?MCF800-SphHex-G2E6
?MCF275-SphOct-C2A8
?MCF450-SphOct-E2A8
?MCF450-SphOct-Ec2A8
?MCF600-SphOct-F2A8
?MCF600-SphOct-F2C8
?MCF800-SphOct-G2C8
?MCF800-ExtOct-G2C8
?MCF800-ExtOct-G2C8A16
?MCF1000-SphOct-H2C8
?MCF800-SphDec-G2C10
?MCF600-SphHexadecagon-F2A16
?MCF133-DblSphCube-A10
?MCF275-SphTrpOct-Cr2A16
?MCF275-SphTrpOct-C18
?MCF275-FlgAdptr-C1A1
?MCF275-FlgAdptr-C2
?MCF450-FlgAdptr-E2
?MCF133-PWeldFlg
?MCF275-PWeldFlg
?MCF450-PWeldFlg
?MCF600-PWeldFlg
?MCF800-PWeldFlg
?MCF133-ThnFlg-A2-175
?MCF133-ThnFlg-A2-175-ID640
?MCF133-ThnFlg-A2-400
?MCF133-ThnFlg-A2-400-ID640
?MCF275-ThnFlg-C2-175
?MCF275-ThnFlg-C2-175-ID1500
?MCF275-ThnFlg-C2-400
?MCF275-ThnFlg-C2-400-ID1500GG
?MCF450-ThnFlg-E2-175
?MCF450-ThnFlg-E2-175-ID2900
?MCF450-ThnFlg-E2-400
?MCF450-ThnFlg-E2-400-ID2900GG
?MCF600-ThnFlg-F2-175
?MCF600-ThnFlg-F2-175-ID4300
?MCF600-ThnFlg-F2-400
?MCF600-ThnFlg-F2-400-ID4300GG
?MCF800-ThnFlg-G2-175
?MCF800-ThnFlg-G2-175-ID6300
?MCF800-ThnFlg-G2-400
?MCF800-ThnFlg-G2-400-ID6300GG
?MCF275-MtgFlg-C2
?MCF275-MtgFlg-C1Blk
?MCF275-MtgFlg-C1VP
?MCF450-MtgFlg-E2
?MCF450-MtgFlg-E1Blk
?MCF450-MtgFlg-E1VP
?MCF600-MtgFlg-F2
?MCF600-MtgFlg-F1Blk
?MCF600-MtgFlg-F1VP
?MCF800-MtgFlg-G2
?MCF800-MtgFlg-G1Blk
?MCF600-ClsCplr-F1r1
?MCF800-ClsCplr-G1r1
?MCF275-ExtBrkt-R
?MCF275-ExtBrkt-LS
?MCF450-ExtBrkt-LS
?MCF600-ExtBrkt-LS
?MCF600-ExtBrkt-SM
?MCF800-ExtBrkt-LS
?MCF275-GrvGrb-C01
?MCF275-GrvGrb-C02
?MCF275-GrvGrb-CB03
?MCF275-GrvGrb-CB04
?MCF275-GrvGrb-CYL0750
?MCF275-GrvGrb-CYL1000
?MCF450-GrvGrb-C01
?MCF450-GrvGrb-C02
?MCF450-GrvGrb-C03
?MCF450-GrvGrb-C04
?MCF450-GrvGrb-CYL1750
?MCF600-GrvGrb-C01
?MCF800-GrvGrb-C01
?MCF1000-GrvGrb-C01


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