美國 Lattice Electro Optics Excimer Laser Mirrors ArF (193nm) & KrF (248nm) 準分子激光鏡ArF（193nm）和KrF（248nm）

?美國 Lattice Electro Optics

Excimer Laser Mirrors ArF (193nm) & KrF (248nm)

準分子激光鏡ArF（193nm）和KrF（248nm）

參數

 
材料:VUV CaF2, UV Fused Silica
平行度：< 3 arc min
凈孔徑：> 85% of central dimension
倒角：0.3mm?′?45°
表面形狀：l/10 at 632.8nm
表面質量：20-10 for VUV CaF2

10-5 for UV Fused Silica

能量:Up to 1J/cm2, ArF

Up to 4J/cm2, KrF

 

Part NoDiameter

Thickness

A.O.I.
ArF (193nm)KrF (248nm)
RX-193-0-UF-1025RX-248-0-UF-10251.00”0.250”0°
RX-193-0-UF-1420RX-248-0-UF-1420??????????36.0mm5.0mm0°
RX-193-0-UF-1520RX-248-0-UF-15201.50”5.0mm0°
RX-193-0-UF-2038RX-248-0-UF-20382.00”0.375”0°
RX-193-45-UF-1025RX-248-45-UC-10251.00”0.250”??45°
RX-193-45-UF-1420RX-248-45-UC-1420??????????36.0mm5.0mm??45°
RX-193-45-UF-1520RX-248-45-UC-15201.50”5.0mm??45°
RX-193-45-UF-2038RX-248-45-UC-20382.00”0.375”??45°

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