EF 40LT1低溫蒸發源設計用于在較低溫度范圍內實現高度恒定的蒸發速率。定制插入長度至少為325毫米(可定制其他長度)。
特性
蒸發溫度范圍:100°C–1000°C
極其穩定的通量率
各種坩堝材料
高度可重復性和可靠性
適用于任何MBE系統
無鉬結構(允許高放氣溫度)
整體水冷
K型熱電偶
選項
定制插入長度
有或沒有集成手動/電動氣動快門
線性移位
坩堝
技術參數
Mounting flange | DN 40CF (rotatable) |
Heater | W wire (tungsten) |
Temperature range | 100 °C – 1000 °C |
Temperature stability | ± 0.1°C |
Crucible type (option) | PBN, Al2O3, Quartz (other materials on request) |
Crucibles volume | 5cc (other volumes on request) |
Evaporated materials | High vapor pressure and organic materials (e.g. As, Sb, Ba, Bi, K, Li, Mg, Ca, CdSe) |
Thermocouple type | type K |
Degassing temp. | 1100 °C |
Water cooling (required) | water flow: > 0.5 l/min, temperature: 15 – 30 °C, max pressure: 6 bar |
Insertion length | min. 115 mm (other on request) OD: 35 mm |
Spot size | Dependent on working distance |
Working distance | 100 – 150 mm |
Bakeout temperature | up to?250 °C |
Working pressure | < 10-5?mbar |