VPM-4 SmartPirani™ Lite真空變送器
| 真空測量 |
VPM-4 MEMS皮拉尼傳感器
寬量程MEMS皮拉尼傳感器，測量范圍1.0E-6至10毫巴
耐腐蝕性能
可選陶瓷或聚對二甲苯傳感器保護層
數字接口
配備RS-232和RS-485數字接口，便于系統(tǒng)集成
過程控制
可編程設定點繼電器，實現真空開關功能
VPM-4 SmartPirani™ Lite真空變送器采用尖端技術，提供行業(yè)領先的性能表現，通過將熱導式真空計的可用測量范圍擴展1-3個數量級，樹立了新的性能標準。
SmartPirani™采用先進的MEMS（微機電系統(tǒng)）傳感器技術，結合前沿數字信號處理架構與創(chuàng)新測量算法。配合精密自動化制造與校準工藝，打造出這款性能無與倫比的獨特產品。SmartPirani™ Lite專為真空開關功能設計，測量上限為10毫巴。若需覆蓋至大氣壓及更高壓力的全量程測量，請選擇VPM-5 SmartPirani™變送器。
領先的真空測量技術
VPM-4 SmartPirani™ Lite變送器以卓越性能重新定義真空測量標準，將熱導式真空計的可用測量范圍突破性擴展至1E-6量級。
VPM-4測量范圍
SmartPirani™ Lite的擴展量程使其能應用于傳統(tǒng)需熱陰極電離規(guī)或冷陰極電離規(guī)的領域。該產品針對低量程測量性能進行優(yōu)化，上限測量范圍可達10毫巴（7.5托）。
SmartPirani™變送器系列還包含：
- 全量程VPM-5 SmartPirani™：提供2至1333毫巴的氣體無關性測量
- VPM-7 SmartPirani™ ATM：額外配備大氣壓開關功能
應對嚴苛應用的卓越性能
為適應腐蝕性及活性氣體環(huán)境，SmartPirani™可選配防護鍍層，為傳感器提供高效保護屏障。
多重防護解決方案
SmartPirani™變送器系列現提供陶瓷或聚對二甲苯（Parylene）防護層選項，有效防止傳感器材料腐蝕氧化：
- 陶瓷鍍層：具有極強耐腐蝕性，廣泛用于電容式薄膜規(guī)等真空傳感器膜片
- 聚對二甲苯鍍層：獨特聚合物材料兼具卓越耐腐蝕性與疏水特性，特別適合凍干滅菌等醫(yī)療應用
顆粒防護設計
針對存在顆粒物的真空工藝環(huán)境，SmartPirani™可加裝防護擋板阻隔宏觀顆粒。結合可選防護鍍層技術，新一代變送器專為在極端真空環(huán)境中穩(wěn)定運行而設計。
Specifications | |
| Measuring range in mbar | 1×10-6 to 10 mbar (7.5×10-7 to 7.5?Torr) |
| Measuring principle 1×10-6 to 10?mbar | MEMS Pirani thermal conductivity |
| Accuracy 1×10-5 to 9.99×10-5 | 25% of reading |
| Accuracy 1×10-4 to 9.99×10-1?mbar | 5% of reading |
| Accuracy 1.00 to 10 mbar | 30% of reading |
| Hysteresis 1×10-3 to 10 mbar (ISO19685:2017 | 1% |
| Analog output resolution | 16 bit (150 μV) |
| Analog output update rate | 124 Hz |
| Response time (ISO 19685:2017) | <20 ms |
| Temperature compensation | +10 to +50 °C |
| Solid state relay set point range | 5×10-6 to 1333 mbar (3.75×10-6 to 1000 Torr) |
| Solid state relay contact rating | 50 V, 100 mArms / mADC |
| Solid state relay approvals | UL Recognized: File E76270 CSA?Certified: Certificate 1175739 EN/IEC 60950-1 Certified |
| Environment conditions | |
| Operating ambient temperature | -20 to +50 °C |
| Media temperature | -20 to +50 °C |
| Storage ambient temperature | -40 to +120 °C |
| Bake-out temperature (non-operating) | +120 °C |
| Maximum media pressure(3) | 10 bar absolute |
| Mounting position | Arbitrary |
| Protection rating, EN 60529/A2:2013 | IP40 |
| Humidity, IEC 68-2-38 | 98%, non-condensing |
| Power supply | |
| Supply voltage | 12-30 VDC |
| Power consumption | 240 mW (max) |
| Reverse polarity protection | Yes |
| Overvoltage protection | Yes |
| Internal fuse | 100 mA (thermal recoverable) |
| Materials | |
| Enclosure | SS 1.4307 / AISI 304L / Aluminum 6061 |
| Vacuum Process flange (media wetted) | SS 1.4401 / AISI 316 |
| Vacuum exposed materials (media wetted) Standard version | 316 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, gold, Viton?, low out-gassing epoxy resin, |
| Vacuum exposed materials (media wetted) Parylene protected version | 316 Stainless steel, Viton?, Parylene |
| Vacuum exposed materials (media wetted) Ceramic protected version | 316 Stainless steel, Viton?, Aluminum oxide ceramic (AI2O3) |
| Process leak tightness | <1·10-9 mbar·l/s |
| Reliability | |
| MTBF (Mean Time Between Failure) | 13.092.170 hours |
| Failure rate FIT (Failure In Time, where time=10E+9 hours) | 76,38 |
| Approvals | |
| CE | EMC directive 2014/30/EU |
| RoHS compliance | Directive EU 2015/863 |