VPM-5 SmartPirani™ 真空變送器采用尖端技術打造，不僅提供行業領先的性能表現，更通過將熱導式真空計的可用測量范圍擴展1-3個數量級，樹立了全新的性能標桿。
該產品基于創新的MEMS（微機電系統）傳感器技術，結合革命性的高精度數字信號處理架構和先進的測量算法。配合精密的自動化制造與校準工藝，這些技術要素共同成就了一款具有無與倫比測量性能的獨特產品。
超寬量程覆蓋
1.0E-6至1333毫巴，橫跨9個數量級
卓越耐腐蝕性能
可選配陶瓷或聚對二甲苯(Parylene)傳感器防護層
氣體類型無關測量
2至1333毫巴范圍內采用精密薄膜傳感器技術
極致性價比
為各類真空應用提供業界領先的性能表現
VPM-5-10101211?
- DN16KF Flange
- Standard Sensors
- RS-232 Interface
- mbar
- Std. Analog Output
- 1 Setpoint Relay
- 9 pin. D-sub
VPM-5-10201211
- DN16KF Flange
- Standard Sensors
- RS-485 Interface
- mbar
- Std. Analog Output
- 1 Setpoint Relay
- 9 pin. D-sub
VPM-5-10101111
- DN16KF Flange
- Standard Sensors
- RS-232 Interface
- torr
- Std. Analog Output
- 1 Setpoint Relay
- 9 pin. D-sub
VPM-5-10201111
- DN16KF Flange
- Standard Sensors
- RS-485 Interface
- torr
- Std.?Analog Output
- 1 Setpoint Relay
- 9 pin. D-sub
領先的真空測量技術
VPM-5 SmartPirani™變送器憑借卓越性能，將熱導式真空計的可用測量范圍擴展1-3個數量級，重新定義了真空測量的行業基準。
突破性技術解決氣體依賴性問題
通過集成MEMS薄膜傳感器，SmartPirani™成功消除了傳統熱導式真空計在粗真空范圍內的氣體依賴性難題。該傳感器提供與昂貴電容式壓力計相媲美的測量精度，其測量結果完全不受氣體種類和濃度影響。這一技術突破顯著提升了測量可靠性，確保真空系統排氣過程控制更加精準，有效防止系統過壓風險。
嚴苛工況應用解決方案
針對可能接觸腐蝕性或活性氣體的應用環境，SmartPirani™可選配高性能防護鍍層，為傳感器提供可靠保護屏障。
新一代防護技術選項：
? 陶瓷防護層：具有卓越耐腐蝕特性，是經電容式薄膜規驗證的真空傳感器膜片材料
? 聚對二甲苯(Parylene)防護層：獨特聚合物材料兼具超強耐腐蝕性和疏水特性，專為凍干滅菌等醫療應用設計
顆粒防護創新設計
針對存在顆粒污染的真空工藝，SmartPirani™可配備防護擋板，有效阻隔宏觀顆粒物。結合可選防護鍍層技術，新一代變送器專為應對極端真空環境挑戰而打造。
Specifications | |
| Measuring range in mbar | 1×10-6 to 1333 mbar (7.5×10-7 to 1000 Torr) |
| Measuring principle 1×10-6 to 1.5 mbar | MEMS Pirani thermal conductivity |
| Measuring principle 1.5 to 2 mbar | Blended MEMS Pirani / piezo reading |
| Measuring principle 2 to 1333 mbar | MEMS piezo resistive diaphragm |
| Accuracy 1×10-5 to 9.99×10-5 | 25% of reading |
| Accuracy 1×10-4 to 7.99 mbar | 5% of reading |
| Accuracy 8.00 to 99.9 mbar | 1% of reading |
| Accuracy 100 to 800 mbar | 0.5% of reading |
| Accuracy 800 to 1099 mbar | 0.25% of reading |
| Accuracy 1100 to 1333 mbar | 0.5% reading |
| Hysteresis 1×10-3 to 10 mbar (ISO19685:2017) | 1% |
| Hysteresis 10 to 1333 mbar (ISO19685:2017) | 0.1% |
| Analog output resolution | 16 bit (150 μV) |
| Analog output update rate | 124 Hz |
| Response time (ISO 19685:2017) | <20 ms |
| Temperature compensation | +10 to +50 °C |
| Solid state relay set point range | 5×10-6 to 1333 mbar (3.75×10-6 to 1000 Torr) |
| Solid state relay contact rating | 50 V, 100 mArms / mADC |
| Solid state relay approvals | UL Recognized: File E76270 CSA?Certified: Certificate 1175739 EN/IEC 60950-1 Certified |
| Environment conditions | |
| Operating ambient temperature | -20 to +50 °C |
| Media temperature | -20 to +50 °C |
| Storage ambient temperature | -40 to +120 °C |
| Bake-out temperature (non-operating) | +120 °C |
| Maximum media pressure(3) | 10 bar absolute |
| Mounting position | Arbitrary |
| Protection rating, EN 60529/A2:2013 | IP40 |
| Humidity, IEC 68-2-38 | 98%, non-condensing |
| Power supply | |
| Supply voltage | 12-30 VDC |
| Power consumption | 240 mW (max) |
| Reverse polarity protection | Yes |
| Overvoltage protection | Yes |
| Internal fuse | 100 mA (thermal recoverable) |
| Materials | |
| Enclosure | SS 1.4307 / AISI 304L / Aluminum 6061 |
| Vacuum Process flange (media wetted) | SS 1.4401 / AISI 316 |
| Vacuum exposed materials (media wetted) Standard version | 316 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, gold, Viton?, low out-gassing epoxy resin, solder, RO4305 |
| Vacuum exposed materials (media wetted) Parylene protected version | 316 Stainless steel, Viton?, Parylene |
| Vacuum exposed materials (media wetted) Ceramic protected version | 316 Stainless steel, Viton?, Aluminum oxide ceramic (AI2O3) |
| Process leak tightness | <1·10-9 mbar·l/s |
| Reliability | |
| MTBF (Mean Time Between Failure) | 13.092.170 hours |
| Failure rate FIT (Failure In Time, where time=10E+9 hours) | 76,38 |
| Approvals | |
| CE | EMC directive 2014/30/EU |
| RoHS compliance | Directive EU 2015/863 |
