美國Thermionics RCL Series 3 kW Multiple Crucible Linear e-Gun™ 3kW線性多坩堝鍍膜電子槍

Thermionics研究能力系列,3 kW多坩堝線性電子槍,提供增強(qiáng)的光束穩(wěn)定性和高效的XY掃描,具有完整的坩堝覆蓋范圍,并可通過自動(dòng)分度器進(jìn)行自動(dòng)定位,單獨(dú)出售。

特性
真正的XY掃掠,完全覆蓋坩堝
掃頻線圈隨電源一起提供
增強(qiáng)光束準(zhǔn)直
插入式發(fā)射器模塊
增強(qiáng)的高穩(wěn)定性冷卻
交叉污染屏蔽
堅(jiān)固的設(shè)計(jì)
可選自動(dòng)索引器

Specifications

Operating Pressure Below 5 x 10-5?Torr is desirable for best operation
Beam Voltage 4,000 VDC
Beam Current 0–750 mA
continuously variable
Maximum Power 3 kW
Cooling Water 1.5 gpm
Pressure Differential 25 psi minimum
Maximum Bakeout
Temperature
230°C (446°F)
Crucible Volume 2.24 cc x 3, 4 or 5 crucibles

Ordering Information

Description Model No.
Multiple crucible 3 kW e-Gun source with sweep coils, linear 3-position RCL0303
Multiple crucible 3 kW e-Gun source with sweep coils, linear 4-position RCL0304
Multiple crucible 3 kW e-Gun source with sweep coils, linear 5-position RCL0305

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