Evaporation Source Series: HCR Rotary e-Gun™
The HCR series Rotary e-Gun™ is available in 3 to 8 crucible versions allowing sequential deposition of up to 8 plus materials. Standard mounting is on a 12″ O.D. CF flange and includes auto indexer and all mechanical and electrical connections.
特性
可提供3至8個(gè)坩堝
270°光束偏轉(zhuǎn)
多坩堝，旋轉(zhuǎn)設(shè)計(jì)
可互換坩堝組件
長(zhǎng)壽命發(fā)射器組件
易于更換燈絲
永磁梁定位
整體式掃掠線圈
提供底部或側(cè)面驅(qū)動(dòng)
Specifications
| Feature | Specifications |
| Maximum Power | 10 kW |
| Emission Voltage | -6 to -10 kV |
| Emission Current | 0 to 1 A |
| Filament | 700 W |
| E-Beam Deflection | 270° |
| Beam Spot Size | .25″ diameter, tight beam |
| Evaporation Rate | 1 gram/min @ 10 kW 36,000 ?/min Al @ 10″ (250 mm) source-to-substrate distance |
| X and Y Sweep | Longitudinal and lateral control up to 200 Hz when operated with Thermionics sweep controller |
| Water | 3 gpm, 20°C, 50 psi pressure differential |
| Crucible Material | OFE copper |
| Bakeout Temperature | 120°C (250°F) |
安裝配置
每個(gè)e-Gun™都有三種標(biāo)準(zhǔn)安裝配置：
e-Gun™安裝在PyraFlat或ConFlat金屬密封型法蘭上，該法蘭使用標(biāo)準(zhǔn)OFE銅墊片
e-Gun™配備直徑為1英寸的螺栓式安裝座，通過直徑為1”的孔安裝，并由壓縮O型圈密封
e-Gun™單獨(dú)使用，無安裝法蘭
請(qǐng)?jiān)谙聠螘r(shí)指定安裝配置；成本可能不包括螺栓式或法蘭式安裝。
